Family data sheet

Product family datasheet
Other microlithography lamps above 3,000 W
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May 25, 2016, 17:16:10
Other microlithography lamps above 3,000 W
© 2016, OSRAM GmbH. All rights reserved.
Page 1 of 5
Product family datasheet
Product line drawing
Product line drawing
Product line drawing
Product line drawing
Product line drawing
Product line drawing
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Product line drawing
May 25, 2016, 17:16:10
Other microlithography lamps above 3,000 W
© 2016, OSRAM GmbH. All rights reserved.
Page 2 of 5
Product family datasheet
Technical data
Electrical data
Length with base
excl. base
pins/connection
Light
center
length
(LCL)
Burning position
HBO 3500 W/MR
56.0 A
62.0 V
70.0 mm
1000 h
Vertical
2)
63.0 A
55.0 V
70.0 mm
1500 h
Vertical
3)
100 A
50.0 V
DC
80.0 mm
318.00 mm
143.5 mm
7.5 mm
1500 h
Vertical
3)
HBO 5000 W/S 1)
100 A
50.0 V
DC
80.0 mm
360.00 mm
143.5 mm
7.5 mm
2250 h
Vertical
3)
HBO 5000 W/TA 1)
100 A
50.0 V
DC
80.0 mm
329.50 mm
148.5 mm
7.5 mm
1000 h
Vertical
3)
HBO 5001 W/F
80.0 A
62.0 V
DC
85.0 mm
430.00 mm
216.0 mm
7.9 mm
850 h
Vertical
2)
HBO 5000 W/HK
72.0 A
70.0 V
DC
82.0 mm
302.00 mm
152.5 mm
7.5 mm
1500 h
Vertical
2)
4)
4)
4)
4)
4)
Electrode gap cold
Lifespan
Nominal
voltage
HBO 5000 W/MF
Diameter
Capabilities
Nominal
current
1)
Type of
current
Lifespan
Product description
HBO 3500 W/HK
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Dimensions & weight
Additional product data
Product description
Cooling
Base anode (standard
designation)
Base cathode (standard
designation)
HBO 3500 W/MR
HBO 3500 W/HK
HBO 5000 W/MF 1)
Forced
6)
SFa33.5-9.4/50
5)
SFa33.5-7.85/50
HBO 5000 W/S 1)
Forced
6)
SFa33.5-9.4/50
5)
SFa33.5-7.85/50
Forced
6)
SFa33.5-12/50
5)
SFa33.5-12/50
Forced
6)
SFa38-14/65
Forced
6)
SFYa29-10/42
HBO 5000 W/TA
HBO 5001 W/F
HBO 5000 W/HK
1)
5)
8)
7)
SFXa38-14/65
SFc29-20-12/42
1) Lamp contains overpressure even in cold status - additional safety regulations, supplied with the lamps, have to be fulfilled. Please read Technical bulletin DO-SEM TB 004 carefully
2) Anode underneath
May 25, 2016, 17:16:10
Other microlithography lamps above 3,000 W
© 2016, OSRAM GmbH. All rights reserved.
Page 3 of 5
Product family datasheet
3) Anode on top
4) Distance from end of base to tip of anode or cathode (cold)
5) With cable connection (M 10)
6) Maximum permissible base temperature: 200 °C
7) With cable connection (M12)
8) With cable connection (M 6)
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May 25, 2016, 17:16:10
Other microlithography lamps above 3,000 W
© 2016, OSRAM GmbH. All rights reserved.
Page 4 of 5
Product family datasheet
Safety advice
Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in
enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions
must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the
operating instructions.
Application advice
For more detailed application information and graphics please see product datasheet.
Disclaimer
Subject to change without notice. Errors and omission excepted. Always make sure to use the most recent release.
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May 25, 2016, 17:16:10
Other microlithography lamps above 3,000 W
© 2016, OSRAM GmbH. All rights reserved.
Page 5 of 5