Pressure Freescale Semiconductor MPXM2051G Rev 2, 10/2009 50 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors MPXM2051G Series 0 to 50 kPa (0 to 7.25 psi) 40 mV Full Scale Span (Typical) The MPXM2051G device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output - directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. Application Examples • • • • • • Features • • • • Temperature Compensated Over 0°C to +85°C Available in Easy-to-Use Tape & Reel Ratiometric to Supply Voltage Gauge Ported Pump/Motor Controllers Robotics Level Indicators Medical Diagnostics Pressure Switching Non-Invasive Blood Pressure Measurement ORDERING INFORMATION Case Device Name No. MPAK Package (MPXM2051 Series) MPXM2051GS 1320A MPXM2051GST1 1320A None # of Ports Single Dual • • MPAK PACKAGE MPXM2051GS/GST1 CASE 1320 © Freescale Semiconductor, Inc., 2005-2009. All rights reserved. Gauge • • Pressure Type Differential Absolute Device Marking MPXM2051GS MPXM2051GS Pressure Operating Characteristics Table 1. Operating Characteristics (VS = 10 Vdc, TA = 25°C.) Characteristic Symbol Min Typ Max Unit POP 0 — 50 kPa Supply Voltage(2) VS — 10 16 Vdc Supply Current Io — 6.0 — mAdc VFSS 38.5 40 41.5 mV Voff -1.0 — 1.0 mV ΔV/ΔP — 0.8 — mV/kPa Linearity — -0.3 — 0.3 %VFSS Pressure Hysteresis(0 to 50 kPa) — — ±0.1 — %VFSS Temperature Hysteresis (-40°C to +125°C) — — ±0.5 — %VFSS TCVFSS -1.0 — 1.0 %VFSS TCVoff -1.0 — 1.0 mV Input Impedance Zin 1000 — 2500 Ω Output Impedance Zout 1400 — 3000 Ω Response Time(5) (10% to 90%) tR — 1.0 — ms Warm-Up — — 20 — ms — — ±0.5 — %VFSS Pressure Range (1) Full Scale Span(3) Offset(4) Sensitivity Temperature Effect on Full Scale Span Temperature Effect on Offset Offset Stability(6) 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 6. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. MPXM2051G 2 Sensors Freescale Semiconductor Pressure Maximum Ratings Table 2. Maximum Ratings(1) Rating Symbol Value Unit Maximum Pressure Pmax 200 kPa Storage Temperature Tstg -40 to +125 °C Operating Temperature TA -40 to +125 °C 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. VS 3 Thin Film Temperature Compensation and Calibration X-ducer Sensing Element 2 4 Vout+ Vout- 1 GND Figure 1. Temperature Compensated Pressure Sensor Schematic Voltage Output versus Applied Differential Pressure The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum side relative to the pressure side. MPXM2051G Sensors Freescale Semiconductor 3 Pressure On-chip Temperature Compensation and Calibration Figure 2 shows the minimum, maximum and typical output characteristics of the MPXM2051G series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line. 40 VS = 10 Vdc TA = 25°C 35 Output (mVdc) A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. TYP 30 25 20 SPAN RANGE (TYP) MAX 15 10 MIN 5 kPa PSI 0 -5 0 12.5 1.8 25 3.6 37.5 5.4 50 7.25 OFFSET (TYP) Figure 2. Output vs. Pressure Differential Least Square Deviation Least Squares Fit Exaggerated Performance Curve Relative Voltage Output LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 3) or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. The specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. Straight Line Deviation End Point Straight Line Fit OFFSET 0 50 100 Pressure (% Full scale) Figure 3. Linearity Specification Comparison MPXM2051G 4 Sensors Freescale Semiconductor Pressure PACKAGE DIMENSIONS PIN 4 PIN 1 PAGE 1 OF 2 CASE 1320A-02 ISSUE A MPXM2051G Sensors Freescale Semiconductor 5 Pressure PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1320A-02 ISSUE A MPXM2051G 6 Sensors Freescale Semiconductor How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. 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