Clean Sensing System ZN Series Advanced Clean-Monitoring for the Manufacturing Field Is that booth really clean? Is clean air with a filter enough to maintain a clean environment? Clean measures are not perfect unless they are tied to quality. Localized Continuous Clean-Monitoring Systems by OMRON provide many ways to improve quality and enable perfect reporting of production process monitoring. Applications Electronic Component Production Processes Multi-Clean Control 2 Cell Production Processes Storage and Test Environments Direct Clean Control Storage of Precision and Optical Components Total Sensing for Clean Booths OMRON provides the optimum clean environment with constant monitoring of continuously changing production environments. Sensing and control with up to 9 Air Clean Units. The degree of cleanliness in each production stage can be controlled in relation to quality. Electrostatic Sensor Multi-point data management No. of connectable Sensors: 10 max. Continuous Sensing of Particles Clean environments change during the production process due to the various work operations performed. The particle volume inside booths is constantly sensed by an Air Particle Sensor. Optimum clean environments are maintained by controlling air volume based on particle volume — from rapid ventilation to energy-conserving gradational air volume control. Rapid Feedback Constant Feedback The maximum and minimum air volume and feedback time can be set to any desired values. Once a cleanliness threshold has been exceeded, the level of cleanliness can be increased in a short time by applying the maximum air volume. Constant feedback is provided so that the cleanliness threshold is not exceeded. A constant level of cleanliness is always maintained and energy is conserved. Air volume Air volume Cleanliness threshold Particle volume Clean-monitoring of Inspection and Measurement Environments Cleanliness threshold Particle volume Ionized Clean Environments An Ionizer is needed to remove dust attached to particles by static electricity. OMRON provides a new style for discharging and dust removal, with the first Ionizers in the industry that can be combined with Air Clean Units. 3 Compact but High-Performance Air Clean Unit Slimmest in the industry: 97.5 mm HEPA Filter with High Filtration High-Speed Dust Control A unique ZNA2502 Twin-Fan construction enables both a slimmer body and a greater air volume. Downsizing is possible with a greater level of capacity than previous models. 4 Relationship between Air Volume and Particle Removal No. of 0.5 µm particles (per L) Unique Twin-fan Construction 800 600 Air volume 1: 0.3 m3/min Air volume 3: 1.0 m3/min Air volume 5: 1.8 m3/min 400 200 0 0 min 1 min 2 min 3 min 4 min 5 min The HEPA filter used with the ZN Series has the capacity to filter 99.99% of 0.3 µm particles. Clean Sensing System Laminar Airflow Design The smaller fan section and the unique ventilation construction design provides a more uniform laminar airflow. Uniform air is provided over a wide area. ZN-A2502 ZN-A4105 Air Speed Distribution Air Speed Distribution 200 0.8 m/s min. 500 0.7 to 0.8 m/s min. 0.6 to 0.7 m/s min. 750 200 mm 0.5 to 0.6 m/s min. 100 0 100 200 mm 1.00 to 1.20 (m/s) 0.80 to 1.00 (m/s) 1000 200 (mm) (at 200 mm from Air Clean Unit) 200 (mm) Measurement conditions: Maximum air volume Airflow Switching Function The air volume can be set to 5 different levels, from 0.3 to 1.8 m3/min for the ZN-A2502 and 1.0 to 5.0 m3/min for the ZN-A4105. The air volume can be checked with the large indicators in the middle. Distance from Air Clean Unit Distance from Air Clean Unit (mm) (at 500 mm from Air Clean Unit) 200 0.9 m/s min. 500 0.7 to 0.9 m/s min. 0.5 to 0.7 m/s min. 750 360 mm 0.5 m/s min. 1000 400 200 0 200 400 (mm) 360 mm 1.00 to 1.20 (m/s) 0.80 to 1.00 (m/s) 0.60 to 0.80 (m/s) Measurement conditions: Maximum air volume Self-diagnosis Function Two LED indicators indicate operation errors (e.g., stopped fans) and when HEPA filter replacement is required. Located on two corners of the Unit, the LED indicators are visible from many angles. Air Volume Displayed in 5 Levels External I/O Ultra-Easy Maintenance An I/O interface is built in. An AC adapter or 24-VDC input can be selected for the power supply. An alarm signal is output if the self-diagnosis function indicates HEPA filter replacement or error operation. DC power supply/external output terminal HEPA filters can be replaced without tools thanks to the use of buckles. Onsite maintenance time is reduced because filters can be replaced in a one-step operation. AC Adapter input 5 Unique and Easy Ionizer for Air Clean Unit Industry First Patent pending Ionizer That Can be Combined with Air Clean Units Previous Model When Using an Air Clean Unit Ionizer Laminar airflow can be disrupted with bar-type Ionizers, depending on where the Ionizer is installed, and too much installation work is required. Opening Constructed Not to Obstruct Laminar Airflow The opening does not obstruct the airflow from the Air Clean Unit eliminating worries about disrupting the laminar airflow. 6 The Ionizer can be mounted directly to the Air Clean Unit. Clean Sensing System Wide Discharge Area by Adopting Variable DC Ionization Method Variable DC ionization is used to discharge over a wide area. ZN-J25A ZN-J41A 0 Discharge time: 2 s Discharge time: 4 s 200 Discharge time: 6 s 400 600 Measurement Conditions 800 −300 0 300 ZN-A2502 at maximum air volume Discharge time from 1,000 V to100 V Plate Monitor, 150 × 150 mm, 20 pF Automatic Ion Balance Two Sensors provide constant feedback on the ion balance to maintain uniform discharging. Ion Balance Sensors Distance from Ionizer (mm) Distance from Ionizer (mm) 0 Discharge time: 2 s Discharge time: 4 s 200 Discharge time: 6 s 400 600 800 −300 Self-diagnosis and Display Functions LED indicators and external outputs provide notification when discharge needles require cleaning or discharge errors occur. Cleaning outputs are made at two levels: warnings and alarms. Measurement Conditions 0 300 ZN-A4105 at maximum air volume Discharge time from 1,000 V to 100 V Plate Monitor, 150 × 150 mm, 20 pF Ozone Buildup Prevention Patent Pending Discharging is stopped when a signal indicating that the Air Clean Unit fan has stopped is received. This function prevents ozone from remaining due to discharging. Discharge stop control Simple Mounting and Wiring The Ionizer can be installed easily by inserting it between the Air Clean Unit and the top of the Clean Booth and securing it with screws. Wiring work is greatly reduced by the connectors used for connection to the Air Clean Unit. Simple Maintenance Discharge needles are modular and can be easily replaced. 7 Small Size, Continuous Measurement In-line Air Particle Sensor Smallest in the Industry Air Particle Sensor for In-line Measurement A high-performance fan for external air suction enables constant measuring over long periods. Semiconductor lasers and high-sensitivity optical design in the sensing section enable measurement of 0.3-µm particles. Airflow Laser beam Measurement Principle A semiconductor laser beam is targeted on to the air intake and the light is scattered when particles pass through that beam. The scattered light is received by the light receiving element and converted to an electrical signal. Particle Trend Indicator The sensing section has a particle trend display for quick visual confirmation of the degree of cleanliness. The Amplifier provides numeric indication of the number of 0.3-, 0.5-, and 1.0-µm particles. A signal can be output at any level of particles if a threshold has been set. 8 Particle Numeric Display Particle Trend Display Clean Sensing System On-screen Indication and Data Logging of Particle Amount Measurement values can be easily logged on a personal computer by using the Interface Unit and special software (sold separately). Data from sequential sensing of particles can be used to improve quality. Quality Control with Multi-point Measurement Realtime Clean Air Monitor A variety of displays (including color graphs for visual confirmation by color of particle densities, indication of the number of particles, and trend graphs) can be set. Particle Sensors and Interface Units can also be set from the personal computer. Measurement data is logged in realtime and can be manipulated in CSV-format files using spreadsheet software. Patent Pending Up to ten Particle Sensors and up to nine Air Clean Units can be controlled through one Interface Unit and Real Time Clean Air Monitor. There are no time-consuming restrictions, such as the order that power is turned ON. The level of cleanliness can be controlled for each process and constant monitoring is possible in relation to quality data. Electrostatic Sensor Air Clean Unit air volume settings, operation, and errors can be checked on the Amplifier or Interface Unit. No. of connectable Sensors: 10 max. Multi-point data output For In-line Applications Installation is simple with DIN Track mounting. The In-line Air Particle Sensor was developed for in-line applications, with a 24-VDC power supply. External outputs can be at two levels: warnings and alarms. Suitable for in-line trend management applications. 9 System Connection Diagram There are four ways of using the In-line Air Particle Sensor, depending on the application. Measurement and Logging of Particle Volumes • Particle volumes are logged and warnings or alarms are output for set thresholds. Air Particle Sensor Clean Monitoring System ZN-SFW11 Sensor Head ZN-PD03 Interface Unit 24-VDC power supply Amplifier Realtime Clean Air Monitor ZN-PDA11 Clean Air Supply and Discharging • Discharging can be performed with the downflow from the Air Clean Unit. Discharging and Dust Removal System Air Clean Unit ZN-A2502 ZN-A4105 Power supply Supplied AC Adapter or 24-VDC power supply Supplied Connection Cable Ionizer (See note.) ZN-J25A ZN-J41A Note: When using the Ionizer in combination with an Air Clean Unit, be sure to specify an applicable model (e.g., ZN-J25A). Direct Clean Sensing Systems • The air volume of the Air Clean Unit is automatically adjusted while the particle volume is measured and logged. Discharging and Dust Removal System Clean Monitoring System Air Clean Unit ZN-SFW11 ZN-A2502 ZN-A4105 Power supply Supplied AC Adapter or 24-VDC power supply Interface Unit Air Particle Sensor Sensor Head ZN-PD03 Supplied Connection Cable Ionizer (See note.) ZN-J25A ZN-J41A Amplifier Realtime Clean Air Monitor ZN-PDA12 Standard cable length: 2 m; Power is supplied from the Air Clean Unit. Note: When using the Ionizer in combination with an Air Clean Unit, be sure to specify an applicable model (e.g., ZN-J25A). To extend, use commercially available LAN connectors (female–female, straight) and LAN cable (straight, category 5 E or better). Multi-Clean Sensing Systems • The air volume of the Air Clean Unit is automatically adjusted while the particle volume is measured and logged. • The level of cleanliness can be managed and feedback controlled for more than one production process. Use a commercially available LAN cable (straight, category 5 E or better) if more than one Air Clean Unit is to be connected. Air Clean Unit ZN-A2502 ZN-A4105 Up to 9 Units ••••• Supplied Connection Cable Ionizer Power supply Supplied AC Adapter or 24-VDC power supply Note: Required for each Air Clean Unit. ZN-J25A ZN-J41A Clean Monitoring System ZN-SFW12 Air Particle Sensor Sensor Head ZN-PD03 Interface Unit ••••• 24-VDC power supply Realtime Clean Air Monitor Up to 10 Units •••••• Standard cable length: 2 m To extend, use commercially available LAN connectors (female–female, straight) and LAN cable (straight, category 5E or better). 10 Amplifier ZN-PDA11 Calculating Unit ZX-CAL2 Ordering Information Air Clean Units Air Clean Units Appearance Accessories Application Power supply Model Replacement HEPA Filters ZN-A2502 250 250 mm ZN-A2502D (See note.) 24 VDC Replacement Pre-filters ZN-A4105 410 410 mm Application Model Qty. For 250 250 mm ZN9-AHP25 1 For 410 410 mm ZN9-AHP41 1 For 250 250 mm ZN9-APF25 2 For 410 410 mm ZN9-APF41 1 ZN-A4105 (See note.) Use a commercially available LAN cable (straight, category 5E or better) if more than one Air Clean Unit is to be connected to make a system. Note: Without AC adapter. Ionizers Ionizers Accessories Appearance Application Power supply Model Replacement Discharge Needles ZN-J25A (See note.) 250 250 mm Qty. ZN9-JH04 4 per pack Single-sided Connector Cables (for DC power supply or I/O connection) Supplied from the Air Clean Unit. ZN-J41A (See note.) 410 410 mm Model Cable length Model Qty. 2m ZN9-JC02 1 Note: Connection Cable to the Air Clean Unit is provided. (Air Clean Units should be ordered separately.) Air Particle Sensors Double-sided Connector Cable (for extension between Sensor Head and Amplifier) Sensor Head Appearance Measured particle diameter 0.3, 0.5, and 1.0 m Model ZN-PD03 Cable length Model Qty. 1m ZX-XC1A 1 4m ZX-XC4A 1 8m ZX-XC8A 1 Amplifiers Appearance Power supply 24 VDC Connection method Cable connection Connector connection Supplied from the (Air Clean Unit feedback Air Clean Unit. connection) Model Qty. Sensor Head Replacement Filter Set ZN9-PF1 1 Cleaning Filter ZN9-PC1 1 Head Attachment Tool ZN9-PB1 1 Model ZN-PDA11 2M ZN-PDA12 2M Calculating Unit Appearance Model ZX-CAL2 Clean Monitoring Systems Appearance + CD-ROM + CD-ROM Contents Connection method Model ZN-SF11 Interface Unit + Realtime Clean Air Monitor For RS-232C connection with personal computer only ZN-SFW11 ZN-SF12 Interface Unit + Realtime Clean Air Monitor For RS-232C connection with personal computer or Air Clean Unit feedback connection ZN-SFW12 An Interface Unit is not available by itself. 11 Specifications Air Clean Units Item Model ZN-A2502/A2502D ZN-A4105/A4105D 225 × 205 mm Air outlet dimension 360 × 360 mm Particle outlet efficiency More than 99.99% for 0.3-µm particles Air volume (m3/min) Sound noise level (dBA) Fan motor 0.3 to 1.8 m3/min (typical) 1.0 to 5.0 m3/min (typical) Air volume level 3: 53 dB (typical) Air volume level 3: 53 dB (typical) Air volume level 1: 41 dB (typical) Air volume level 1: 40 dB (typical) Two, DC brushless compact centrifugal blowers Main filter One DC brushless turbo fan HEPA filter Main filter part number ZN9-AHP25 Pre-filter part number ZN9-APF25 ZN9-AHP41 ZN9-APF41 Power supply voltage 24 VDC±10%, Ripple (p-p): 10% max. Current consumption Air volume level 5: 2.1 A max. (RMS value) Air volume level 5: 3.5 A max. (RMS value) (Peak: 5.5 A) Air volume level 1: 0.4 A max. (RMS value) Air volume level 1: 0.32 A max. (RMS value) Operating status: Green/Red Indicators Air volume: Blue Alarm output 1: Alarm output 1 turns OFF when one of the following events occurs. (Normally alarm output 1 is ON.) (Check indicator to find out which event occurred.) • Filter is clogged. • Fan error • Cleaning alarm for discharge needle (when ZN-J-series Ionizer (sold separately) is connected) • Discharge error (when ZN-J-series Ionizer (sold separately) is connected) Alarm output 2: Enabled only when ZN-J-series Ionizer (sold separately) is connected. • Alarm output 2 turns OFF to indicate that cleaning is necessary for ZN-J Series discharge needles. (Normally alarm output 2 is ON.) 30 VDC, 50 mA max. Residual voltage: 1 V max. with load current of 10 mA, 2 V max. with load current of 50 mA. Outputs Air volume selectable (levels 1 to 5), Automatic control by ZN-PDA, Filter clogging alarm, ZN-J Ionizer Functions connection, connection of up to 9 Units Ambient temperature range Operating and storage: 0 to 40°C (with no icing or condensation) Ambient humidity range Operating and storage: 35% to 85% (with no condensation) Material Upper case: ABS, Bottom frame: Steel 250 × 250 × 97.5 mm (W × D × H) Dimensions (mm) Weight Accessories 410 × 410 × 129.5 mm (W × D × H) Approx. 2 kg (Packed state: Approx. 3.3 kg) Approx. 5.2 kg (Packed state: Approx. 8.6 kg) Instruction Sheet, Sealing parts, Mounting screws, I/O connector (XW4B-06B1-H1), AC adapter (excluding ZN-A2502D, ZN-A4105D.) (See note.) Note: AC Adapter: Made by Sanken Electric Co., Ltd. Model SEB100P2-24.0 for ZN-A2502: Supply voltage of 100 VAC to 240 VAC Model SEC165P2-24.0 for ZN-A4105: Supply voltage of 100 VAC to 240 VAC Ionizers Item Model Applicable Air Clean Units ZN-J25A ZN-J41A ZN-A2502 ZN-A4105 Power supply voltage 24 VDC±10%, Ripple (p-p): 10% max. Current consumption 300 mA max Output voltage ±7 kV max Discharge method Variable DC Discharge time (typical) (See note 1.) 5 s max. ±30 V max. Ion balance (typical) (See note 2.) Indicators Outputs Functions Ambient temperature range Ambient humidity range Materials Dimensions (mm) Weight Accessories Power (green), Cleaning notice (orange flashing), Cleaning alarm (orange), High voltage error (red) High voltage error output, cleaning output: photo-MOS relay (30 VDC, 300 mA max.) Manual Ion balance adjustment, cleaning alarm, high voltage error alarm Operating and storage: 0 to 40°C (with no icing or condensation) Operating and storage: 35% to 65% (with no condensation) Unit: ABS, Discharge needles: Tungsten 248 × 310 × 45 mm (W × D × H) 408 × 470 × 45 mm (W × D × H) Approx. 0.6 kg (Packed state: Approx. 1.4 kg) Approx. 1.5 kg (Packed state: Approx. 2.7 kg) Instruction Sheet Sealing parts Mounting screws Connector cable for Air Clean Unit (excluding ZN-A2502D, ZN-A4105D.) Ferrite core English warning label Note 1. Measurement conditions: Distance: 300 mm Air Clean Unit: ZN-A Series with air level 5 at center of air outlet Discharging from ±1000 V to ±100 V with Charge Plate Monitor (150 × 150 mm, 20 pF) Temperature: 18 to 28°C, Humidity: 35% to 65% The performance may not be satisfied when gases such as solvents are in the measurement area. 2. Measurement conditions: Distance: 300 mm Air Clean Unit: ZN-A Series with air level 5 at center of air outlet Discharging with Charge Plate Monitor (150 × 150 mm, 20 pF) for 10 s Temperature: 18 to 28°C, Humidity: 35% to 65% The performance may not be satisfied when gases such as solvents are in the measurement area. 12 Instruction Sheet Sealing parts Mounting screws Connector cable for Air Clean Unit (excluding ZN-A2502D, ZN-A4105D.) Ferrite core English warning label Specifications Air Particle Sensors Sensor Head Item Model ZN-PD03 Applicable Amplifier ZN-PDA11/ZN-PDA12 Measurement method 90° sideways light-scattering method Light source Semiconductor laser 0.3, 0.5, or 1.0 µm min. Applicable particle size Applicable cleanliness class Equivalent to Class 100 to 100,000 (FED-STD-209D) Indicator Level indicator for Class 100 to 100,000 (FED-STD-209D) Connection tube Inner diameter: 4, Length: 1 m max. Operating: 0 to 40°C, Storage: −15 to 50°C (with no icing or condensation) Ambient temperature range Ambient humidity range Operating and storage: 35% to 85% (with no condensation) Dielectric strength 1,000 VAC, 50/60 Hz for 1 min Vibration resistance 10 to 55 Hz, 0.7-mm double amplitude 80 min each in X, Y, and Z directions 150 m/s2 3 times each in six directions (up/down, left/right, forward/backward) Shock resistance Connection method Connector cable (standard cable length: 0.5 m) Material ABS Weight Approx. 300 g (Packed state: Approx. 450 g) Accessories Instruction Sheet, connection tube Amplifiers Item Model ZN-PDA11 ZN-PDA12 Sampling time 1 to 599 s (selectable) Average count setting 1, 2, 4, 8, 16, 32, or 64 Operation indicators: OUT1 (orange), OUT2 (yellow), 7-segment main display (red), 7-segment sub-display (yellow), power (green), wide range display (green), unit selection display (green) Indicators Status outputs (2 outputs: OUT1/OUT2) (See note.) NPN open-collector outputs, 30 VDC, 30 mA max., Residual voltage: 1.2 V max. Reset input (See note.) ON: Short-circuited with 0-V terminal or 1.5 V or less, OFF: Open 7-segment main display (red), 7-segment sub-display (yellow), power (green), wide range display (green), unit selection display (green) ----- Measurement result display, Setting value display, Unit selection, Scaling, Peak hold, Hysteresis setting, Threshold level selection, Wide range display, Key lock, ECO mode, Display reverse, Display digit change, Initialize Functions Communications with Air Clean Unit Power supply voltage Measurement result display, Communications condition display, Unit selection, Scaling, Air Clean Unit automatic control, Air Clean Unit air level change, Threshold level selection, Wide range display, Key lock, ECO mode, Display reverse, Display digit change, Initialize Unique communications specifications (RJ-45 connector and straight LAN cable) --24 VDC ±10%, Ripple (p-p): 10% max. 24 VDC ±10%, Ripple (p-p): 10% max. (Supplied from Air Clean Unit.) Current consumption 300 mA max. Operating: 0 to 40°C , Storage: −15 to 50°C (with no icing or condensation) Ambient temperature range Ambient humidity range Operating and storage: 35% to 85% (with no condensation) Insulation resistance 20 MΩ min. at 500 VDC Dielectric strength 1,000 VAC, 50/60 Hz for 1 min Vibration resistance 10 to 150 Hz, 0.7-mm double amplitude 80 min each in X, Y, and Z directions Shock resistance 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward) Connection method Cable (standard cable length: 2 m) Materials Connector cable (standard cable length: 2 m) Case: PBT (polybutylene terephthalate), Cover: Polycarbonate Weight Approx. 180 g (Packed state: Approx. 350 g) Accessories Instruction Sheet Note: OUT2 and the reset input are switched by using the DIP switch on the bottom of the Amplifier. Clean Monitoring Systems Item Model ZN-SFW11 ZN-SFW12 Power supply voltage Supplied from the ZN-PDA. Current consumption 45 mA max. with 24-VDC power supply voltage (excluding current consumption and current output of the Amplifier) Applicable Amplifiers Applicable Amplifier Unit software versions ZX Series, ZJ-SD Series, ZN-PD Series ZX-LDA@@-N V1.000 or higher, ZX-EDA@@ V1.300 or higher, ZX-TDA@@ V1.100 or higher, ZJ-SDA@@ V1.000 or higher, or ZN-PDA@@ V1.000 or higher No. of connectable Amplifiers 10 max. (For ZN-PDA) Indicator Power: Green, Sensor communications: Green, Sensor communications error: Red, External terminal communications: Green, External terminal communications error: Red Functions --Communications port Automatic control for Air Clean Units (multi-unit system control), Air level change for Air Clean Units RS-232C (9-pin, D-Sub connector) Protocol Communications CompoWay/F Baud rate Data configuration For external device 2 Ambient temperature range 38,400 bps Data bits: 8, Parity: None, Start bits: 1, Stop bits: 1, Flow control: None Operating: 0 to 40°C, Storage: −15 to 50°C (with no icing or condensation) Operating and storage: 35% to 85% (with no condensation) Insulation resistance 20 MΩ min. at 500 VDC Dielectric strength Shock resistance Connection method Materials Weight Accessories Unique communications specifications (RJ-45 connector and straight LAN cable) --- Ambient humidity range Vibration resistance Power (POWER: Green), Serial communications (STA1: Green) Not clean (OPE1: Orange), Clean (OPE2: Green) 1,000 VAC, 50/60 Hz for 1 min 10 to 150 Hz, 0.7-mm double amplitude 80 min each in X, Y, and Z directions 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward) --- Connector cable (standard cable length: 2 m) Case: PBT (polybutylene terephthalate), Cover: Polycarbonate Approx. 100 g (Packed state: Approx. 480 g) Approx. 200 g (Packed state: Approx. 550 g) CD-ROM (Realtime Clean Air Monitor), Instruction Sheet, Two clamps 13 Dimensions Air Clean Units ZN-A2502/A2502D (Unit: mm) 97.5 45 160 250 276 205.6 220 28 250 Four, M4 screws, depth: 17 226.6 ON/OFF switch Air volume switch Operation indicators Operation indicators Air volume level indicators ZN-A4105/A4105D 417 410 380 360 15 380 360 436 410 15 129.5 Air volume switch Four, M5 screws, depth: 20 ON/OFF switch Operation indicators Operation indicators ho le s) Air volume level indicators (th ro ug h- Ionizers (Unit: mm) ZN-J41A m ou nt in g ho le s ZN-J25A ia . 380 240 210 Discharge needles (4 locations) 65.5 Power switch Discharge needles (4 locations) 252 412 45 33 (3.3) 470 210 160 ±0.2 220 ±0.2 Eig ho ht, 5 les -d Mounting Hole and Panel Cut Dimensions 14 les 160 ±0.2 220 ±0.2 . ho 310 dia (3.3) 6 6 6lve, Twe 210 45 33 Power switch 380±0.2 360 240±0.2 360 380±0.2 360 240±0.2 25.50 Ground terminal s High voltage error indicator (red, lit) 240 360 380 408 70 Ground terminal Power input/ signal output connector hole 210 220 248 70 Power input/ signal output connector ing Cleaning alarm indicator (orange, lit) Cleaning notification indicator (orange, flashing) Power indicator (green, lit) Cleaning notification indicator (orange, flashing) Cleaning alarm indicator (orange, lit) High voltage error indicator (red, lit) Ion balance adjustment button t oun .m -dia ) e, 6 les elv -ho Tw ough (thr Power indicator (green, lit) Fi ve ,8 -d Ion balance adjustment button ia. Mounting Hole and Panel Cut Dimensions Dimensions Air Particle Sensors ZN-PD03 (Unit: mm) 21.5 39.4 70±0.1 Sensor Head Mounting Tool When ZN9-PB1 is used (sold separately) (Unit: mm) 45 Two, 4.2-dia. holes 45 Six, M3 15.85 Mounting hole cutout dimensions Oblong holes for mounting Six, 3.2 × 6.2 holes Mounting plate 36.8 42 2.6 5 Two, M4 × 6 mounting screws 45 5 (90) 82 5.2-dia. vinyl-insulated round cable with 10 conductors, standard length: 0.5 m 45 4 70 46 35 14.3 Mounting hole cutout dimensions Mounting screw holes 25 70 Two, M4 holes, depth: 6 82±0.1 76 120 Air inlet 44 Exhaust outlet 14.4 22.4 4 22 ZN-PDA11 ZN-PDA12 (Unit: mm) 13 36.8 5.1-dia. vinyl-insulated round cable, standard length: 100 mm 64.3 21.46 4.2 13 36.8 5.1-dia. vinyl-insulated round cable, standard length: 100 mm 5.1-dia. vinyl-insulated round cable with 10 conductors (conductor cross-section: 0.08 mm2, insulator diameter: 0.7 mm), standard length: 2 m 11.7 11.7 11.7 2.2 4.2 3 (133) 44 5.2-dia. vinyl-insulated round cable, standard length: 2 m 29 Main digital indicator Sub-digital indicator Status output OUT2/reset input switch (default setting: status output) 6.6 4.2 15.5 dia. 64.3 13.2 4.2 3 (133) 15.8 6 16.8 31.5 15.5 dia. 13.2 44 30 Modular jack 15.8 6 16.8 31.5 OUT2 indicator Range indicator Unit indicator OUT1 indicator OUT2 indicator Main digital indicator Sub-digital indicator OUT1 indicator 30 (Unit: mm) Power indicator Range indicator Unit indicator 29 11.7 Power indicator 2.2 Status output Interface Unit ZN-SF11 (Unit: mm) ZN-SF12 (Unit: mm) Sensor communications indicator (communicating) Link connector Sensor communications indicator (communications error) Power indicator Status indicator Modular jack Power indicator External terminal communications indicator (communicating) (336) Sub-digital indicator 4.2 21.46 2.2 6.55 11.7 11.7 29 4.3 36.8 29 2.2 5.1-dia. vinyl-insulated round cable with 10 conductors (conductor cross-section: 0.08 mm2,insulator diameter: 0.7 mm), standard length: 2 m 36.8 3 5 13.2 13 5.2-dia. vinyl-insulated round cable, standard length: 300 mm Connector Connector 64.3 15 13 11.7 (33.1) 13.2 15 31.5 (46) 5.2-dia. vinyl-insulated round cable, standard length: 300 mm 4.2 3 (46) 4.2 (33.1) (336) 64.3 4.2 3 4.3 3 5 11.7 6.55 30 Main digital indicator Operation indicators 30 6.6 15.8 31.5 External terminal communications indicator (communications error) 15 This document provides information mainly for selecting suitable models. Please read the document System Manual (Z267) carefully for information that the user must understand and accept before purchase, including information on warranty, limitations of liability, and precautions. OMRON Corporation Industrial Automation Company Sensing Devices Division H.Q. Application Sensors Division Shiokoji Horikawa, Shimogyo-ku, Kyoto, 600-8530 Japan Tel: (81) 75-344-7068/Fax: (81) 75-344-7107 Regional Headquarters OMRON EUROPE B.V. Sensor Business Unit Carl-Benz-Str. 4, D-71154 Nufringen, Germany Tel: (49) 7032-811-0/Fax: (49) 7032-811-199 OMRON ELECTRONICS LLC One Commerce Drive Schaumburg, IL 60173-5302 U.S.A. Tel: (1) 847-843-7900/Fax: (1) 847-843-7787 Authorized Distributor: OMRON ASIA PACIFIC PTE. LTD. No. 438A Alexandra Road # 05-05/08 (Lobby 2), Alexandra Technopark, Singapore 119967 Tel: (65) 6835-3011/Fax: (65) 6835-2711 OMRON (CHINA) CO., LTD. Room 2211, Bank of China Tower, 200 Yin Cheng Zhong Road, PuDong New Area, Shanghai, 200120, China Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200 OMRON Industrial Automation Global: www.ia.omron.com In the interest of product improvement, specifications are subject to change without notice. CSM_1_5_0715 Printed in Japan Cat. No. E383-E1-01