HIGH BRIGHTNESS NEW VUV LIGHT SOURCE UNIT L10366 SERIES OVERVIEW The L10366 series are newly developed VUV (vacuum UV) light source units. This product uses a "high-brightness deuterium lamp with MgF2 window" that produces a high radiant intensity 4 times higher than conventional model. This product is now a lot easier to handle due to use of an air-cooled structure and vacuum flange mount. Left: Power supply, Right: Light source FEATURES APPLICATIONS ●High Radiant Intensity: 4 Times (compared to conventional model) ●High VUV Intensity Down to 115 nm ●Air Cooling (needs no cooling water) ●External Control (lamp ON/OFF, lamp ON status signal) ●No Optical Axis Alignment Required ARC DISTRIBUTION (at 230 nm) L10366 series (Aperture size: 0.5 mm) TLSOF0184 ●Spectrophotometer, Fluorophotometer ●Electrostatic Removal of Semiconductor Wafer, LCD Panel, etc. ●Photoionization Detector (PID) ●UV Resistance Testing of Various Material ●Optical Chemical Vapor Deposition (optical CVD) ●Excitation Light Source Conventional type High Radiant Intensity x4 (compared to conventional model) (Aperture size: 1 mm) PACKAGE CONTENTS Type No. L10366 L10366-10 L10366-11 L10366-12 Vacuum Flange 1 — (E3444) (E3444-01) (E3444-02) Light Source Power Supply Light Source to Power Supply Cable AC Cable 1 The vacuum flange E3444 series can be sold separately from the unit L10366 series. SPECIFICATIONS ●GENERAL RATINGS Parameter Spectral Distribution Window Material Aperture Size (Arc Point) Cooling Method Operating Temperature Range Operating Humidity Range Description/Value 115 to 400 MgF2 0.5 Air-cooled +10 to +35 Below 80 % (No Condensation) Unit nm — mm — °C — ●RECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C) Parameter Warm-up Time Fluctuation (p-p) Drift (Max.) at 230 nm at 160 nm Output Stability Light Source Life 2 Input Voltage (AC) Power Consumption Description/Value 25 ± 5 0.05 ±0.3 2000 (Guaranteed) 500 (Expected) 100 V to 240 V (100 V / 200 V Auto Switching), Single Phase 50 Hz to 60 Hz 140 Unit s % %/h h — VA 2 The life end is defined as the time when the radiant output falls to 50 % of its initial value. Operating life depends on environmental conditions (vacuum atmosphere). ●VACUUM FLANGE Parameter Seeling Method Flange Mount Flange Seeling Force Retention E3444 Regular — 1.33 × 10-4 SPECTRAL DISTRIBUTION E3444-01 E3444-02 O-Ring JIS VF50 ICF114 JIS VG50 ICF114 Pa L/s or Less (1 × 10-6 Torr L/s) REPLACE LAMP SOURCE (VUV region; for reference only) RELATIVE OUTPUT (%) 100 Type No. L10388 L10388-10 L10388-11 L10388-12 TLSOB0079EB 80 60 40 20 0 100 120 140 160 180 200 WAVELENGTH (nm) 220 240 400 Light Source Vacuum Flange — (E3444) (E3444-01) (E3444-02) DIMENSIONAL OUTLINES (Unit: mm) LIGHT SOURCE (Weight: Approx. 1 kg) 122 77 COOLING FAN TOP VIEW VACUUM FLANGE MOUNT * ARC POINT 0.3 A 81.5 ± 0.5 ARC POINT 30 62 115 48 h7 A 77 94 METAL CONNECTOR (CONNECTION TO POWER SUPPLY) FRONT VIEW METAL CONNECTOR (CONNECTION TO POWER SUPPLY) SIDE VIEW * Sealing Force Retention 1.33 × 10-4 Pa L/S or Less (1 × 10-6 Torr L/S) POWER SUPPLY TLSOA0094EB (Weight: Approx. 2.8 kg) EXTERNAL CONTROL TERMINALS (D-SUB CONNECTOR) LAMP STATUS SIGNAL + LAMP STATUS SIGNAL – +5 V dc(+) +5 V dc RETURN(–) TOP VIEW CONT 145 POWER LINE INPUT OUTPUT 110 310 FRONT VIEW SIDE VIEW METAL CONNECTOR (CONNECTION TO LIGHT SOURCE) REAR VIEW CABLE LENGTH: 2000 ± 50 TLSOA0095EB DIMENSIONAL OUTLINES (Unit: mm) VACUUM FLANGE E3444 40 4- 8.4 10 O-RING 70.0 ± 0.3 P.C.D. 106 40 120 7 20 TLSOA0097EA E3444-01 40 4- 10 10 O-RING 70.0 ± 0.3 P.C.D. 100 40 120 7 20 TLSOA0098EA E3444-02 47.5 17.5 8- 8.4 O-RING 70 ± 0.3 114 P.C.D. 92.2 40 7 20 TLSOA0053EB Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2006 Hamamatsu Photonics K.K. WEB SITE www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P. O. Box 6910, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected] Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected] France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected] United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road Welwyn Garden City Hertfordshire AL7 1BW, United Kingdom, Telephone: 44-(0)1707-294888, Fax: 44(0)1707-325777 E-mail: [email protected] North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171-41 SOLNA, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected] TLSO1060E02 Italy: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741 E-mail: [email protected] NOV. 2006 IP