ETC C20F

C20F 2.0µm 5/40V CMOS Process
C20F Overview
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Thick gate oxide
Double poly, two layer metal
P-type epitaxy over p+ substrate
Allows the integration of 5V CMOS with 40V CMOS
which can operate with 40V on both gate and drain.
Features
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Full integration of 5V and 40V mixed signal
CMOS on the same die
Single and double drain extensions on 40V
NMOS and 40V PMOS
40V double poly capacitor
High Value (10k:/sq) and Low TCR poly
resistor options
Mixed signal Cadence Foundry Design Kit
(FDK) available
Mixed Signal Capabilities
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40V double poly capacitor (0.48fF/µm²)
High value poly resistor option (10k:/sq)
5V 2µm CMOS
40V CMOS Propogation delay:-1.15nS/stage
for single extended
2.0nS/stage for double extended
Applications
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EL displays
CCD Drivers
Motor Control
Instrumentation
Telecom line cards
Layout Rules
Layer
Poly 1
Poly 2
Contact
Metal 1
Via
Metal 2
Width (µm)
2
2
2x2
2.0
2.4 x 2.4
2.8
Space (µm)
2.5
2
2
2.0
2.0
2.4
Simplified Cross-Section of 40V CMOS
B
p+
40V N XF
G
S
n+
n -exte n d ed
40V PXF
D
n+
n -exte n d ed
p -e p ita xy
B
n+
S
G
D
p+
p+
p -exten d e d
p -exten d e d
n -w e ll
p -e p ita xy
26-Sep-02
03-70-00148-00
www.dalsa.com
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C20F 2.0µm 5/40V CMOS Process
DALSA Semiconductor • C20F 5/40V CMOS Process
Electrical Parameters of Representative Transistors
Parameter
W x L (Pm)
VT (V)
Ids (mA)
Bvdss (V)
Isub (PA/Pm)
RON (:)
5V PMOS
40V NMOS
40V PMOS
50 X 2
50 X 2
50 X 10
50 X 6
1.3
1.7
1.3
1.6
3.0
0.9
9.5
9.0
15
18
79
46
0.0006
-
1.94
-
589
2200
1100
1400
Double Extended 40V NMOS
(L=10µm, W=50µm)
Double Extended 40V PMOS
(L=6µm, W=50µm)
For More Information
DALSA Semiconductor
18 Blvd de l’aéroport
Bromont
Quebec Canada
J2L 1S7
26-Sep-02
03-70-00148-00
www.dalsasemi.com
5V NMOS
Tel : +01 800 718 9701
Fax : +01 450 534 3201
e-mail: [email protected]
www.dalsasemi.com