Mass flow controllers & accessories t h e c a t a l o g u e D 1 0 -0 3 V0 2 www.qualiflow.com MFCs & MFMs series Smart solutions to meet your needs DeviceNet Analog - Digital - ModBus communication MFC Calibration & Retrofit support center Gas systems solutions & manufacturing - Gas accessories Special MFC configuration upon request (metal design...) AF C 5 0 / A F M 5 5 The traditional analog Qualiflow Therm AFC 50 and AFM 55 with elastomeric seals and magnetic valve : - Unique fast and reliable horizontal magnetic valve - Low pressure drop option for TEOS SDC, TiCl4, etc… Using Large sensor diameter gives very low pressure drop and defeats contamination and clogging - Perfect flow splitting through special bypass design, giving optimal linearity and accuracy 10sccm 25slm AF C 5 0 D / A F M 5 5 D The highest performances of digital P.C.B. combined with elastomeric seals on the Qualiflow Therm AFC 50 D and AFM 55 D : - Full potential of digital technology - Low pressure drop option for TEOS SDC, TiCl4, etc.. - 100% compatible with analog AFC50 10sccm 25slm AF C 2 0 2 / A F M 3 0 2 For high flow from 30 slm to 250 slm, the traditional analog Qualiflow Therm AFC 202 and AFM 302 with elastomeric seals and magnetic valve : - Unique fast and reliable horizontal magnetic valve - Special pressure compensated stainless steel valve for ultra fast flow control - No particle generation or entrapment 30sccm 250slm AF C 2 0 2 D / A F M 3 0 2 D For high flow from 30 slm up to 250 slm, the highest performances of digital P.C.B. combined with elastomeric seals on the Qualiflow Therm AFC 202D and AFM 302D : - Full potential of digital technology - Special pressure compensated stainless steel valve for ultra fast flow control 30slm 250slm AF C 2 6 0 - 2 6 1 / A F M 3 6 0 - 3 6 1 The traditional analog Qualiflow Therm AFC 260 & 261 and AFM 360 & 361 with elastomeric seals and reliable thermal valve : -�� Compatible with other MFC -� Economic design, simple construction -� Possibility to regulate with external readout 10sccm 5slm 10slm 20slm AF M 1 0 & 1 1 A small flow meter designed to replace rotameter whenever an electrical signal of the flow measurement is required : - Low cost design, simple construction - Small footprint - Accuracy up to ±2% F.S. 2slm 60slm 100slm 200slm 395, rue Louis Lépine - BP7 - 34935 Montpellier - Cedex 9 - France - [email protected] - tel# (0)4 67 99 47 47 fax# (0)4 67 99 47 48