EXCIMER LAMP LIGHT SOURCE Bonding Cleaning Modification EXCIMER LAMP LIGHT SOURCE RESULTS 100 Irradiation distance: 2 mm Irradiation time: 10 s Irradiation atmosphere: air 90 80 Before processing After processing 70 60 50 40 30 20 ■Surface modification of resin TAC Polycarbonate PVA Acrylic PPS Polyimide PET Polypropylene 0 COP 10 Polyethylene Surface modification technology is utilized in a wide range of industrial fields. Compared to ordinary techniques, material modification using excimer lamps is considered precision modification because it occurs via a chemical reaction on the atomic or molecular level. Moreover, this is clean modification that does not harm the material and generates no dust particles, and so is effective in fields requiring more advanced levels of material modification. TLS B0019EA Glass epoxy CONTACT ANGLE TO PURE WATER (°) Modification * Data verified by in-house testing. ■Surface modification of various materials ■Bonding pre-processing (improve adhesiveness) Example: Polyphenylene sulfide (PPS) + polyolefin (PO) BONDING STRENGTH 80° 15° Before excimer light irradiation After excimer light irradiation 3 Improved about 3 times 2 1 0 Before processing by excimer light After processing by excimer light TLS B0013EA PRINCIPLE 1 2 Excimer lamp Vacuum UV light (Wavelength: 172 nm) In air O3 O2 O3 + O(1D) O(1D) O3 O(1D) H H H H C C C C H H H H O3 O(1D) O3 O(1D) O3 Reaction O3 Vacuum UV light at a wavelength of 172 nm generates ozone and active oxygen in large quantities. H H Resin material H H C C C C H H H H Bonds in material surface are simultaneously broken up by vacuum UV light. OH O OH COOH C C C C H H H H Imparts hydrophilicity to the material surface since chemical reaction forms functional groups on dangling bonds to provide functionality. Expanding the possibilities of modification, cleaning, and bonding with light! Cleaning Vacuum UV light at a wavelength of 172 nm emitted from an excimer lamp is greatly absorbed by oxygen so that highly concentrated active oxygen can be generated. Vacuum UV light is also capable of breaking the molecular bonds of organic matter and so provides benefits in various processes such as accelerating the cleaning speed, improving the cleaning quality, and increasing the product yield. RESULTS * Data verified by in-house testing. ■Optical cleaning of evaporated gold coatings on laser mirrors Before excimer light irradiation After excimer light irradiation ■Removal of acetone cleaning residues Before excimer light irradiation After excimer light irradiation PRINCIPLE 1 2 Excimer lamp Vacuum UV light (Wavelength: 172 nm) In air O3 O2 O3 + O(1D) O(1D) O3 O(1D) O3 O(1D) O3 O(1D) O3 Reaction O3 Organic contaminants H2O CO2 H2O CO2 Substrate Vacuum UV light at a wavelength of 172 nm generates ozone and active oxygen in large quantities. Bonding Bonds in Organic contaminants are simultaneously broken up by vacuum UV light. Ozone and active oxygen react with the broken organic contaminants and evaporate as carbon dioxide and moisture, etc. Microfluidic devices are now actively used in various fields including medical and biological applications. The bonding technology used for such devices having fine structures requires bonding techniques with a still higher degree of quality and accuracy. Bonding that uses excimer lamps needs no adhesive agent and causes no damage and thermal deformation, making it ideal for bonding of microfluidic devices. EXCIMER LAMP LIGHT SOURCE FEATURES Comparison with other methods Corona discharge method Plasma method Excimer lamp method Discharge Vacuum UV light Excimer lamp method Corona discharge method / plasma method No damage to object In the corona discharge and plasma methods, the target object is directly exposed to discharge and so may be damaged. In the excimer lamp method, however, the object is merely irradiated with vacuum UV light and so there will be no damage to it. Excimer lamp Electrode Damage Excimer lamp method Corona discharge method / plasma method No dust particle generation In the corona discharge and plasma methods, dust particles generated by electrode spattering might fly upward by air flow and adhere to the target object surface. The excimer lamp method solves these problems and ensures clean processing. Dust particle Excimer lamp Excimer lamp method No processing irregularities Electrode Corona discharge method / plasma method Vacuum UV light Unlike the corona discharge and plasma methods utilizing discharge, the excimer lamp method using light does not cause uneven irradiation and so achieves highly efficient, uniform processing over a large area. Discharge *Processing effects shown in violet Processing irregularity Comparison with other manufacturer’s excimer lamps Uniformly irradiates a large area by using a flat lamp Uniformity characteristics (along short axis) Flat lamp vs. cylindrical lamp Poor uniformity since only portions of target directly below lamp is in close proximity Good uniformity since entire target surface is in close proximity 100 90 RELATIVE OUTPUT (%) 80 70 DISTANCE FROM IRRADIATED CENTER (mm) ●Compact flat lamp (EX-86U, EX-mini) Actual size Cylindrical lamp from another company Hamamatsu flat lamp Irradiance distribution (Typical example) 20 15 10 5 0 -5 -10 -15 -20 60 -40 -35 -30 -25 -20 -15 -10 -5 0 5 10 15 20 25 30 35 40 DISTANCE FROM IRRADIATED CENTER (mm) 50 40 UV power meter: Hamamatsu C9536/H9535-172 Lamp to UV power meter distance: 5 mm Measurement atmosphere: Air 30 20 10 0 -20 UV power meter: Hamamatsu C9536/H9535-172 Lamp to UV power meter distance: 5 mm Measurement atmosphere: Air -15 -10 -5 0 5 10 15 80 % or more 60 % – 80 % Below 60 % 20 DISTANCE FROM IRRADIATED CENTER (mm) Gives stable output with minimal flicker by using RF* discharge RF discharge vs. dielectric barrier discharge Dielectric material (glass, etc.) External electrode Dielectric material (glass, etc.) Glow discharge External electrode Microplasma discharge Dielectric barrier discharge RF discharge Uniform discharge without irregular light emissions Thread-like discharge with irregular light emissions Power supply auto-tuning function for efficient light emission Single wavelength at 172 nm allows highly efficient processing Instantaneous lamp ON / OFF operation Note: *RF indicates “radio frequency” EXCIMER LAMP LIGHT SOURCE APPLICATION EXAMPLES Surface modification using excimer lamps can be used to improve adhesion and improve the functionality of materials such as by making them hydrophilic and its applications are expanding in recent years to include a wide range of fields and materials. · Improvement of adhesiveness during printing and coating ●Surface modification of devices Excimer lamp light source Modification · Improvement of adhesive strength during bonding Excimer lamp light source · Improvement of resist wettability · Improvement of wettability in various materials such as resin, metal, and rubber Cleaning is performed just by illuminating the material with light and so is especially effective on materials not compatible with wet cleaning or that are easily damaged by heat. · Cleaning of silicon wafers and glass substrates ●Glass substrate cleaning Excimer lamp light source Cleaning · Removal of resist residues, adhesive residues, organic films, and oil stains Since bonding is carried out by surface activation using light, it does not damage materials, helps downsize equipment, reduces its cost, simplifies the process, and allows bonding only at the desired position. This technique can be applied to various materials of microfluidic devices. Bonding ■Application fields where microfluidic devices are used ●Bonding of microfluidic devices · Protein and DNA analysis · Drug discovery support · Cell experiments Irradiated surface Sample · Chemical monitoring Jointed portion Reagent PRODUCT LINEUP ■Irradiation area size 400 mm × 38 mm In-line Long and large area Use of a flat long lamp and RF (radio frequency) discharge delivers stable output with uniform irradiation over a large area and less flickering. 110 (Excimer lamp + lamp house) 700 (Power supply) 129 Weight Excimer lamp: 220 g Lamp house: 10.3 kg Power supply: 10.5 kg 480 (Unit: mm) ■Irradiation area size 86 mm × 40 mm In-line Compact 253 Compact all-in-one design with a built-in power supply eliminates the installation time and task. The EX-86U can be installed anywhere and easily set up in a production process. Weight: 4.8 kg 227 (Unit: mm) ■Irradiation area size 86 mm × 40 mm R&D Compact 233 Amaziingly Amazingly l handy ndy and easy to use design allows simple yet highly accurate testing and evaluation in any place needed. 344 Weight: 6.5 kg (Unit: mm) Ozone decomposition unit is optional. L11751-01 In-line E12499 C11997 Long and large area Excimer lamp with even higher uniformity Use of a flat long lamp and RF (radio frequency) discharge delivers stable output with uniform irradiation over a large area and less flickering. The EX-400 ensures highly accurate, high quality modification, cleaning, and bonding compared to corona discharge method, plasma method, and even other excimer lamps. INSTALLATION EXAMPLE EXHAUST DUCT FOR LAMP HOUSE COOLING EXCIMER LAMP L11751-01 LAMP HOUSE FOR EXCIMER LAMP E12499 AC 200 V TO AC 240 V SINGLE PHASE POWER SUPPLY FOR EXCIMER LAMP C11997 OZONE EXHAUST DUCT * Since ozone is generated in air when irradiated with an excimer lamp, users should enclose the irradiated area and install an ozone exhaust duct as shown in this example. SPECIFICATIONS DIMENSIONAL OUTLINE (Uuit: mm) EXCIMER LAMP L11751-01 49 110 202 4-6.5 × 10 IRRADIATION AREA 38 160 5 CONNECTOR (FOR CONNECTION TO POWER SUPPLY) 400 734 10 1Value calculated on the assumption that the irradiance is measured with a Hamamatsu UV power meter C9536/H9535-172 placed in the immediate vicinity of the lamp. AIR FLOW METER 750 700 180 Description / Value 180 W Rating 172 nm Emission wavelength 50 mW/cm2 Irradiance 1 Lamp design life 2000 h Operating / storage temperature range +5 °C to +35 °C / -25 °C to +55 °C Operating / storage humidity range 30 % to 80 % / below 80 % (no condensation) Weight 220 g ●LAMP HOUSE FOR EXCIMER LAMP E12499 Parameter TLSA0014EB LAMP HOUSE FOR EXCIMER LAMP E12499 ●POWER SUPPLY FOR EXCIMER LAMP C11997 CONNECTOR (FOR CONNECTION TO LAMP HOUSE) TOP VIEW 2Air flow rate in exhaust duct for lamp cooling 20 2-M4 DEPTH 10 40 480 100 POWER SUPPLY FOR EXCIMER LAMP C11997 Accessories CONTROL ITEMS ●SWITCH BOX C12633 HANDY CONTROLLER C12632 [External control] [Controller control] · Lamp ON / OFF · Lamp timer check and reset · Error signals, lifetime warning signal · Interlock ●Switch box C12633 (option) · Lamp ON / OFF · Timer reset ●Handy controller C12632 (option) · Lamp ON / OFF · Timer check and reset · Error signals, lifetime warning signal · Internal / external control switching SIDE VIEW 15 Parameter Description / Value Input voltage AC 200 V to AC 240 V single phase Oscillation frequency Approx. 2 MHz RF output power 0 to 180 W Power 500 VA Typ. consumption 750 VA Max. Operating / storage temperature range +5 °C to +35 °C / -25 °C to +55 °C Operating / storage humidity range 30 % to 80 % / below 80 % (no condensation) Control method External control / controller control Weight 10.5 kg REAR VIEW REMOTE CONNECTOR FOR CONNECTION TO SWITCH BOX OR EXTERNAL UNIT (D-SUB 25 PINS) POWER INPUT CONNECTOR 215 129 Parameter Description / Value 400 mm × 38 mm Irradiation area (W × H) Forced-air cooling by duct Cooling method 0.35 ± 0.08 m3/min Duct suction air flow rate 2 Operating / storage temperature range +5 °C to +35 °C / -25 °C to +55 °C Operating / storage humidity range 30 % to 80 % / below 80 % (no condensation) Weight 10.3 kg 30 FRONT VIEW CONT CONNECTOR FOR CONNECTION TO HANDY CONTROLLER TLSA0015EA • Lamp house cable (5 m) • Output cable (5 m) • External control connector (D-sub 25 pins) • Power cable (5 m) OPTIONS These are excimer lamp light source controllers ideal for experiments using an excimer lamp light source. This switch box is a simple controller that can only be used to turn an excimer lamp on or off. The handy controller allows precise lamp control and the same operations as those performed by external control. Left: Switch box, Right: Handy controller L13129 In-line C Compact Needs no extra space, no hassle for installation, and easy to set up in production line ine The “all-in-one” design with an internal power supply achieved a compact, lightweight body that can easily be set up in production sites by eliminating installation hassles with no need to choose installation space. High versatility for in-line usage makes it simple to incorporate the EX-86U into already existing lines and relocate production lines, etc. INSTALLATION EXAMPLE EX-86U AC 100 V TO AC 240 V OZONE EXHAUST DUCT * Ozone is formed in the air irradiated with vacuum UV light, so we ask that the customer install exhaust air ducts that enclose the unit as shown in the example. * The E12685 ozone decomposition unit (option) requiring no exhaust air duct can be used under certain conditions depending on the installation environment and conditions. FEATURES DIMENSIONAL OUTLINE (Unit: mm) ●Compact and lightweight ●All-in-one design with built-in power supply ●Operates on AC100 V to AC240 V COMMUNICATION CONNECTOR (RS-232C) EXT. CONTROL EXTERNAL CONTROL TERMINAL (D-SUB 15 PINS) TYPE NO. GUIDE POWER SWITCH RS-232C POWER MENU DOWM UP AC INPUT L13129-C Number in CONTROL PANEL indicates power cable specifications 1: For Japan 2: For North America 3: For EU 4: For China 5: For UK 7: For Thailand MODE LAMP AUTO ON / OFF 50 POWER INPUT CONNECTOR SPECIFICATIONS 149 40 [Panel control] [External control] · Manual / Auto irradiation · Timer (irradiation time duration) setting · Irradiation time display · Irradiation-ON signal · Various error signals · Manual/Auto irradiation · Irradiation-ON signal · Various error signals 4-4.2 × 8 · Power cable (2 m) · External control connector (D-sub 15 pins) 70 Accessories IRRADIATION AREA 71 CONTROL ITEMS 227 86 1Value calculated on the assumption that the irradiance is measured with a Hamamatsu UV power meter C9536/H9535-172 placed in the immediate vicinity of the lamp. 2When replacing the lamp, please specify the lamp type No. L12681. COOLING FAN 252 Parameter Description / Value 172 nm Emission wavelength 50 mW/cm2 Irradiance 1 Irradiation area size (W×H) 86 mm × 40 mm Lamp design life 2 2000 h Input voltage (AC) 100 V to 240 V Power consumption 150 VA or less Cooling method Forced air cooling by fan Operating / storage temperature range +5 °C to +35 °C / -25 °C to +55 °C Operating / storage humidity range 10 % to 80 % / below 80 % (no condensation) Control method Panel control / external control Weight 4.8 kg 253 COOLING FAN 120 L12530-01 R&D Compact Astonishingly easy to use & handle-like nothing you have ever seen! Extraordinary portability makes it possible to make simple yet high accuracy tests and evaluations nearly anywhere. The EX-mini designed for R&D work offers the same performance as the EX-400 & EX-86U excimer lamp sources made for in-line operation, so you can put evaluation results from the EX-mini to use right away for in-line operation tasks. FEATURES ●All-in-one light source built into the irradiation box ●Small enough to carry around with you 230 Just this one unit lets you start right away without having to design an irradiation box. ●High safety design via interlocks and error signals, etc. ●Irradiation time can be set as needed The EX-mini allows easy and accurate tests and evaluations by setting the irradiation time you need. ●Operates on AC100 V to AC240 V power source 233 Size and weight are small enough to allow carrying it around with you for field work, and there are no special restrictions on installation positions or work environments. CONTROL ITEMS SPECIFICATIONS Parameter Description / Value 172 nm Emission wavelength 50 mW/cm2 Irradiance 1 Irradiation area size (W×H) 86 mm × 40 mm 2000 h Lamp design life 2 100 V to 240 V Input voltage (AC) 150 VA or less Power consumption Forced air cooling by fan or duct Cooling method 0.25 m3/min to 0.35 m3/min Duct suction air flow rate 34 +5 °C to +35 °C / -25 °C to +55 °C Operating / storage temperature range Operating / storage humidity range 10 % to 80 % / below 80 % (no condensation) Control method Panel control / external control Weight 6.5 kg [Panel control] [External control] · Manual / Auto irradiation · Timer (irradiation time duration) setting · Irradiation time display · Irradiation-ON signal · Various error signals · Manual/Auto irradiation · Irradiation-ON signal · Various error signals 1Value calculated on the assumption that the irradiance is measured with a Hamamatsu UV power meter C9536/H9535-172 placed in the immediate vicinity of the lamp. 2When replacing the lamp, please specify the lamp type No. L12681-02. 3Suction air flow rate of cooling and ozone exhaust air ducts. 4Prepare exhaust duct or use our ozone decomposition unit E12685 (option) that does not exhaust duct. DIMENSIONAL OUTLINE (Unit: mm) 81.5 NITROGEN (N2) INDUCTION PORT COOLING FAN 48.6 DUCT CONNECTION PORT CONTROL PANEL Accessories · Power cable (2 m) · External control connector (D-sub 15 pins) · External fan shorting connector 233 EXTERNAL CONTROL TERMINAL (D-SUB 15 PINS) POWER SWITCH 230 344 10.5 POWER INPUT CONNECTOR TLSZA0036EA ●Ozone decomposition unit E12685 (option) for handy indoor exhaust (no exhaust ducts needed) OZONE DECOMPOSITION UNIT E12685 EXCIMER LAMP LIGHT SOURCE L12530-01 The EX-mini can be easily used anywhere since no exhaust duct installation is needed. Just attach the connector to the EX-mini to start operation. Ozone O3 Clean air O2 O2 O2 O3 O3 O3 Outer dimensions (W × H × D): 136 mm × 109 mm × 115 mm (not including protrusions) Weight: Approx. 1.2 kg 344 Inside dimensions (W × H × D): 204 mm × 118 mm × 139 mm (not including protrusions) * Sample stage (jack, etc.) is not supplied with the EX-mini. * Ozone decomposition unit only eliminates ozone. Toxic substances might possibly be emitted depending on the material being irradiated, so install exhaust ducts in such cases. * The internal ozone decomposition filter has a guaranteed service life of 2000 operating hours or within 1 year from the shipping date, whichever comes first. Specify the A12686 as a replacement filter. EXCIMER LAMP LIGHT SOURCE Q&A Q1 A What will I need to operate an excimer lamp light source besides the light source itself? Q2 A Is nitrogen (N2) purge required on using an excimer lamp light source? Q3 A Is it necessary to enclose the irradiated atmosphere? Q4 A How high should the ozone exhaust level be? Q5 A A power supply and exhaust air ducts are required. The excimer lamp light source is air-cooled so no cooling water or coolant is required. EX-400 EX-86U EX-mini · AC 200 V to AC 240 V single phase · Exhaust duct for cooling lamp housing · Exhaust duct for evacuating ozone · AC 100 V to AC 240 V · Exhaust duct for evacuating ozone · AC 100 V to AC 240 V · Exhaust duct for evacuating ozone * * No ozone exhaust duct is needed if using the E12685 ozone decomposition unit available as an option. Our excimer lamp light source essentially does not require nitrogen (N2) purges. However, if the irradiation distance is separated (about 5 mm or more as a rough guide), then nitrogen (N2) purge will shorten the processing time. (Excimer lamp sources EX-400 and EX-86U) The vacuum ultraviolet light emitted from excimer lamp sources is absorbed by oxygen and ozone is generated, so the irradiated air must be enclosed. We recommend using SUS (stainless steel) or aluminum as the cover material for the irradiated air since this will not deteriorate or age and will not need replacement. If you need to view the interior of the irradiated air area, then install a window made of glass. (Excimer lamp sources EX-400 and EX-86U) A precise level cannot be strictly defined since the exhaust is affected by the volumetric size of the irradiated atmosphere and air tightness in the customer’s manufacturing process. Please adjust the amount of exhaust air so that the irradiated atmosphere at the customer plant is a negative pressure (no ozone leakage occurs). EX-400 EX-86U OZONE EXHAUST DUCT How high should the forced air cooling exhaust level be? (Excimer lamp source EX-400) EXHAUST DUCT FOR LAMP HOUSE COOLING Provide exhaust at a duct suction air flow rate of 0.35 ±0.08 m3/min. Adjust the air flow so that the air flow meter needle (supplied with the unit) is within the mark. (Also adjustable with the air flow meter since the air flow meter includes a damper.) ENLARGED VIEW MARK Q6 A What precautions should I take when using an excimer lamp light source? Q7 A Are there any limits on materials for surface modification or cleaning? Q8 A How long does the processing effect from surface modification last? Q9 A Are there thermal effects on the object irradiated with vacuum ultraviolet light? Q10 A Place the target object for irradiation close to the excimer lamp source (We recommend a distance within 5 mm.). The farther the distance, the more the vacuum ultraviolet light is absorbed by oxygen, so the irradiation time takes longer until the desired effect is obtained. Surface modification gives a standard effect regardless of the material. Cleaning can breakdown and eliminate organic matter but not inorganic matter. Note: Irradiating vacuum ultraviolet light onto materials containing fluorine (fluororesin, gas containing fluorine) might exert harmful effects on the lamp due to decomposition products generated at that time, so do not irradiated vacuum ultraviolet light onto these materials. This varies with the material. It usually tends to return to the original state over time after processing. There is almost no thermal effect on the irradiated object. [Reference] When using the EX-400 excimer lamp source at a lamp-to-sample distance of 2 mm, the temperature of the sample will be 36 °C when irradiated for 1 minute and 58 °C when irradiated for 10 minutes (when the surface temperature of a polyethylene (PE) plate is measured with a thermocouple). Any mandatory legal measures to observe when using excimer lamp sources? These products must be used in compliance with regulations about radio frequency radiation. Users of these products must be familiar with the applicable laws that regulate use of radiofrequency discharge devices. For more details, refer to international or domestic laws and regulations on radio frequency radiation and comply with the required procedures listed there. EXCIMER LAMP LIGHT SOURCE ■RELATED PRODUCTS ●UV POWER METER C9536/H9535-172 This UV power meter directly detects ultraviolet light at the designated wavelengths without needing optical filters. It is ideal to monitor the absolute optical power (mW/cm2) as well as to control the accumulated UV energy. The sensor head can be detached from the controller and so can be mounted for measurements on a belt conveyor or in locations where routing cables is difficult. ■PRODUCTION PROCESS SUPPORT PRODUCTS ●LINEAR IRRADIATION TYPE UV-LED UNIT LIGHTNINGCURE® LC-L5G The LC-L5G is a linear irradiation type UV-LED light source that is ideal for drying UV coating, drying UV ink, and doing UV curing. The LC-L5G needs no chiller equipment or exhaust duct installation since it is air-cooled, small and lightweight while providing a high-output of 10 W/cm2 at 385 nm. This will reduce the initial cost and save installation space. ●UV-LED SPOT LIGHT SOURCE LIGHTNINGCURE UV-LED® LC-L1V3 The LC-L1V3 is a spot irradiation UV-LED light source ideal for UV curing. By slashing unneeded space to a minimum, we were able to build a small lightweight unit with 4-head drive that can fit into the palm of your hand. GUIDE OF LOANER / DEMO UNITS Hamamatsu provides loaner/demo units for use by customers, so if these are needed, contact us by phone or via our homepage. (Feel free to consult us for details on scheduling.) APPLICATION TO USE HIGH-FREQUENCY EQUIPMENT These products must be used in compliance with regulations about radio frequency radiation. Users of these products must be familiar with the applicable laws that regulate use of radio frequency discharge devices. For more details, refer to international or domestic laws and regulations on radio frequency radiation and comply with the required procedures listed there. Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2015 Hamamatsu Photonics K.K. HAMAMATSU PHOTONICS K.K. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected] Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected] France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected] United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: [email protected] North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 SE-164 40 Kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected] TLSZ1027E01 Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93581733, Fax: (39)02-93581741 E-mail: [email protected] China: Hamamatsu Photonics (China) Co., Ltd.: B1201 Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: [email protected] JUL. 2015 IP