D6F-A5 MEMS Flow Sensor High-accuracy Sensing with a Compact Body for Flow Rates Up to 50 L/min. • Accurately detects a mass flow rate of 10 to 50 L/min. • A compact size of 30 × 78 × 30 mm (H × W × D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-10A5-000 Manifold Air Flow rate range Model 0 to 10 L/min D6F-10A5-000 0 to 20 L/min D6F-20A5-000 0 to 50 L/min D6F-50A5-000 Accessory (Sold separately) Type D6F-20A5-000 6.0 6.0 5.0 5.0 Output voltage (V) Applicable fluid Output voltage (V) Flow Port Type 4.0 3.0 2.0 1.0 0.0 0.0 2.0 4.0 6.0 Flow rate (L/min) 8.0 10.0 40.0 50.0 4.0 3.0 2.0 1.0 0.0 0.0 4.0 8.0 12.0 Flow rate (L/min) 16.0 20.0 Model Cable D6F-CABLE1 D6F-50A5-000 6.0 D6F-10A5-000 D6F-20A5-000 D6F-50A5-000 Pin No. Connector 1: Vcc 2: Vout 3: GND 53398 (Made by Molex Japan) Use the following connectors for connections to the D6F: Housing 51021 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 1: Vcc 2: Vout 3: GND 5.0 Output voltage (V) Connections 4.0 3.0 2.0 1.0 0.0 0.0 10.0 20.0 30.0 Flow rate (L/min) D6F-10A5-000 Flow rate L/min (normal) Output voltage V 0 1.00 ±0.12 2.0 4.0 6.0 8.0 10.0 1.75 ±0.12 2.60 ±0.12 3.45 ±0.12 4.25 ±0.12 5.00 ±0.12 4.0 8.0 12.0 16.0 20.0 1.93 ±0.12 2.87 ±0.12 3.70 ±0.12 4.41 ±0.12 5.00 ±0.12 10 20 30 40 50 2.45 ±0.12 3.51 ±0.12 4.20 ±0.12 4.66 ±0.12 5.00 ±0.12 D6F-20A5-000 Flow rate L/min (normal) Output voltage V 0 1.00 ±0.12 D6F-50A5-000 Enlarged View Flow rate L/min (normal) Output voltage V 0 1.00 ±0.12 Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%. 14 D6F-A5 MEMS Flow Sensor Characteristics/Performance Model D6F-10A5-000 Flow Range (See note 1.) D6F-20A5-000 0 to 10 L/min 0 to 20 L/min Calibration Gas (See note 2.) Air Flow Port Type Manifold Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ) Accuracy ±3% FS (25°C characteristic) Repeatability (See note 3.) ±0.3% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ) Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS/aluminum alloy Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 500 kPa Pressure Drop (See note 3.) 0.8 kPa Operating Temperature (See note 4.) −10 to 60°C 2.9 kPa Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) −30 to 80°C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics ±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) D6F-50A5-000 0 to 50 L/min 17.2 kPa Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 103 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0°C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) ● MEMS Flow Sensors D6F-10A5-000 D6F-20A5-000 D6F-50A5-000 Mounting Hole Dimensions Lot number label Two, 1.4±0.1 Four, 3.2-dia. through holes Four, M3 holes (3.7) 78±0.5 66±0.1 66±0.05 (6) (30.05) Two, 5 dia. 14±0.05 6 30±0.5 30±0.5 ● Cable (Sold separately) D6F-CABLE1 200±35 100±15 Brown wire Black wire 1. Vcc 2. Vout Blue wire 3. GND 15 D6F-A6/-N6 MEMS Flow Sensor High-accuracy Sensing with a Compact Body for Flow Rates up to 50 L/min. • Accurately detects a mass flow rate of 10 to 50 L/min. • A compact size of 30 × 78 × 30 mm (H × W × D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor Natural gas (13A) 0 to 5 L/min 0 to 10 L/min Rc 1/4 thread Air NPT 1/8 thread NPT 1/2 thread D6F-05N6-000 D6F-10A6-000 D6F-20A6-000 D6F-50A6-000 D6F-50A62-000 5.0 D6F-50A6-000 0 to 10 L/min D6F-10A61-000 0 to 20 L/min D6F-20A61-000 0 to 50 L/min D6F-50A61-000 0 to 50 L/min D6F-50A62-000 4.0 3.0 2.0 1.0 0.0 0.0 D6F-10A61-000 D6F-20A61-000 D6F-50A61-000 1: Vcc 2: Vout 3: GND 53398 (Made by Molex Japan) AWG28 to AWG26 1: Vcc 2: Vout 3: GND 2.0 4.0 6.0 Flow rate (L/min) 8.0 Output voltage (V) 4.0 3.0 2.0 1.0 0.0 0.0 10.0 D6F-50A6-000 D6F-50A61-000 D6F-50A62-000 6.0 5.0 5.0 4.0 3.0 2.0 1.0 10.0 4.0 8.0 12.0 Flow rate (L/min) 16.0 20.0 4.0 5.0 D6F-05N6-000 6.0 0.0 0.0 Use the following connectors for connections to the D6F: Housing 51021 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires 6.0 5.0 0 to 50 L/min Connections Connector 6.0 D6F-20A6-000 D6F-CABLE1 D6F-20A6-000 D6F-20A61-000 D6F-05N6-000 Model Cable Pin No. D6F-10A6-000 D6F-10A61-000 D6F-10A6-000 0 to 20 L/min Accessory (Sold separately) Type Model Output voltage (V) Flow rate range Output voltage (V) Applicable fluid Output voltage (V) Flow Port Type 20.0 30.0 Flow rate (L/min) 40.0 4.0 3.0 2.0 1.0 0.0 0.0 50.0 1.0 2.0 3.0 Flow rate (L/min) D6F-05N6-000 Flow rate L/min (normal) Output voltage V 0 1.00 ±0.12 1.0 2.0 3.0 4.0 5.0 1.71 ±0.12 2.53 ±0.12 3.40 ±0.12 4.22 ±0.12 5.00 ±0.12 D6F-10A6-000/D6F-10A61-000 Flow rate L/min (normal) Output voltage V 0 1.00 ±0.12 2.0 4.0 6.0 8.0 10.0 1.75 ±0.12 2.60 ±0.12 3.45 ±0.12 4.25 ±0.12 5.00 ±0.12 12 16 20 3.70 ±0.12 4.41 ±0.12 5.00 ±0.12 D6F-20A6-000/D6F-20A61-000 Flow rate L/min (normal) Output voltage V 0 1.00 ±0.12 4 1.93 ±0.12 8 2.87 ±0.12 D6F-50A6-000/D6F-50A61-000/D6F-50A62-000 Enlarged View Flow rate L/min (normal) Output voltage V 0 1.00 ±0.12 10 20 30 40 50 2.45 ±0.12 3.51 ±0.12 4.20 ±0.12 4.66 ±0.12 5.00 ±0.12 Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%. 16 D6F-A6/-N6 MEMS Flow Sensor Characteristics/Performance Model D6F-05N6-000 D6F-10A6-000 D6F-20A6-000 D6F-50A6-000 D6F-10A61-000 D6F-20A61-000 D6F-50A61-000 D6F-50A62-000 Flow Range (See note 1.) 0 to 5 L/min 0 to 10 L/min Natural gas Calibration Gas (See note 2.) 0 to 20 L/min 0 to 50 L/min 0 to 10 L/min Flow Port Type Rc 1/4 thread Electrical Connection Three-pin connector 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10kΩ min.) Accuracy ±3% FS (25°C characteristic) Repeatability (See note 3.) ±0.3% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ) Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS/aluminum alloy Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 500 kPa 0.68 kPa −10 to 60°C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) −10 to 80°C 0.10 kPa 0.28 kPa 1.44 kPa 0.15 kPa thread 0.52 kPa 2.31 kPa 2.16 kPa −30 to 80°C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics ±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 103 g Note: 1. Note: 2. Note: 3. Note: 4. 0 to 50 L/min NPT 1/2 NPT 1/8 thread Power Supply Operating Temperature (See note 4.) 0 to 50 L/min Air (13A) Pressure Drop (See note 3.) 0 to 20 L/min Volumetric flow rate at 0°C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) ● MEMS Flow Sensors [Models Other Than D6F-50A62 Models] Lot number label 12±0.2 Mounting Hole Dimensions [D6F-50A62] Lot number label 12 Two, 3.2-dia. Holes (3.7) 78±0.5 66±0.2 66±0.05 (3.7) 92 66 (6) (6) (30.4) (37.05) D6F-05N6-000 D6F-10A6-000 D6F-20A6-000 D6F-50A6-000 D6F-10A61-000 D6F-20A61-000 D6F-50A61-000 Two, tapped threads for Rc 1/4 pipes 6 Two, M3 holes, Effective screw depth: 4.5 12±0.05 13 Two, tapped threads for NPT 1/2 pipes 30±0.5 Two, M3 holes, Effective screw depth: 2.5 D6F-50A62-000 30±0.5 30±0.5 Two, tapped threads for NPT 1/8 pipes 30±0.5 30±0.5 30±0.5 ● Cable (Sold separately) D6F-CABLE1 200±35 100±15 Brown wire Black wire 1. Vcc 2. Vout Blue wire 3. GND 17