Freescale Semiconductor, Inc. MOTOROLA Order this document by MPXA6115A SEMICONDUCTOR TECHNICAL DATA Freescale Semiconductor, Inc... High Temperature Accuracy Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On- Chip Signal Conditioned, Temperature Compensated and Calibrated Motorola’s MPXA6115A/MPXH6115A series sensor integrates on--chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The small form factor and high reliability of on--chip integration make the Motorola pressure sensor a logical and economical choice for the system designer. SUPER SMALL OUTLINE The MPXA6115A/MPXH6115A series piezoresistive PACKAGE transducer is a state--of--the--art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. MPXH6115A6U Figure 1 shows a block diagram of the internal CASE 1317 circuitry integrated on a pressure sensor chip. Features • Improved Accuracy at High Temperature • Available in Small and Super Small Outline Packages • 1.5% Maximum Error over 0° to 85°C • Ideally suited for Microprocessor or Microcontroller--Based Systems • Temperature Compensated from --40° to +125°C • Durable Thermoplastic (PPS) Surface Mount Package MPXA6115A MPXH6115A SERIES INTEGRATED PRESSURE SENSOR 15 to 115 kPa (2.2 to 16.7 psi) 0.2 to 4.8 Volts Output SMALL OUTLINE PACKAGE MPXA6115A6U CASE 482 MPXA6115AC6U CASE 482A MPXH6115AC6U CASE 1317A J PIN NUMBER Application Examples • Aviation Altimeters • Industrial Controls • Engine Control/Manifold Absolute Pressure (MAP) • Weather Station and Weather Reporting Device Barometers 1 N/C 5 N/C 2 VS 6 N/C 3 Gnd 7 N/C 4 Vout 8 N/C MPXV5004G7U CASE 482B NOTE: Pins 1, 5, 6, 7, and 8 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is denoted by the chamfered corner of the package. VS MPXV5004GC7U CASE 482C THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 SENSING ELEMENT GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY PINS 1, 5, 6, 7 AND 8 ARE NO CONNECTS GND Figure 1. Fully Integrated Pressure Sensor Schematic PIN NUMBER Vout N/C 5 N/C 2 VS 6 N/C 3 Gnd 7 N/C 4 Vout 8 N/C 1 NOTE: Pins 1, 5, 6, 7, and 8 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is denoted by the notch in the lead. REV 2 Motorola Sensor Device Data Motorola, Inc. 2003 MPXA6115A MPXH6115A SERIES For More Information On This Product, 1 Go to: www.freescale.com Freescale Semiconductor, Inc. MAXIMUM RATINGS(1) Symbol Value Units Maximum Pressure (P1 > P2) Parametrics Pmax 400 kPa Storage Temperature Tstg --40° to +125° °C TA --40° to +125° °C Io+ 0.5 mAdc Io -- --0.5 mAdc Operating Temperature Output Source Current @ Full Scale Output(2) Output Sink Current @ Minimum Pressure Offset(2) NOTES: 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2. Maximum Output Current is controlled by effective impedance from Vout to Gnd or Vout to VS in the application circuit. OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2.) Freescale Semiconductor, Inc... Characteristic Symbol Min Typ Max Unit Pressure Range POP 15 — 115 kPa Supply Voltage(1) VS 4.75 5.0 5.25 Vdc Io — 6.0 10 mAdc (0 to 85°C) Voff 0.133 0.200 0.268 Vdc Full Scale Output(3) @ VS = 5.0 Volts (0 to 85°C) VFSO 4.633 4.700 4.768 Vdc Full Scale Span(4) @ VS = 5.0 Volts (0 to 85°C) VFSS 4.433 4.500 4.568 Vdc Accuracy(5) (0 to 85°C) — — — ±1.5 %VFSS Supply Current Minimum Pressure @ VS = 5.0 Volts Sensitivity Offset(2) V/P — 45 — mV/kPa Response Time(6) tR — 1.0 — ms Warm--Up Time(7) — — 20 — ms — — ±0.25 — %VFSS Offset Stability(8) NOTES: 1. Device is ratiometric within this specified excitation range. 2. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 3. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 4. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 5. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span at 25°C due to all sources of error including the following: • Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25°C. • TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Warm--up Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized. 8. Offset Stability is the product’s output deviation when subjected to 1000 cycles of Pulsed Pressure, Temperature Cycling with Bias Test. MPXA6115A MPXH6115A SERIES For More Information On This Product, 2 Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. DIE FLUORO SILICONE GEL DIE COAT +5.0 V STAINLESS STEEL CAP P1 WIRE BOND THERMOPLASTIC CASE LEAD FRAME VS Pin 2 MPXA6115A MPXH6115A Vout Pin 4 100 nF to ADC 47 pF GND Pin 3 51 K ABSOLUTE ELEMENT DIE BOND SEALED VACUUM REFERENCE Figure 2 illustrates the absolute sensing chip in the basic Super Small Outline chip carrier (Case 1317). Figure 3. Typical Application Circuit (Output Source Current Operation) Figure 3 shows a typical application circuit (output source current operation). 5.0 4.5 4.0 OUTPUT (Volts) 3.5 MAX TRANSFER FUNCTION: Vout = Vs* (.009*P--.095) ± Error VS = 5.0 Vdc TEMP = 0 to 85°C TYP 3.0 2.5 2.0 1.5 MIN 1.0 0.5 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 90 95 100 105 110 115 120 Freescale Semiconductor, Inc... Figure 2. Cross Sectional Diagram SSOP (not to scale) Pressure (ref: to sealed vacuum) in kPa Figure 4. Output versus Absolute Pressure Figure 4 shows the sensor output signal relative to pressure input. Typical minimum and maximum output curves are shown for operation over 0 to 85°C temperature range. The output will saturate outside of the rated pressure range. A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The Motorola Sensor Device Data MPXA6115A/MPXH6115A series pressure sensor operating characteristics, internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long--term reliability. Contact the factory for information regarding media compatibility in your application. MPXA6115A MPXH6115A SERIES For More Information On This Product, 3 Go to: www.freescale.com Freescale Semiconductor, Inc. Transfer Function (MPXA6115A/MPXH6115A) Nominal Transfer Value: Vout = VS x (0.009 x P -- 0.095) ± (Pressure Error x Temp. Factor x 0.009 x VS) VS = 5.0 ± 0.25 Vdc Temperature Error Band MPXA6115A/MPXH6115A Series 4.0 Break Points Temp 3.0 Temperature Error Factor Multiplier -- 40 0 to 85 125 2.0 3 1 1.75 1.0 --40 --20 0 20 40 60 80 100 120 140 Temperature in C° NOTE: The Temperature Multiplier is a linear response from 0°C to --40°C and from 85°C to 125°C Pressure Error Band Error Limits for Pressure 3.0 2.0 Pressure Error (kPa) Freescale Semiconductor, Inc... 0.0 1.0 0.0 20 40 60 80 100 120 Pressure (in kPa) --1.0 -- 2.0 -- 3.0 Pressure Error (Max) 15 to 115 (kPa) ± 1.5 (kPa) ORDERING INFORMATION — SMALL OUTLINE PACKAGE Device Type Options Case No. Basic Element Absolute, Element Only 482 MPXA6115A6U Rails MPXA6115A Absolute, Element Only 482 MPXA6115A6T1 Tape and Reel MPXA6115A Absolute, Axial Port 482A MPXA6115AC6U Rails MPXA6115A Absolute, Axial Port 482A MPXA6115AC6T1 Tape and Reel MPXA6115A Ported Element MPX Series Order No. Packing Options Marking ORDERING INFORMATION — SUPER SMALL OUTLINE PACKAGE Device Type Options Case No. Basic Element Absolute, Element Only 1317 MPXH6115A6U Rails MPXH6115A Absolute, Element Only 1317 MPXH6115A6T1 Tape and Reel MPXH6115A Absolute, Axial Port 1317A MPXH6115AC6U Rails MPXH6115A Absolute, Axial Port 1317A MPXH6115AC6T1 Tape and Reel MPXH6115A Ported Element MPX Series Order No. Packing Options MPXA6115A MPXH6115A SERIES For More Information On This Product, 4 Go to: www.freescale.com Marking Motorola Sensor Device Data Freescale Semiconductor, Inc. SURFACE MOUNTING INFORMATION MINIMUM RECOMMENDED FOOTPRINT FOR SMALL AND SUPER SMALL PACKAGES a solder reflow process. It is always recommended to fabricate boards with a solder mask layer to avoid bridging and/or shorting between solder pads, especially on tight tolerances and/or tight layouts. Surface mount board layout is a critical portion of the total design. The footprint for the semiconductor package must be the correct size to ensure proper solder connection interface between the board and the package. With the correct pad geometry, the packages will self--align when subjected to 0.100 TYP 2.54 Freescale Semiconductor, Inc... 0.660 16.76 0.060 TYP 8X 1.52 0.300 7.62 inch mm 0.100 TYP 8X 2.54 Figure 5. SOP Footprint (Case 482) 0.050 1.27 TYP 0.387 9.83 0.150 3.81 0.027 TYP 8X 0.69 0.053 TYP 8X 1.35 inch mm Figure 6. SSOP Footprint (Case 1317 and 1317A) Motorola Sensor Device Data MPXA6115A MPXH6115A SERIES For More Information On This Product, 5 Go to: www.freescale.com Freescale Semiconductor, Inc. Freescale Semiconductor, Inc... NOTES MPXA6115A MPXH6115A SERIES For More Information On This Product, 6 Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. Freescale Semiconductor, Inc... NOTES Motorola Sensor Device Data MPXA6115A MPXH6115A SERIES For More Information On This Product, 7 Go to: www.freescale.com Freescale Semiconductor, Inc. SMALL OUTLINE PACKAGE DIMENSIONS --A-- D 8 PL 0.25 (0.010) 4 5 M T B A S NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5_ TYPICAL DRAFT. S --B-G 8 1 S Freescale Semiconductor, Inc... N H C J --T-PIN 1 IDENTIFIER M K SEATING PLANE DIM A B C D G H J K M N S INCHES MIN MAX 0.415 0.425 0.415 0.425 0.212 0.230 0.038 0.042 0.100 BSC 0.002 0.010 0.009 0.011 0.061 0.071 0_ 7_ 0.405 0.415 0.709 0.725 MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 5.38 5.84 0.96 1.07 2.54 BSC 0.05 0.25 0.23 0.28 1.55 1.80 0_ 7_ 10.29 10.54 18.01 18.41 CASE 482--01 ISSUE O --A-- D 8 PL 0.25 (0.010) 4 5 M T B S A NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5_ TYPICAL DRAFT. S N --B-G 8 1 S DIM A B C D G H J K M N S V W W V C H J INCHES MIN MAX 0.415 0.425 0.415 0.425 0.500 0.520 0.038 0.042 0.100 BSC 0.002 0.010 0.009 0.011 0.061 0.071 0_ 7_ 0.444 0.448 0.709 0.725 0.245 0.255 0.115 0.125 MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 12.70 13.21 0.96 1.07 2.54 BSC 0.05 0.25 0.23 0.28 1.55 1.80 0_ 7_ 11.28 11.38 18.01 18.41 6.22 6.48 2.92 3.17 --T-K M PIN 1 IDENTIFIER SEATING PLANE CASE 482A--01 ISSUE A MPXA6115A MPXH6115A SERIES For More Information On This Product, 8 Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. SMALL OUTLINE PACKAGE DIMENSIONS (CONTINUED) --A-NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5_ TYPICAL DRAFT. 6. DIMENSION S TO CENTER OF LEAD WHEN FORMED PARALLEL. 4 5 --B-G 8 1 0.25 (0.010) M T B D 8 PL S A DETAIL X S PIN 1 IDENTIFIER N Freescale Semiconductor, Inc... S C --T-K SEATING PLANE DIM A B C D G J K M N S INCHES MIN MAX 0.415 0.425 0.415 0.425 0.210 0.220 0.026 0.034 0.100 BSC 0.009 0.011 0.100 0.120 0_ 15 _ 0.405 0.415 0.540 0.560 MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 5.33 5.59 0.66 0.864 2.54 BSC 0.23 0.28 2.54 3.05 0_ 15 _ 10.29 10.54 13.72 14.22 M J DETAIL X CASE 482B--03 ISSUE B NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5_ TYPICAL DRAFT. 6. DIMENSION S TO CENTER OF LEAD WHEN FORMED PARALLEL. --A-4 5 N --B-G 8 0.25 (0.010) 1 M T B D 8 PL S A S DIM A B C D G J K M N S V W DETAIL X S W V PIN 1 IDENTIFIER C --T-K INCHES MIN MAX 0.415 0.425 0.415 0.425 0.500 0.520 0.026 0.034 0.100 BSC 0.009 0.011 0.100 0.120 0_ 15 _ 0.444 0.448 0.540 0.560 0.245 0.255 0.115 0.125 MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 12.70 13.21 0.66 0.864 2.54 BSC 0.23 0.28 2.54 3.05 0_ 15 _ 11.28 11.38 13.72 14.22 6.22 6.48 2.92 3.17 SEATING PLANE M J DETAIL X CASE 482C--03 ISSUE B Motorola Sensor Device Data MPXA6115A MPXH6115A SERIES For More Information On This Product, 9 Go to: www.freescale.com Freescale Semiconductor, Inc. SUPER SMALL OUTLINE PACKAGE DIMENSIONS 2X 0.006 C A B 0.420 0.400 0.050 0.025 0.300 0.280 3 NOTES: 1. ALL DIMENSIONS ARE IN INCHES. 2. DIMENSIONING AND TOLERANCING PER ASME Y14.5M--1994. 3. DIMENSIONS DO NOT INCLUDE MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR PROTRUSIONS SHALL NOT EXCEED .006 INCHES PER SIDE. 4. ALL VERTICAL SURFACES TO BE 5° MAXIMUM. 5. DIMENSION DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE .008 INCHES MAXIMUM. 0.019 5 0.014 0.004 M C A B Freescale Semiconductor, Inc... 8X A B 3 0.300 0.280 0.298 0.278 0.165 0.145 0.010 0.002 0.004 DETAIL E C .010 GAGE PLANE 0.023 0.013 10° 0° DETAIL E SEATING PLANE CASE 1317--03 ISSUE B MPXA6115A MPXH6115A SERIES For More Information On This Product, 10 Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. SUPER SMALL OUTLINE PACKAGE DIMENSIONS (CONTINUED) 2X 0.006 C A B 0.420 0.400 NOTES: 1. ALL DIMENSIONS ARE IN INCHES. 2. DIMENSIONING AND TOLERANCING PER ASME Y14.5M--1994. 3. DIMENSIONS DO NOT INCLUDE MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR PROTRUSIONS SHALL NOT EXCEED .006 INCHES PER SIDE. 4. ALL VERTICAL SURFACES TO BE 5° MAXIMUM. 5. DIMENSION DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE .008 INCHES MAXIMUM. 0.050 0.025 0.345 0.325 Freescale Semiconductor, Inc... 8X A 0.345 0.325 B 0.018 0.014 0.004 M 5 C A B .014 GAGE PLANE 0.010 0.002 0.048 0.038 10° 0° DETAIL E 0.130 0.110 0.200 0.180 0.300 0.280 0.390 0.370 3 0.004 A DETAIL E C B 3 SEATING PLANE 0.300 0.280 BOTTOM VIEW CASE 1317A--01 ISSUE A Motorola Sensor Device Data MPXA6115A MPXH6115A SERIES For More Information On This Product, 11 Go to: www.freescale.com Freescale Semiconductor, Inc... Freescale Semiconductor, Inc. Information in this document is provided solely to enable system and software implementers to use Motorola products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document. Motorola reserves the right to make changes without further notice to any products herein. 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All other product or service names are the property of their respective owners. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. E Motorola Inc. 2003 HOW TO REACH US: USA/EUROPE/LOCATIONS NOT LISTED: Motorola Literature Distribution P.O. Box 5405, Denver, Colorado 80217 1--800--521--6274 or 480--768--2130 JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3--20--1, Minami--Azabu, Minato--ku, Tokyo 106--8573, Japan 81--3--3440--3569 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong 852--26668334 HOME PAGE: http://motorola.com/semiconductors MPXA6115A MPXH6115A SERIES ◊For More Information On This Product, 12 Go to: www.freescale.com Motorola Sensor Device Data MPXA6115A