LPR530AL MEMS motion sensor: dual axis pitch and roll ±300°/s analog gyroscope Preliminary data Features ■ 2.7 V to 3.6 V single-supply operation ■ Wide operating temperature range (-40 °C to +85 °C) ■ High stability overtemperature ■ Analog absolute angular-rate output ■ Two separate outputs for each axis (1x and 4x amplified) ■ Integrated low-pass filters ■ Low power consumption ■ Embedded power-down ■ Embedded self-test ■ High shock and vibration survivability ■ ECOPACK® RoHS and “Green” compliant (see Section 5) LGA-16L (5x5x1.5mm) The LPR530AL has a full scale of ±300 °/s and is capable of detecting rates with a -3 dB bandwidth up to 140 Hz. The gyroscope is the combination of one actuator and one accelerometer integrated in a single micromachined structure. Applications ■ Pointing devices, remote and game controllers ■ Motion control with user interface ■ GPS navigation systems ■ Industrial and robotics A CMOS IC provides the measured angular rate to the external world through an analog output voltage, allowing high level of integration and production trimming to better match sensing element characteristics. ST’s gyroscope family leverages on robust and mature manufacturing process already used for the production of micromachined accelerometers. Description The LPR530AL is a low-power dual-axis micromachined gyroscope capable of measuring angular rate along pitch and roll axes. It provides excellent temperature stability and high resolution over an extended operating temperature range (-40 °C to +85 °C). Table 1. It includes a sensing element composed by single driving mass, kept in continuous oscillating movement and able to react when an angular rate is applied based on the Coriolis principle. ST is already in the field with several hundreds million sensors with excellent acceptance from the market in terms of quality, reliability and performance. LPR530AL is provided in plastic land grid array (LGA) package. Several years ago ST pioneered successfully the usage of this package for accelerometers. Today ST has the widest manufacturing capability and strongest expertise in the world for production of sensor in plastic LGA package. Device summary Order code Temperature range (°C) Package Packing LPR530AL -40 to +85 LGA-16 (5x5x1.5) Tray LPR530ALTR -40 to +85 LGA-16 (5x5x1.5) Tape and reel July 2009 Doc ID 15812 Rev 2 This is preliminary information on a new product now in development or undergoing evaluation. Details are subject to change without notice. 1/12 www.st.com 12 Contents LPR530AL Contents 1 Block diagram and pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 1.1 2 3 4 Pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Mechanical and electrical specifications . . . . . . . . . . . . . . . . . . . . . . . . 5 2.1 Mechanical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 2.2 Electrical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 2.3 Absolute maximum ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 Terminology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 3.1 Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 3.2 Zero-rate level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 3.3 Self-test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 3.4 High pass filter reset (HP) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 Application hints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 4.1 Output response vs. rotation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 4.2 Soldering information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 5 Package information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 6 Revision history . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 2/12 Doc ID 15812 Rev 2 LPR530AL 1 Block diagram and pin description Block diagram and pin description Figure 1. +Ω Block diagram X + CHARGE AMPLIFIER DEMODULATOR SWITCHED CAPACITOR LOW-PASS FILTER - Optional LP/HP Filter Not amplified filtered output X X/Y DRIVING MASS GAIN 4x 4x OUT X (amplified) GAIN 4x 4x OUT Y (amplified) Feedback loop +Ω Y + Not amplified filtered output Y CHARGE AMPLIFIER SWITCHED CAPACITOR LOW-PASS FILTER - Optional LP/HP Filter DEMODULATOR REFERENCE PHASE GENERATOR CLOCK Pin description +Ω (TOP VIEW) DIRECTION OF THE DETECTABLE ANGULAR RATES 14 X HP Vdd 16 13 1 GND PD FILTVDD ST VCONT OUTX 4xINX OUTY 9 5 4xINY 6 8 4xOUTY Y Vref +Ω Res Pin connection Res Figure 2. 4xOUTX 1.1 TRIMMING CIRCUITS (BOTTOM VIEW) Doc ID 15812 Rev 2 3/12 Block diagram and pin description 4/12 LPR530AL Table 2. Pin description Pin # Pin name 1 GND 2 FILTVDD PLL filter connection pin #2 3 VCONT PLL filter connection pin #1 4 OUTY Not amplified output 5 4xINY Input of 4x amplifier 6 4xOUTY 7 Vref 8 4xOUTX 9 4xINX Input of 4x amplifier 10 OUTX Not amplified output 11 ST Self-test (logic 0: normal mode; logic 1: self-test) 12 PD Power-down (logic 0: normal mode; logic 1: power-down mode) 13 HP High pass filter reset (logic 0: normal operation mode; logic1: external high pass filter is reset) 14,15 Res Reserved. Connect to Vdd 16 Vdd Power supply Analog function 0V supply voltage Y rate signal output voltage (amplified) Reference voltage X rate signal output voltage (amplified) Doc ID 15812 Rev 2 LPR530AL Mechanical and electrical specifications 2 Mechanical and electrical specifications 2.1 Mechanical characteristics Table 3. Mechanical characteristics @ Vdd = 3 V, T = 25 °C unless otherwise noted(1) Symbol FSA FS SoA So Parameter Measurement range Sensitivity(3) Test condition Min. Typ.(2) Max. Unit 4x OUT (amplified) ±300 °/s OUT (not amplified) ±1200 °/s 4x OUT (amplified) 3.33 mV/ °/s OUT (not amplified) 0.83 mV/ °/s Delta from 25°C 0.03 %/°C SoDr Sensitivity change vs temperature Voff Zero-rate level(3) 1.23 V Vref Reference voltage 1.23 V OffDr Zero-rate level change Delta from 25°C Vs temperature 0.05 °/s/°C ±1 % FS 140 Hz 0.035 °/s / Hz NL Non linearity BW Bandwidth(4) Rn Rate noise density Top Operating temperature range Best fit straight line -40 +85 °C 1. The product is factory calibrated at 3 V. The operational power supply range is specified in Table 4. 2. Typical specifications are not guaranteed 3. Sensitivity and zero-rate level are not ratiometric to supply voltage 4. The product is capable of measuring angular rates extending from DC to the selected BW. Doc ID 15812 Rev 2 5/12 Mechanical and electrical specifications LPR530AL 2.2 Electrical characteristics Table 4. Electrical characteristics @ Vdd =3 V, T=25 °C unless otherwise noted(1) Symbol Parameter Test condition Min. Typ.(2) Max. Unit 2.7 3 3.6 V Vdd Supply voltage Idd Supply current PD pin connected to GND 6.8 Supply current in power-down mode PD pin connected to Vdd 1 IddPdn VST VPD Top mA 5 Logic 0 level 0 0.2*Vdd Logic 1 level 0.8*Vdd Vdd Logic 0 level 0 0.2*Vdd Logic 1 level 0.8*Vdd Vdd -40 +85 µA Self-test input V Power-down input V Operating temperature range °C 1. The product is factory calibrated at 3 V 2. Typical specifications are not guaranteed 2.3 Absolute maximum ratings Stresses above those listed as “Absolute maximum ratings” may cause permanent damage to the device. This is a stress rating only and functional operation of the device under these conditions is not implied. Exposure to maximum rating conditions for extended periods may affect device reliability. Table 5. Absolute maximum ratings Symbol Ratings Vdd Supply voltage Vin Input voltage on any control pin (PD, ST) TSTG Storage temperature range Maximum value Unit -0.3 to 6 V -0.3 to Vdd +0.3 V -40 to +125 °C 3000 g for 0.5 ms A Acceleration ESD 10000 g for 0.1 ms Electrostatic discharge protection 2 (HBM) kV This is a mechanical shock sensitive device, improper handling can cause permanent damage to the part This is an ESD sensitive device, improper handling can cause permanent damage to the part 6/12 Doc ID 15812 Rev 2 LPR530AL Terminology 3 Terminology 3.1 Sensitivity An angular rate gyroscope is a device that produces a positive-going output voltage for counterclockwise rotation around the sensitive axis considered. Sensitivity describes the gain of the sensor and can be determined by applying a defined angular velocity to it. This value changes very little over temperature and time. 3.2 Zero-rate level Zero-rate level describes the actual output signal if there is no angular rate present. The zero-rate level of precise MEMS sensors is, to some extent, a result of stress to the sensor and therefore zero-rate level can slightly change after mounting the sensor onto a printed circuit board or after exposing it to extensive mechanical stress. This value changes very little over temperature and time. 3.3 Self-test Self-test allows testing of the mechanical and electrical part of the sensor, allowing the seismic mass to be moved by means of an electrostatic test-force. The self-test function is off when the ST pin is connected to GND. When the ST pin is tied to Vdd, an actuation force is applied to the sensor, emulating a definite Coriolis force. In this case the sensor output will exhibit a voltage change in its DC level which is also dependent on the supply voltage. When ST is active, the device output level is given by the algebraic sum of the signals produced by the velocity acting on the sensor and by the electrostatic test-force. If the output signals change within the amplitude specified in Table 3, then the mechanical element is working properly and the parameters of the interface chip are within the defined specifications. 3.4 High pass filter reset (HP) The LPR530AL provides the possibility to reset the optional external high pass filter by applying a high logic value to the HP pad. This procedure ensures faster response, especially during overload conditions. Moreover, this operation is suggested each time the device is powered. Doc ID 15812 Rev 2 7/12 Application hints 4 LPR530AL Application hints Figure 3. LPR530AL electrical connections and external component values +Ω C2 10nF GND 10kOhm GND +Ω Y X Vdd 470nF R1 100 nF C1 GND 1 10 µF (TOP VIEW) DIRECTION OF THE DETECTABLE ANGULAR RATES 16 14 13 HP PD LPR530AL (Top View) Not amplified filtered output Y R2 8 Vref 9 R2 C1 R1 C2 GND 4xOUTX Vref Recomended Optional Low-pass filter High-pass filter Typical values: R1 = 1MOhm C1 = 4.7 µF R2 = 33kOhm C2 = 2.2 nF to 2.2 µF 6 Vref GND R1 5 4xOUTY C2 C1 Not amplified filtered output X ST Power supply decoupling capacitors (100 nF ceramic or polyester + 10 µF Aluminum) should be placed as near as possible to the device (common design practice). The LPR530AL allows band limiting the output rate response through the use of an external low pass filter (suggested) and/or high pass filter (optional) in addition to the embedded low pass filter (ft = 140 Hz). 4xOUTX and 4xOUTY are respectively OUTX and OUTY amplified outputs lines, internally buffered to ensure low output impedance. If external high pass or low pass filtering is not applied it is mandatory to short-circuit respectively pad 4 to pad 5 and pad 9 to pad 10 when amplified outputs are used. When only non-amplified outputs are used (OUTX/Y), it is suggested to set pads 5 and 9 to fixed reference voltages (GND/Vref). When high pass filter is applied to not amplified output (OUTx), it is recommended to buffer the line before entering ADC for performance optimization. The LPR530AL IC includes a PLL (Phase Locked Loop) circuit to synchronize driving and sensing interfaces. Capacitors and resistors must be added at FILTVDD and VCONT pins (as shown in Figure 3) to implement a low-pass filter. 8/12 Doc ID 15812 Rev 2 LPR530AL 4.1 Application hints Output response vs. rotation Figure 4. +Ω Output response vs. rotation +Ω Y Steady State position: 4xOUTX = 4xOUTY = 1.23V OUTX = OUTY = 1.23V +Ω X Y +Ω X Positive rotations as indicated by arrows increase output value over Zero rate level: +300°/sec --> 4xOUTX, 4xOUTY = 1.23V + SoA*300 = 2.23V +300°/sec --> OUTX, OUTY = 1.23V + So*300 = 1.48V 4.2 Soldering information The LGA package is compliant with the ECOPACK®, RoHS and “Green” standard. It is qualified for soldering heat resistance according to JEDEC J-STD-020C. Leave “pin 1 indicator” unconnected during soldering. Land pattern and soldering recommendations are available at www.st.com. Doc ID 15812 Rev 2 9/12 Package information 5 LPR530AL Package information In order to meet environmental requirements, ST offers these devices in different grades of ECOPACK® packages, depending on their level of environmental compliance. ECOPACK® specifications, grade definitions and product status are available at: www.st.com. ECOPACK is an ST trademark. Figure 5. A1 LGA-16: mechanical data and package dimensions 1.46 1.5 A2 A3 1.6 0.057 0.059 1.33 0.16 C 0.2 0.063 0.052 0.24 0.006 0.3 0.008 0.009 0.012 D1 4.85 5 5.15 0.191 0.197 0.203 E1 4.85 5 5.15 0.191 0.197 0.203 L 0.8 0.031 L1 3.2 0.126 M 1.6 M1 2.15 2.175 0.062 2.20 0.085 0.086 M2 1.625 0.064 N 2.175 0.086 N1 2.4 0.094 T1 0.8 T2 0.475 R 1.2 S 0.5 0.087 LGA-16 (5x5x1.5mm) Land Grid Array Package 0.031 0.525 0.019 1.6 0.047 0.020 0.021 0.063 0.1 0.004 h 0.15 0.006 k 0.05 0.002 j 0.1 0.004 7887555A 10/12 Doc ID 15812 Rev 2 LPR530AL 6 Revision history Revision history Table 6. Document revision history Date Revision 04-Jun-2009 1 06-Jul-2009 2 Changes Initial release Small text changes to improve readability. Updated Table 4 Doc ID 15812 Rev 2 11/12 LPR530AL Please Read Carefully: Information in this document is provided solely in connection with ST products. STMicroelectronics NV and its subsidiaries (“ST”) reserve the right to make changes, corrections, modifications or improvements, to this document, and the products and services described herein at any time, without notice. All ST products are sold pursuant to ST’s terms and conditions of sale. Purchasers are solely responsible for the choice, selection and use of the ST products and services described herein, and ST assumes no liability whatsoever relating to the choice, selection or use of the ST products and services described herein. No license, express or implied, by estoppel or otherwise, to any intellectual property rights is granted under this document. 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