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SMART Sensor Series
Laser Displacement Sensor CMOS Type
Model ZX2 Series
Stable, Easy & Affordable
New Regular-reflective Sensor Head
Designed for Optimal Wafer Measurement
Black coating
White coating
Rough machined
metal surface
Metallic luster
One Solution for Any Application
Height/Length
Level detection
Thin connector assembly
Shape validation for molded parts
Positioning
Double feed
Robot hand positioning
Warpage
Tray warpage measurement
Thickness
PCB double feed detection
Wafer thickness measurement
New
Laser Displacement Sensor CMOS Type
ZX2 Series
Realize stable measurements
*1
Resolution 1.5µm
Realize stable measurements at 10µm
*2
*3
Linearity 0.05% F.S.
Reliable measurement of moving objects
Unaffected by environmental changes
Measurement cycle
30µs
Temperature characteristic*4
S./ C*5
0.02% F.S./°C
Stable Wafer Measurement
Regular-reflective
Sensor Head
*1 When employing Models ZX2-LD50/LD50L (50mm type)
*2 Linearity : Maximum error produced when measuring within measurement range
*3 A linearity of ±0.05% F.S. indicates that the maximum error is 10 µm when the
ZX2-LD50L is used with a 40 to 50-mm measurement range, or 35 µm when the
ZX2-LD100L is used with a 65 to 100-mm measurement range.
*4 Temperature characteristic : Error produced when the ambient temperature varies by 1°C
*5 Linearity ±0.02% F.S./°C indicates the maximum error is 4µm when the ambient
temperature varies by 1°C in the case of using Models ZX2-LD50/LD50L with a
measurement range ±10mm.
2
Stable Measurement and Easy to Use
Stable measurements in case of color/material
and moving objects
Dynamic range of two million times
For high reflectance,
brightly colored workpiece
CMOS Image Sensor
Receiver element
For low reflectance,
darkly colored workpiece
Use a low
power laser
beam!
CMOS
Image
Sensor
Use a high
power laser
beam!
Stable measurements on objects with changing color/material
Linearity characteristic of
existing product according to material
1
0.8
0.6
0.4
0.2
0
-0.2
-0.4
-0.6
-0.6
-1
-10 -8
Linearity characteristic of
the ZX2 according to material
Linearity (%FS)
Linearity (%FS)
A line beam is used in addition
to an emitter beam when
dealing with rough surfaces to
average out the amount of
reflected light and to offset the
amount of light received at a
high-speed measurement
period of 30 µs in order to
reduce variations in received
light and to enable stable
measurements for moving
objects.
-6
-4
-2
0
2
4
6
8 10
Distance (mm)
1
0.8
0.6
0.4
0.2
0
-0.2
-0.4
-0.6
-0.6
-1
-10 -8
White ceramic
SUS304, mirror finishing
SUS304, hairline (orthogonal)
SUS304, hairline (parallel)
Black rubber
-6
-4
-2
0
2
4
6
8 10
Distance (mm)
Stable measurements on moving objects
Limit of resolution of
existing product when workpiece is moving
Limit of resolution of
the ZX2 when workpiece is moving
40
400
Max error:
approx. 400µm
300
200
100
0
-100
-200
-300
30
20
Max error:
approx. 7µm
10
0
-10
-20
-30
Workpiece:SUS304,
hairline (parallel)
-40
-400
Rest state
Moving condition
Rest state
workpiece
Easy
PAT.P
Emitter element
Measurement error (µm)
Stable measurements are
enabled for any color or
surface condition, including
metals, substrates,
elastomers, and transparent
materials, through OMRON’s
unique HSDR-CMOS (High
Speed and Dynamic Range)
image sensor and a step-less
laser power adjustment
algorithm.
Step-less adjustment of laser power
Measurement error (µm)
Stability
Moving condition
workpiece
Easy and User-friendly Configuration
PAT.P
Smart tuning
The ideal configuration for stable measurements is
realized by a single button through the new feature
“smart tuning”, and no longer depends on the skill
of the user. A reliable configuration is achieved by
three tuning methods, which can be selected to
match the type of object and surface conditions to
be measured.
Sensor configuration by just a pushing
the SMART button
Three selectable tunings
One type of workpiece
Several types of workpiece
Surface conditions
of the workpiece are variable
Single smart tuning
Multi-smart tuning
Active smart tuning
Best configuration for stable detection in
case of objects do not change by pushing
the button for one second
Ideal configuration for stable detection
of changing objects by pushing the
button for three seconds
Continuous configuration improvement
for the stable detection of all locations by
pushing the button for five seconds
3
Sensor head
Sensor Heads for Various Applications-select
the Range and Type of Beam
New Regular-reflective Sensor Head Designed for Optimal Wafer Measurement
ZX2-LD50L
ZX2-LD50
Line beam type
•Measurement range 50mm±10mm
1.5µm
•Resolution
Linearity
Line beam ±0.05%F.S.*1
•
*1
•Beam size
Spot beam
±0.10%F.S.
Line beam
Approx.60µm×2.6mm
Approx.60µm dia.
Spot beam
(regular-reflective)
•Measurement range 48mm±5mm
1.5µm
•Resolution
Linearity
Spot beam ±0.3%F.S.
•
Spot beam Approx.60µm dia.
•Beam size
Spot beam
Regular-reflective
Precise measurement on
micro-scale objects
Stable wafer
measurement
ZX2-LD100L
ZX2-LD100
Line beam type
Spot beam type
•Measurement range 100mm±35mm
5µm
•Resolution
Line beam ±0.05%F.S.*2
•Linearity
*2
•
Beam size
Spot beam
±0.10%F.S.
Line beam
Approx.110µm×2.7mm
Approx.110µm dia.
Spot beam
Line beam
Stable measurement on
rough-surfaced objects
*1 Using 40 to 50mm
*2 Using 65 to 100mm
4
ZX2-LD50V Spot beam type
Spot beam type
Support for Various
Environments/Space-Saving
The Smart Sensor Head
Reliable measurements in harsh environments
IP67, robot cable
& temperature characteristic 0.02% F.S./°C
IP67 protection class enables to use the sensor in harsh
environments. A robot cable is used as standard between the head
and amplifier, that the unit can be used reliably on moving parts. In
addition, as 3D UV bond is used to fix the optical components rather
than screws, stress can be controlled and a temperature
characteristic 0.02% F.S./°C* is realized.
* If the room temperature varies 1°C, the measured value varies 0.02% F.S.
(corresponding to 4µm for the Model ZX2-LD50)
Compact sensor for easy mounting
World smallest*
The world’s smallest CMOS laser displacement sensor
head is realized in a resin case. Enables to mount the
sensor in smallest spaces and to minimize
measurement errors arising from temperature
fluctuations.
* According to OMRON investigation of CMOS laser displacement sensors
performed in September 2010.
35.5mm
Cable can be
fed through
from the back
22.6mm
47. mm
47.5mm
10µm precision measurements
Linearity to meet the application
Model ZX2-LD50L
Measurements to an even higher
accuracy are realized for
applications that do not require
the entire measurement range. If
the range of the field is less than
the length of the measurement
center, linearity accuracy improves
by 50% compared with that for
the full range.*
* For the ZX2-LD50L/LD100L.
50
40
50
Linearity ±0.05%F.S.
60
40
50
Linearity ±0.1%F.S.
Example of an application
that does not require the entire measurement range
Example of an application
that requires the entire measurement range
Low-profile connector assembly
height measurement
Robot hand registration
Visualization to prevent from stopping the production-line
Laser life display function
The end of the laser diode lifespan is automatically
detected and displayed so maintenance can be
performed systematically. On the main digital display
of the amplifier, this is indicated by an LED on the
back of the head. Accordingly, in case of amplifier is
within the control panel, the lifetime can be confirmed
by the head and the indications are not missed.
LED gives
a flashing notification
Deterioration
over time
5
Amplifier unit + Calculating unit
Ease of Use by “LED Display” and “Calculating Unit”
11-segment LED display for intuitive configuration
Determination output indicators
High (orange)/Pass (green)/Low (orange),
two color display
Intuitive operation through
cross buttons
11 Segment LED Display
Easy calculations of measurements
6
A thorough pursuit
of user-friendliness
The Smart Amplifier Unit
No need for a manual
11 Segment LED Display
An 11 segment LED display is integrated in the
compact housing. Alphanumeric characters
can be read with ease and there is no need to
refer to a manual.
Comparison of the existing 7 segment LED display
and the 11 segment LED display
The 7 segment display
on existing models
The 11 segment display
on model ZX2
30mm
30mm
38mm
31mm
64mm
72mm
The compact housing stays just as it is
Perform two calculations with ease
Thickness + subtraction mode
The calculated results of two sensor heads are displayed on the amplifier unit by just connecting
the calculating unit between the two amplifier units. The calculation function can be chosen from
possible to prevent mutual interference by
the two modes of thickness and subtraction. It is also po
units can be connected.)
coupling via the calculating units. (Up to five amplifier un
Thickness mode
Subtraction mode
Sensor 1
A
Sensor 1 0 criterion
Sensor 2 0 criterion
S
K T
A
B
Sensor 2
B
Thickness
T=K+(A+B)
Level difference
S=B- A
Easy change of setup
Equipped with 4 banks
The amplifier unit is equipped
with four bank functions.
Easy change of setup
between four modes is
supported by just switching
between the bank functions.
Existing models
ZX2
B
B ANK 3
B ANK 2
BANAKNK 1
0
Amplifier unit
+
Bank unit
Built into the unit
7
One Sensor for Any Measurement Application
Height/
Length
Height measurements prior
to IC package sealing
Stable measurements can be performed by the
HSDR-CMOS image sensor and Omron’s proprietary
algorithm, even for measurements on moving IC
packages.
Warpage
Tray warping measurement
before chip baking
Even if there is temperature variation due to the
ambient temperature, a die-cast is used for the optical
base and so there is almost no fluctuation in
measured value.
Double feed
PCB double feed detection
Even if the color of the substrate changes, application
of the HSDR-CMOS image sensor and Omron’ s
proprietary algorithm results in almost no fluctuation in
measured value.
8
Level
detection
Shape validation
for molded parts
Calculation of the measured values can be carried out
and the difference in level can be easily measured by just
connecting the calculating unit between two amplifiers.
Even if the surface conditions of a molded part varies,
application of a line beam and HSDR-CMOS image
sensor results in almost no fluctuation in measured value.
Positioning
Robot hand Positioning
Stable measurements can be performed by the
HSDR-CMOS image sensor and Omron’ s proprietary
algorithm even for robot hand registration.
Thickness
Wafer thickness
measurement
You can easily measure thicknesses by using
Regular-reflective Sensor Heads and connecting a
Calculating Unit between the two Amplifier Units to
perform calculations.
Ordering Information
Units
Sensor Heads [Dimensions ➜ page 14]
Appearance
Optical system
Sensing distance
Beam shape
Line beam
Diffuse reflective
Resolution
50±10mm
40
Spot beam
1.5µm
60
Model
ZX2-LD50L 0.5M
ZX2-LD50 0.5M
Line beam
100±35mm
Spot beam
65
135
5µm
ZX2-LD100L 0.5M
ZX2-LD100 0.5M
48±5mm
Regular reflective
Spot beam
43
1.5µm
53
ZX2-LD50V 0.5M
Amplifier Units [Dimensions ➜ page 14]
Appearance
Power supply
Output type
Model
NPN
ZX2-LDA11 2M
PNP
ZX2-LDA41 2M
DC
Accessories (sold separately) These are not included with the Sensor Head or Amplifier Unit. Please order as necessary.
Calculating Unit [Dimensions ➜ page 14]
Appearance
Model
ZX2-CAL
Communications Interface Unit [Dimensions ➜ page 14]
Appearance
Type
Model
RS-232C
ZX2-SF11
Sensor Head Extension Cables [Dimensions ➜ page 14]
Cable Length
Model
1m
ZX2-XC1R
4m
ZX2-XC4R
9m
ZX2-XC9R
20m
ZX2-XC20R
* Extension cables cannot be coupled and used together.
Mounting Brackets [Dimensions ➜ page 15]
Applicable Sensor Heads
ZX2-LD50V
ZX2-LD50L
ZX2-LD50
Appearance
Model
Contents
E39-L178
Mounting Bracket: 1
Nut plate: 1
Phillips screws (M3×30): 2
ZX2-LD100L
ZX2-LD100
E39-L179
9
Specifications
Diffuse-reflective Sensor Heads
Item
Model
ZX2-LD50L
ZX2-LD50
ZX2-LD100L
ZX2-LD100
Optical system
Diffuse reflective
Light source
(wave length)
Visible-light semiconductor laser with a wavelength of 660 nm and an output of 1mW max.
EN class 2,FDA class 2*5
Measurement center point
50mm
100mm
Measurement range
±10mm
±35mm
Beam shape
Line
Spot
Line
Spot
Beam size *1
Approx. 60µm×2.6mm
Approx. 60µm dia.
Approx.110µm×2.7mm
Approx.110µm dia.
Resolution *2
1.5µm
Linearity *3
±0.05%F.S. (40 to 50mm)
±0.1%F.S. (entire range)
Temperature characteristic *4
0.02%F.S./°C
Ambient illumination
Incandescent lamp: 10,000lx max. (on light receiving side)
Ambient temperature
Operating: 0 to +50°C, Storage: -15 to +70°C (with no icing or condensation)
Ambient humidity
Operating and storage: 35% to 85% (with no condensation)
Dielectric strength
1,000 VAC, 50/60 Hz for 1 minute
5µm
±0.1%F.S. (40 to 50mm)
±0.15%F.S. (entire range)
±0.05%F.S. (65 to 100mm) ±0.1%F.S. (65 to 100mm)
±0.1%F.S. (entire range)
±0.15%F.S. (entire range)
Vibration resistance (destruction) 10 to 150 Hz, 0.7-mm double amplitude, 80 minutes, each in X,Y,and Z directions
Shock resistance (destruction) 300 m/s2 3 times each in six directions (up/down,left/right,forward/backward)
Degree of protection
IEC60529, IP67
Connection method
Connector connection (standard cable length: 500 mm)
Weight (packed state)
Approx.160g (Sensor Head only: Approx.75g)
Materials
Case and cover: PBT (polybutylene terephtahalate), Optical window: Glass, Internal thread: Brass, Cable: PVC
Accessories
Instruction sheet, Ferrite core ×1 (made by TDK Corp. ZCAT1730-0730A), Laser warning label (English), FDA certification label
Regular-reflective Sensor Head
Item
Model
Optical system
ZX2-LD50V
Regular reflective
Light source (wave length)
Visible-light semiconductor laser with a wavelength of 660 nm and an output of 0.24 mW max. EN class 1, FDA class 1*5
Measurement center point
48mm
Measurement range
±5mm
Beam shape
Spot
Beam size *1
Approx. 60µm dia.
Resolution *2
1.5µm
Linearity *3
±0.3%F.S. (entire range)
Temperature characteristic *4
0.06%F.S./°C
Ambient illumination
Incandescent lamp: 10,000lx max. (on light receiving side)
Ambient temperature
Operating: 0 to +50°C, Storage: -15 to +70°C (with no icing or condensation)
Ambient humidity
Operating and storage: 35% to 85% (with no condensation)
Dielectric strength
1,000 VAC, 50/60 Hz for 1 minute
Vibration resistance (destruction) 10 to 150 Hz, 0.7-mm double amplitude, 80 minutes, each in X,Y,and Z directions
Shock resistance (destruction) 300 m/s2 3 times each in six directions (up/down,left/right,forward/backward)
Degree of protection
IEC 60529, IP67
Connection method
Connector connection (standard cable length: 500 mm)
Weight (packed state)
Approx.160g (Sensor Head only: Approx.75g)
Materials
Case and cover: PBT (polybutylene terephtahalate), Optical window: Glass, Internal thread: Brass, Cable: PVC
Accessories
Instruction sheet, Ferrite core ×1 (made by TDK Corp. ZCAT1730-0730A), Laser warning label (English), FDA certification label
Note) False detection outside the measurement range can occur in the case of an object with high reflectance.
*1. Beam size: Defined as 1/e2 (13.5%) of the central intensity at the smallest value of diameter for the measurement range (typical value)
False detections can occur in the case there is light leakage outside the defined region and the surroundings of the target object have a high reflectance in
comparison to the target object.
*2. Resolution: indicates the degree of fluctuation (±3σ) of analog output when connected to the ZX2-LDA.
(The measured value is given for the center distance for OMRON’ s standard target object (diffuse-reflective models: white ceramic object, regular-reflective models:
1/4 λ flat mirror) when the response time of the ZX2-LDA is set to 128 ms.)
Indicates the repetition accuracy for when the workpiece is in a state of rest. Not an indication of distance accuracy.
Resolution performance may not be satisfied in a strong electromagnetic field.
*3. Linearity: indicates the error with respect to the ideal straight line of the displacement output in the case of measuring Omron’ s standard target object. Linearity and
measured value may vary depending on target object.
F.S. indicates the full scope of the measurement range. (ZX2-LD50 (L): 20mm)
*4. Temperature characteristic: Value for the case the space between the sensor head and Omron’ s standard target object is secured by an aluminum jig. (Measured at
the measurement center distance)
*5. These Sensors are classified as Class 2 laser devices for diffuse-reflective models and Class 1 for regular-reflective models under IEC 60825-1 and the regulations of
Laser Notice No. 50 for FDA certification. CDRH registration has been completed.
10
Amplifier Units
Item
Model
Measurement period *1
Response time
Analog output *2
Judgement outputs
(HIGH/PASS/LOW:
3 outputs), error output
Laser OFF input,
zero reset input,
timing input, reset input,
bank input
ZX2-LDA11
ZX2-LDA41
Min. 30µs
60µs, 120µs, 240µs, 500µs, 1ms, 2ms, 4ms, 8ms, 12ms, 20ms, 36ms, 66ms, 128ms, 250ms, 500ms
4 to 20 mA, Max. load resistance: 300Ω, ±5VDC or 1 to 5 VDC, Output impedance: 100Ω
NPN open-collector outputs, 30 VDC, 50 mA max.
PNP open-collector outputs, 30 VDC, 50 mA max.
(residual voltage: 1V max. for load current 10mA max., (residual voltage: 1V max. for load current 10mA max.,
2V max. for load current above 10mA)
2V max. for load current above 10mA)
ON: Short-circuited with 0-V terminal or 1.2V or less
OFF: Open (leakage current: 0.1 mA max.)
ON: Supply voltage short-circuited
or supply voltage within -1.2V
OFF: Open (leakage current: 0.1 mA max.)
Functions
Smart tuning, scaling, sample hold, peak hold, bottom hold, peak-to-peak hold, self-peak hold,
self-bottom hold, average hold, zero reset, On-delay timer, OFF-delay timer, keep/clamp switch,
(A-B)calculations *3, thickness calculation *3, mutual interference prevention *3,
laser deterioration detection, bank function(4 banks), differential function
Indications
Judgement indicators: HIGH(orange),PASS(green),LOW(orange),11-segment main display(red),11-segment
sub-display(orange),laser ON(green),zero reset(green),enable(green),menu(green),
HIGH threshold(orange),LOW threshold(orange)
Power supply voltage
Power consumption
Ambient temperature
Ambient humidity
Dielectric strength
Vibration resistance
(destruction)
Shock resistance
(destruction)
Degree of protection
Connection method
Weight (packed state)
Materials
Accessories
10 to 30 VDC, including 10% ripple(p-p)
3,000 mW max. (at 24 VDC: 125 mA max., at 12 VDC: 250 mA max.)
Operating: 0 to +50°C, Storage: -15 to +70°C (with no icing or condensation)
Operating and storage: 35% to 85% (with no condensation)
1,000 VAC, 50/60 Hz for 1 minute
10 to 150 Hz, 0.7-mm double amplitude, 80 minutes, each in X,Y,and Z directions
300 m/s2 3 times each in six directions (up/down,left/right,forward/backward)
IEC60529, IP40
Prewired (standard cable length: 2 m)
Approx.200g (Amplifier Unit only: Approx.135g)
Case: PBT (polybutylene terephtahalate), Cover: Polycarbonate, Display: Methacrylic resin,
Button: Polyacetal, Cable: PVC
Instruction sheet
*1. In the case of Omron’s standard target object (white ceramic)
*2. Configure current output (4 to 20mA) and voltage output (±5V or 1 to 5V) by MENU mode.
*3. Calculating unit (ZX2-CAL) is necessary. Calculations are possible for two amplifier units. Mutual interference prevention is possible for up to five amplifier units.
Calculating Unit
Item
Model
Applicable Amplifier Units
Current consumption
Ambient temperature
Ambient humidity
Connection method
Dielectric strength
Vibration resistance
(destructive)
Shock resistance
(destructive)
Materials
Weight (packed state)
Accessories
ZX2-series Communications Interface Unit
ZX2-CAL
ZX2-LDA11, ZX2-LDA41
12 mA max. (supplied from the Smart
Sensor Amplifier Unit)
Operating: 0 to +50°C, storage: -15 to
+70°C (with no icing or condensation)
Operating and storage: 35% to 85%
(with no condensation)
Connector
1,000 VAC, 50/60 Hz for 1 minute
10 to 150 Hz, 0.7-mm double amplitude,
80 minutes, each in X,Y,and Z directions
300 m/s2 3 times each in six directions
(up/down, left/right, forward/backward)
Case: ABS, Display: Methacrylic resin
Approx. 50g
(Calculating Unit only: Approx. 15g)
Instruction sheet
Item
Model
ZX2-SF11
10 to 30 V DC ±10% (including 10% ripple (p-p))
(Supplied from Sensor Amplifier.)
720 mW max. (at 24 V: 30 mA max., at 12 V: 60 mA max.)
(Not including Sensor Amplifier current consumption or
Power consumption
output current.)
Applicable Amplifier Units ZX2-LDA@@ (Production after November 2013)
Sensor Amplifier Unit version: V1.330 or higher
Applicable Amplifier Unit (The Sensor Amplifier version is shown on the sub-digital
versions
display when the power of the Sensor Amplifier is turned ON.)
Power supply voltage
Max. No. of Amplifier Units
Port
Communications method
Synchronization method
Transmission code
Commu- Baud rate
nications
functions Data bit length
Parity check
Stop bit length
Receiving
Data
delimiter Sending
Indicators
Protective circuits
Ambient temperature
Ambient humidity
Insulation resistance
Dielectric strength
Materials
Accessories
5
RS-232C (9-pin, D-Sub connector)
Full duplex
Start/stop synchronization
ASCII
38,400 (at shipping)/9,600 bps switchable
8 bits
None
1 bit
CR or CR + LF is automatically recognized.
CR + LF fixed
Power supply: green, Sensor communications: green, Sensor
communications error: red, External terminal communications:
green, External terminal communications error: red
Power supply reverse polarity protection
Operating: 0 to 50ºC, storage: -15 to 60ºC
(with no icing or condensation)
Operating and storage: 35% to 85% (with no condensation)
20 MΩ min. (at 500 VDC)
1,000 VAC, 50/60 Hz for 1 min, Leakage current: 10 mA max.
Case: PBT (polybutylene terephthalate), Cover: Polycarbonate
Instruction sheet, 2 clamps
11
Engineering Data (Reference Value)
Angle Characteristic
ZX2-LD50L
0.6
+ Inclination
0.4
- Inclination
Front-to-back Inclination
White ceramic
SUS304,mirror finish
Black rubber
0.8
0.6
+ Inclination
0.4
1.0
Side-to-side Inclination
Error (%F.S.)
White ceramic
SUS304,mirror finish
Black rubber
0.8
1.0
Error (%F.S.)
Side-to-side Inclination
Error (%F.S.)
Error (%F.S.)
ZX2-LD50
1.0
White ceramic
SUS304,mirror finish
Black rubber
0.8
0.6
+ Inclination
0.4
- Inclination
1.0
0.6
+ Inclination
0.2
0.2
0.4
- Inclination
0.2
0
0
0
0
-0.2
-0.2
-0.2
-0.2
-0.4
-0.4
-0.4
-0.4
-0.6
-0.6
-0.6
-0.6
-0.8
-0.8
-0.8
10
20
30
40
-1.0
-50 -40 -30 -20 -10
50
10
0
20
30
40
30
40
-1.0
-50 -40 -30 -20 -10
50
White ceramic
SUS304,mirror finish
Black rubber
+ Inclination
1.0
Front-to-back Inclination
White ceramic
SUS304,mirror finish
Black rubber
0.8
0.6
+ Inclination
0.4
- Inclination
0.2
1.0
Side-to-side Inclination
White ceramic
SUS304,mirror finish
Black rubber
0.8
0.6
+ Inclination
0.4
- Inclination
- Inclination
1.0
20
30
40
50
0.6
+ Inclination
0.4
- Inclination
0
0
0
-0.2
-0.2
-0.2
-0.4
-0.4
-0.4
-0.4
-0.6
-0.6
-0.6
-0.6
-0.8
-0.8
-0.8
20
30
40
50
-1.0
-50 -40 -30 -20 -10
10
0
Angle of inclination (°)
20
30
40
-0.8
-1.0
-50 -40 -30 -20 -10
50
White ceramic
SUS304,mirror finish
Black rubber
0.2
0
10
Front-to-back Inclination
0.8
-0.2
0
10
Angle of inclination (°)
0.2
0.2
-1.0
-50 -40 -30 -20 -10
0
Angle of inclination (°)
Error (%F.S.)
Side-to-side Inclination
Error (%F.S.)
Error (%F.S.)
20
ZX2-LD100L
0.8
0.4
10
0
Angle of inclination (°)
ZX2-LD100
0.6
-0.8
-1.0
-50 -40 -30 -20 -10
50
Error (%F.S.)
0
Angle of inclination (°)
1.0
White ceramic
SUS304,mirror finish
Black rubber
- Inclination
0.2
-1.0
-50 -40 -30 -20 -10
Front-to-back Inclination
0.8
10
0
20
30
40
50
Angle of inclination (°)
Angle of inclination (°)
-1.0
-50 -40 -30 -20 -10
0
10
20
30
40
50
Angle of inclination (°)
Linearity Characteristic for Different Materials
White ceramic
SUS304,mirror finish
Black rubber
0.6
0.4
1.0
-50° Inclination Front-to-back
White ceramic
SUS304,mirror finish
Black rubber
0.8
0.6
Error (%F.S.)
0° Inclination
0.8
Error (%F.S.)
Error (%F.S.)
ZX2-LD50
1.0
0.4
0° Inclination
1.0
0.4
-50° Inclination
0.2
0
0
0
-0.2
-0.2
-0.2
-0.4
-0.4
-0.4
-0.6
-0.6
-0.6
-0.8
-0.8
-6
-4
-2
0
2
4
6
8
+50° Inclination
0.2
-0.8
-1.0
-10 -8
10
White ceramic
SUS304,mirror finish
Black rubber
0.6
0.2
-1.0
-10 -8
+50° Inclination
0.8
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-6
-4
-2
0
2
4
6
8
-1.0
-10 -8
10
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-6
-4
-2
0
2
4
6
8
10
FAR side
NEAR side
Measurement center distance
Displacement (mm)
White ceramic
SUS304,mirror finish
Black rubber
0.6
0.4
1.0
-50° Inclination Front-to-back
White ceramic
SUS304,mirror finish
Black rubber
0.8
0.6
Error (%F.S.)
0° Inclination
0.8
Error (%F.S.)
Error (%F.S.)
ZX2-LD50L
1.0
0.4
0° Inclination
1.0
0.4
-50° Inclination
0.2
0
0
0
-0.2
-0.2
-0.2
-0.4
-0.4
-0.4
-0.6
-0.6
-0.6
-0.8
-0.8
-6
-4
-2
0
2
4
6
8
+50° Inclination
0.2
-0.8
-1.0
-10 -8
10
White ceramic
SUS304,mirror finish
Black rubber
0.6
0.2
-1.0
-10 -8
+50° Inclination
0.8
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-6
-4
-2
0
2
4
6
8
-1.0
-10 -8
10
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-6
-4
-2
0
2
4
6
8
10
FAR side
NEAR side
Measurement center distance
Displacement (mm)
White ceramic
SUS304,mirror finish
Black rubber
0.6
0.4
1.0
-50° Inclination Front-to-back
Error (%F.S.)
0° Inclination
0.8
Error (%F.S.)
Error (%F.S.)
ZX2-LD100
1.0
White ceramic
SUS304,mirror finish
Black rubber
0.8
0.6
0.2
0
0
0
-0.2
-0.2
-0.2
-0.4
-0.4
-0.4
-0.6
-0.6
-0.6
-0.8
-0.8
-25
-15
-5 0
5
15
25
-0.8
-1.0
-35
35
White ceramic
SUS304,mirror finish
Black rubber
0.6
+50° Inclination
-50° Inclination
0.2
-1.0
-35
+50° Inclination
0.8
0.4
0.4
0° Inclination
0.2
1.0
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-25
-15
-5 0
5
15
25
-1.0
-35
35
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-25
-15
-5 0
5
15
25
35
FAR side
NEAR side
Measurement center distance
Displacement (mm)
0.6
0.4
1.0
-50° Inclination Front-to-back
White ceramic
SUS304,mirror finish
Black rubber
0.8
0.6
+50° Inclination
-50° Inclination
0.2
0
0
0
-0.2
-0.2
-0.2
-0.4
-0.4
-0.4
-0.6
-0.6
-0.6
-0.8
-0.8
-0.8
-15
-5 0 5
15
25
35
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-1.0
-35
White ceramic
SUS304,mirror finish
Black rubber
0.6
0.2
-25
+50° Inclination
0.8
0.4
0.4
0° Inclination
1.0
0.2
-1.0
-35
12
White ceramic
SUS304,mirror finish
Black rubber
Error (%F.S.)
0° Inclination
0.8
Error (%F.S.)
Error (%F.S.)
ZX2-LD100L
1.0
-25
-15
-5 0 5
15
25
35
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-1.0
-35
-25
-15
-5 0 5
15
25
35
FAR side
NEAR side
Measurement center distance
Displacement (mm)
* The x-axis displacement indicates the measurement
distance displayed by the amplifier unit. The
measurement distance displayed by the amplifier
unit takes the measurement center distance as 0 and
displays the near-side from the sensor as plus and
the far-side as minus.
Angle Characteristic
-1.0°
-0.5°
0°
2.0
1.5
+ Inclination
1.0
- Inclination
0.5°
1.0°
3.0
Front-to-back Inclination for Flat Mirror
2.5
2.0
1.5
0.5
3.0
Side-to-side Inclination for Silicon Wafer
2.5
-1.0°
-0.5°
0°
2.0
1.5
+ Inclination
1.0
- Inclination
0.5°
1.0°
3.0
1.5
0.5
0
0
0
-0.5
-0.5
-0.5
-1.0
-1.0
-1.0
-1.0
-1.5
-1.5
-1.5
-1.5
-2.0
-2.0
-2.0
-2.0
-2.5
-2.5
-2.5
-3
-2
-1
0
1
2
3
4
-3.0
-5
5
-4
3.0
Side-to-side Inclination for Glass
2.5
-1.0°
-0.5°
0°
2.0
1.5
+ Inclination
1.0
- Inclination
0.5°
1.0°
3.0
-1
0
1
2
3
4
5
-3.0
-5
-2.5
-4
-3
-2
-1
0
1
2
3
4
5
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-3.0
-5
-4
-3
-2
-1
0
1
2
3
4
5
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Front-to-back Inclination for Glass
2.5
-1.0°
-0.5°
0°
10.5°
2.0
1.5
0.5°
1.0°
+ Inclination
- Inclination
1.0
0.5
-2
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Error (%F.S.)
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-3
0.5°
1.0°
+ Inclination
- Inclination
1.0
0.5
-1.0°
-0.5°
0°
10.5°
2.0
0
-4
Front-to-back Inclination for Silicon Wafer
2.5
-0.5
-3.0
-5
Error (%F.S.)
0.5°
1.0°
+ Inclination
- Inclination
1.0
0.5
-1.0°
-0.5°
0°
10.5°
Error (%F.S.)
Side-to-side Inclination for Flat Mirror
2.5
Error (%F.S.)
3.0
Error (%F.S.)
Error (%F.S.)
ZX2-LD50V
0.5
0
0
-0.5
-0.5
-1.0
-1.0
-1.5
-1.5
-2.0
-2.0
-2.5
-2.5
-3.0
-5
-4
-3
-2
-1
0
1
2
3
4
5
-3.0
-5
-4
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-3
-2
-1
0
1
2
3
4
5
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Linearity Characteristic for Different Materials
Error (%F.S.)
ZX2-LD50V
1.0
0° Inclination
Flat Mirror
Silicon Wafer
Glass
0.8
0.6
0.4
10.5°
0° Inclination
0.2
0
-0.2
-0.4
-0.6
-0.8
-1.0
-5
-4
-3
-2
-1
0
1
2
3
4
5
FAR side
NEAR side
Measurement center distance
Displacement (mm)
* The x-axis displacement indicates the measurement
distance displayed by the amplifier unit. The
measurement distance displayed by the amplifier
unit takes the measurement center distance as 0 and
displays the near-side from the sensor as plus and
the far-side as minus.
13
Dimensions
(Unit: mm)
Units
Sensor Heads
Reference surface
ZX2-LD50/ZX2-LD50L
ZX2-LD100/ZX2-LD100L
ZX2-LD50V
(9.7)
Emitter axis
Mounting Dimensions
Reference surface
L*
Measurement
center distance 4
Emitter
axis
7
9.7
10.1
10.5
Two, 3.2-dia.
(Mounting holes)
7
27.5
6
4
A*
35.3
2-M3
Reference
surface
Mounting reference
surface
Range
indicator
4.8
20.9
Mounting
reference
surface
39.5
16.7
Receiver
axis
Emitter center
4±0.05
43.5±0.05
4.8
15.1
Range
indicator
Laser
warning
light
28.43
4±0.05
31.5±0.05
12.6 dia.
Vinyl insulated round cable, 4.7 dia., 4 conductors
(Conductor cross-section: 0.086 mm2/ Insulator diameter: 0.9 mm)
Standard length: 0.5 m, Minimum bending radius: 30 mm
29.8
* In the case of ZX2-LD50 (L), L=50, A=21°
Note: Attach the enclosed ferrite core (16.5 dia., length: 30 mm) to
the cable within 100 mm from the Sensor Head.
In the case of ZX2-LD100 (L), L=100, A=11.5°
Amplifier Units
ZX2-LDA11/ZX2-LDA41
11.7 18
6.2*2
*1 Maximum height when cover open: 56
*2 Minimum length when connected: 50
(when cover open 84.6)
4.2
47.6
50
Vinyl insulated round cable, 5.2 dia., 11 conductors
(Conductor cross-section: 0.09 mm2/ Insulator diameter: 0.7 mm)
Note: The analog output line (black) has double shielding and
the diameter of the insulator is 2.3 mm.
Standard length: 2 m, Minimum bending radius: 30 mm
9.6
34.2
16.6
16.9
20.7
36.8
10.9 15.4 6.1
Accessories (sold separately)
Calculating Unit
ZX2-series Communications Interface Unit
ZX2-CAL
ZX2-SF11
Coupling
connector
Sensor communications indicator (communications operation)
Sensor communications indicator (communications error)
24.9
Power supply indicator
External terminal communications indicator (communications error)
Coupled indicators
External terminal
communications indicator
(communications operation)
Coupling connectors
4.2
3
30
12
8
64.3
44.05
(46)
9.5
31.5
15
14.4
15
3.4
13.2
5
4.2
(336)
36.7
36.8
13
Vinyl -insulated round cable,
5.23 dia. Standard length 100 mm
29
2.2
11.7
4.3
(33.1)
11.7
Connector
Sensor Head Extension Cables
ZX2-XC1R
ZX2-XC4R
ZX2-XC9R
ZX2-XC20R
14
29.8
L*
3
28.9
12 dia.
12.6 dia.
Amplifier Unit
attachment connector
(female, 6 poles)
Vinyl insulated round cable, 4.7 dia.
(ZX2-XC20R, 5.1 dia.)
Sensor Head
attachment connector
(male, 6 poles)
* Length L is as follows.
5 6.55
ZX2-XC1R:1 m, ZX2-XC4R:4 m,
ZX2-XC9R:9 m, ZX2-XC20R:20 m
Minimum bending radius: 30 mm
Note: Attach the enclosed ferrite
cores (16.5 dia., length: 30 mm)
within 100 mm of each end of
the extension cable.
(Unit: mm)
Mounting Bracket
Mounting Bracket
E39-L178
E39-L179
Mounting Bracket
(36.4)
31.4
2-R3
Nut plate
6
5
2-M3
P=0.5
Mounting Bracket
(36.6)
31.6
2-R3
Nut plate
6
5
2-M3
P=0.5
5
5
3.2 dia.
3.2 dia.
54.1 48.1
56
.1
R48.1
R48
54.1 48.1
58
3.5
3.5
23
24.5°(Regular-reflective
Sensor mounting)
34.7°(Diffuse-reflective
Sensor mounting)
8.8
23
29.2°(Regular-reflective
Sensor mounting)
34.7°(Diffuse-reflective
Sensor mounting)
Material: Stainless steel
(SUS304)
Thickness: 2.0 mm
8.8
3.2 14
12
3.2 14
12
2 ✕ R3
3.2
5.2
16.8
9.6
(26.4)
Material: Stainless steel (SUS304)
Thickness: 3.0 mm
Accessories: Phillips screws (M3×30): 2
Nut plate: 1
2 ✕ R3
3.2
5.2
16.8
9.6
(26.4)
Material: Stainless steel (SUS304)
Thickness: 3.0 mm
Accessories: Phillips screws (M3×30): 2
Nut plate: 1
this Mounting Bracket when installing the ZX2-LD100 (L) as a normal
* Use
Diffuse-reflective or Regular-reflective Sensor Head.
Installation Method for Regular-reflective
Sensor Head
Using a E39-L178 Mounting Bracket:
*1
Material: Stainless steel
(SUS304)
Thickness: 2.0 mm
Using a E39-L179 Mounting Bracket:
(32)
22.6
Phillips screws
Installation Method for Regular-reflective
Sensor Heads (Installing a Diffuse-reflective
Sensor Head as a Regular-reflective Sensor Head)
*1
Phillips screws
(32)
22.6
Nut plate
Nut plate
Mounting Bracket
10.5°
*2
5.75°
*2
Mounting Bracket
measurement distance reference
*1 The
position is the end of the Mounting Bracket.
measurement distance reference
*1 The
position is the end of the Mounting Bracket.
*2 For the Regulalr-reflective Sensor Heads,
*2 For the IInstalling a Diffuse-reflective Sensor
rotate the Sensor Head counterclockwise,
secure it in place, and then perform any
necessary fine adjustments.
Note: When securing the Sensor Head in the Mounting
Bracket, insert the screws into the side of the
Sensor Head where the warning label is located
and secure the Sensor Head into place.
as a Regular-reflective Sensor, rotate the
Sensor Head counterclockwise, secure it in
place, and then perform any necessary fine
adjustments.
Note: When securing the Sensor Head in the Mounting
Bracket, insert the screws into the side of the
Sensor Head where the warning label is located
and secure the Sensor Head into place.
Not Using a Mounting Bracket:
Tilt the Sensor Head towards the workpiece as shown below.
ZX2-LD50V
79.4±0.05
Measurement
center distance
(43.85)
workpiece
(19.85)
10.5°±0.1°
Adjust the installation so that the angle
is 10.5° ±0.1°.
* The mounting hole dimensions in
parentheses (reference values) are for
when the Sensor is installed at 10.5°.
15
(Unit: mm)
Installation Method for Diffuse-reflective Sensor Heads
Using a E39-L178, E39-L179 Mounting Bracket:
*1
Phillips screws
Not Using a Mounting Bracket:
Mount the Sensor Head in relation to the workpiece as shown below.
(32)
22.6
Nut plate
L*
Measurement
center distance
31.5
±0.05
39.5±0.05
Mounting Bracket
workpiece
4.0
±0.05
*1 The measurement distance reference position is
the Sensor’s sensing surface.
Note: When securing the Sensor Head in the Mounting
Bracket, insert the screws into the side of the
Sensor Head where the warning label is located
and secure the Sensor Head into place.
OMRON Corporation
Tokyo, JAPAN
Industrial Automation Company
* ZX2-LD50 (L): 50
ZX2-LD100 (L): 100
Authorized Distributor:
Contact : www.ia.omron.com
Regional Headquarters
OMRON EUROPE B.V.
Sensor Business Unit
Carl-Benz-Str. 4, D-71154 Nufringen, Germany
Tel: (49) 7032-811-0/Fax: (49) 7032-811-199
OMRON ELECTRONICS LLC
One Commerce Drive Schaumburg,
IL 60173-5302 U.S.A.
Tel: (1) 847-843-7900/Fax: (1) 847-843-7787
OMRON ASIA PACIFIC PTE. LTD.
No. 438A Alexandra Road # 05-05/08 (Lobby 2),
Alexandra Technopark,
Singapore 119967
Tel: (65) 6835-3011/Fax: (65) 6835-2711
OMRON (CHINA) CO., LTD.
Room 2211, Bank of China Tower,
200 Yin Cheng Zhong Road,
PuDong New Area, Shanghai, 200120, China
Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200
© OMRON Corporation 2010 All Rights Reserved.
In the interest of product improvement,
specifications are subject to change without notice.
Printed in Japan
CSM_11_1_0315
Cat. No. E406-E1-03
1013(0711)
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