! "#$%& &' " '' ( " )#'* ( " ) " )+ ,"-./01" )2&." )2& !23." )#'' 425" )&*&" )*&&" )&*-+4" )2&67%462898.$" )-3:' &* " )67%462 " ) ! " )23. 9; " )<" )" )0" )$&" *This specification are subject to be changed without notice. 9 9 4 4 & #'&&* & -#'&&* 9. 4 & 9#'&&* 9 4 & ;#'&&* 9- 4 & :#'&&* 99 4 & -#'&&* 9; 4 & #'&&* 9: 4 & .#'&&* 4 & #'&&* 4 & 9#'&&* . 4 & #'&&* 4 & #'&&* - 4 & 8#'&&* 9 4 & #'&&* ; 4 & ;#'&&* : 4 & :#'&&* 8 4 & #'&&* 8 4 & .#'&&* =22 >& 2 +4## 4 2# 7? 4 7?# !2 4 # ; +'&&,:Κ@... 1 ; +'&&,:Κ@... 1 ;. +'.&&,:Κ@... 1 ; +'&&,:Κ@... 1 ;- +'-&&,:Κ@... 1 ;9 +'9&&,:Κ@... 1 ;; +';&&,:Κ@... 1 ;: +':&&,:Κ@... 1 # %!! 34 #4 &&,.".Κ@... 1 34 %!! &&,.".Κ@... 1 = A9='2& 42 4 4 #4 && +B42 94/"-./0 *This specification are subject to be changed without notice. .. '&;***&' 5 " ' &" &*C&C& && &*5&&" !!! & '**+,4+1 & ' 9 . '" !(&4+(&"#$%& " & ( & 9 "&& !!( " ' " ' -9 ."9 4+ ' 9 +$2$ '" " 6 " '&" &"%'5 &"%& 5 ; " ' & & & " " 6 "& ' ; "&59 " +C&2,+21"! & ' 5" ' " & & & & &'&+$2$7% " *This specification are subject to be changed without notice. #!! " ' . & 5 && ' (& +$2$" ' & " 23+2&,/($%1 *+! " *+5" *+! " *?&" *+&5&" $,/($$/1 *+'$$(" *+&5&" 5 ,/($DD1 *+&+$2$7% " *+&5&" 2!2 ,/(D1 *+! " * &&&" *2& 3" * " *+5" *+! " *4E F .F. F *+&5&" *This specification are subject to be changed without notice. -- +%,D.1 *+'! " *%&" *2'%"''9&2" *+& " 2 +3%,/(D1 *+! " *+535& *+! " *23,G71 *+&5&" G7 "+E,A!1(,.H1("-: !F5&." F5&-" ."%E, A1(.9 F5&;9":'" -I ±.J -I ±.J " .;": :"9 ;": .-" ;" ." 9"9 ." 9" "9 -"; :" -" ;" -" 9" ": " " ." " "8 .": " ."9 8". ." "; ." " ." *This specification are subject to be changed without notice. 99 "%&E"83A.J %&E9 2± .J $,/(D-1 *+'! " * &&&" * " *2" %&%,/(D91 *+'! " *+'*" * &&&" *2&,1" *2& 3" * " *2 2%&,/(D;1 *+'! " *+'*" * &&&" *2&,1" *2& 3" * " * & $!%&'()*)+)$, *+! " * &&&" *2,1" D:F DF3 D8F D!F 33 *+&5&" *This specification are subject to be changed without notice. ;; 2,/(DD D%1 *+! " * &&&" *+5% *+! " *2%,1" DF D F3 D%F *+&5&" +,/(D$1 *25&&&"5&+$2$7%+$2$7% " +,/(DD1 *+! " * *+9 5 " *%&." #!! '&& " !',/(D!1 '5 ( +$2$7%$ /4" ! ,/(!!1 &&& " $,/($$1 $ /4 " %,/(!1 .%&+$!%% "'' " *This specification are subject to be changed without notice. :: &45&,/(DD1 &5'5&'&" &(DD"D.(" +,/(D$1 655&&'+$2$7% " " &.&' "''& ( 5&"! (&"6' "6"' ' " ' 5 '" ''&" -. /. -. /. K,I1 .8 . !8 . L .% .$ !% !$ . = .D !D - - - 9 9 7 9 ; ; . . ; : : ,M1 : ",N1 - - 8 8 3,O1 9 9 8 ! ! 2/DB+ ; ; +#B# % 8% *,*1 !#B# E,A1 % % 2! $ 8 8 ! 2! $ $ $ !#B+ $ $ ! D D +#B+ $% $8% P 8 7? -9 9 6 8 ,:1 -: : *This specification are subject to be changed without notice. -. /. -. /. $ . 8. ,-1 - + 8 ,1 -D D - 8- ,1 - Q 9 89 ,91 - ? ; 8; ,.1 9 % : 8: ,1 9. %. 4 8 ,G1 : : 8 88 ,81 -8 8 R,ST ! 8! ,;1 -% % U,T1 8 ,1 9 % V,W1X . ! ,%$#1 9 % !2 ! ! ,*1 -! ! ! $ 8$ ,A1 -$ $ 2 D 8D ,$7$+1 $ $8 % . ! $2 D . ! D > .. !. D. / . ! D % % < .- !- D- $ $ .9 !9 D9 D D # .; !; D; - Y,F1 .: !: D: - Z,[1 . ! D -. . -.X. . ! D8 - $7$+ 8 D -- - 2/DB# .! !! D 9: %: -9X. 9; %; D. 9 % \ . ! 2 +4## -; ; *This specification are subject to be changed without notice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his specification are subject to be changed without notice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his specification are subject to be changed without notice. -. /. -. /. 2 D ,$7$+1 $9! $D9! % . D. $2 :; D:; D . D. D 9 D9 > - D- D. ; D; / D D - D- < D D- D -. D-. D9 D # - D- D; D Y,F1 - D- D: D Z,[1 9. D9. D ! D! -.X. 9% D9% D8 D $7$+ 9! D9! D 8 D8 2/DB# . D. D : D: -9X; ; D; D. : D: \ ! D! 2 +4## :$ D:$ 72 /!!)#01. #!2( 1. -./. -./. -./. $:3$D: $D.$: $.$: 3$D:$. %$# #$D /4$ $7% ? %467 !>$? $:3$D: $;3$D; $; 3$D; $;83$D;8 $:93$D:9 $:.3$D:. $:%3$D:% *This specification are subject to be changed without notice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his specification are subject to be changed without notice. -. /. 8 -; -9 D -; D -9 *,B1 -$ D -$ E,A1 99 D 99 ! 2! $ ;; D ;; ! % D % P 9 D 9 6 % D % $ .- D .- + .% D .% . D . Q 9 D 9 ? D - D - 4 -- D -- -% D -% R,ST 9- D 9- U,11 9 D 9 V,W1X8 9 D 9 !2 - D - 3 ! D 2 D % . D . D . D . > - D - / D < D -. D -. # - D - Y,F1 - D - Z,[1 9. D 9. -.X 9 D 9 $7$+ 9! D 9! 2/DB# . D . 3 -9X D \ ! D ! L .. D .. *This specification are subject to be changed without notice. -- -. /. = . .! D . D .! . D . 7 D ! D ! ,M1 - D - ",N1 -8 D -8 3,O1 -! D -! 2/DB+ 98 D 98 3 +#B# D 3 !#B# 8 D 8 3 2! $ .8 D .8 !#B+ 8 D 8 9 D 9 72 ;: D ;: %$# ;- D ;- #$D ; D ; /4$ ;$ D ;$ $7% ;9 D ;9 ? ; D ; %467 ; D ; !>$? ;D D ;D !>$%467 ;% D ;% +>/ ;! D ;! 7? :; D :; ,:1 ; D ; ,-1 ; D ; ,1 ;8 D ;8 ,31 :: D :: ,1 :9 D :9 ,91 : D : ,.1 :. D :. ,01 : D : ,G1 :$ D :$ ,81 :% D :% ,;1 :- D :- ,1 :! D :! +#B+ *This specification are subject to be changed without notice. 99 -. /. ,%$#1 ,*1 : - D : D - ,A1 : D : ,$7$+1 :8 D :8 $2 D D : D : D. D D D D : D : D- D D D D9 .: D .: D; .D D .D D: : D : D D D D D8 -: D -: D -D D -D D 9; D 9; D. 9$ D 9$ +7 9: D 9: 2 +4## 9D D 9D !?2$ ;. D ;. 7" X8F* XF.* *This specification are subject to be changed without notice. ;; 7'F 7' #67 $ 9 $ % +67 $ 9 $ % ! $ 9% $ %% 7* />,1 : D :8 D8 +4!,1 : D - :% D% 9; : D : :$ D$ # D L + D L 46$+ $ 9$ $ %$ 2#$$ $ 9D $ %D 6!$? $ ; $ $ 7' #67 $ D $ D D +67 $ .: $ D .: ! $ .D $ D .D 7* />,1 ;: D ;: ;- D ;- +4!,1 D - ;! D ;! 9; 9 D 9 : ;% D ;% # D L + D. L 46$+ $ : $ D : 2#$$ $ D $ D D 6!$? $ 9$ $ D 9$ />,.1 7'.F />,.1 *This specification are subject to be changed without notice. :: 7'F 7' #67 +67 D D !$3+$! !$3+$! ! % D % !$3+$! 7* />,1 9 D 9 !$ ; D ; !$ +4!,1 : D : !$ - 9% D 9% Q$! 9; 9 D 9 Q$! : : D : Q$! # D L + D. L 46$+ L L 2#$$ L L 6!$? L L />,.1 6'.&* " D& 2$ 2$. !$ +$! !$ +$! F666 F666D' .F666 $;! $;8 $; $$! $$8 $$ $ $ $. $D $D $D. F666+ -F6662 $;: $;9 $$: $$9 $. $ $D. $D 9F666D5 ;F66663/ :F F& $;; $. $; $. $$; $. $$ $! $ $! $- $. $D $D! $D- $D. 8F=& * -F=& A $.$ $ $!$ $ $. $. $D. $D. -F3& -.F2 $.. $.- $!. $!- $- $ $D- $D -F --F7( $ $8 $8 $88 $9 $-% $D9 $D-% -9F2 -;F & -:F & $;% $; $. $$% $$ $! $9 $- $. $D9 $D- $D. *This specification are subject to be changed without notice. -.4 DA &*D& 4"2"D& .E=& * BE3& $E63/ E & BA E BE & B-E B* ED5 B9E B" E2 B;E7( +!'ED' B:E& !' E BE=& A %'!'E2 B8E2 $""4 D& $ E $& ?!' E+ %&2 D#,#$%471 ! !. D D. ! D !- D- !9 D9 !; D; !: D: ! D !8 D8 ! D ! D !. D. ! 72 !- 2 !9 2# !; & 7& *This specification are subject to be changed without notice. 88 5 6! 2&= = *"9=A:= &= = *"=A;= 4&&= = *"=A;= && 0:0 2 & *;5 90 5 -5 "5 -'5 45 = -"9 9 9"9 4&& ! DE"-./0 & ± µ! =E== &5 = ." = &'5 = " = 4&&'5 = "- = E" ! 4&&'5#$%2 = ". = E ! . =E= .". =E= &*,;81 + . &* + "9 = %!! # 4&&'5%!! # = "- = E9 ! 5 -5 "5 -'5 .9 µ2 %!! # 9 #%!! . 9 %& #5 - 9 µ2 %& #5 - - 9 µ2 &(5& 9 9 µ2 ; 9 .9 µ2 D # "- /0 -*9 µ2 &(5 55 #& '&(5 %!! 2 *This specification are subject to be changed without notice. .. D"&& D-"& *This specification are subject to be changed without notice. .. EM78448D Mechanical Scroll !"#$$% *This specification are subject to be changed without notice. .... 3 <7):: ; <:):9 < <9):3 8 <3):; ( <;):< :; 7)87)9( :)8:)9* 9)89)9+ 3)83)37 ;)8;)3: <)8<)39 8)88)33 ()8()3; 0 3 B F%G, ( :7( ; > C & 8 1 & :: -$ ? / - )%H, <8 5%L, $ & :9 :3 + 8 3 5 K <8):( :9 %, * %, < %, 9 %, 7 %, <():* :: %, ( %, ; %, : %, $ %, - *7):+ %, %, %, :7 *9)9: * *3)99 + *;)93 7 *<)9; :8 *8)9< M$ & 1 & :; 11 & ; :<7 *()98 % 1, : W 9 +:)8 M & + & :7 <%@, 8%D, 0I%J, $> %, M 1 1 M N8 N( Q%R, S%4, I%T, ;9 %U, V% , M 1 & 8 $/ $ 1 :9 $1 N9 N3 N: N; & < $ ;< *This specification are subject to be changed without notice. + & 9 1 M$ 1 1 M & :3 X N $> *%K, & - 1. (%E, +%I%I, $1 1 * ;%A, :: & : O%P, 3%=, /$ 9 $ # :( +7)< %, *:)97 %, <<):8 :< & ( &> &> & * & 3 - :7 7%I,I, < N< :<: % , Y%Z, :%[, : 9%2, .. *This specification are subject to be changed without notice. ..-- &'!() "* + , % / % / % / % % % %% % % %/ % % % -( 010 2230 14$30 & & & &% & & & & & &% & & &/ & & & & &% & & &/ & &/ &/ &/ &/% &/ &/ &// &/ & & & 5 013 ./) .%) ./) .%//) ./%) ./%) ./%) ./%) ./%) ./%) ./%) ./%) ./%) ./%) ./%) .) .) .%) ./) .) .) /) ) ) %) ) /%) /%) /%) /%) /%) /%) /%) /%) /%) /%) /%) ) ) /) /) /) /) ) /) ) %) ) /) ) .) ./) .) .%) ./) ./) ./) ./) ./) ./) ./) ./) ./) ./) ./) .) .%) .) .) ./) ) ) /) %) ) ) /) /) 167/8* *This specification are subject to be changed without notice. ..99