LISY300AL MEMS inertial sensor: single-axis ±300°/s analog output yaw rate gyroscope Features ■ 2.7 V to 3.6 V single supply operation ■ Low power consumption ■ Embedded power-down ■ ±300 °/s full scale ■ Absolute analog rate output ■ Integrated low-pass filters ■ Embedded self-test ■ High shock survivability ■ ECOPACK® RoHS and “Green” compliant (see Section 4) LGA-28 (7x7x1.5mm) Description The LISY300AL has a full scale of ±300 °/s and is capable of measuring rates with a -3 dB bandwidth up to 88 Hz. The LISY300AL is a low-power single-axis yaw rate sensor. It includes a sensing element and an IC interface able to provide the measured angular rate to the external world through an analog output voltage. The LISY300AL is available in a plastic land grid array (LGA) package and can operate within a temperature range from -40 °C to +85 °C. The sensing element, capable of detecting the yaw rate, is manufactured using a dedicated micromachining process developed by ST to produce inertial sensors and actuators on silicon wafers. The LISY300AL belongs to a family of products suitable for a variety of applications, including: – Gaming and virtual reality input devices – Motion control with MMI (man-machine interface) – Image stabilization for digital video and digital still cameras – GPS navigation systems – Appliances and robotics The IC interface is manufactured using a CMOS process that allows a high level of integration to design a dedicated circuit which is trimmed to better match the sensing element characteristics. Table 1. Device summary Order code Temperature range (°C) Package Packing LISY300AL -40 to +85 LGA-28 (7x7x1.5) Tray LISY300ALTR -40 to +85 LGA-28 (7x7x1.5) Tape and reel May 2008 Rev 1 1/13 www.st.com 13 Contents LISY300AL Contents 1 Block diagram and pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 1.1 2 3 Pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Mechanical and electrical specifications . . . . . . . . . . . . . . . . . . . . . . . . 5 2.1 Mechanical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 2.2 Electrical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 2.3 Absolute maximum ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 2.4 Terminology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 2.4.1 Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 2.4.2 Zero-rate level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 2.4.3 Self-test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Application hints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 3.1 Soldering information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 4 Package information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 5 Revision history . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 2/13 LISY300AL 1 Block diagram and pin description Block diagram and pin description Figure 1. +Ω Block diagram CHARGE AMPLIFIER Sens+ z ACTIVE LOW-PASS FILTER DEMODULATOR SWITCHED CAPACITOR LOW-PASS FILTER Sens- ANALOG OUTPUT ANALOG CONDITIONING Feedback+ TRANSIMPEDANCE AMPLIFIER FeedbackDrive- VOLTAGE GAIN AMPLIFIER PID control AUTOMATIC GAIN CONTROL PLL Drive+ REFERENCE TRIMMING CIRCUITS CLOCK PHASE GENERATOR The vibration of the structure is maintained by a drive circuitry in a feedback loop. The sensing signal is filtered and appears as an analog signal at the output. Pin description 28 NC VCONT FILTVDD Vdd Vdd z NC +Ω Vdd Pin connection 22 21 Reserved NC 1 Reserved GND GND Reserved LISY300AL NC Reserved (TOP VIEW) CACT Reserved ANALOG OUTPUT Reserved NC 7 NC Reserved Reserved 14 ST 8 PD (TOP VIEW) DIRECTION OF THE DETECTABLE ANGULAR RATE 15 NC NC Figure 2. NC 1.1 3/13 Block diagram and pin description Table 2. 4/13 LISY300AL Pin description Pin # Pin Name Function 1 NC 2 GND 0V supply 3 GND 0V supply 4 NC 5 CACT 6 ANALOG OUTPUT 7-9 NC Internally not connected 10 PD Power-down (logic 0: normal mode; logic 1: power-down mode) 11 ST Self-test (logic 0: normal mode; logic 1: self-test) 12-13 Reserved 14-15 NC 16-21 Reserved 22 NC 23 VCONT PLL filter connection pad #1 24 FILTVDD PLL filter connection pad #2 25 Vdd Power supply 26 Vdd Power supply 27 Vdd Power supply 28 NC Internally not connected Internally not connected Internally not connected Active filter capacitor Rate signal output voltage Leave unconnected Internally not connected Leave unconnected Internally not connected LISY300AL Mechanical and electrical specifications 2 Mechanical and electrical specifications 2.1 Mechanical characteristics Table 3. Mechanical characteristics @ Vdd = 3.3 V, T = 25 °C unless otherwise noted(1) Symbol Parameter FS Measurement range So Sensitivity SoDr Sensitivity change vs. temperature Voff Zero-rate level(3) OffDr NL Test condition Min. From -40 °C to +85 °C Zero-rate level change From -40 °C to +85 °C vs. temperature Non linearity(4) Best fit straight line (3)(5) CACT = 10 nF Typ.(2) Max. Unit ±300 °/s 3.3 mV/ °/s 4 % 1.65 V 5 °/s ±0.8 % FS 88 Hz BW -3dB bandwidth Rn Rate noise density 0.1 °/s / Hz Vt Self-test output voltage change(6) +300 mV 300 ms 4.5 kHz Sup Start-up time Fres Sensing element resonant frequency Top Operating temperature range Wh Product weight Settling to ±5 °/s -40 +85 160 °C mg 1. The product is factory calibrated at 3.3 V. The operational power supply range is specified in Table 4. 2. Typical specifications are not guaranteed 3. The product is capable of sensing angular rates extending from DC to the selected bandwidth 4. Guaranteed by design 5. User selectable by external capacitor CACT 6. “Self-test output voltage change” is defined as Vout(Vst = logic 1) - Vout(Vst = logic 0) 5/13 Mechanical and electrical specifications LISY300AL 2.2 Electrical characteristics Table 4. Electrical characteristics @ Vdd =3.3 V, T=25 °C unless otherwise noted(1) Symbol Parameter Min. Typ.(2) Max. Unit 2.7 3.3 3.6 V Vdd Supply voltage Idd Supply current PD pin connected to GND 4.8 mA Supply current in power-down mode PD pin connected to Vdd 1 µA IddPdn VST VPD 0.2*Vdd Logic 1 level 0.8*Vdd Vdd Logic 0 level 0 0.2*Vdd Logic 1 level 0.8*Vdd Vdd Power-down input OVS Output voltage swing(3) Top 0 V Active low-pass filter capacitor CLOAD Logic 0 level Self-test input CACT V 10 0.4 Vdd-0.4 V 0.4 10 nF Operating temperature range -40 +85 °C Capacitive load 2. Typical specifications are not guaranteed 3. Referred to ANALOG OUTPUT pin #6 Iout = ±100µA nF drive(3) 1. The product is factory calibrated at 3.3 V 6/13 Test condition LISY300AL 2.3 Mechanical and electrical specifications Absolute maximum ratings Stresses above those listed as “Absolute maximum ratings” may cause permanent damage to the device. This is a stress rating only and functional operation of the device under these conditions is not implied. Exposure to maximum rating conditions for extended periods may affect device reliability. Table 5. Absolute maximum ratings Symbol Ratings Vdd Supply voltage Vin Input voltage on any control pin (PD, ST) Maximum value Unit -0.3 to 6 V -0.3 to Vdd +0.3 V 3000 g for 0.5 ms AUNP Acceleration (not powered) TSTG Storage temperature range ESD Electrostatic discharge protection 10000 g for 0.1 ms -40 to +125 °C 2 (HBM) kV This is a mechanical shock sensitive device, improper handling can cause permanent damage to the part This is an ESD sensitive device, improper handling can cause permanent damage to the part 7/13 Mechanical and electrical specifications 2.4 Terminology 2.4.1 Sensitivity LISY300AL A yaw rate gyroscope is a Z-axis rate device that produces a positive-going output voltage for counterclockwise rotation around the axis normal to the package top. Sensitivity describes the gain of the sensor and can be determined by applying a defined angular velocity to it. This value changes very little over temperature and also very little over time. 2.4.2 Zero-rate level Zero-rate level describes the actual output signal if there is no angular rate present. For a 3.3 V powered sensor the absolute zero-rate output is ideally 1.65 V. Zero-rate level of precise MEMS sensors is, to some extent, a result of stress to the sensor and therefore zero-rate level can slightly change after mounting the sensor onto a printed circuit board or after exposing it to extensive mechanical stress. This value changes very little over temperature and also very little over time. 2.4.3 Self-test Self-test allows to test the mechanical and electric part of the sensor, allowing the seismic mass to be moved by means of an electrostatic test-force. The Self-test function is off when the ST pin is connected to GND. When the ST pin is tied to Vdd, an actuation force is applied to the sensor, emulating a definite Coriolis force. In this case the sensor output will exhibit a voltage change in its DC level which is also depending on the supply voltage. When ST is active, the device output level is given by the algebraic sum of the signals produced by the velocity acting on the sensor and by the electrostatic test-force. If the output signals change within the amplitude specified in Table 3, then the mechanical element is working properly and the parameters of the interface chip are within the defined specification. 8/13 LISY300AL Application hints Figure 3. LISY300AL electrical connections and external components values +Ω C2 z 9nF GND GND 10 µF VDD 450nF 9.5kOhm 100 nF C1 ROPT VoutYAW 2 20 3 GND 4 CACT 5 0.4nF COPT GND 28 27 26 25 24 23 22 21 CLOAD LISY300AL (top view) R1 19 18 17 6 16 7 15 8 9 10 11 12 13 14 GND ST Optional Low-pass filter 1 PD 3 Application hints Digital signals Power supply decoupling capacitors (100 nF ceramic or polyester + 10 µF Aluminum) should be placed as near as possible to the device (common design practice). The LISY300AL allows to band limit the output rate response through the use of two firstorder on-chip filters: a switched capacitor low-pass filter, with 400Hz -3dB bandwidth, in combination with an active low-pass filter. The active filter -3 dB nominal frequency (ftA) is set through an internal resistor RACT and the external capacitor CACT (added between CACT pin #5 and ANALOG OUTPUT pin #6), by the formula: 1 f tA = -------------------------------------------------2π ⋅ R ACT ⋅ C ACT The value of the internal resistor RACT is 180 kΩ, while the external capacitor CACT is used to select the signal bandwidth. The sensed frequency range spans from DC up to the selected bandwidth. In order to further reduce high-frequency noise, the LISY300AL supports an additional optional low-pass filter on ANALOG OUTPUT pin #6 (Figure 3). The cutoff frequency (ftP) is given by the formula: 1 f t P = --------------------------------------------------2π ⋅ R OPT ⋅ C OPT 9/13 Application hints LISY300AL The LISY300AL IC includes a PLL (phase locked loop) circuit to synchronize driving and sensing interfaces. Capacitors and resistors must be added at the FILTVDD and VCONT pads (as shown in Figure 3) to implement a second-order low-pass filter. Table 6 summarizes the PLL low-pass filter components’ values. Table 6. 3.1 PLL low-pass filter components’ values Component Value C1 450 nF ± 10% C2 9 nF ± 10% R1 9.5 kΩ ± 10% Soldering information The LGA package is compliant with the ECOPACK®, RoHS and “Green” standard. It is qualified for soldering heat resistance according to JEDEC J-STD-020C. Leave “Pin 1 Indicator” unconnected during soldering. Land pattern and soldering recommendations are available at www.st.com/mems. 10/13 LISY300AL 4 Package information Package information In order to meet environmental requirements, ST offers these devices in ECOPACK® packages. These packages have a lead-free second level interconnect. The category of second level interconnect is marked on the inner box label, in compliance with JEDEC Standard JESD97. The maximum ratings related to soldering conditions are also marked on the inner box label. ECOPACK® is an ST trademark. ECOPACK® specifications are available at: www.st.com. Figure 4. LGA-28: mechanical data and package dimensions mm inch OUTLINE AND MECHANICAL DATA DIM. MIN. TYP. A MAX. MIN. TYP. 1.600 A2 MAX. 0.0630 1.300 0.0512 A3 0.170 0.200 D 6.900 7.000 7.100 0.2717 0.2756 0.2795 DIM. 0.230 0.0067 0.0079 0.0091 mm MIN. E 6.900 7.000 A F A2 0.350 G 0.800 TYP. inch MAX. MIN. TYP. MAX. 7.100 0.2717 0.2756 0.2795 1.600 1.300 0.0138 0.0630 0.0512 A3 0.170 0.200 0.230 0.0067 0.0079 0.0091 D 6.900 7.000 7.100 0.2717 0.2756 0.2795 L 0.450E 6.900 7.000 0.0177 7.100 0.2717 0.2756 0.2795 L1 0.100F 0.350 G 0.800 M 0.800 OUTLINE AND MECHANICAL DATA 0.0315 0.0039 0.0138 0.0315 0.0315 L 0.450 N 1.600 L1 0.100 O 4.800 M 0.800 N 1.600 P 2.400 O 4.800 K 0.050P 2.400 K 0.050 0.0177 0.0630 0.1890 0.0039 0.0315 0.0630 0.0945 0.0020 0.1890 0.0945 LGA28 (7x7x1.5mm) Land Grid Array Package LGA28 (7x7x1.5mm) Land Grid Array Package 0.0020 8003444 A 8003444 A 11/13 Revision history 5 LISY300AL Revision history Table 7. 12/13 Document revision history Date Revision 29-May-08 1 Changes Initial release LISY300AL Please Read Carefully: Information in this document is provided solely in connection with ST products. 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