VUV LIGHT H2D2 LIGHT SOURCE UNIT SOURCE L11798/-01, L11799/-01 OVERVIEW The H2D2 light source unit contains a high-brightness, high-end deuterium lamp (H2D2 lamp) that emits light at a brightness 6 times higher than our current deuterium lamps (L2D2 lamps). Despite its high brightness, the H2D2 is highly stable, has a long service life, and allows air-cooled operation by a specially designed housing. This feature makes it much more convenient and easy to use than ordinary water-cooled lamps. The H2D2 can be used in various applications and enhances equipment sensitivity and throughput. TLSZF0047 Left: Light source, Right: Power supply FEATURES APPLICATIONS ●Semiconductor inspection ●Film thickness measurement ●Electrostatic remover ●Spectrophotometry ●Environmental measurement ●Optical component inspection 650 TLS B0007EC 600 High brightness ×6 550 500 RELATIVE IRRADIANCE (%) ●High brightness: 6 times (compared to conventional model) ●High stability: Fluctuation 0.05 %p-p (Max.) Drift ±0.3 %h (Max.) ●Long Life: Warranty of 1000 hours ●Air cooling (needs no cooling water) ●External control ●Replaceable lamp BRIGHTNESS DISTRIBUTION 450 400 H2D2 lamp 350 Conventional model X2D2 lamp L2D2 lamp ( 0.5 mm) 300 250 200 150 100 50 0 -2.5 -2 -1.5 -1 -0.5 0 0.5 1 1.5 DISTANCE FROM APERTURE CENTER (mm) 2 2.5 PACKAGE CONTENTS Type No. Built-in lamp L11798 L11798-01 L11799 L11799-01 Light source to power supply cable Power supply AC cable (L12098) (L12098) (L12099) (L12099) SPECIFICATIONS ●GENERAL RATINGS Parameter Spectral distribution Window material Aperture size (arc point) Cooling method 1 Operating temperature range Storage temperature range Operating humidity range Storage Humidity range L11798 L11798-01 115 to 400 MgF2 L11799 L11799-01 160 to 400 Synthetic silica 0.6 Compressed air cooling Fan cooling +10 to +40 0 to +60 Below 80 % (no condensation) Below 85 % (no condensation) Fan cooling Compressed air cooling Unit nm — mm — °C °C — — 1A cooling fan is supplied as standard. High pressure air should be prepared by the users. ●RECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C) Parameter L11798 L11798-01 L11799 L11799-01 Warm-up time Approx. 30 Output stability Fluctuation (p-p) (Max.) 0.05 at 230 nm ±0.3 Drift (Max.) Guaranteed light source service life 2 1000 100 V to 240 V (100 V / 200 V auto switching), single phase 50 Hz to 60 Hz Input voltage (AC) 200 Power consumption (Max.) Unit s % %/h h — VA 2End of service life is defined as the time when light intensity at 230 nm falls below 50 % of its initial value. ●REPLACE LAMP SOURCE (sold separately) Parameter Spectral distribution Window material Light source L12098 115 to 400 MgF2 L11798/L11798-01 Unit nm — — L12099 160 to 400 Synthetic silica L11799/L11799-01 SPECTRAL DISTRIBUTION ●L11798/-01 (MgF2 window) ●L11799/-01 (Synthetic silica window) TLSOB0079EC TLS B0008EB 100 RELATIVE IRRADIANCE (%) RELATIVE IRRADIANCE (%) 100 80 60 40 20 0 100 120 140 160 180 200 WAVELENGTH (nm) 220 240 400 80 60 40 20 0 160 200 240 280 320 WAVELENGTH (nm) 360 400 DIMENSIONAL OUTLINES (Unit: mm) ●LIGHT SOURCE (Weight: Approx. 1.3kg) L11798, L11799 A B ARC POINT 104 ± 2 ( 26) 48.0 ± 0.1 70 44.3 VACUUM FLANGE MOUNT H2D2 LAMP (L11798) CONNECTOR (CONNECTION TO POWER SUPPLY) Type No. L11798 L11799 COOLING FAN Dimension A Dimension B 240 ± 4 110 ± 4 215 ± 4 88 ± 4 TLS A0007EA L11798-01, L11799-01 A B ARC POINT TUBE JOINT 78 ( 26) 48.0 ± 0.1 70 44.3 VACUUM FLANGE MOUNT (L11798-01) H2D2 LAMP ▲Cooling section CONNECTOR (CONNECTION TO POWER SUPPLY) Type No. Dimension A Dimension B L11798-01 231 ± 4 110 ± 4 L11799-01 204 ± 4 88 ± 4 TLS A0008EB ●POWER SUPPLY (Weight: Approx. 2.8kg) TOP VIEW LED COOLING FAN POWER ON 103 OPEN MAIN POWER SWITCH 280 C11472 LAMP ON/OFF AUTO 298 123 DEUTERIUMU LAMP POWER SUPPLY CONNECTOR (CONNECTION TO LIGHT SOUECE) OFF OUTPUT O.H.P INTERFACE AC INPUT LAMP SWITCH FRONT VIEW SIDE VIEW EXTERNAL CONTROL TERMINALS ALARM SIGNAL REAR VIEW DEUTERIUM LAMP STATUS SIGNAL DEUTERIUM LAMP ON/OFF CONTROL LIGHT SOURCE TO POWER SUPPLY CABLE LENGTH: 2000 ± 50 TLS A0009EB RELATED PRODUCTS ■VACUUM FLANGE ●OVERVIEW Various vacuum flanges are available for the H2D2 light source unit. The E3444-02 mount flange meets ICF114 flange specifications and so easily attaches to ports of most vacuum equipment. We also provide other vacuum flanges including flanges made to JIS (Japanese Industrial Standards) specifications, so users can select the best flange that matches their vacuum vessel. ●SPECIFICATIONS Parameter Seeling method Flange Mount flange Seeling force retention E3444 E3444-01 O-ring JIS VF50 JIS VG50 1.33 × 10-4 Pa L/s or less (1 × 10-6 Torr L/s) Regular — E3444-02 ICF114 ICF114 * L11798 and L11798-01 can be operated under vacuum condition. L11799 and L11799-01 are not suitable for operation under vacuum condition. ●DIMENSIONAL OUTLINES (Unit: mm) E3444 40 4- 8.4 10 O-RING 70.0 ± 0.3 P.C.D. 106 40 120 7 20 TLSOA0097EB E3444-01 40 4- 10 10 O-RING 70.0 ± 0.3 P.C.D. 100 40 120 7 20 TLSOA0098EB E3444-02 47.5 17.5 8- 8.4 O-RING 70.0 ± 0.3 114 P.C.D. 92.2 40 7 20 TLSOA0053EC Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2014 Hamamatsu Photonics K.K. HAMAMATSU PHOTONICS K.K. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected] Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected] France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected] United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: [email protected] North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 SE-164 40 Kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected] TLSZ1014E05 Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93581733, Fax: (39)02-93581741 E-mail: [email protected] NOV. 2014 IP China: Hamamatsu Photonics (China) Co., Ltd.: B1201 Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: [email protected]