MOTOROLA MPX7100DP

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SEMICONDUCTOR TECHNICAL DATA
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The new MPX7100 series pressure sensor incorporates all the innovative features of
Motorola’s MPX2000 series family including the patented, single piezoresistive strain
gauge (X–ducer) and on–chip temperature compensation and calibration. In addition, the
MPX7100 series has a high input impedance of typically 10 kΩ for those portable, low
power and battery–operated applications. This device is suitable for those systems in
which users must have a dependable, accurate pressure sensor that will not consume
significant power. The MPX7100 series device is a logical and economical choice for
applications such as portable medical instrumentation, remote sensing systems with
4 – 20 mAmp transmission and field barometers/altimeters.
Motorola Preferred Device
0 to 100 kPa (0 to 14.5 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
Features
• Temperature Compensated Over 0°C to +85°C
• Unique Silicon Shear Stress Strain Gauge
• Easy to Use Chip Carrier Package Options
• Available in Differential and Gauge Configurations
• Ratiometric to Supply Voltage
• ± 0.25% Linearity (MPX7100D)
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
Application Examples
• Portable Medical Instrumentation
• Field Altimeters
• Field Barometers
Figure 1 illustrates a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
DIFFERENTIAL
PORT OPTION
CASE 344C–01, STYLE 1
VS
3
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
HIGH
Zin
X–ducer
SENSING
ELEMENT
NOTE: Pin 1 is the notched pin.
2
4
Vout+
Vout–
PIN NUMBER
1
Gnd
3
VS
2
+Vout
4
–Vout
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The absolute sensor has a built–in reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
Preferred devices are Motorola recommended choices for future use and best overall value.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 3
Motorola Sensor Device Data
 Motorola, Inc. 1997
1
MAXIMUM RATINGS
Rating
Overpressure(8) (P1 > P2)
Burst Pressure(8) (P1 > P2)
Symbol
Storage Temperature
Operating Temperature
Value
Unit
Pmax
400
kPa
Pburst
1000
kPa
Tstg
– 40 to +125
°C
TA
– 40 to +125
°C
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Symbol
Min
Typ
Max
Unit
Pressure Range(1)
POP
0
—
100
kPa
Supply Voltage(2)
VS
—
10
16
Vdc
Supply Current
Io
—
1.0
—
mAdc
VFSS
38.5
40
41.5
mV
Voff
–1.0
– 2.0
—
—
1.0
2.0
mV
∆V/∆P
—
0.4
—
mV/kPa
—
—
– 0.25
– 1.0
—
—
0.25
1.0
%VFSS
—
—
± 0.1
—
%VFSS
Characteristic
Full Scale Span(3)
MPX7100A, MPX7100D
Offset(4)
MPX7100D
MPX7100A
Sensitivity
Linearity(5)
MPX7100D
MPX7100A
Pressure Hysteresis(5) (0 to 100 kPa)
Temperature Hysteresis(5) (– 40°C to +125°C)
Temperature Effect on Full Scale Span(5)
Temperature Effect on Offset(5)
—
—
± 0.5
—
%VFSS
TCVFSS
–1.0
—
1.0
%VFSS
TCVoff
–1.0
—
1.0
mV
Zin
5000
10,000
15,000
Ω
Zout
2500
3100
6000
Ω
Response Time(6) (10% to 90%)
tR
—
1.0
—
ms
Warm–Up
—
—
20
—
ms
Offset Stability(9)
—
—
± 0.5
—
%VFSS
Symbol
Min
Typ
Max
Unit
Weight (Basic Element Case 344–15)
—
—
2.0
—
Grams
Common Mode Line Pressure(7)
—
—
—
690
kPa
Input Impedance
Output Impedance
MECHANICAL CHARACTERISTICS
Characteristic
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pressure.
LEAST SQUARES FIT
RELATIVE VOLTAGE OUTPUT
EXAGGERATED
PERFORMANCE
CURVE
LEAST
SQUARE
DEVIATION
STRAIGHT LINE
DEVIATION
END POINT
STRAIGHT LINE FIT
OFFSET
50
PRESSURE (% FULLSCALE)
0
100
Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the output characteristics of the MPX7100
series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line.
40
VS = 10 Vdc
TA = 25°C
P1 > P2
35
OUTPUT (mVdc)
30
25
20
The effects of temperature on Full Scale Span and Offset
are very small and are shown under Operating Characteristics.
TYP
SPAN
RANGE
(TYP)
MAX
15
10
MIN
5
kPa
PSI
0
–5
0
25
3.62
50
7.25
75
10.87
100
14.5
OFFSET
(TYP)
Figure 3. Output versus Pressure Differential
SILICONE GEL
DIE COAT
DIFFERENTIAL/GAUGE
STAINLESS STEEL
DIE
METAL COVER
P1
EPOXY
CASE
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
WIRE BOND
LEAD FRAME
DIFFERENTIAL/GAUGE ELEMENT
P2
DIE
BOND
SILICONE GEL ABSOLUTE
DIE COAT
DIE
P1
WIRE BOND
STAINLESS STEEL
METAL COVER
EPOXY
CASE
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
LEAD FRAME
ABSOLUTE ELEMENT
P2
DIE
BOND
Figure 4. Cross–Sectional Diagrams (Not to Scale)
Figure 4 illustrates the absolute sensing configuration (right)
and the differential or gauge configuration in the basic chip
carrier (Case 344–15). A silicone gel isolates the die surface
and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm.
The MPX7100 series pressure sensor operating charac-
Motorola Sensor Device Data
teristics and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.
3
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die from the environment. The differential
or gauge sensor is designed to operate with positive differen-
Part Number
MPX7100A
tial pressure applied, P1 > P2. The absolute sensor is designed for vacuum applied to P1 side.
The Pressure (P1) side may be identified by using the
table below:
Case Type
MPX7100D
MPX7100DP
MPX7100AP
MPX7100GP
MPX7100GVP
MPX7100AS
MPX7100GS
MPX7100GVS
MPX7100ASX
MPX7100GSX
MPX7100GVSX
Pressure (P1) Side Identifier
344–15C
Stainless Steel Cap
344C–01
Side with Part Marking
344B–01
Side with Port Attached
344D–01
Stainless Steel Cap
344E–01
Side with Port Attached
344A–01
Stainless Steel Cap
344F–01
Side with Port Attached
344G–01
Stainless Steel Cap
ORDERING INFORMATION
MPX7100 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in
the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose
pressure connections.
MPX Series
D i Type
Device
T
O i
Options
C
Case
Type
T
Order Number
Device Marking
Basic Element
Absolute, Differential
Case 344–15
MPX7100A
MPX7100D
MPX7100A
MPX7100D
Ported Elements
Differential, Dual Ported
Case 344C–01
MPX7100DP
MPX7100DP
Absolute, Gauge
Case 344B–01
MPX7100AP
MPX7100GP
MPX7100AP
MPX7100GP
Gauge Vacuum
Case 344D–01
MPX7100GVP
MPX7100GVP
Absolute, Gauge Stove Pipe
Case 344E–01
MPX7100AS
MPX7100GS
MPX7100A
MPX7100D
Gauge Vacuum Stove Pipe
Case 344A–01
MPX7100GVS
MPX7100D
Absolute, Gauge Axial
Case 344F–01
MPX7100ASX
MPX7100GSX
MPX7100A
MPX7100D
Gauge Vacuum Axial
Case 344G–01
MPX7100GVSX
MPX7100D
4
Motorola Sensor Device Data
PACKAGE DIMENSIONS
NOTES:
C
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
POSITIVE
PRESSURE (P1)
R
M
B
–A–
DIM
A
B
C
D
F
G
J
L
M
N
R
N
1
PIN 1
2
3
L
4
–T–
SEATING
PLANE
J
POSITIVE
PRESSURE
(P1)
G
F
D
4 PL
0.136 (0.005)
M
T A
M
INCHES
MIN
MAX
0.595
0.630
0.514
0.534
0.200
0.220
0.016
0.020
0.048
0.064
0.100 BSC
0.014
0.016
0.695
0.725
30_ NOM
0.475
0.495
0.430
0.450
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
15.11
16.00
13.06
13.56
5.08
5.59
0.41
0.51
1.22
1.63
2.54 BSC
0.36
0.40
17.65
18.42
30_ NOM
12.07
12.57
10.92
11.43
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344–15
ISSUE W
PORT #2
VACUUM
PRESSURE
(P2)
–B–
C
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
A
POSITIVE
PRESSURE
(P1)
PIN 1
V
1 2
3 4
K
J
N
R
SEATING
PLANE
S
–T–
G
F
D 4 PL
0.13 (0.005)
M
T B
M
DIM
A
B
C
D
F
G
J
K
N
R
S
V
INCHES
MIN
MAX
0.690
0.720
0.245
0.255
0.780
0.820
0.016
0.020
0.048
0.064
0.100 BSC
0.014
0.016
0.345
0.375
0.300
0.310
0.178
0.186
0.220
0.240
0.182
0.194
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
17.53
18.28
6.22
6.48
19.81
20.82
0.41
0.51
1.22
1.63
2.54 BSC
0.36
0.41
8.76
9.53
7.62
7.87
4.52
4.72
5.59
6.10
4.62
4.93
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344A–01
ISSUE B
Motorola Sensor Device Data
5
PACKAGE DIMENSIONS — CONTINUED
SEATING
PLANE
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
–T–
U
L
R
H
N
PORT #1
POSITIVE
PRESSURE
(P1)
–Q–
B
1 2
3 4
PIN 1
K
–P–
0.25 (0.010)
T Q
M
S
S
J
F
G
D 4 PL
0.13 (0.005)
C
M
T S
S
Q
S
INCHES
MIN
MAX
1.145
1.175
0.685
0.715
0.305
0.325
0.016
0.020
0.048
0.064
0.100 BSC
0.182
0.194
0.014
0.016
0.695
0.725
0.290
0.300
0.420
0.440
0.153
0.159
0.153
0.159
0.230
0.250
0.220
0.240
0.910 BSC
DIM
A
B
C
D
F
G
H
J
K
L
N
P
Q
R
S
U
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
29.08
29.85
17.40
18.16
7.75
8.26
0.41
0.51
1.22
1.63
2.54 BSC
4.62
4.93
0.36
0.41
17.65
18.42
7.37
7.62
10.67
11.18
3.89
4.04
3.89
4.04
5.84
6.35
5.59
6.10
23.11 BSC
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344B–01
ISSUE B
PORT #1
R
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
U
V
W
L
H
PORT #2
N
PORT #1
POSITIVE PRESSURE
(P1)
PORT #2
VACUUM
(P2)
–Q–
B
SEATING
PLANE
SEATING
PLANE
1 2 3 4
PIN 1
K
–P–
–T–
–T–
0.25 (0.010)
M
T Q
S
S
F
J
G
D 4 PL
C
0.13 (0.005)
M
T S
S
Q
S
DIM
A
B
C
D
F
G
H
J
K
L
N
P
Q
R
S
U
V
W
INCHES
MIN
MAX
1.145
1.175
0.685
0.715
0.405
0.435
0.016
0.020
0.048
0.064
0.100 BSC
0.182
0.194
0.014
0.016
0.695
0.725
0.290
0.300
0.420
0.440
0.153
0.159
0.153
0.159
0.063
0.083
0.220
0.240
0.910 BSC
0.248
0.278
0.310
0.330
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
29.08
29.85
17.40
18.16
10.29
11.05
0.41
0.51
1.22
1.63
2.54 BSC
4.62
4.93
0.36
0.41
17.65
18.42
7.37
7.62
10.67
11.18
3.89
4.04
3.89
4.04
1.60
2.11
5.59
6.10
23.11 BSC
6.30
7.06
7.87
8.38
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344C–01
ISSUE B
6
Motorola Sensor Device Data
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
U
L
SEATING
PLANE
–T–
R
DIM
A
B
C
D
F
G
H
J
K
L
N
P
Q
R
S
U
H
PORT #2
VACUUM
(P2)
POSITIVE
PRESSURE
(P1)
N
–Q–
B
1 2
3 4
K
PIN 1
S
C
J
F
–P–
0.25 (0.010)
M
T Q
G
D 4 PL
0.13 (0.005)
S
M
T S
S
Q
S
INCHES
MIN
MAX
1.145
1.175
0.685
0.715
0.305
0.325
0.016
0.020
0.048
0.064
0.100 BSC
0.182
0.194
0.014
0.016
0.695
0.725
0.290
0.300
0.420
0.440
0.153
0.159
0.153
0.158
0.230
0.250
0.220
0.240
0.910 BSC
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
29.08
29.85
17.40
18.16
7.75
8.26
0.41
0.51
1.22
1.63
2.54 BSC
4.62
4.93
0.36
0.41
17.65
18.42
7.37
7.62
10.67
11.18
3.89
4.04
3.89
4.04
5.84
6.35
5.59
6.10
23.11 BSC
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344D–01
ISSUE B
PORT #1
POSITIVE
PRESSURE
(P1)
–B–
C
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
A
BACK SIDE
VACUUM
(P2)
DIM
A
B
C
D
F
G
J
K
N
R
S
V
V
4 3
2 1
PIN 1
K
J
N
R
SEATING
PLANE
S
–T–
INCHES
MIN
MAX
0.690
0.720
0.245
0.255
0.780
0.820
0.016
0.020
0.048
0.064
0.100 BSC
0.014
0.016
0.345
0.375
0.300
0.310
0.178
0.186
0.220
0.240
0.182
0.194
MILLIMETERS
MIN
MAX
17.53
18.28
6.22
6.48
19.81
20.82
0.41
0.51
1.22
1.63
2.54 BSC
0.36
0.41
8.76
9.53
7.62
7.87
4.52
4.72
5.59
6.10
4.62
4.93
G
F
D 4 PL
0.13 (0.005)
M
T B
M
STYLE 1:
PIN 1.
2.
3.
4.
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344E–01
ISSUE B
Motorola Sensor Device Data
7
PACKAGE DIMENSIONS — CONTINUED
–T–
C
A
E
–Q–
U
N
V
B
R
PORT #1
POSITIVE
PRESSURE
(P1)
PIN 1
–P–
0.25 (0.010)
M
T Q
M
4
3
2
1
S
K
F
J
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
U
V
INCHES
MIN
MAX
1.080
1.120
0.740
0.760
0.630
0.650
0.016
0.020
0.160
0.180
0.048
0.064
0.100 BSC
0.014
0.016
0.220
0.240
0.070
0.080
0.150
0.160
0.150
0.160
0.440
0.460
0.695
0.725
0.840
0.860
0.182
0.194
MILLIMETERS
MIN
MAX
27.43
28.45
18.80
19.30
16.00
16.51
0.41
0.51
4.06
4.57
1.22
1.63
2.54 BSC
0.36
0.41
5.59
6.10
1.78
2.03
3.81
4.06
3.81
4.06
11.18
11.68
17.65
18.42
21.34
21.84
4.62
4.92
G
D 4 PL
0.13 (0.005)
T P
M
S
Q
STYLE 1:
PIN 1.
2.
3.
4.
S
GROUND
V (+) OUT
V SUPPLY
V (–) OUT
CASE 344F–01
ISSUE B
–T–
C
A
E
–Q–
U
POSITIVE
PRESSURE
(P1)
N
V
B
R
PIN 1
PORT #2
VACUUM
(P2)
–P–
0.25 (0.010)
M
T Q
M
1
2
3
4
S
K
J
F
G
D 4 PL
0.13 (0.005)
M
T P
S
Q
S
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
U
V
INCHES
MIN
MAX
1.080
1.120
0.740
0.760
0.630
0.650
0.016
0.020
0.160
0.180
0.048
0.064
0.100 BSC
0.014
0.016
0.220
0.240
0.070
0.080
0.150
0.160
0.150
0.160
0.440
0.460
0.695
0.725
0.840
0.860
0.182
0.194
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
27.43
28.45
18.80
19.30
16.00
16.51
0.41
0.51
4.06
4.57
1.22
1.63
2.54 BSC
0.36
0.41
5.59
6.10
1.78
2.03
3.81
4.06
3.81
4.06
11.18
11.68
17.65
18.42
21.34
21.84
4.62
4.92
GROUND
V (+) OUT
V SUPPLY
V (–) OUT
CASE 344G–01
ISSUE B
8
Motorola Sensor Device Data
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Motorola Sensor Device Data
9
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10
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MPX7100/D
Motorola Sensor Device
Data