Datasheet

D6F-A7/-L7/-N7
MEMS Flow Sensor
Reduction of Piping time by quick joint
connection
• Low -flow rate of natural gas and LP gas can be measured.
• 10 L/min and 30 L/min of Air can be measured.
• Compact size of 30 × 84.6 × 30 mm (H × W × D).
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
Flow rate range
Model
Natural gas (13A) 0 to 5 L/min
D6F-05N7-000
LP gas
0 to 2 L/min
D6F-02L7-000
0 to 10 L/min
D6F-10A7-000
Air
0 to 30 L/min
D6F-30A7-000
D6F-02L7-000
6.0
6.0
5.0
5.0
Output voltage (V)
Quick joint P10
D6F-05N7-000
Applicable fluid
Output voltage (V)
Flow Port Type
4.0
3.0
2.0
1.0
0.0
0.0
1.0
2.0
3.0
4.0
4.0
3.0
2.0
1.0
0.0
0.0
5.0
0.4
D6F-10A7-000
Model
Cable
D6F-CABLE1
Quick fastener
D6F-FASTENER-P10
Connections
Output voltage (V)
Type
1.2
1.6
2.0
24
30
D6F-30A7-000
6.0
6.0
5.0
5.0
Output voltage (V)
Accessories (Sold separately)
0.8
Flow rate (L/min)
Flow rate (L/min)
4.0
3.0
2.0
1.0
0.0
4.0
3.0
2.0
1.0
0.0
0
2
4
6
8
10
0
Flow rate (L/min)
6
12
18
Flow rate (L/min)
D6F-05N7-000 D6F-02L7-000
D6F-10A7-000 D6F-30A7-000
Pin No.
Connector
1: Vcc
2: Vout
3: GND
53398 (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
1:Vcc 2:Vout
3:GND
D6F-05N7-000
Flow rate
L/min (normal)
0
1.0
2.0
3.0
4.0
5.0
Output voltage
V
1.00
±0.12
1.68
±0.12
2.47
±0.12
3.31
±0.12
4.15
±0.12
5.00
±0.12
Flow rate
L/min (normal)
0
0.4
0.8
1.2
1.6
2.0
Output voltage
V
1.00
±0.12
1.96
±0.12
2.89
±0.12
3.72
±0.12
4.43
±0.12
5.00
±0.12
Flow rate
L/min (normal)
0
2.0
4.0
6.0
8.0
10.0
Output voltage
V
1.00
±0.12
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
Flow rate
L/min (normal)
0
6
12
18
24
30
Output voltage
V
1.00
±0.12
2.11
±0.12
3.12
±0.12
3.91
±0.12
4.53
±0.12
5.00
±0.12
D6F-02L7-000
D6F-10A7-000
Enlarged View
D6F-30A7-000
Measurement conditions: Power-supply voltage 12±0.1 VDC, ambient temperature 25±5°C and ambient humidity 35 to 75%RH.
18
D6F-A7/-L7/-N7
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-05N7-000
D6F-02L7-000
D6F-10A7-000
Flow Range (See note 1.)
0 to 5 L/min
0 to 2 L/min
0 to 10 L/min
Calibration Gas (See note 2.)
Natural gas (13A)
LP gas
Air
Flow Port Type
Quick joint P10
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load and Vcc of 12 to 24 VDC, GND = 0 VDC, 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ min.)
Accuracy
±3%F.S. (25°C characteristic)
Repeatability (See note 3.)
±0.3%F.S.
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
500 kPa
Pressure Drop (See note 3.)
0.06 kPa
Operating Temperature (See note 4.)
–10 to +60°C
0.03 kPa
D6F-30A7-000
0 to 30 L/min
0.32 kPa
Operating Humidity (See note 4.)
35 to 85%RH
Storage Temperature (See note 4.)
–10 to +80°C
Storage Humidity (See note 4.)
35 to 85%RH
Temperature Characteristics
±3%F.S. for 25°C characteristic at an ambient temperature of –10 to +60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
2.19 kPa
–30 to +80°C
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
72 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
Note.
D6F-05N7-000
D6F-02L7-000
D6F-10A7-000
D6F-30A7-000
The Port type of pipe fitting based on “Quick Joint P10 Type”.
* P10 shows the name of an O-ring prescribed by JIS B 2401.
* The port of O-ring ditch is based on P10 of JIS B 2406.
● Quick fastener (Sold separately)
D6F-FASTENER-P10
Return direction
Rolling direction
16.5±2
11.5±1
A
Lot No. Display
3.3
1
A
4-R1.5
2-R2
R8.5
R8.5
14
64.5
84.6±0.5
66.6
60.6
1
11
2-R2
(3.7)
8-R2.5
“10” is engraved
here.
(6)
6±0.15
3
(33.4)
12±0.15
30°
20 dia.
17 dia.
13 +0.1
-0.05 dia.
30±0.5
Note
30±0.5
8±0.3
3±0.15
15±1
2-R1
t=0.8±0.04
0.9
C0.5 (circumference)
R2 (circumference)
C0.5 (circumference)
6±0.3
3±0.15
CROSS A-A
● Cable (Sold separately)
D6F-CABLE1
200±35
100±15
Brown wire
Black wire
1. Vcc
2. Vout
Blue wire
3. GND
19
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