Freescale Semiconductor, Inc. MOTOROLA Order number: MPX5100/D Rev 9, 3/2004 SEMICONDUCTOR TECHNICAL DATA Freescale Semiconductor, Inc... Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPX5100/MPXV5100 series piezoresistive transducer is a state-ofthe-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. MPX5100/MPXV5100 SERIES INTEGRATED PRESSURE SENSOR Differential Absolute 0 to 100 kPa (0 to 14.5 psi) 15 to 115 kPa (2.18 to 16.68 psi) 0.2 to 4.7 Volts Output SMALL OUTLINE PACKAGE UNIBODY PACKAGE Features MPX5100D • 2.5% Maximum Error over 0° to 85°C • Ideally suited for Microprocessor or Microcontroller-Based Systems CASE 867 MPXV5100GC6U CASE 482A • Patented Silicon Shear Stress Strain Gauge • Available in Absolute, Differential and Gauge Configurations • Ideal for Automotive and Non-Automotive Applications VS MPX5100DP CASE 867C THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 SENSING ELEMENT GND GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY MPXV5100GC7U CASE 482C Vout PINS 1 AND 5 THROUGH 8 ARE NO CONNECTS FOR SMALL OUTLINE PACKAGE MPX5100GSX CASE 867F PINS 4, 5, AND 6 ARE NO CONNECTS FOR UNIBODY PACKAGE Figure 1. Fully Integrated Pressure Sensor Schematic PIN NUMBER PIN NUMBER N/C 5 N/C 1 Vout 4 N/C 2 VS 6 N/C 2 GND 5 N/C 3 GND 7 N/C 3 VS 6 N/C 4 Vout 8 N/C 1 NOTE: Pins 1, 5, 6, 7, and 8 are internal device connections. Do not connect to external circuitry or ground. Pin1 is noted by the notch in the lead. © Motorola, Inc. 2004 For More Information On This Product, Go to: www.freescale.com NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin1 is noted by the notch in the lead. Freescale Semiconductor, Inc. MPX5100/MPXV5100 SERIES Table 1. MAXIMUM RATINGS(NOTE) Rating Symbol Value Unit Maximum Pressure (P1 > P2) Pmax 400 kPa Storage Temperature Tstg –40° to +125° °C Operating Temperature TA –40° to +125° °C NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device. Table 2. OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4 required to meet electrical specifications.) Characteristic Symbol Min Typ Max Unit POP 0 15 — — 100 115 kPa Supply Voltage(2) VS 4.75 5.0 5.25 Vdc Supply Current Io — 7.0 10 mAdc Voff 0.088 0.20 0.313 Vdc Full Scale Output(4) Differential and Absolute (0 to 85°C) @ VS = 5.0 Volts VFSO 4.587 4.700 4.813 Vdc Full Scale Span(5) @ VS = 5.0 Volts VFSS — 4.500 — Vdc — — — ± 2.5 %VFSS V/P — 45 — mV/kPa tR — 1.0 — ms Io+ — 0.1 — mAdc — — 20 — ms — — ± 0.5 — %VFSS (1) Freescale Semiconductor, Inc... Pressure Range Gauge, Differential: MPX5100D/MPX5100G/MPXV5100G Absolute: MPX5100A Minimum Pressure Offset(3) @ VS = 5.0 Volts (0 to 85°C) Differential and Absolute (0 to 85°C) Accuracy(6) Sensitivity Response Time (7) Output Source Current at Full Scale Output Warm-Up Time Offset (8) Stability(9) NOTES: 1. 2. 3. 4. 5. 6. 7. 8. 9. 1.0kPa (kiloPascal) equals 0.145 psi. Device is ratiometric within this specified excitation range. Offset (Voff) is defined as the output voltage at the minimum rated pressure. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25°C. • TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C. • Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25°C. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. Table 3. MECHANICAL CHARACTERISTICS Characteristics Typ Unit Weight, Basic Element (Case 867) 4.0 grams Weight, Basic Element (Case 482) 1.5 grams 2 Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com MOTOROLA Freescale Semiconductor, Inc. MPX5100/MPXV5100 SERIES ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING Figure 2 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0° to 85°C using the decoupling circuit shown in Figure 4. The output will saturate outside of the specified pressure range. Figure 3 illustrates both the Differential/Gauge and the Absolute Sensing Chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPX5100/MPXV5100 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 4 shows the recommended decoupling circuit for interfacing the output of the integrated sensor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended. Figure 1. 4 SPAN RANGE (TYP) OUTPUT VOLTAGE (V) Freescale Semiconductor, Inc... Vout = VS x (0.009 x P + 0.04) ± (Pressure Error x Temperature Factor x 0.009 x VS) VS = 5.0 V ± 0.25 Vdc PE = 2.5 TM = 1 Temperature = 0–85°C 3 TYPICAL 2 MAX MIN 1 OUTPUT RANGE (TYP) Transfer Function MPX5100D/MPX5100G/MPXV5100G Series 5 0 0 10 20 30 40 50 60 70 80 90 100 PRESSURE (kPa) 110 OFFSET (TYP) Figure 2. Output versus Pressure Differential FLUORO SILICONE GEL DIE COAT STAINLESS STEEL METAL COVER DIE FLUORO SILICONE GEL DIE COAT DIE EPOXY PLASTIC CASE EPOXY PLASTIC WIRE BOND CASE WIRE BOND LEAD FRAME DIFFERENTIAL/GAUGE ELEMENT LEAD FRAME DIE BOND STAINLESS STEEL METAL COVER ABSOLUTE ELEMENT DIE BOND Figure 3. Cross-Sectional Diagrams (Not to Scale) +5 V OUTPUT Vout VS IPS 1.0 µF 0.01 µF GND 470 pF Figure 4. Recommended Power Supply Decoupling and Output Filtering (For additional output filtering, please refer to Application Note AN1646) MOTOROLA Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com 3 Freescale Semiconductor, Inc. MPX5100/MPXV5100 SERIES Transfer Function (MPX5100D, MPX5100G, MPXV5100G) Nominal Transfer Value: Vout = VS (P x 0.009 + 0.04) ± (Pressure Error x Temp. Mult. x 0.009 x VS) VS = 5.0 V ± 5% P kPa Temperature Error Multiplier MPX5100D/MPX5100G/MPXV5100G Series Temp Multiplier –40 3 0 to 85 1 +125 3 4.0 Freescale Semiconductor, Inc... 3.0 2.0 1.0 0.0 –40 –20 0 20 40 60 80 Temperature in °C 100 120 130 140 NOTE: The Temperature Multiplier is a linear response from 0° to –40°C and from 85° to 125°C. Pressure Error Band MPX5100D/MPX5100G/MPXV5100G Series Error Limits for Pressure 3.0 Error (kPa) 2.0 1.0 0.0 Pressure in kPa 0 20 40 60 80 100 120 –1.0 –2.0 –3.0 4 Pressure Error (max) 0 to 100 kPa ± 2.5 kPa Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com MOTOROLA Freescale Semiconductor, Inc. MPX5100/MPXV5100 SERIES Transfer Function (MPX5100A) Nominal Transfer Value: Vout = VS (P x 0.009 – 0.095) ± (Pressure Error x Temp. Mult. x 0.009 x VS) VS = 5.0 V ±5% P kPa Temperature Error Multiplier MPX5100A Series Temp Multiplier –40 3 0 to 85 1 +125 3 4.0 2.0 1.0 0.0 –40 –20 0 20 40 60 80 100 120 130 140 Temperature in °C NOTE: The Temperature Multiplier is a linear response from 0° to –40°C and from 85° to 125°C. Pressure Error Band MPX5100A Series Error Limits for Pressure 3.0 2.0 Error (kPa) Freescale Semiconductor, Inc... 3.0 1.0 0.0 Pressure in kPa 0 20 40 60 80 100 130 -1.0 -2.0 -3.0 MOTOROLA Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com Pressure Error (max) 15 to 115 kPa ± 2.5 kPa 5 Freescale Semiconductor, Inc. MPX5100/MPXV5100 SERIES PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluoro silicone gel which protects the die from harsh media. The Motorola MPX pressure sensor Part Number Case Type MPX5100A, MPX5100D Freescale Semiconductor, Inc... is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the Table below: Pressure (P1) Side Identifier Stainless Steel Cap 867 MPX5100DP 867C Side with Part Marking MPX5100AP, MPX5100GP 867B Side with Port Attached MPX5100GSX 867F Side with Port Attached MPXV5100GC6U 482A Side with Port Attached MPXV5100GC7U 482C Side with Port Attached ORDERING INFORMATION The MPX5100/MPXV5100 pressure sensor is available in absolute, differential, gauge, and vacuum configurations. Devices are available in the basic element package or with pressure port fittings that provide printed circuit board mounting ease and barbed hose pressure connections. Device Name Basic Element Options Absolute 867 Differential Ported Elements MPX Series Case Type Order Number MPX5100A Device Marking MPX5100A MPX5100D MPX5100D Differential Dual Ports 867C MPX5100DP MPX5100DP Absolute, Single Port 867B MPX5100AP MPX5100AP Gauge, Single Port 867B MPX5100GP MPX5100GP Gauge, Axial PC Mount 867F MPX5100GSX MPX5100D Gauge, Axial Port, SMT 482A MPXV5100GC6U MPXV5100G Gauge, Axial Port, DIP 482C MPXV5100GC7U MPXV5100G 867 INFORMATION FOR USING THE SMALL OUTLINE PACKAGE (CASE 482) MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS Surface mount board layout is a critical portion of the total design. The footprint for the surface mount packages must be the correct size to ensure proper solder connection interface between the board and the package. With the correct footprint, the packages will self align when subjected to a solder reflow process. It is always recommended to design boards with a solder mask layer to avoid bridging and shorting between solder pads. 0.100 TYP 8X 2.54 0.660 16.76 0.060 TYP 8X 1.52 0.300 7.62 0.100 TYP 8X 2.54 inch mm SCALE 2:1 Figure 5. SOP Footprint (Case 482) 6 Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com MOTOROLA Freescale Semiconductor, Inc. MPX5100/MPXV5100 SERIES PACKAGE DIMENSIONS C NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). R POSITIVE PRESSURE (P1) M B -AN PIN 1 SEATING PLANE 2 3 4 5 6 -TG J S Freescale Semiconductor, Inc... 1 DIM A B C D F G J L M N R S L F D 6 PL 0.136 (0.005) STYLE 1: PIN 1. 2. 3. 4. 5. 6. STYLE 2: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX M T A M STYLE 3: PIN 1. 2. 3. 4. 5. 6. OPEN GROUND -VOUT VSUPPLY +VOUT OPEN INCHES MILLIMETERS MAX MIN MAX MIN 16.00 0.595 0.630 15.11 13.56 0.514 0.534 13.06 5.59 0.200 0.220 5.08 0.84 0.027 0.033 0.68 1.63 0.048 0.064 1.22 0.100 BSC 2.54 BSC 0.40 0.014 0.016 0.36 18.42 0.695 0.725 17.65 30˚ NOM 30˚ NOM 12.57 0.475 0.495 12.07 11.43 0.430 0.450 10.92 0.090 0.105 2.29 2.66 OPEN GROUND +VOUT +VSUPPLY -VOUT OPEN CASE 867-08 ISSUE N BASIC ELEMENT T NOTES: 1. DIMENSIONS ARE IN MILLIMETERS. 2. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, 1994. A U L V SEATING PLANE R DIM A B C D F G J K L N P Q R S U V Q N Q B 1 6 2 3 4 5 K P PIN 1 P C J 0.25 M S G T Q M 6X F D 0.173 M T P S Q S MILLIMETERS MAX MIN 29.85 29.08 18.16 17.4 8.26 7.75 0.84 0.68 1.63 1.22 2.54 BSC 0.41 0.36 18.42 17.65 7.62 7.37 11.18 10.67 4.04 3.89 4.04 3.89 6.35 5.84 6.1 5.59 23.11 BSC 4.93 4.62 STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX CASE 867B-04 ISSUE F CASE 867B-04 ISSUE F PRESSURE SIDE PORTED (AP, GP) MOTOROLA Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com DATE 09/20/99 7 Freescale Semiconductor, Inc. MPX5100/MPXV5100 SERIES P 0.25 (0.010) M T Q -A- M U W X R PORT #1 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, 1994. 2. CONTROLLING DIMENSION: INCH. L V PORT #2 VACUUM (P2) PORT #1 POSITIVE PRESSURE (P1) N -Q- PORT #2 VACUUM (P2) B PIN 1 1 2 3 4 5 K 6 Freescale Semiconductor, Inc... C SEATING PLANE -T- -T- S SEATING PLANE D 6 PL 0.13 (0.005) G J F M A DIM A B C D F G J K L N P Q R S U V W X INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.063 0.083 0.220 0.240 0.910 BSC 0.182 0.194 0.310 0.330 0.248 0.278 STYLE 1: PIN 1. 2. 3. 4. 5. 6. M MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 10.29 11.05 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 1.60 2.11 5.59 6.10 23.11 BSC 4.62 4.93 7.87 8.38 6.30 7.06 VOUT GROUND VCC V1 V2 VEX CASE 867C-05 CASE ISSUE 876C-05F ISSUE F DATE 12/12/96 PRESSURE AND VACUUM SIDES PORTED (DP) -TC A E -Q- U N V B R PIN 1 PORT #1 POSITIVE PRESSURE (P1) -P0.25 (0.010) M T Q 6 M 5 4 3 2 1 S K J 0.13 (0.005) M T P S D 6 PL Q S NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D E F G J K N P Q R S U V G F INCHES MILLIMETERS MAX MIN MIN MAX 28.45 27.43 1.080 1.120 19.30 18.80 0.740 0.760 16.51 16.00 0.630 0.650 0.84 0.68 0.027 0.033 4.57 4.06 0.160 0.180 1.63 1.22 0.048 0.064 0.100 BSC 2.54 BSC 0.41 0.36 0.014 0.016 6.10 5.59 0.220 0.240 2.03 1.78 0.070 0.080 4.06 3.81 0.150 0.160 4.06 3.81 0.150 0.160 11.68 11.18 0.440 0.460 18.42 17.65 0.695 0.725 21.84 21.34 0.840 0.860 4.93 4.62 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX CASE 867F-03 CASE 867F-03 ISSUE D ISSUE D DATE 12/12/96 PRESSURE SIDE AXIAL PORT (GSX) 8 Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com MOTOROLA Freescale Semiconductor, Inc. MPX5100/MPXV5100 SERIES -A- D 8 PL 4 0.25 (0.010) 5 N M T B S A S NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT. -BG 8 1 S DIM A B C D G H J K M N S V W W V Freescale Semiconductor, Inc... C H J -T- MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 12.70 13.21 0.96 1.07 2.54 BSC 0.05 0.25 0.23 0.28 1.55 1.80 0˚ 7˚ 11.28 11.38 18.01 18.41 6.22 6.48 2.92 3.17 SEATING PLANE PIN 1 IDENTIFIER M K INCHES MIN MAX 0.415 0.425 0.415 0.425 0.500 0.520 0.038 0.042 0.100 BSC 0.002 0.010 0.009 0.011 0.061 0.071 0˚ 7˚ 0.444 0.448 0.709 0.725 0.245 0.255 0.115 0.125 CASE 482A-01 CASE 482A-01 ISSUE A ISSUE A SMALL OUTLINE PACKAGE SURFACE MOUNT NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT. 6. DIMENSION S TO CENTER OF LEAD WHEN FORMED PARALLEL. -A4 5 N -BG 0.25 (0.010) 8 1 M T B D 8 PL S A S DIM A B C D G J K M N S V W DETAIL X S W V DATE 05/13/98 PIN 1 IDENTIFIER C -T- INCHES MILLIMETERS MIN MAX MIN MAX 0.415 0.425 10.54 10.79 0.415 0.425 10.54 10.79 0.500 0.520 12.70 13.21 0.026 0.034 0.66 0.864 0.100 BSC 2.54 BSC 0.009 0.011 0.23 0.28 0.100 0.120 2.54 3.05 0˚ 15˚ 0˚ 15˚ 0.444 0.448 11.28 11.38 0.540 0.560 13.72 14.22 0.245 0.255 6.22 6.48 0.115 0.125 2.92 3.17 SEATING PLANE K M J DETAIL X CASE 482C-03 CASE 482C-03 ISSUE B ISSUE B SMALL OUTLINE PACKAGE THROUGH-HOLE MOTOROLA Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com DATE 06/12/98 9 Freescale Semiconductor, Inc. MPX5100/MPXV5100 SERIES Freescale Semiconductor, Inc... NOTES 10 Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com MOTOROLA Freescale Semiconductor, Inc. MPX5100/MPXV5100 SERIES Freescale Semiconductor, Inc... NOTES MOTOROLA Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com 11 Freescale Semiconductor, Inc... Freescale Semiconductor, Inc. Information in this document is provided solely to enable system and software implementers to use Motorola products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document. Motorola reserves the right to make changes without further notice to any products herein. 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All other product or service names are the property of their respective owners. © Motorola, Inc. 2004 HOW TO REACH US: USA/EUROPE/LOCATIONS NOT LISTED: Motorola Literature Distribution P.O. Box 5405, Denver, Colorado 80217 1-800-521-6274 or 480-768-2130 JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center 3-20-1 Minami-Azabu. Minato-ku, Tokyo 106-8573, Japan 81-3-3440-3569 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong 852-26668334 HOME PAGE: http://motorola.com/semiconductors MPX5100/D For More Information On This Product, Go to: www.freescale.com