MEMS Gauge Pressure Sensor
2SMPP
MEMS Gauge Pressure Sensor Featuring
Small Size and Low Power Consumption
• Ultra-miniature 6.1 × 4.7 × 8.2 mm (L × W × H).
• Piezo Resistive element provides electrical characteristics
that are superior to capacitive type pressure sensors.
• 0 to 37 kPa (2SMPP-02) or -50 to 50 kPa (2SMPP-03)
pressure range.
• Low Power consumption of 0.2 mW
• Low Temperature Influence
• RoHS Compliant
Ordering Information
Standard Models with Surface mount package
Classification
Bottom Port Type
Pressure Range
0 to 37 kPa
Structure
SOP
Packaging
Plastic sleeve
-50 to 50 kPa
Model
2SMPP-02
2SMPP-03
Terminal Arrangement
Application Examples
Icc
Vout (+)
• Medical equipment
• Home appliance
• Air movement control
• Level indicators
Non Conneted
Nsub
(Connect to ICC)
GND
Vout (−)
• Leak detection
• Pressure controller
MEMS Gauge Pressure Sensor
2SMPP
35
Specifications
■ Ratings
Item
2SMPP-02
2SMPP-03
Pressure type
Gauge Pressure
Sensing type
Piezo Resistive
Applicable gases
Ratings
Air (Non-corrosive, dust free)
Pressure range
0 to 37 kPa
-50 to 50 kPa
Withstand pressure
Max. 53 kPa
-80 to 120 kPa
100 μADC (130 μADC absolute max.)
100 μADC (200 μADC absolute max.)
0 to 50°C (with no icing or condensation)
-10 to 100°C (with no icing or condensation)
Supply current
Ambient operating temperature
Ambient operating humidity
Ambient storage temperature
15 to 90%RH (with no icing or condensation) 10 to 95%RH (with no icing or condensation)
−30 to 85°C (with no icing or condensation)
Ambient storage humidity
−40 to 120°C (with no icing or condensation)
10 to 95%RH (with no icing or condensation)
Note: 1. The above values are initial values measured at ambient temperature condition of 23°C.
2. Please avoid caustic gases.
3. Standard 2SMPP-02 product is not calibrated for negative pressures.
■ Electrical Characteristics
Item
2SMPP-02
Pressure type
2SMPP-03
Positive
Operating pressure range
0 to 37 kPa
Negative
0 to 50 kPa
-50 to 0 kPa
20 ± 2 kΩ
Bridge resistance
−2.5 ± 4.0 mV
Offset voltage (See note 2.)
Span voltage (See note 2.)
31.0 ± 3.1 mV (at 37 kPa)
42.0 ± 5.5 mV (at 50 kPa)
-43.0 ±5.5 mV (at -50 kPa)
Non-Linearity (See note 2.)
0 ± 0.8%FS (0 to 37 kPa)
0.8 ± 0.5%FS (at 50 kPa)
0.2 ± 0.5%FS (at -50 kPa)
Hysteresis (See note 2.)
0 ± 0.5%FS (0 to 37 kPa)
Temperature influence of Span
Temperature influence of Offset
0 ± 0.2%FS (-50 to 50 kPa)
0.5 ± 1.0%FS (at 0°C)
1.0 ± 2.0%FS (at 0°C)
0.8 ± 2.0%FS (at 0°C)
0.3 ± 1.0%FS (at 50°C)
-0.1 ± 2.0%FS (at 50°C)
0.1 ± 2.0%FS (at 50°C)
---
1.0 ± 3.0%FS (at 85°C)
1.2 ± 3.0%FS (at 85°C)
0 ± 3.0%FS (0 to 25°C)
-1.0 ± 3.0%FS (at 0°C)
0 ± 3.0%FS (25 to 50°C)
1.0 ± 3.0%FS (at 50°C)
---
2.0 ± 5.0%FS (at 85°C)
Note: 1. The above values are initial values measured at ambient temperature condition of 23°C.
2. Not including temperature influence.
3. The above values are operated at 100 μADC
■ Environment Characteristics
Item
2SMPP-02
Vibration resistance
Shock resistance
2SMPP-03
Destruction
10 Hz to 500 Hz 10 G
Malfunction
10 Hz to 500 Hz 10 G
Destruction
15 G
Malfunction
Life Expectancy
15 G
300,000 Operations min. (0 to 39 kPa)
ESD
Weight
0.17 g
Package Material
36
100,000 Operations min. (0 to 75 kPa)
1000 V (Human body model)
MEMS Gauge Pressure Sensor
PPS (Polyphenylenesulfide)
2SMPP
Engineering Data (for reference)
■ Output Characteristics - 2SMPP-02
Rated Pressure vs. Output Voltage
40
35
Output Voltage [mV]
30
25
20
15
10
5
0
−5
0
Note: 1.
2.
3.
4.
10
20
30
40
Rated Pressure [kPa]
50
Ambient temperature condition: 25°C
Drive current: 100 μA
These output voltage characteristics are measured with tester without a mounting board.
The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual
equipment before use.
Temperature influence of Span voltage
Temperature influence of Offset voltage
2.0
Temp. Influence of Offset Voltage [%FS]
Temp. Influence of Span Voltage [%FS]
2.0
1.5
1.0
0.5
0.0
−0.5
−1.0
−10
Note: 1.
2.
3.
4.
0
10
20
30
40
Temperature [°C]
50
60
1.5
1.0
0.5
0.0
−0.5
−1.0
−1.5
−2.0
−10
0
10
20
30
40
Temperature [°C]
50
60
Measured points are 0°C and 25°C, 50°C
Drive current: 100 μA
These output voltage characteristics are measured with tester without a mounting board.
The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual
equipment before use.
MEMS Gauge Pressure Sensor
2SMPP
37
Pressure cycle range (0 to 40 kPa)
1
Span voltage range [%FS]
Offset voltage range [%FS]
1
0.5
0
−0.5
−1
Note: 1.
2.
3.
4.
0
100000
200000
Pressure cycle
300000
0.5
0
−0.5
−1
0
100000
200000
Pressure cycle
300000
Tested temperature condition: 25°C
Number of pressure cycle time: 3 x 105
Rated cycle pressure: 0 to 40 kPa
These output voltage characteristics are measured with tester without a mounting board.
■ Output Characteristics - 2SMPP-03
Rated Pressure vs. Output Voltage
40
30
Output Voltage [mV]
20
10
0
-10
-20
-30
-40
-50
-50 -40 -30 -20 -10 0 10 20 30 40 50
Rated Pressure [kPa]
Note: 1.
2.
3.
4.
38
Ambient temperature condition: 25°C
Drive current: 100 μA
These output voltage characteristics are measured with tester without a mounting board.
The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual
equipment before use.
MEMS Gauge Pressure Sensor
2SMPP
Temperature influence of Offset voltage (at 0 kPa)
3.0
2.0
Temp. Influence of Offset Voltage [%FS]
Temp. Influence of Positive Span Voltage [%FS]
Temperature influence of Span voltage (at 50 kPA)
1.5
1.0
0.5
0.0
-0.5
-1.0
-10
Note: 1.
2.
3.
4.
0
10
20 30 40 50 60
Temperature [°C]
2.5
2.0
1.5
1.0
0.5
0.0
-0.5
-1.0
-1.5
-2.0
-10
70 80 90
0
10 20 30 40 50 60 70
Temperature [°C]
80 90
Measured points are 0°C, 25°C, 50°C and 85°C at 0 to 50 kPa.
Drive current: 100 μA
These output voltage characteristics are measured with tester without a mounting board.
The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual
equipment before use.
Pressure cycle range (0 to 75 kPa)
1
Span voltage range [%FS]
Offset voltage range [%FS]
1
0.5
0
-0.5
-1
Note: 1.
2.
3.
4.
0
25000
50000
75000
Pressure cycle
100000
0.5
0
-0.5
-1
0
25000
50000
75000
Pressure cycle
100000
Tested temperature condition: 25°C
Number of pressure cycle time: 1 x 105
Rated cycle pressure: 0 to 75 kPa
These output voltage characteristics are measured with tester without a mounting board.
MEMS Gauge Pressure Sensor
2SMPP
39
Example of application circuit for MEMS Pressure Sensor
VDD
Constant current circuit unit
Amplifier circuit unit
+
−
Pressure
Sensor
+
−
−
+
Vout
−
+
1. The pressure sensor is designed to convert a voltage by means of constant current drive.
2. Please amplify the output voltage of the pressure sensor by using the amplifying circuit if necessary.
40
MEMS Gauge Pressure Sensor
2SMPP
Dimensions
Note: All units are in millimeters unless otherwise indicated.
2SMPP-02
2SMPP-03
4.75
4.00
3
0.25±0.05
#1
φ3.80
φ0.62
6.15 5.40
9.85
A
3.20
4-R0.50
4
6
1.27
0.40
1.27 x 2 = 2.54
1.00
2.00
The tolerance is ±0.3mm unless otherwise specified.
1.50
2.80
1.00
4.75
(1.10)
φ1.80
φ2.60
Top view
1 Vout (+)
6 Icc
2 NC
5 N-sub
3 GND
4 Vout (-)
Marking
0.75
1.125
5.45
0.10
P P 0 2
0.90
*
4.05
1.125
0.45
5 6 7 8
(0.90)
1.65
1.65
3.30
(1.075)
LOT NUMBER
*part will be marked “PP03” for 2SMPP-03
MEMS Gauge Pressure Sensor
2SMPP
41
Precautions
■ Precautions for Correct Use
Handling
Mounting
• Only air can be used as pressure media on the products directly. It
is prohibited to use pressure media including corrosive gases (e.g.
organic solvents gases, sulfur dioxide and hydrogen sulfide gases),
fluid and any other foreign materials.
• The products are not water proof. Please keep dry in use.
• Don't use the products under dew-condensing conditions. Frozen
fluid on sensor chips may also cause fluctuation of sensor output
and other troubles.
• Don't put foreign materials (e.g. a wire or pin) into connecting tube.
It may cause breakage of pressure sensor chips or fluctuation of
sensor output caused by clogging the tube.
• Use the products within rated pressure. Usage at pressure out of
the range may cause breakage.
• Don't use under high-frequency vibration including ultrasonic wave.
• The products may be broken by static electricity. Charged materials
(e.g. a workbench and a floor) and workers must provide measures
against static electricity, including ground connection.
• Overpowering terminals may deform them and detract their solderability. Don't drop or handle the products roughly.
• Don't use the products under humid or dusty condition.
• Terminals connection of pressure sensors must be handled as
directed by a connection diagram.
• Use lands on the printed-circuit boards to which the sensor can be
securely fixed.
• Fix pin No.2 on the printed-circuit boards, not fixed causes fluctuation of sensor output signals.
Environmental Conditions for Transport and Storage
• It is prohibited to keep the products with corrosive gases (e.g.
organic solvents gases, sulfur dioxide and hydrogen sulfide gases).
• The products are not water proof. Please keep dry during storage.
• An anti-static treatment has been applied to the sleeves. Please
note the following points.
Soldering
• Due to its small size, the thermal capacity of the pressure sensor is
low. Therefore, take steps to minimize the effects of external heat.
• Dip soldering bath: Max.260°C, within 10 sec.
• Soldering iron: Max. 260°C, within 10 sec.
• Do not heat the case of sensor package, heat only terminal.
• Use a non-corrosive resin type of flux. Since the pressure sensor
chip is exposed to the atmosphere, do not allow flux to enter inside.
Cleaning
• Since the pressure sensor chip is exposed to atmosphere, do not
allow cleaning fluid to enter inside.
• Avoid ultrasonic cleaning since this may cause breaks or disconnections in the wiring.
Coating
• Do not coat the pressure sensor when it is mounted to the print circuit board.
• Do not wash the print circuit board after the pressure sensor is
mounted using detergent containing silicone. Otherwise, the detergent may remain on the surface of the pressure sensor.
1. Getting wet may remove an anti-static treatment and eliminate its effect.
2. The sleeves may feel sticky under hot and humid condition
due to the nature of the anti-static treatment.
3. Anti-static has aging degradation. It is prohibited to keep the
sleeves for more than six months. The sleeves are also nonreusable.
• Don't keep the products under humid or dusty condition.
■ Definitions
1. Offset voltage is defined as the ouput voltage at 0 kPa rated pressure
2. Positive span voltage is defined as the algebraic difference between the output voltage at 50 kPa rated pressure and and the output voltage at
0 kPa rated pressure. (37 kPa and 0 kPa for 2SMPP-02)
3. Negative span voltage is defined as the algebraic difference between the output voltage at -50 kPa rated pressure and the output voltage at 0
kPa rated pressure. (Not applicable for 2SMPP-02)
4. Hysteresis is defined as follows; {The maximum value of difference at the same pressure}/span voltage x 100 %FS
5. Temperature influence of span voltage is defined as follows;
• {Span voltage at 0°C - span voltage at 25°C}/span voltage at 25°C x 100%FS
• {Span voltage at 50°C - span voltage at 25°C}/span voltage at 25°C x 100%FS
• {Span voltage at 85°C - span voltage at 25°C}/span voltage at 25°C x 100%FS - - - does not apply to 2SMPP-02
6. Temperature influence of offset voltage is defined as follows
• {Offset voltage at 0°C - offset voltage at 25°C}/span voltage at 25°C x 100%FS
• {Offset voltage at 50°C - offset voltage at 25°C}/span voltage at 25°C x 100%FS
• {Offset voltage at 85°C - offset voltage at 25°C}/span voltage at 25°C x 100%FS - - - does not apply to 2SMPP-02
42
MEMS Gauge Pressure Sensor
2SMPP
MEMO
MEMS Gauge Pressure Sensor
2SMPP
All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which
can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.
OMRON ON-LINE
OMRON ELECTRONIC
COMPONENTS LLC
Global - http://www.omron.com
USA - http://www.components.omron.com
55 E. Commerce Drive, Suite B
Schaumburg, IL 60173
847-882-2288
Cat. No. X305-E-1b
11/12
Specifications subject to change without notice
MEMS Gauge Pressure Sensor
2SMPP
Printed in USA