D6F-A7/-L7/-N7 MEMS Flow Sensor Reduction of Piping time by quick joint connection • Low -flow rate of natural gas and LP gas can be measured. • 10 L/min and 30 L/min of Air can be measured. • Compact size of 30 × 84.6 × 30 mm (H × W × D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor Flow rate range Model Natural gas (13A) 0 to 5 L/min D6F-05N7-000 LP gas 0 to 2 L/min D6F-02L7-000 0 to 10 L/min D6F-10A7-000 Air 0 to 30 L/min D6F-30A7-000 D6F-02L7-000 6.0 6.0 5.0 5.0 Output voltage (V) Quick joint P10 D6F-05N7-000 Applicable fluid Output voltage (V) Flow Port Type 4.0 3.0 2.0 1.0 0.0 0.0 1.0 2.0 3.0 4.0 4.0 3.0 2.0 1.0 0.0 0.0 5.0 0.4 D6F-10A7-000 Model Cable D6F-CABLE1 Quick fastener D6F-FASTENER-P10 Connections Output voltage (V) Type 1.2 1.6 2.0 24 30 D6F-30A7-000 6.0 6.0 5.0 5.0 Output voltage (V) Accessories (Sold separately) 0.8 Flow rate (L/min) Flow rate (L/min) 4.0 3.0 2.0 1.0 0.0 4.0 3.0 2.0 1.0 0.0 0 2 4 6 8 10 0 Flow rate (L/min) 6 12 18 Flow rate (L/min) D6F-05N7-000 D6F-02L7-000 D6F-10A7-000 D6F-30A7-000 Pin No. Connector 1: Vcc 2: Vout 3: GND 53398 (Made by Molex Japan) Use the following connectors for connections to the D6F: Housing 51021 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 1:Vcc 2:Vout 3:GND D6F-05N7-000 Flow rate L/min (normal) 0 1.0 2.0 3.0 4.0 5.0 Output voltage V 1.00 ±0.12 1.68 ±0.12 2.47 ±0.12 3.31 ±0.12 4.15 ±0.12 5.00 ±0.12 Flow rate L/min (normal) 0 0.4 0.8 1.2 1.6 2.0 Output voltage V 1.00 ±0.12 1.96 ±0.12 2.89 ±0.12 3.72 ±0.12 4.43 ±0.12 5.00 ±0.12 Flow rate L/min (normal) 0 2.0 4.0 6.0 8.0 10.0 Output voltage V 1.00 ±0.12 1.75 ±0.12 2.60 ±0.12 3.45 ±0.12 4.25 ±0.12 5.00 ±0.12 Flow rate L/min (normal) 0 6 12 18 24 30 Output voltage V 1.00 ±0.12 2.11 ±0.12 3.12 ±0.12 3.91 ±0.12 4.53 ±0.12 5.00 ±0.12 D6F-02L7-000 D6F-10A7-000 Enlarged View D6F-30A7-000 Measurement conditions: Power-supply voltage 12±0.1 VDC, ambient temperature 25±5°C and ambient humidity 35 to 75%RH. 18 D6F-A7/-L7/-N7 MEMS Flow Sensor Characteristics/Performance Model D6F-05N7-000 D6F-02L7-000 D6F-10A7-000 Flow Range (See note 1.) 0 to 5 L/min 0 to 2 L/min 0 to 10 L/min Calibration Gas (See note 2.) Natural gas (13A) LP gas Air Flow Port Type Quick joint P10 Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load and Vcc of 12 to 24 VDC, GND = 0 VDC, 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ min.) Accuracy ±3%F.S. (25°C characteristic) Repeatability (See note 3.) ±0.3%F.S. Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ) Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 500 kPa Pressure Drop (See note 3.) 0.06 kPa Operating Temperature (See note 4.) –10 to +60°C 0.03 kPa D6F-30A7-000 0 to 30 L/min 0.32 kPa Operating Humidity (See note 4.) 35 to 85%RH Storage Temperature (See note 4.) –10 to +80°C Storage Humidity (See note 4.) 35 to 85%RH Temperature Characteristics ±3%F.S. for 25°C characteristic at an ambient temperature of –10 to +60°C Insulation Resistance Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) 2.19 kPa –30 to +80°C Dielectric Strength Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 72 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0°C, 101.3 kPa. Dry gas (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) ● MEMS Flow Sensors Note. D6F-05N7-000 D6F-02L7-000 D6F-10A7-000 D6F-30A7-000 The Port type of pipe fitting based on “Quick Joint P10 Type”. * P10 shows the name of an O-ring prescribed by JIS B 2401. * The port of O-ring ditch is based on P10 of JIS B 2406. ● Quick fastener (Sold separately) D6F-FASTENER-P10 Return direction Rolling direction 16.5±2 11.5±1 A Lot No. Display 3.3 1 A 4-R1.5 2-R2 R8.5 R8.5 14 64.5 84.6±0.5 66.6 60.6 1 11 2-R2 (3.7) 8-R2.5 “10” is engraved here. (6) 6±0.15 3 (33.4) 12±0.15 30° 20 dia. 17 dia. 13 +0.1 -0.05 dia. 30±0.5 Note 30±0.5 8±0.3 3±0.15 15±1 2-R1 t=0.8±0.04 0.9 C0.5 (circumference) R2 (circumference) C0.5 (circumference) 6±0.3 3±0.15 CROSS A-A ● Cable (Sold separately) D6F-CABLE1 200±35 100±15 Brown wire Black wire 1. Vcc 2. Vout Blue wire 3. GND 19