TEST REPORT TSP SERIES SEMI F47 Compliance

SEMI F-47 Test Compliance Test Report
Standard:
SEMI F47-0200
Specification for Semiconductor Processing Equipment
Voltage Sag Immunity
Test Procedure Standard:
Semi F42 : Test method for Semiconductor Processing Equipment.
Voltage Sag Immunity
1. Test Setup
Sag Generator: Schaffner NSG1003: Dropout and Varation Simulator
Tektronics: TDS1002
2. Test Units
Nominal Output
Output
Voltage Voltage
Current
[VAC]
[V]
[A]
115-240
12
6
TSP070-112
115-240
24
3.75
TSP090-124*
115/230
12
12
TSP140-112
115/230
24
7.5
TSP180-124
115/230
24
15
TSP360-124
115/230
24
25
TSP600-124
*model reference can be followed by alphanumeric code which relate to customer references.
Units Name
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
1/14
3. Test Report
3.1 TSP070-112
•
Input Voltage V=208VAC
Output: V=12VDC/6A
Voltage Sag Duration
[V]
166.4
166.4
145.6
145.6
145.6
104
104
104
104
104
0
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
Output Voltage Percent of Nominal
DUT 50Hz
[V]
[%]
SEMI F47 [%] Result
12.0
0.0
80
PASS
12.0
0.0
80
PASS
12.0
0.0
70
PASS
12.0
0.0
70
PASS
12.0
0.0
70
PASS
12.0
0.0
50
PASS
12.0
0.0
50
PASS
12.0
0.0
50
PASS
12.0
0.0
50
PASS
12.0
0.0
50
PASS
12
0.0
0
PASS
TSP070-112
[%]
V=208V
100
90
80
70
60
50
SEMI F-47
40
DUT 50Hz
30
20
10
0
[s]
0
0.1
0.2
0.3
0.4
0.5
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.6
0.7
0.8
0.9
1
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
2/14
•
TSP070-112
Input Voltage V=115VAC
Output: V=12VDC/6A
Voltage Sag Duration
[V]
92
92
80.5
80.5
80.5
57.5
57.5
57.5
57.5
57.5
0
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Output Voltage Percent of Nominal
DUT 50Hz
[V]
[%]
SEMI F47 [%] Result
12.0
0.0
80
PASS
12.0
0.0
80
PASS
11.4
2.5
70
PASS
11.4
2.5
70
PASS
11.4
2.5
70
PASS
8.9
12.9
50
PASS
8.9
12.9
50
PASS
8.9
12.9
50
PASS
8.9
12.9
50
PASS
10.4
6.7
50
PASS
10.4
6.7
0
PASS
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
TSP070-112 V=115V
[%]
100
90
80
70
60
50
SEMI-F47
40
DUT 50Hz
30
20
10
0
0
0.1
0.2
0.3
0.4
0.5
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.6
0.7
0.8
0.9
1
[s]
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
3/14
3.2 TSP090-124*
• Input Voltage V=208VAC
Output: V=24VDC/3.75A
Voltage Sag
Duration
[V]
166.4
166.4
145.6
145.6
145.6
104
104
104
104
104
0
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Output Voltage Percent of Nominal
DUT 50Hz
[V]
[%]
SEMI F47 [%] Result
24.0
0.0
80
PASS
24.0
0.0
80
PASS
24.0
0.0
70
PASS
24.0
0.0
70
PASS
24.0
0.0
70
PASS
24.0
0.0
50
PASS
24.0
0.0
50
PASS
24.0
0.0
50
PASS
24.0
0.0
50
PASS
24.0
0.0
50
PASS
24
0.0
0
PASS
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
TSP090-124*
[%]
V=208V
100
90
80
70
60
50
SEMI F-47
40
DUT 50Hz
30
20
10
0
0
0.1
0.2
0.3
0.4
0.5
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.6
0.7
0.8
0.9
1
[s]
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
4/14
•
TSP090-112
Input Voltage V=115VAC
Output: V=24VDC/3.75A
Voltage Sag
[V]
92
92
80.5
80.5
80.5
57.5
57.5
57.5
57.5
57.5
0
Duration
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
Output Voltage
[V]
23.4
23.4
21.8
21.8
21.8
18.5
18.5
18.5
18.5
18.5
18.4
Percent of Nominal
DUT 50Hz [%] SEMI F47 [%] Result
2.5
80
PASS
2.5
80
PASS
9.2
70
PASS
9.2
70
PASS
9.2
70
PASS
22.9
50
PASS
22.9
50
PASS
22.9
50
PASS
22.9
50
PASS
22.9
50
PASS
23.3
0
PASS
TSP090-124 V=115V
[%]
100
90
80
70
60
SEMI-F47
50
40
DUT 50Hz
30
20
10
0
0
0.1
0.2
0.3
0.4
0.5
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.6
0.7
0.8
0.9
1 [s]
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
5/14
3.3 TSP140-112
• Input Voltage V=208VAC
Output: V=12VDC/6.0A
Voltage Sag Duration
[V]
166.4
166.4
145.6
145.6
145.6
104
104
104
104
104
0
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
Output Voltage Percent of Nominal
DUT 50Hz
[V]
[%]
SEMI F47 [%] Result
11.8
0.8
80
PASS
11.8
0.8
80
PASS
10.9
4.6
70
PASS
10.9
4.6
70
PASS
10.9
4.6
70
PASS
8.9
12.9
50
PASS
8.9
12.9
50
PASS
8.9
12.9
50
PASS
9.2
11.7
50
PASS
11.8
0.8
50
PASS
11.8
0.8
0
PASS
TSP140-112
[%]
V=208V
100
90
80
70
60
SEMI F-47
50
DUT 50Hz
40
30
20
10
0
[s]
0
0.1
0.2
0.3
0.4
0.5
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.6
0.7
0.8
0.9
1
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
6/14
•
TSP140-112
Input Voltage V=115VAC
Output: V=12VDC/7.5A
Voltage Sag Duration
[V]
92
92
80.5
80.5
80.5
57.5
57.5
57.5
57.5
57.5
0
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Output Voltage Percent of Nominal
DUT 50Hz
[V]
[%]
SEMI F47 [%] Result
12.0
0.0
80
PASS
12.0
0.0
80
PASS
11.1
3.8
70
PASS
11.1
3.8
70
PASS
11.1
3.8
70
PASS
8.6
14.2
50
PASS
8.6
14.2
50
PASS
8.6
14.2
50
PASS
9.0
12.5
50
PASS
12.0
0.0
50
PASS
12.0
0.0
0
PASS
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
TSP140-112 V=115V
[%]
100
90
80
70
60
SEMI-F47
50
40
DUT 50Hz
30
20
10
0
0
0.1
0.2
0.3
0.4
0.5
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.6
0.7
0.8
0.9
1
[s]
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
7/14
3.4
•
TSP180-124
Input Voltage V=208VAC
Output: V=24VDC/7.5A
Voltage Sag
[V]
166.4
166.4
145.6
145.6
145.6
104
104
104
104
104
0
Duration
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
Output
Voltage
[V]
23.8
23.8
22.8
22.8
22.8
19.6
19.6
19.6
20.2
22.2
22.2
Percent of Nominal
DUT 50Hz [%]
0.8
0.8
5.0
5.0
5.0
18.3
18.3
18.3
15.8
7.5
7.5
TSP180-124
[%]
SEMI F47 [%] Result
80
PASS
80
PASS
70
PASS
70
PASS
70
PASS
50
PASS
50
PASS
50
PASS
50
PASS
50
PASS
0
PASS
V=208V
100
90
80
70
60
SEMI F-47
50
40
DUT 50Hz
30
20
10
0
0
0.1
0.2
0.3
0.4
0.5
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.6
0.7
0.8
0.9
1
[s]
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
8/14
•
TSP180-124
Input Voltage V=115VAC
Output: V=24VDC/7.5A
Voltage Sag Duration
[V]
92
92
80.5
80.5
80.5
57.5
57.5
57.5
57.5
57.5
0
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
Output Voltage Percent of Nominal
DUT 50Hz
[V]
[%]
SEMI F47 [%] Result
23.3
2.9
80
PASS
23.3
2.9
80
PASS
21.6
10.0
70
PASS
21.6
10.0
70
PASS
21.6
10.0
70
PASS
17.1
28.8
50
PASS
17.1
28.8
50
PASS
17.1
28.8
50
PASS
17.4
27.5
50
PASS
22.8
5.0
50
PASS
22.8
5.0
0
PASS
TSP180-124 V=115V
[%]
100
90
80
70
60
SEMI-F47
50
40
DUT 50Hz
30
20
10
0
0
0.1
0.2
0.3
0.4
0.5
0.6
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.7
0.8
0.9
1
[s]
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
9/14
3.5 TSP360-124
• Input Voltage V=208VAC
Output: V=24VDC/15A
Voltage Sag
Duration
[V]
166.4
166.4
145.6
145.6
145.6
104
104
104
104
104
0
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
Output Voltage Percent of Nominal
DUT 50Hz
[V]
[%]
SEMI F47 [%] Result
23.0
4.2
80
PASS
23.0
4.2
80
PASS
24.0
0.0
70
PASS
24.0
0.0
70
PASS
24.0
0.0
70
PASS
21.8
9.2
50
PASS
21.8
9.2
50
PASS
21.8
9.2
50
PASS
22.0
8.3
50
PASS
22.4
6.7
50
PASS
22.4
6.7
0
PASS
TSP360-124
[%]
V=208V
100
90
80
70
SEMI F-47
60
50
DUT 50Hz
40
30
20
10
0
0
0.1
0.2
0.3
0.4
0.5
0.6
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.7
0.8
0.9
1
[s]
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
10/14
•
TSP360-124
Input Voltage V=115VAC
Output: V=24VDC/15A
Voltage Sag
Duration
[V]
50
92
80.5
80.5
80.5
57.5
57.5
57.5
57.5
57.5
0
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
Output Voltage Percent of Nominal
DUT 50Hz
[V]
[%]
SEMI F47 [%] Result
19.8
17.5
80
PASS
19.8
17.5
80
PASS
18.8
21.7
70
PASS
18.8
21.7
70
PASS
18.8
21.7
70
PASS
13.8
42.5
50
PASS
13.8
42.5
50
PASS
13.8
42.5
50
PASS
13.8
42.5
50
PASS
19.2
20.0
50
PASS
19.2
20.0
0
PASS
TSP360-124 V=115V
[%]
100
90
80
70
SEMI-F47
60
50
DUT 50Hz
40
30
20
10
0
0
0.1
0.2
0.3
0.4
0.5
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.6
0.7
0.8
0.9
1
[s]
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
11/14
3.6 TSP600-124
• Input Voltage V=208VAC
Output: V=24VDC/25A
Voltage Sag Duration
[V]
166.4
166.4
145.6
145.6
145.6
104
104
104
104
104
0
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
Output Voltage Percent of Nominal
DUT 50Hz
[V]
[%]
SEMI F47 [%] Result
19.8
17.5
80
PASS
19.8
17.5
80
PASS
17.4
27.5
70
PASS
17.4
27.5
70
PASS
17.4
27.5
70
PASS
14.8
38.3
50
PASS
14.8
38.3
50
PASS
14.8
38.3
50
PASS
15.0
37.5
50
PASS
19.6
18.3
50
PASS
19.6
18.3
0
PASS
TSP600-124
[%]
V=208V
100
90
80
70
60
SEMI F-47
50
DUT 50Hz
40
30
20
10
0
[s]
0
0.1
0.2
0.3
0.4
0.5
0.6
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.7
0.8
0.9
1
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
12/14
•
TSP600-124
Input Voltage V=115VAC
Output: V=24VDC/25A
Voltage Sag
[V]
92
92
80.5
80.5
80.5
57.5
57.5
57.5
57.5
57.5
0
Duration
[s]
1
0.5
0.5
0.25
0.2
0.2
0.15
0.1
0.05
0.02
0.02
Cycles
50
25
25
12.5
12.5
10
7.5
5
2.5
1
1
Output Voltage
[V]
19.8
19.8
17.2
17.2
17.2
12.8
12.8
12.8
13.2
20.8
20.8
Percent of Nominal
DUT 50Hz [%]SEMI F47 [%] Result
17.5
80
PASS
17.5
80
PASS
28.3
70
PASS
28.3
70
PASS
28.3
70
PASS
46.7
50
PASS
46.7
50
PASS
46.7
50
PASS
45.0
50
PASS
13.3
50
PASS
13.3
0
PASS
TSP600-124 V=115V
[%]
100
90
80
70
SEMI-F47
60
50
DUT 50Hz
40
30
20
10
0
0
0.1
0.2
0.3
0.4
0.5
0.6
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
0.7
0.8
0.9
1
[s]
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
13/14
4. Conclusion
All of the units were tested at 208V and at 115V at full nominal resistive load.
The deviation of the output voltage is noted in the tables (DUT50 Hz).
For all tests the TSP units passed F-47 standard.
They passed also the recommended F-47 tests for sag duration below 50ms as
indicated in the tables.
At all conditions the units continued to deliver power to the output without any
restart. The deviation of the output voltage was always smaller then the deviation
of the input AC.
Date
Prep.
1
Iss.
Change
28.02.13 Wendy
Date
Name
Name
18.10.05 S.D.
TEST REPORT TSP SERIES
SEMI F47 Compliance
Sheet/of
14/14