Datasheet

D6F-V
MEMS Flow Sensor
A Compact Sensor That Uses
OMRON’s Unique Flow Path Structure
for High-performance Flow Rate
Measurement.
• Anti-dust performance enhanced by OMRON’s unique
three-dimensional flow path structure.
• Extremely compact, measuring only 24 × 14 × 8 mm.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-V03A1
Flow velocity range
Air
0 to 3 m/s
D6F-V03A1
Accessory (Sold separately)
Type
Model
Cable
D6F-CABLE2
Connections
D6F-V03A1
2. Vout.
2.5
Model
1. Vcc.
3. GND.
Output voltage (V)
Applicable fluid
2.0
1.5
1.0
0.5
0.0
0.0
0.75
1.5
2.25
Flow velocity (m/s)
3.0
D6F-V03A1
Flow velocity
m/s
0
0.75
Output voltage
V
0.5±0.15
0.7±0.15
1.5
2.25
1.11±0.15 1.58±0.15
3
2±0.15
The flow velocity is the value calculated from the mass flow rate in OMRON’s
specified 48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are
shown in Figure 1 below.
Figure 1: Wind Tunnel
Enlarged View
Pin No.
1: Vcc
2: Vout
Flow velocity
Air volume sensor measurement position
Mesh
48 dia.
3: GND
Connector
SM03B-SRSS-TB (made by J.S.T. Mfg. Co.)
Use the following connectors from J.S.T. Mfg. Co. Ltd. to connect
23.6
60
Measurement conditions: Power supply voltage of 3.3 VDC, ambient temperature of 25°C, and dry air.
the D6F:
• Pressure-welded Connectors
Socket: 03SR-3S
Wires: AWG30
Or
• Crimp Connectors
Contact: SSH-003T-P0.2
Housing: SHR-03V-S
• Wires: AWG32 to AWG28
33
D6F-V
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-V03A1
Flow Range (See note 1.)
0 to 3 m/s
Calibration Gas (See note 2.)
Air
Electrical Connection
Three-pin connector
Power Supply
3.15 to 3.45 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 3.3 VDC, and at 25°C
Output Voltage
0.5 to 2 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±10% FS (25°C characteristic)
Repeatability (See note 3.)
±1.5% FS
Output Voltage (Max.)
2.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
12 VDC
Rated Output Voltage
3 VDC
Case
PBT
Degree of Protection
IEC IP40 (except for flow inlet and outlet)
Operating Temperature (See note 4.) −10 to 60°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±20% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
5.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 25°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
D6F-V03A1
Lot number label
Three, R0.5
22
21
3.1 ±0.1 dia.
3.6 ±0.1 dia.
16
4
(3.7)
13
11
2
14
0.8
4.4
1.6
Flow inlet
15.2
18.2
24
Three, R1.8
● Cable (Sold separately)
D6F-CABLE2
White wire
Black wire
3: GND
Red wire
180±10
1: Vcc
2: Vout
15±3
34
(5)
8
Flow outlet
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