INFINEON Q62705-K174

Silicon Piezoresistive
Relative Pressure Sensor
KPY 51-R
KPY 56-R
Features
•
•
•
•
Low pressure and temperature hysteresis
Fast response
High sensitivity and linearity
Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
• High long term stability
• Built in silicon temperature sensor
• Media compatible stainless housing
Stainless Steel Package
Type and
Marking
Symbol
Pressure Range
Unit
Ordering Code
KPY 51 R
P0 … PN
0 … 0.25
bar
Q62705-K174
KPY 52 R
0 … 0.6
Q62705-K171
KPY 53 R
0 … 1.6
Q62705-K176
KPY 54 R
0…4
Q62705-K178
KPY 55 R
0 … 10
Q62705-K180
KPY 56 R
0 … 25
Q62705-K182
Pin Configuration
1
Capillary tube
2
+ VIN
3
− VOUT
4
Temperature sensor
(typ. R25 = 2 kΩ)
5
Temperature sensor
6
− VIN
7
+ VOUT
8
Not connected
Semiconductor Group
1
02.97
KPY 51-R
KPY 56-R
Absolute Maximum Ratings
Parameter
Limit Values1)
Symbol
Unit
Frontside Rearside
PMAX
Pressure overload
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
bar
2
6
10
16
30
40
2
6
10
16
30
75
TA
Tstg
VIN
Operating temperature range
Storage temperature range
Supply voltage
− 40 … + 125
˚C
− 50 … + 130
˚C
12
V
1) Frontside coupling applies pressure onto chip face.
Rearside coupling applies pressure through Kovar centre tube.
Electrical Characteristics
at TA = 25 ˚C and VIN = 5 V, unless otherwise specified.
Parameter
Symbol
Bridge resistance
RB
Sensitivity
s
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
min.
typ.
max.
4
−
8
16.8
11.0
5.6
4.0
1.8
0.88
24.0
15.0
8.8
6.0
2.6
1.2
32.0
24.0
12.5
9.0
4.0
2.0
Vfin
Output voltage
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
V0
Offset voltage
P = P0
Semiconductor Group
Limit Values
2
Unit
kΩ
mV/
Vbar
mV
21
33
45
80
90
110
30
45
70
120
130
150
40
72
100
180
200
250
− 25
−
+ 25
mV
KPY 51-R
KPY 56-R
Electrical Characteristics (cont’d)
at TA = 25 ˚C and VIN = 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
min.
max.
FL
Linearity error (Best fit straight line)
P0 = P0 … PN
% Vfin
KPY 51 … 55 R
KPY 56 R
Pressure hysteresis
P1 = P0, P2 = PN, P3 = P0
typ.
Unit
KPY 51 … 56 R
−
−
PH
± 0.15 ± 0.35
± 0.15 −
−
± 0.1
% Vfin
−
Electrical Characteristics
at T1 = 25 ˚C, T2 = 80 ˚C, T3 = 25 ˚C and VIN = 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
min.
Temperature coefficient of Vfin
− 0.09
− 0.12
− 0.13
− 0.14
− 0.15
− 0.15
%/K
− 0.03
− 0.03
− 0.03
− 0.03
− 0.03
− 0.03
−
−
−
−
−
−
+ 0.08
+ 0.08
+ 0.05
+ 0.05
+ 0.05
+ 0.05
TCRB
%/K
−
+ 0.095 −
% v. Vfin
TH
KPY 51 … 56 R
Semiconductor Group
−
−
−
−
−
−
TCV0
KPY 51 … 56 R
Temperature hysteresis of V0; Vfin
%/K
− 0.20
− 0.20
− 0.20
− 0.20
− 0.20
− 0.20
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
Temperature coefficient of RB
max.
TCVfin
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
Temperature coefficient of V0
typ.
−
3
Unit
± 0.2
−
KPY 51-R
KPY 56-R
Package Outline
Stainless Steel Package
Weight 15.5 g
Dimension in mm
Exterior Packaging
I.e. tubes, trays, boxes are shown in our Data Book “Package Information”.
Semiconductor Group
4