FBO Series Mass flow sensors for gases FEATURES · Ranges 0...±30 to 0...±1000 or -600...1000 sccm1 · Bidirectional sensing · Actual mass flow sensing · Sensortechnics PRO services MEDIA COMPATIBILITY To be used with dry gases only The FBO series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS ELECTRICAL CONNECTION Maximum ratings Supply voltage2 Power consumption 8 to 15 V typ. 10 ±0.01 V max. 50 mW typ. 30 mW Temperature limits Operating Storage -25 to 85°C -40 to 90°C Mechanical shock 100 g (5 drops, 6 axes) P1 P2 1 2 3 4 5 6 Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage E / 11721 / A 1/6 www.sensortechnics.com FBO Series Mass flow sensors for gases FLOW SENSOR CHARACTERISTICS3 (VS = 10 ±0.01 V, TA = 25°C) Output voltage @ trim point Part no. Flow range (full scale) Max. flow change4 FBOM200DB ±200 sccm 5.0 l/sec FBOM030DB ±30 sccm 5.0 l/sec FBOL001DB ±1000 sccm 5.0 l/sec 50 mV @ 650 sccm FBOL001DBX -600...1000 sccm 5.0 l/sec 50 mV @ 650 sccm 30 mV @ 100 sccm 11.8 mV @ 25 sccm PERFORMANCE CHARACTERISTICS (VS = 10 ±0.01 V, TA = 25°C) Characteristics Zero offset Repeatability and hysteresis (combined) Offset Temperature effects Span Min. Typ. -1.0 0 FBOL001DB all others -25 to 85 °C5 -25 to 25 °C 25 to 85 °C Sensor resistance (Pin 2 - Pin 1, Pin 6 - Pin 1) Sensor current (Pin 2 - Pin 1, Pin 6 - Pin 1) Response time Common mode pressure Max. Unit 1.0 mV ±1.0 ±0.35 % reading ±0.20 mV FBOM200DB 2.5 FBOM030DB 5.0 FBOL001DB 5.0 FBOL001DBX 5.0 FBOM200DB -2.5 FBOM030DB -5.0 FBOL001DB -5.0 FBOL001DBX -5.0 5 1.0 % reading kOhm 0.6 mA 3.0 ms 25 p si Notes: 3 A 5 micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. 5 Shift is relative to 25 °C. E / 11721 / A 2/6 www.sensortechnics.com FBO Series Mass flow sensors for gases FLOW SPECIFICATIONS (VS = 10 ±0.01 V, TA = 25°C) FBOM200DB Press. Flow (mbar) (sccm)6 FBOM030DB FBOL001DB Nom. Tol. Press. Flow Nom. Tol. Press. Flow (mV) (± mV) (µbar) (sccm)6 (mV) (± mV) (mbar) (sccm)6 FBOL001DBX Nom. Tol. Press. Flow (mV) (± mV) (mbar) (sccm)6 Nom. Tol. (mV) (± mV) 0.49 200 44.50 4.25 53 30 14.0 2.5 3.4 1000 55.50 3.70 3.4 1000 55.50 7.0 0.35 150 38.75 3.00 36 20 9.5 1.5 2.4 800 52.90 3.50 2.4 800 52.90 6.0 0.21 100 30.00 1.50 17 10 5.0 1.5 1.8 650 50.00 2.50 1.8 650 50.00 5.0 0.09 50 16.50 2.50 9.8 5 2.5 1.0 0.83 400 42.50 3.00 0.83 400 42.50 6.0 0.00 0 0.00 1.00 7.4 4 2.0 1.0 0.31 200 29.20 3.20 0.31 200 29.20 5.0 0.00 50 16.50 4.50 6.2 3 1.5 1.0 0 0 0.00 1.00 0 0 0.00 1.5 -0.21 -100 -30.00 5.00 5 2 1.0 1.0 -0.31 -200 -28.90 15.00 -0.31 -200 -28.90 15.0 -0.35 -150 -38.80 7.65 2.5 1 0.5 0.8 -0.83 -400 -41.20 26.00 -0.83 -400 -41.20 26.0 -0.49 -200 -44.50 9.75 0 0 0.0 0.6 -1.6 -600 -48.20 29.50 -1.6 -600 -48.20 30.0 -9.8 -5 -2.5 2.0 -2.4 -800 -52.20 32.50 -53 -30 -14.0 5.0 -3.4 -1000 -55.00 36.00 Note: 6 Devices are calibrated in mass flow. Tolerance values apply to calibration type only. OUTPUT VS. FLOW CURVES FBOM200DB FBOM030DB FBOL001DB FBOL001DBX E / 11721 / A 3/6 www.sensortechnics.com FBO Series Mass flow sensors for gases HEATER CONTROL CIRCUIT SENSING BRIDGE SUPPLY CIRCUIT Note: These circuits are required for operation per specifications. Circuits are not on board the sensor. DIFFERENTIAL INSTRUMENTATION AMPLIFIER CIRCUIT (optional) 2 R + R1 R4 (V2 − V1 ) + VOffset VO = 2 R1 R3 R6 where VOffset = VS R6 + R5 E / 11721 / A 4/6 www.sensortechnics.com FBO Series Mass flow sensors for gases OUTLINE DRAWING 7.60 (0.30) 6.3 (0.25) 2.8 (0.11) 1.40 (0.055) 2.9 (0.114) 1.8 (0.07) 5.1 (0.20) 54.4 (2.14) 8.3 (0.325) 8.4 (0.33) P1 P2 31.5 (1.24) 23.6 (0.93) 2.8 (0.11) 1.0 (0.04) 1 2 3 4 5 6 0.6 (0.025) 1.52 (0.06) 2.5 (0.10) 23.9 (0.94) 30.5 (1.20) 5.1 (0.20) 4.1 (0.16) 7.4 (0.29) 12.7 (0.50) 15.5 (0.61) third angle projection mass: approx. 10.8 g dimensions in mm (inches) Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output (pin 6 > pin 2). Negative flow direction is defined conversely and results in negative output (pin 6 < pin 2). E / 11721 / A 5/6 www.sensortechnics.com FBO Series Mass flow sensors for gases GAS CORRECTION FACTORS7 Gas type Correction factor (approx.) 0.58 0.78,9 0.95 1.0 1.0 1.0 1.0 1.0 1.1 1.1 1.35 1.35 1.35 Helium (He) Hydrogen (H2) Argon (Ar) Nitrogen (N2) Oxygen (O2) Ai r Nitric oxide (NO) Carbon monoxide (CO) Methane (CH4) Ammonia (NH3) Nitrous oxide (N2O) Nitrogen dioxide (NO2) Carbon dioxide (CO2) Notes: 7 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 8 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 9 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. ORDERING INFORMATION - AVAILABLE LISTINGS Note: Preferred listings are highlighted in grey Dry gas Hydrogen gas9 ±30 sccm FBOM030DB --- ±200 sccm FBOM200DB FBOM200HB ±1000 sccm FBOL001DB FBOL001HB FBOL001DBX --- Flow range -600...1000 sccm Sensortechnics PRO services: · Extended guarantee period of 2 years · Improved performance characteristics · Custom product modifications and adaptations even for small quantities · Advanced logistics models for supply inventory and short delivery times · Technical support through application engineers on the phone or at your site · Fastest possible technical response for design and QA engineers ... plus other services on request Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. E / 11721 / A 6/6 www.sensortechnics.com