MOTOROLA XMMAS250G

Order this document
by XMMAS250G/D
SEMICONDUCTOR TECHNICAL DATA
±250g Amplified
MICROMACHINED
ACCELEROMETER
± 250g AMPLIFIED
The MMAS250G family of silicon capacitive, micro–machined accelerometers features integral signal amplification, signal conditioning, a 4–pole
low–pass filter and temperature compensation. Zero–G offset, full scale span
and filter roll–off are factory set and require no external passives. A calibrated
self–test feature mechanically displaces the seismic mass with the application
of a digital self–test signal. The device is offered in either of two plastic
packages, thereby accommodating various axis orientation requirements.
The MMAS250G incorporates a single polysilicon seismic mass, suspended
between two fixed polysilicon plates (G–cell). The forces of acceleration move
the seismic mass, thereby resulting in a change in capacitance. The G–cell is
sealed at the die level, creating a particle–free environment. The G–cell
features built–in damping and over–range stops to protect it from mechanical
shock.
MMAS250G accelerometers are ideally suited for automotive crash detection
and recording, vibration monitoring, automotive suspension control, appliance
control systems, etc.
DIP PACKAGE
CASE 648C–03
SIP PACKAGE
CASE 447–01
Features
• Full Scale Measurement ± 250g
PIN NUMBER
• Calibrated, True Self–Test
1
N/C (1)
9
N/C (1)
• Standard 16–Pin Plastic DIP
2
N/C (1)
10
N/C (1)
• Integral Signal Conditioning and 4–Pole Filter
3
N/C (1)
11
N/C (1)
• Linear Output
4
Self–Test
12
N/C (1)
• Robust, High Shock Survivability
5
Output
13
N/C (1)
6
Bypass (2)
14
N/C (1)
7
GND
15
N/C (1)
8
VS (2)
16
N/C (1)
SIMPLIFIED BLOCK DIAGRAM
+
4
NOTES:
1. Internal connections. All N/C must
remain floating, except DIP’s pin
11 which must be tied to pin 8.
2. Bypass to ground with 0.1 µF ceramic
capacitor to improve noise performance.
+
SELF–TEST
8
VS
+
g
A
G–CELL
6
LOW–PASS FILTER
TEMPERATURE
COMPENSATION
7
5
BYPASS
OUTPUT
GND
This document contains information on a product under development. Motorola reserves the right to change or discontinue this product without notice.
Sensor
Motorola
Motorola, Inc.
1995 Device Data
1
MAXIMUM RATINGS
Symbol
Value
Unit
Acceleration (biased each axis)
Rating
G
± 500
g
Acceleration (unbiased each axis)
G
± 2000
g
VSmax
– 0.3 to +7.0
Vdc
Tstg
– 40 to +125
°C
TA
– 40 to +85
°C
Supply Voltage
Storage Temperature
Operating Temperature(6)
OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted)
Symbol
Min
Typ
Max
Unit
Acceleration Range
G
± 250
—
—
g
Output Drive Capability
—
– 0.2
—
0.2
mA
Supply Voltage
VS
4.75
5.0
5.25
V
Supply Current
IO
—
5.0
—
mA
Full Scale Output Range
VFSO
0.3
—
4.7
V
Sensitivity (over temperature range) (1) (2) (3)
Characteristic
∆V/∆G
5.8
6.5
7.2
mV/g
Zero Acceleration Output (TA = 25°C) (4)
Voff
2.3
2.5
2.7
V
Zero Acceleration Output (over temperature range) (3) (4)
Voff
2.1
2.5
2.9
V
Linearity
—
—
0.5
—
%FSO
Transverse Sensitivity
—
—
1.0
3.0
%FSO
Frequency Bandwidth
—
—
700
—
Hz
Noise
—
—
20
50
mVpk
Self–Test Output Equivalent (5)
GS
44
50
56
g
Self–Test Triggering Voltage
VTH
1.6
—
3.4
V
—
—
10
—
µA
Self–Test Input Current
NOTES:
1. The output voltage increases from the Zero Acceleration Output for positive acceleration and decreases for negative acceleration. The
typical sensitivity is 6.5 mV/g. For example, with VS = 5.0 V, a + 100g input will result in a 3.15 V output. (Voutput = 2.5 + 0.0065 x 100) and
a – 100g input will result in a 1.85 V output.
2. Sensitivity is a ratiometric parameter: ∆V/∆G(Vs) = ∆V/∆G(5 V) x (VS / 5 V).
3. The compensated temperature range is – 40 to +85°C.
4. Zero Acceleration Output is a ratiometric parameter: Voff(Vs) = Voff(5 V) x (VS / 5 V).
5. Equivalent output in response to a Logic Level One on the self–test pin.
6. Additional temperature range available. Consult factory.
ORDERING INFORMATION
Device
Temperature Range
Case No.
Package
XMMAS250G10D
–40 to +85°C
Case 648C–03
Plastic DIP
XMMAS250G10S
–40 to +85°C
Case 447–01
Plastic SIP
2
Motorola Sensor Device Data
POSITIVE ACCELERATION SENSING DIRECTION
16
9
1
8
1
8
*
DIP PACKAGE
SIP PACKAGE
* When positioned as shown, gravity will result in a positive 1g output
.499
.350
.250
.050
.000
.050
.150
.250
.350
.499
SIP PACKAGE DRILLING PATTERN
.240
7 x ∅ .040
+ .004
– .000
.000
+ .004
2 x ∅ .096
– .000
.240
+ .005
2 x ∅ .058
– .000
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit,
and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in different
applications. All operating parameters, including “Typicals” must be validated for each customer application by customer’s technical experts. Motorola does
not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in
systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of
the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such
unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless
against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death
associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part.
Motorola and
are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
Motorola Sensor Device Data
3
PACKAGE DIMENSIONS
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION L TO CENTER OF LEADS WHEN
FORMED PARALLEL.
4. DIMENSION B DOES NOT INCLUDE MOLD FLASH.
5. INTERNAL LEAD CONNECTION BETWEEN 4 AND
5, 12 AND 13.
–A–
16
9
1
8
–B–
L
DIM
A
B
C
D
E
F
G
J
K
L
M
N
NOTE 5
C
–T–
M
N
SEATING
PLANE
K
E
F
J
G
D 16 PL
0.13 (0.005)
16 PL
0.13 (0.005)
T A
M
M
T B
INCHES
MIN
MAX
0.740
0.840
0.240
0.260
0.145
0.185
0.015
0.021
0.050 BSC
0.040
0.70
0.100 BSC
0.008
0.015
0.115
0.135
0.300 BSC
0_
10_
0.015
0.040
MILLIMETERS
MIN
MAX
18.80
21.34
6.10
6.60
3.69
4.69
0.38
0.53
1.27 BSC
1.02
1.78
2.54 BSC
0.20
0.38
2.92
3.43
7.62 BSC
0_
10_
0.39
1.01
S
S
CASE 648C–03
ISSUE C
DIP PACKAGE
E
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
N B
DIM
A
B
C
D
E
F
G
H
J
K
L
M
N
P
Q
R
S
U
V
V
A
P
C
M
INCHES
MIN
MAX
1.095
1.110
0.600
0.640
0.428
0.434
0.016
0.020
0.125
0.135
0.063
0.068
0.095
0.105
0.236
0.244
0.009
0.011
0.114
0.124
0.045
0.055
0.058
0.065
0.295
0.305
0.875
0.885
0.051
0.055
0.000
0.007
0.480
0.490
0.040
0.050
0.075
0.085
MILLIMETERS
MIN
MAX
27.18
28.19
15.24
16.26
10.87
11.02
0.41
0.51
3.18
3.43
1.60
1.73
1.65
2.67
5.99
6.20
0.23
0.28
2.90
3.15
1.14
1.40
1.47
1.65
7.49
7.75
22.22
22.48
1.30
1.40
0.00
0.18
12.19
12.45
1.02
1.27
1.90
2.16
R
D
L
G
U
K
H
F
S
Q
J
CASE 447–01
ISSUE A
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JAPAN: Nippon Motorola Ltd.; 4-32-1, Nishi-Gotanda, Shinagawa-ku, Tokyo 141, Japan.
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4
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CODELINE TO BE PLACED HERE
*XMMAS250G/D*
Motorola Sensor
Device Data
XMMAS250G/D