Datasheet

D6F-A5
MEMS Flow Sensor
High-accuracy Sensing with a Compact
Body for Flow Rates Up to 50 L/min.
• Accurately detects a mass flow rate of 10 to 50 L/min.
• A compact size of 30 × 78 × 30 mm (H × W × D).
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-10A5-000
Manifold
Air
Flow rate range
Model
0 to 10 L/min
D6F-10A5-000
0 to 20 L/min
D6F-20A5-000
0 to 50 L/min
D6F-50A5-000
Accessory (Sold separately)
Type
D6F-20A5-000
6.0
6.0
5.0
5.0
Output voltage (V)
Applicable fluid
Output voltage (V)
Flow Port Type
4.0
3.0
2.0
1.0
0.0
0.0
2.0
4.0
6.0
Flow rate (L/min)
8.0
10.0
40.0
50.0
4.0
3.0
2.0
1.0
0.0
0.0
4.0
8.0
12.0
Flow rate (L/min)
16.0
20.0
Model
Cable
D6F-CABLE1
D6F-50A5-000
6.0
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
Pin No.
Connector
1: Vcc
2: Vout
3: GND
53398 (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
1: Vcc 2: Vout 3: GND
5.0
Output voltage (V)
Connections
4.0
3.0
2.0
1.0
0.0
0.0
10.0
20.0
30.0
Flow rate (L/min)
D6F-10A5-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
2.0
4.0
6.0
8.0
10.0
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
4.0
8.0
12.0
16.0
20.0
1.93
±0.12
2.87
±0.12
3.70
±0.12
4.41
±0.12
5.00
±0.12
10
20
30
40
50
2.45
±0.12
3.51
±0.12
4.20
±0.12
4.66
±0.12
5.00
±0.12
D6F-20A5-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
D6F-50A5-000
Enlarged View
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
14
D6F-A5
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-10A5-000
Flow Range (See note 1.)
D6F-20A5-000
0 to 10 L/min
0 to 20 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
Manifold
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.3% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS/aluminum alloy
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
500 kPa
Pressure Drop (See note 3.)
0.8 kPa
Operating Temperature (See note 4.)
−10 to 60°C
2.9 kPa
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−30 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
D6F-50A5-000
0 to 50 L/min
17.2 kPa
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
103 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
Mounting Hole
Dimensions
Lot number label
Two, 1.4±0.1
Four, 3.2-dia. through holes
Four, M3 holes
(3.7)
78±0.5
66±0.1
66±0.05
(6)
(30.05)
Two, 5 dia.
14±0.05
6
30±0.5
30±0.5
● Cable (Sold separately)
D6F-CABLE1
200±35
100±15
Brown wire
Black wire
1. Vcc
2. Vout
Blue wire
3. GND
15
D6F-A6/-N6
MEMS Flow Sensor
High-accuracy Sensing with a Compact
Body for Flow Rates up to 50 L/min.
• Accurately detects a mass flow rate of 10 to 50 L/min.
• A compact size of 30 × 78 × 30 mm (H × W × D).
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
Natural gas (13A) 0 to 5 L/min
0 to 10 L/min
Rc 1/4 thread
Air
NPT 1/8 thread
NPT 1/2 thread
D6F-05N6-000
D6F-10A6-000
D6F-20A6-000
D6F-50A6-000
D6F-50A62-000
5.0
D6F-50A6-000
0 to 10 L/min
D6F-10A61-000
0 to 20 L/min
D6F-20A61-000
0 to 50 L/min
D6F-50A61-000
0 to 50 L/min
D6F-50A62-000
4.0
3.0
2.0
1.0
0.0
0.0
D6F-10A61-000
D6F-20A61-000
D6F-50A61-000
1: Vcc
2: Vout
3: GND
53398 (Made by Molex Japan)
AWG28 to AWG26
1: Vcc 2: Vout 3: GND
2.0
4.0
6.0
Flow rate (L/min)
8.0
Output voltage (V)
4.0
3.0
2.0
1.0
0.0
0.0
10.0
D6F-50A6-000
D6F-50A61-000
D6F-50A62-000
6.0
5.0
5.0
4.0
3.0
2.0
1.0
10.0
4.0
8.0
12.0
Flow rate (L/min)
16.0
20.0
4.0
5.0
D6F-05N6-000
6.0
0.0
0.0
Use the following connectors for connections to the D6F:
Housing
51021 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
6.0
5.0
0 to 50 L/min
Connections
Connector
6.0
D6F-20A6-000
D6F-CABLE1
D6F-20A6-000
D6F-20A61-000
D6F-05N6-000
Model
Cable
Pin No.
D6F-10A6-000
D6F-10A61-000
D6F-10A6-000
0 to 20 L/min
Accessory (Sold separately)
Type
Model
Output voltage (V)
Flow rate range
Output voltage (V)
Applicable fluid
Output voltage (V)
Flow Port Type
20.0
30.0
Flow rate (L/min)
40.0
4.0
3.0
2.0
1.0
0.0
0.0
50.0
1.0
2.0
3.0
Flow rate (L/min)
D6F-05N6-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
1.0
2.0
3.0
4.0
5.0
1.71
±0.12
2.53
±0.12
3.40
±0.12
4.22
±0.12
5.00
±0.12
D6F-10A6-000/D6F-10A61-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
2.0
4.0
6.0
8.0
10.0
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
12
16
20
3.70
±0.12
4.41
±0.12
5.00
±0.12
D6F-20A6-000/D6F-20A61-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
4
1.93
±0.12
8
2.87
±0.12
D6F-50A6-000/D6F-50A61-000/D6F-50A62-000
Enlarged View
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
10
20
30
40
50
2.45
±0.12
3.51
±0.12
4.20
±0.12
4.66
±0.12
5.00
±0.12
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
16
D6F-A6/-N6
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-05N6-000 D6F-10A6-000 D6F-20A6-000 D6F-50A6-000 D6F-10A61-000 D6F-20A61-000 D6F-50A61-000 D6F-50A62-000
Flow Range (See note 1.)
0 to 5 L/min
0 to 10 L/min
Natural gas
Calibration Gas (See note 2.)
0 to 20 L/min
0 to 50 L/min
0 to 10 L/min
Flow Port Type
Rc 1/4 thread
Electrical Connection
Three-pin connector
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10kΩ min.)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.3% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS/aluminum alloy
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
500 kPa
0.68 kPa
−10 to 60°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.) −10 to 80°C
0.10 kPa
0.28 kPa
1.44 kPa
0.15 kPa
thread
0.52 kPa
2.31 kPa
2.16 kPa
−30 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
103 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
0 to 50 L/min
NPT 1/2
NPT 1/8 thread
Power Supply
Operating Temperature (See note 4.)
0 to 50 L/min
Air
(13A)
Pressure Drop (See note 3.)
0 to 20 L/min
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
[Models Other Than D6F-50A62 Models]
Lot number label
12±0.2
Mounting Hole
Dimensions
[D6F-50A62]
Lot number label
12
Two, 3.2-dia. Holes
(3.7)
78±0.5
66±0.2
66±0.05
(3.7)
92
66
(6)
(6)
(30.4)
(37.05)
D6F-05N6-000
D6F-10A6-000
D6F-20A6-000
D6F-50A6-000
D6F-10A61-000
D6F-20A61-000
D6F-50A61-000
Two, tapped threads
for Rc 1/4 pipes
6
Two, M3 holes,
Effective screw depth: 4.5
12±0.05
13
Two, tapped threads
for NPT 1/2 pipes
30±0.5
Two, M3 holes,
Effective screw depth: 2.5
D6F-50A62-000
30±0.5
30±0.5
Two, tapped threads
for NPT 1/8 pipes
30±0.5
30±0.5
30±0.5
● Cable (Sold separately)
D6F-CABLE1
200±35
100±15
Brown wire
Black wire
1. Vcc
2. Vout
Blue wire
3. GND
17
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