Datasheet

D6F-A3
MEMS Flow Sensor
High-accuracy Sensing with a Thin,
Compact Body.
• A thin, lightweight flow sensor.
• Unique flow path structure provides high precision and fast
response.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-03A3-000
Flow rate range
Air
0 to 3 L/min
Model
D6F-03A3-000
Accessory (Sold separately)
Type
Model
Cable
D6F-CABLE2
6.0
5.0
Output voltage (V)
Applicable fluid
4.0
3.0
2.0
1.0
0.0
0.0
0.6
1.2
1.8
Flow rate (L/min)
2.4
3.0
D6F-03A3-000
Connections
D6F-03A3-000
1: GND
Output voltage
V
2: Vout
3: Vcc
Enlarged View
Pin No.
1: GND
2: Vout
3: Vcc
Connector
SM03B-SRSS-TB (Made by J.S.T. Mfg. Co.)
Use the following connectors made by J.S.T. Mfg. Co. for
connections to the Sensor:
• Pressure-welded Connector
Socket: 03SR-3S
Wires: AWG30
Or
• Crimp Connector
Contacts: SSH-003T-P0.2
Housing: SHR-03V-S or SHR-03V-S-B
Wires: AWG32 to AWG28
12
Flow rate
L/min (normal)
0
1.00
±0.2
0.6
2.83
±0.2
1.2
3.77
±0.2
1.8
4.34
±0.2
2.4
4.72
±0.2
3.0
5.00
±0.2
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
D6F-A3
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-03A3-000
Flow Range (See note 1.)
0 to 3 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
M5 thread
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±5% FS (25°C characteristic)
Repeatability (See note 3.)
±0.7% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
200 kPa
Pressure Drop (See note 3.)
0.45 kPa
Operating Temperature (See note 4.)
0 to 50°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−10 to 60°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±5% FS for 25°C characteristic at an ambient temperature of 0 to 50°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
5.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
D6F-03A3-000
Mounting Hole Dimensions
OUT side
D6F
-03A3-000
MADE IN JAPAN
IN side
8
M5 threads
(Effective thread depth: 3.1)
+0.15
Two,
18±0.05
M3 screw holes
14
16.8
3.1−0.05
6.8
3.4-dia.
3.1
18±0.15
36.6
+0.15
−0.05
dia. through hole
● Cable (Sold separately)
D6F-CABLE2
White wire
Black wire
3: GND
Red wire
180±10
1: Vcc
2: Vout
15±3
(5)
13
Similar pages