MEMS Mass Flow Sensor D6F-03A3-000 Compact, sensors featuring MEMS technology for precision mass airflow measurement. • Precision unidirectional mass airflow up to 3 LPM • Fast Response (< 5 msec, typical) • Ultra-compact size 36.6 (L) x 8 (W) x 16.8 (H) mm • Low power consumption • RoHS Compliant Ordering Information Description Mass Flow Sensor Case Applicable gas Flow range** Thermoplastic resin / Aluminum Alloy Air* 0-3L/min D6F-03A3-000 --- --- --- D6F-CABLE2 Cable Connector Assembly Model Note: Cable Assembly is sold separately. * Contact Omron for other gases. **Mass flow converted to volumetric flow (standard liters per minute) at 0°C and 1 atm. ■ Application examples • • • • Pick and place systems Industrial processes Leak detection Spectroscopy • • • • Mass flow controllers Scientific / test equipment Environmental comfort controls Fuel cell controls Ratings ■ Absolute Maximum Rating Item Symbol Rating Unit Power supply VCC 26.4 VDC Output voltage VOUT 6 VDC ■ Electrical Performance Item Symbol Condition Min. Max. Unit Power supply VCC — 10.8 26.4 VDC Operating temperature TOPR No condensation or icing 0 50 °C Output voltage (max.) VOH Load resistance: 10kΩ 5 5.7 VDC Output voltage (min.) VOL Load resistance: 10kΩ 0 1 VDC MEMS Mass Flow Sensor D6F-03A3-000 19 Characteristics Model D6F-03A3-000 Flow rate @ 0°C and 101.3 kPa 0-3L/min Case material Thermoplastic resin Applicable gas* Air Electrical connection Connector (3 wire) Withstand pressure (max.) 200kPa (about 30 psi) Accuracy ±5% F.S. max of detected characteristics at 25°C Operating temperature 0 to 50°C (with no icing or condensation) Storage temperature -10 to 60°C (with no icing or condensation) Operating and Storage humidity 85% RH max (with no icing or condensation) Power supply voltage 10.8 to 26.4 VDC Output signal 1 to 5 VDC, Analog Output (Load resistance: 10kΩ) Current consumption 15 mA max. (No-Load with VCC = 12 to 24 VDC, VSS = 0V and 25°C) Insulation resistance 20MΩ min. at 500 VDC, between lead terminal and case Dielectric strength 500 VAC, 50/60 Hz, for 1 minute. (Leakage current typ <1 mA.), between the lead terminals and case * Contact Omron for other gases. Operating Characteristics D6F-03A3-000 6.0 Output voltage(V) 5.0 4.0 3.0 2.0 1.0 0.0 0.0 0.6 1.2 1.8 2.4 3.0 Flow rate(L/min) D6F-03A3-000 Flow Rate (LPM) 0 Output Voltage (VDC) 1.00 ± 0.2 20 0.6 1.2 1.8 2.4 3.0 2.83 ± 0.2 3.77 ± 0.2 4.34 ± 0.2 4.72 ± 0.2 5.00 ± 0.2 MEMS Mass Flow Sensor D6F-03A3-000 Test Results (typical performance) (5 samples, repeated 10 times each) 3.0 Repeatability (%F.S.) 2.0 1.0 0.0 -1.0 -2.0 -3.0 0.0 0.5 1.0 1.5 2.0 Flow Rate (lpm) 2.5 3.0 Dimensions Unit: mm D6F-03A3-000 1: GND 2: Vout 3: Vcc Enlarged view Outlet Mounting Hole Dimensions Inlet 8 Two, M3 screw holes 18±0.05 M5 screw (Effective depth: 4.5) +0.15 Connect using the following from JST; 14 16.8 3.1−0.05 6.8 3.4 dia. 18±0.15 36.6 +0.15 3.1 −0.05 dia. through holes Housing: SHR-03V-S-B or SHR-03V-2 Terminal: SH-003T-P0.2 Wire: 28-32 AWG Note: 1. When installing the pipes, use M5 screws for the joints and tighten to a torque of 1.5 N•m max. Use sealing tape to make the joints airtight. 2. Mount to a flat surface using an M3 pan head screw, tightened to 0.59 N•m max. torque. Applicable Cable for D6F-03A3-000 (Optional - sold separately) part number: D6F-CABLE2 Black wire White wire 1. GND 2. Vout 15±3 Red wire (5) 180±10 3. Vcc Note: Be sure to read the precautions and information common to all D6F sensors, contained in the Technical User’s Guide, “D6F Technical Information” for correct use. MEMS Mass Flow Sensor D6F-03A3-000 21 All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527. OMRON ON-LINE OMRON ELECTRONIC COMPONENTS LLC Global - http://www.omron.com USA - http://www.components.omron.com 55 E. Commerce Drive, Suite B Schaumburg, IL 60173 847-882-2288 Cat. No. X305-E-1 10/10 MEMS Mass Flow Sensor Specifications subject to change without notice D6F-03A3-000 Printed in USA