D6F-A3 MEMS Flow Sensor High-accuracy Sensing with a Thin, Compact Body. • A thin, lightweight flow sensor. • Unique flow path structure provides high precision and fast response. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-03A3-000 Flow rate range Air 0 to 3 L/min Model D6F-03A3-000 Accessory (Sold separately) Type Model Cable D6F-CABLE2 6.0 5.0 Output voltage (V) Applicable fluid 4.0 3.0 2.0 1.0 0.0 0.0 0.6 1.2 1.8 Flow rate (L/min) 2.4 3.0 D6F-03A3-000 Connections D6F-03A3-000 1: GND Output voltage V 2: Vout 3: Vcc Enlarged View Pin No. 1: GND 2: Vout 3: Vcc Connector SM03B-SRSS-TB (Made by J.S.T. Mfg. Co.) Use the following connectors made by J.S.T. Mfg. Co. for connections to the Sensor: • Pressure-welded Connector Socket: 03SR-3S Wires: AWG30 Or • Crimp Connector Contacts: SSH-003T-P0.2 Housing: SHR-03V-S or SHR-03V-S-B Wires: AWG32 to AWG28 12 Flow rate L/min (normal) 0 1.00 ±0.2 0.6 2.83 ±0.2 1.2 3.77 ±0.2 1.8 4.34 ±0.2 2.4 4.72 ±0.2 3.0 5.00 ±0.2 Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%. D6F-A3 MEMS Flow Sensor Characteristics/Performance Model D6F-03A3-000 Flow Range (See note 1.) 0 to 3 L/min Calibration Gas (See note 2.) Air Flow Port Type M5 thread Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ) Accuracy ±5% FS (25°C characteristic) Repeatability (See note 3.) ±0.7% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ) Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 200 kPa Pressure Drop (See note 3.) 0.45 kPa Operating Temperature (See note 4.) 0 to 50°C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) −10 to 60°C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics ±5% FS for 25°C characteristic at an ambient temperature of 0 to 50°C Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 5.3 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0°C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) ● MEMS Flow Sensors D6F-03A3-000 Mounting Hole Dimensions OUT side D6F -03A3-000 MADE IN JAPAN IN side 8 M5 threads (Effective thread depth: 3.1) +0.15 Two, 18±0.05 M3 screw holes 14 16.8 3.1−0.05 6.8 3.4-dia. 3.1 18±0.15 36.6 +0.15 −0.05 dia. through hole ● Cable (Sold separately) D6F-CABLE2 White wire Black wire 3: GND Red wire 180±10 1: Vcc 2: Vout 15±3 (5) 13