Silicon Piezoresistive Absolute Pressure Sensor Preliminary Data KPY 62-AK KPY 69-AK Features • • • • Low pressure and temperature hysteresis Fast response High sensitivity and linearity Fatigue free monocrystaline silicon diaphragm giving high load cycle stability • High long term stability • Built in silicon temperature sensor • Provided for further fabrication, protection cap Similar to TO-39-2 Type and Marking Symbol Pressure Range Unit Ordering Code KPY 62 AK P0 … PN 0 … 0.6 bar Q62705-K275 KPY 63 AK 0 … 1.6 Q62705-K276 KPY 64 AK 0…4 Q62705-K277 KPY 65 AK 0 … 10 Q62705-K278 KPY 66 AK 0 … 25 Q62705-K279 KPY 67 AK 0 … 60 Q62705-K280 KPY 68 AK 0 … 160 Q62705-K281 KPY 69 AK 0 … 400 Q62705-K282 Pin Configuration 1 Temperature sensor (typ. R25 = 2 kΩ) 2 Not connected 3 + VIN; Temperature sensor 4 − VOUT 5 Capillary tube 6 Shielding, to be connected to + VIN 7 − VIN 8 + VOUT Semiconductor Group 1 1998-05-08 KPY 62-AK KPY 69-AK Absolute Maximum Ratings Parameter Symbol Pressure overload PMAX KPY 62 AK KPY 63 AK KPY 64 AK KPY 65 AK KPY 66 AK KPY 67 AK KPY 68 AK KPY 69 AK Storage temperature range Supply voltage bar 4 8 12 20 50 70 200 500 TA Tstg VIN Operating temperature range Limit Values Unit − 40 … + 125 ˚C − 50 … + 125 ˚C 12 V Electrical Characteristics at TA = 25 ˚C and VIN = 5 V, unless otherwise specified. Parameter Symbol Bridge resistance RB Sensitivity s KPY 62 AK KPY 63 AK KPY 64 AK KPY 65 AK KPY 66 AK KPY 67 AK KPY 68 AK KPY 69 AK min. typ. max. 4 − 8 23.3 11.3 6.5 3.6 1.1 0.63 0.38 0.16 43.0 20.0 11.0 5.2 2.1 1.0 0.53 0.22 73.3 30.0 15.5 8.0 3.0 1.4 0.66 0.27 Vfin Output voltage KPY 62 AK KPY 63 AK KPY 64 AK KPY 65 AK KPY 66 AK KPY 67 AK KPY 68 AK KPY 69 AK Semiconductor Group Limit Values kΩ mV/ Vbar mV 70 90 130 180 150 190 310 330 2 Unit 130 160 220 260 260 300 420 440 220 240 310 400 370 410 530 550 1998-05-08 KPY 62-AK KPY 69-AK Electrical Characteristics (cont’d) at TA = 25 ˚C and VIN = 5 V, unless otherwise specified. Parameter Symbol Offset voltage P = P0 V0 Linearity error (Best fit straight line) FL P0 = P0 … PN KPY 62 … 65 AK KPY 66 … 69 AK Limit Values min. typ. max. − 25 − + 25 mV % Vfin − − Pressure hysteresis PH P1 = P0, P2 = PN, P3 = P0 KPY 62 … 69 AK Unit ± 0.3 ± 0.3 − ± 0.1 ± 0.5 − − % Vfin Electrical Characteristics at T1 = 25 ˚C, T2 = 125 ˚C, T3 = 25 ˚C and VIN = 5 V, unless otherwise specified. Parameter Symbol Limit Values min. Temperature coefficient of Vfin − 0.15 %/K − 0.04 − 0.04 − 0.02 − 0.02 − 0.02 − 0.01 − 0.01 − 0.01 − − − − − − − − + 0.04 + 0.04 + 0.02 + 0.02 + 0.02 + 0.01 + 0.01 + 0.01 TCRB %/K − + 0.23 − % v. Vfin TH KPY 62 … 66 AK KPY 67 … 69 AK Semiconductor Group − 0.18 TCV0 KPY 62 … 69 AK Temperature hysteresis of V0; Vfin %/K − 0.22 KPY 62 AK KPY 63 AK KPY 64 AK KPY 65 AK KPY 66 AK KPY 67 AK KPY 68 AK KPY 69 AK Temperature coefficient of RB max. TCVfin KPY 62 … 69 AK Temperature coefficient of V0 typ. − − 3 Unit ± 0.2 − 0.1 − − 1998-05-08 KPY 62-AK KPY 69-AK Package Outline Similar to TO-39-2 Basic Component View on Chip 12 ±0.1 8 ±0.5 ø0.65 -0.1 5 6 7.6 ±0.1 ø1.05 ±0.1 9.3 -0.2 7 3 8 2.6 max 4 1 2 Bond Wire Loop Component Delivery Form 5.08 18.2±0.6 3.59 5.08 ø11.5 -0.5 3.59 14.2±0.6 5 ±0.6 45˚ 6.2 ±0.6 8±0.6 GMT05959 Dimensions in mm Weight approx. 1.5 g Exterior Packaging I.e. tubes, trays, boxes are shown in our Data Book “Package Information”. Semiconductor Group 4 1998-05-08