MEMS Inertial Sensors Accelerometers Range (g) Output Type Sensing Axes BW Typ (kHz) Sensitivity Noise (mg/√Hz ) ADXL103 ±1.7, ±18 Analog 1 2.5 100 mV/g to 1000 mV/g ADXL78 ±35, ±50, ±70 Analog 1 0.4 27 mV/g to 55 mV/g ADXL001 ±70, ±250, ±500 Analog 1 22 ADXL203 ±1.7, ±5, ±18 Analog 2 2.5 ADXL206 ±5 Analog 2 2.5 ADXL278 ±35, ±50, ±70 Analog 2 ADXL335 ±3 Analog ADXL326 ±16 Analog ADXL337 ±3 ADXL325 Voltage Supply (V) Supply Current (mA) Temperature Range (°C) Package 0.11 3.0 to 6.0 0.7 –40 to +125 5 mm × 5 mm × 2 mm LCC 1.1 4.75 to 5.25 2.2 –40 to +105 5 mm × 5 mm × 2 mm LCC 2.2 mV/g to 16 mV/g 3.3 3.135 to 6 2.5 –40 to +125 5 mm × 5 mm × 2 mm LCC Ultrawide bandwidth 100 mV/g to 1000 mV/g 0.11 3.0 to 6.0 0.7 –40 to +125 5 mm × 5 mm × 2 mm LCC Low noise, low tempco 312 mV/ g 0.11 4.75 to 5.25 0.7 –40 to +175 13 mm × 8 mm × 2 mm SBDIP Ultrahigh temperature 0.4 27 mV/g to 55 mV/g 1.1 4.75 to 5.25 2.2 –40 to +105 5 mm × 5 mm × 2 mm LCC 3 1.6 300 mV/g 0.15 1.8 to 3.6 0.35 –40 to +85 4 mm × 4 mm × 1.45 mm LFCSP 3 1.6 57 mV/g 0.3 1.8 to 3.6 0.35 –40 to +85 4 mm × 4 mm × 1.45 mm LFCSP Analog 3 1.6 300 mV/g 0.175 1.8 to 3.6 0.3 –40 to +85 3 mm × 3 mm × 1.45 mm LFCSP ±5 Analog 3 1.6 174 mV/g 0.25 1.8 to 3.6 0.35 –40 to +85 4 mm × 4 mm × 1.45 mm LFCSP ADXL327 ±2 Analog 3 1.6 440 mV/g 0.25 1.8 to 3.6 0.35 –40 to +85 4 mm × 4 mm × 1.45 mm LFCSP ADXL377 ±200 Analog 3 1.6 6.5 mV/g 2.4 1.8 to 3.6 0.3 –40 to +85 3 mm × 3 mm × 1.45 mm LFCSP ADXL375 New ±200 Digital 3 1.6 49 mg/LSB 5 2.0 to 3.6 0.03 to 0.14 –40 to +85 3 mm × 5 mm × 1 mm LGA ADXL350 ±1, ±2, ±4, ±8 Digital 3 1.6 2 mg/LSB 0.25 2.0 to 3.6 0.45 to 0.166 –40 to +85 3 mm × 4 mm × 1.2 mm LGA ADXL312 ±1.5, ±3, ±6, ±12 Digital 3 1.6 2.9 mg/LSB 0.34 2.0 to 3.6 0.17 –40 to +105 5 mm × 5 mm × 1.45 mm LFCSP ADXL345 ±2, ±4, ±8, ±16 Digital 3 1.6 3.9 mg/LSB 0.52 2.0 to 3.6 0.03 to 0.14 –40 to +85 3 mm × 5 mm × 1 mm LGA ADXL363 New ±2, ±4, ±8 Digital 3 0.2 1 mg/LSB 0.18 1.6 to 3.5 0.002 –40 to +85 3 mm × 3.25 mm × 1.06 mm LGA ADXL362 ±2, ±4, ±8 Digital 3 0.2 1 mg/LSB 0.18 1.6 to 3.5 0.002 –40 to +85 3 mm × 3.25 mm × 1.06 mm LGA ADXL346 ±2, ±4, ±8, ±16 Digital 3 1.6 3.9 mg/LSB 0.34 1.7 to 2.75 0.03 to 0.14 –40 to +85 3 mm × 3 mm × 1 mm LGA ADXL313 New ±0.5, ±1, ±2, ±4 Digital 3 1.6 1 mg/LSB 0.25 2.0 to 3.6 0.17 –40 to +105 5 mm × 5 mm × 1.45 mm LFCSP ADXL213 ±1.2 PWM 2 2.5 30%/g 0.16 3.0 to 6.0 0.7 –40 to +85 5 mm × 5 mm × 2 mm LCC Low noise, low offset tempco, PWM output ADXL212 ±2 PWM 2 0.5 12.5%/g 0.5 3.0 to 5.25 0.7 –40 to +85 5 mm × 5 mm × 2 mm LCC Low noise, low offset tempco, PWM output ADIS16003 1.7 SPI 2 5.5 — 0.11 5 1.5 –40 to +125 7 mm × 7 mm LGA Internal temperature sensor ADIS16006 5 SPI 2 2.2 — 0.2 5 1.5 –40 to +125 7 mm × 7 mm LGA Internal temperature sensor ADIS16203 ±1.7 ; ±180° Digital 1 2.25 0.025°/LSB — 3.3 11 (normal); 0.5 (sleep) –40 to +125 9 mm × 9 mm LGA ADIS16209 ±1.7; ±180° Digital 2 0.05 0.025°/LSB 0.19 3.3 11 (normal); 0.14 (sleep) –40 to +125 9 mm × 9 mm LGA ADIS16201 ±1.7; ±90° Digital 2 2.25 0.1°/LSB — 3.3 11 (normal); 0.5 (sleep) –40 to +125 9 mm × 9 mm LGA — 3.3 18 (normal); 0.23 (sleep) –40 to +125 15 mm × 24 mm × 15 mm module Vertical mount, tilt and acceleration outputs, programmable alarms, digital filtering Dual-mode, high accuracy (0.1°) tilt and acceleration outputs, programmable alarms, digital filtering Tilt and acceleration outputs, programmable alarms, digital filtering Triaxis, single command frame alignment, programmable alarms, serial number and device ID MEMS Accelerometers Part Number Additional Features Low noise, low tempco Low power, FIFO Min/max tempco, low power, FIFO AEC-Q100 qualified Low power, FIFO Ultralow power, 12-bit ADC Ultralow power, deep FIFO, built-in multiple sample activity/inactivity detection, external sync Low power, FIFO AEC-Q100 qualified iSensor ® MEMS Accelerometer Subsystems Digital Accelerometers Inclinometers ±1.7; ±180° Digital 3 0.05 — ADIS16204 ±70 Digital 2 0.4 8.407 mg/LSB 1.8 3.3 12 (normal); 0.15 (sleep) –40 to +105 9 mm × 9 mm LGA Programmable event recorder, peak sample/hold ADIS16240 ±19 Digital 3 1.6 51.4 mg/LSB 0.48 3 1 (normal); 0.1 (sleep) –40 to +85 12 mm × 12 mm BGA Programmable event recorder, peak sample/hold ADIS16210 Impact Sensors Vibration Sensors 18 Digital 3 840 0.6041 mg/LSB 0.248 3.3 43 (normal); 0.23 (sleep) –40 to +85 ADIS16228 ±18 Digital 3 5 0.3052 mg/LSB 0.248 3.3 40 (normal); 0.23 (sleep) –40 to +125 ADIS16223 ±70 Digital 3 22 4.768 mg/LSB 3.3 3.3 43 (normal); 0.23 (sleep) –40 to +125 ADIS16227 ±70 Digital 3 22 1.192 mg/LSB 3.3 3.3 43 (normal); 0.23 (sleep) –40 to +125 ADIS16229 New For more information on ADI MEMS inertial sensors, visit our website at analog.com/MEMS. 37.8 mm × 22.8 mm × 8.8 mm MCML Embedded RF transceiver Embedded FFT analysis, low noise, multiple capture modes, programmable 15 mm × 24 mm × 15 mm module windowing/filtering, serial number and device ID 15 mm × 15 mm × 15 mm module 15 mm × 15 mm × 15 mm module Embedded FFT analysis Gyroscopes MEMS Gyroscopes (All Single Axis) Part Number In-Run Bias Stability (°/Hr) Linear Angle Random Acceleration Walk (°/√Hr ) Effect (°/sec/g) Bias Tempco (°/sec/°C) Sensitivity Tempco (ppm/°C) NonLinearity (% FS) Voltage Supply (V) Supply Current (mA) Start-Up Time (ms) Temperature Range (°C) Package Additional Features 300 Analog 1000 9 0.6 0.015 9 mV/°/sec — — 0.1 6 3.5 50 –40 to +105 7 mm × 7 mm × 3 mm BGA ADXRS646 300 Analog 1000 12 0.6 0.015 9 mV/°/sec — — 0.1 6 3.5 50 –40 to +105 7 mm × 7 mm × 3 mm BGA ADXRS642 250 Analog 2000 20 1.2 0.03 7 mV/°/sec 0.02 308 0.01 4.75 to 5.25 3.5 50 –40 to +105 7 mm × 7 mm × 3 mm BGA Vibration immune, min/max specs across temperature range, ultralow noise Ultrahigh stability, vibration immune, min/ max specs across temperature range, ultralow noise High vibration immunity, industrial grade typ specs ADXRS624 50 Analog 1000 60 2 0.1 25 mV/°/sec 0.07 462 0.1 4.75 to 5.25 3.5 50 –40 to +105 7 mm × 7 mm × 3 mm BGA Min/max specs across temperature range ADXRS623 150 Analog 3000 60 2 0.1 12.5 mV/°/sec 0.14 462 0.1 4.75 to 5.25 3.5 50 –40 to +105 7 mm × 7 mm × 3 mm BGA Min/max specs across temperature range ADXRS622 250 Analog 2500 60 2 0.1 7 mV/°/sec 0.10 308 0.1 4.75 to 5.25 3.5 50 –40 to +105 7 mm × 7 mm × 3 mm BGA Min/max specs across temperature range ADXRS652 250 Analog 2500 60 2 0.1 7 mV/°/sec 0.10 308 0.1 4.75 to 5.25 3.5 50 –40 to +105 7 mm × 7 mm × 3 mm BGA Industrial grade typ specs ADXRS620 300 Analog 2500 60 2 0.1 6 mV/°/sec 0.11 308 0.1 4.75 to 5.25 3.5 50 –40 to +105 7 mm × 7 mm × 3 mm BGA Min/max specs across temperature range ADXRS645 New 2000 Analog 2000 150 10.6 0.1 9 mV/°/sec — — 0.1 5 3.5 50 –40 to +175 8 mm × 9 mm × 3 mm, 15-lead brazed lead tri in-line package 20,000+ Analog 2000 200 15 0.03 0.01 mV/°/sec — — 0.1 5 3.5 3 –40 to +105 7 mm × 7 mm × 3 mm BGA High temperature High rotation rate up to 50,000°/sec, industrial grade typ specs ADXRS453 300 Digital 77.5 16 0.9 0.01 0.0125°/LSB 0.0034 207 0.05 3.15 to 5.25 6 100 –40 to +105 9 mm × 9 mm × 4 mm LCC VMP, Calibrated over temperature, vibration 10 mm × 10 mm × 3.5 mm SOIC immune, in-plane and out-of-plane sensing ADXRS450 300 Digital 80 25 0.9 0.03 0.0125°/LSB 0.02 462 0.05 3.15 to 5.25 6 100 –40 to +105 9 mm × 9 mm × 4 mm LCC VMP, High vibration immunity, industrial grade typ 10 mm × 10 mm × 3.5 mm SOIC specs, in-plane and out-of-plane sensing Sensitivity Bias Tempco (°/sec/°C) Sensitivity Tempco (ppm/°C) NonLinearity (% FS) Voltage Supply (V) Supply Current (mA) Start-Up Time (ms) Temperature Range (°C) Package Part Number Range Output BW Typ (°/sec) Type (Hz) In-Run Bias Stability (°/Hr) Linear Angle Random Acceleration Walk (°/√Hz ) Effect (°/sec/g) Additional Features ADIS16060 80 Digital 1000 — — 0.1 0.0122°/LSB 0.11 — 0.1 5 4.3 10 –40 to +105 8 mm × 8 mm × 5 mm LGA ADIS16080 80 Digital 40 — — 0.2 0.0976°/LSB — — 0.15 5 7 35 –40 to +85 8 mm × 8 mm × 5 mm LGA ADIS16137 New 1000 Digital 400 2.8 0.15 0.017 0.00015873 0.00125 40 0.05 5 120 — –40 to +105 36 mm × 44 mm × 14 mm module ADIS16136† 480 Digital 380 3.5 0.167 0.017 0.00007°/LSB 0.00125 35 0.05 5 120 180 –40 to +85 36 mm × 44 mm × 14 mm module External clock option ADIS16133† 1200 Digital 335 6 0.75 0.03 0.05°/LSB — 16 0.008 5 88 181 –40 to +85 36 mm × 44 mm × 14 mm module Wide dynamic range ADIS16135† 350 Digital 335 6 0.75 0.03 0.0125°/LSB — 16 0.008 5 88 181 –40 to +105 36 mm × 44 mm × 14 mm module ADIS16260 New 320 Digital 330 25 2 0.2 0.0183/LSB 0.005 25 0.1 5 41 165 –40 to +105 11 mm × 11 mm × 5 mm LGA Calibration temperature: 25°C ADIS16265† 320 Digital 330 25 2 0.2 0.0183°/LSB 0.005 25 0.1 5 41 165 –40 to +105 11 mm × 11 mm × 5 mm LGA Calibration temperature range: –40°C to +85°C 14,000 Digital 360 470 21.5 0.1 4.17°/LSB 0.35 200 0.1 5 41 170 –40 to +105 11 mm × 11 mm × 5 mm LGA Bartlett FIR Filter ADIS16266 New Includes part specific factory calibration, programmable filtering, and digital self test. For multiaxis solutions, see the MEMS Inertial Measurement Unit (IMU) selection table. † Sensitivity ADXRS644 ADXRS649 iSensor MEMS Gyroscope Subsystems (All Single Axis) Range Output BW Typ (°/sec) Type (Hz) i Sensor MEMS Inertial Measurement Units (IMUs) Range Part Number Output Type Gyroscope In-Run Magnetometer Barometer Bias (gauss) (mbar) Stability (°/hr) Angle Random Walk (°/√Hr ) Accelerometer Linear Bias Sensitivity Sensitivity NonAcceleration Alignment (°/sec/ Tempco Tempco Linearity (°) Effect (°/sec/°C) (ppm/°C) (% FS) LSB) (°/sec/g) BW Typ (Hz) In-Run Bias Stability (mg) Start-Up Voltage Temperature Time Supply Range (°C) (ms) (V) Gyro (°/sec) Acceleration (g) 300 3 N/A N/A 22 1.85 0.006 0.02 0.0125 20 0.1 0.1 330 0.037 180 5 –40 to +85 23 mm × 31 mm Low profile × 8 mm module Package Additional Features 4 Degrees of Freedom ADIS16305 Digital 6 Degrees of Freedom ADIS16445 Digital 250 5 N/A N/A 12 0.6 0.005 0.015 0.0025 40 0.1 0.05 330 0.075 — 3.3 –40 to +85 ADIS16385 Digital 300 5 N/A N/A 6 (z); 21 (x, y) 0.75 (z); 1.9 (x, y) 0.001 (z); 0.004 (x, y) Programmable operation and control, 24 mm × 37 mm wide dynamic range, external clock × 10 mm module option, single command self test 0.03 (z); 0.05 (x, y) 0.0031 40 0.1 0.05 330 0.05 210 5 –40 to +105 36 mm × 47 mm High precision on yaw axis × 39 mm module ADIS16375 Digital 300 18 N/A N/A 12 1 0.005 0.013 0.013 40 0.025 0.05 330 0.13 500 3.3 –40 to +85 ADIS16362 Digital 300 1.7 N/A N/A 25 2 0.01 0.05 0.0125 50 0.1 0.05 330 0.041 180 5 –40 to +105 ADIS16364 Digital 300 5 N/A N/A 25 2 0.01 0.05 0.0125 50 0.1 0.05 330 0.1 180 5 –40 to +105 ADIS16365 Digital 300 18 N/A N/A 25 2 0.01 0.05 0.0125 50 0.1 0.05 330 0.2 180 5 –40 to +105 ADIS16334 Digital 300 5 N/A N/A 25 2 0.005 0.05 0.0125 40 0.1 0.05 330 0.1 180 5 –40 to +105 ADIS16485 Digital 450 18 N/A N/A 6 0.3 0.0025 0.009 3.052 × 10–7 35 0.01 0.05 330 0.032 500 3.3 –40 to +85 ADIS16367 Digital 1200 18 N/A N/A 47 2 0.01 0.075 0.05 40 0.1 0.05 330 0.2 180 5 –40 to +105 300 18 2.5 N/A 25 2 0.01 0.05 0.0125 40 0.1 0.05 330 0.2 220 5 –40 to +105 Continuous bias estimator, single 44 mm × 47 mm command self test, delta angle/ × 14 mm module velocity, continuous bias estimator, programmable FIR filtering High sensitivity accelerometer, 23 mm × 23 mm external clocking option, burst × 23 mm module mode reads Narrowed temperature calibration 23 mm × 23 mm range, external clocking option, burst × 23 mm module mode reads Wide temperature calibration range, 23 mm × 23 mm external clocking option, burst × 23 mm module mode reads 22 mm × 33 mm Small footprint/height, single × 11 mm module command self-test Programmable FIR filtering, 2.46 kHz 44 mm × 47 mm sample rate, single command self × 14 mm module test, delta angle/velocity, continuous bias estimator, linear g compensation 23 mm × 23 mm Wide dynamic range, external × 23 mm module clocking option, burst mode reads 9 Degrees of Freedom ADIS16405 Digital 23 mm × 23 mm Magnetometer × 23 mm module 10 Degrees of Freedom ADIS16407 Digital 300 18 2.5 10 to 1200 25 1.9 0.01 0.05 0.0125 40 0.1 0.05 330 0.2 220 5 –40 to +105 ADIS16488A New Digital 450 18 2.5 10 to 1200 5.1 0.26 0.0025 0.009 3.052 × 10–7 35 0.01 0.05 330 0.1 500 3.3 –40 to +85 ADIS16480 Digital 450 18 2.5 10 to 1200 6 0.3 0.0025 0.009 3.052 × 10–7 35 0.01 0.05 330 0.1 500 3.3 –40 to +85 ADIS16448 Digital 1000 18 1.9 10 to 1200 14 0.6 0.005 0.015 0.01 40 0.1 0.05 330 0.12 205 3.3 –40 to +85 All ADI MEMS IMUs include part specific factory calibration and programmable filtering, unless noted. 23 mm × 23 mm Barometer × 23 mm module Programmable FIR filtering, 2.46 kHz sample rate, programmable soft iron 47 mm × 44 mm correction matrix, programmable hard × 14 mm module iron correction, single command self test, delta angle/velocity, continuous bias estimator, linear g compensation Extended Kalman filter, ±0.1° static angle accuracy, ±0.3° dynamic angle accuracy, programmable FIR filtering, 2.46 kHz sample rate, 47 mm × 44 mm programmable soft iron correction × 14 mm module matrix, programmable hard iron correction, single command self test, delta angle/velocity, continuous bias estimator, linear g compensation Programmable operation and control, 24 mm × 37 mm wide dynamic range, external clock × 10 mm module option, single command self test Analog Devices, Inc. Worldwide Headquarters Analog Devices, Inc. One Technology Way P.O. Box 9106 Norwood, MA 02062-9106 U.S.A. Tel: 781.329.4700 (800.262.5643, U.S.A. only) Fax: 781.461.3113 Analog Devices, Inc. Europe Headquarters Analog Devices, Inc. Wilhelm-Wagenfeld-Str. 6 80807 Munich Germany Tel: 49.89.76903.0 Fax: 49.89.76903.157 Analog Devices, Inc. Japan Headquarters Analog Devices, KK New Pier Takeshiba South Tower Building 1-16-1 Kaigan, Minato-ku, Tokyo, 105-6891 Japan Tel: 813.5402.8200 Fax: 813.5402.1064 Analog Devices, Inc. Asia Pacific Headquarters Analog Devices 5F, Sandhill Plaza 2290 Zuchongzhi Road Zhangjiang Hi-Tech Park Pudong New District Shanghai, China 201203 Tel: 86.21.2320.8000 Fax: 86.21.2320.8222 ©2014 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. ST10354-0-10/14(C)