InGaAs area image sensor G12242-0707W Near infrared area image sensor with 128 × 128 pixels The G12242-0707W has a hybrid structure consisting of a CMOS readout circuit (ROIC: readout integrated circuit) and back-illuminated InGaAs photodiodes. Each pixel is made up of an InGaAs photodiode and a ROIC electrically connected by indium bumps. The timing generator in the ROIC provides an analog video output and AD-TRIG output which are obtained by just supplying a master clock (MCLK) and master start pulse (MSP) as digital inputs from external sources. The G12242-0707W has 128 × 128 pixels arrayed at a 20 μm pitch and their signals are read out from a video line. Light incident on the InGaAs photodiodes is converted into electrical signals which are then input to the ROIC through indium pumps. Electrical signals in the ROIC are converted into voltage signals by charge amplifiers and then sequentially output from the video line by the shift register. The G12242-0707W is hermetically sealed in a TO-8 package together with a twostage thermoelectric cooler to deliver low-cost yet highly stable operation. Features Applications Spectral response range: 0.95 to 1.7 μm Thermal image monitor High sensitivity: 1 μV/e- Laser beam profiler Frame rate: 258 fps max. Near infrared image detection Global shutter mode and rolling shutter mode switchable Foreign object detection Simple operation (built-in timing generator) Two-stage TE-cooled Low cost Block diagram Start www.hamamatsu.com Vertical shift register The G12242-0707W operates in either global shutter mode or rolling shutter mode which are switchable. The operation of the readout circuit in each mode is described below. Rolling shutter mode The sample-and-hold switches in all pixels are always ON. Pixel scanning starts from the top left point as shown in the figure on the right. The vertical shift register scans from top to bottom while sequentially selecting each row. The following operations to are performed on each pixel of the selected row. Transfers the integrated optical signal information to the signal processing circuit as a signal voltage, and samples and holds the signal voltage. Resets each pixel after having transferred the signal, transfers the reset signal voltage to the signal processing circuit, and samples and holds the reset signal voltage. The horizontal shift register performs a sequential scan to output the signal voltage and reset signal voltage as serial data. The offset voltage in each pixel can be eliminated by finding a difference between the signal voltage and the reset signal voltage with a circuit outside the sensor. After the above operations to are complete, the reset switch for each pixel on the selected row turns off and signal integration begins. At the same time, the vertical shift register shifts by one row to select the next row and the operations to are repeated. After the vertical shift register advances to the 128th row, the master start pulse (MSP), which is a frame scan signal, changes from low (0 V) to high (5 V), and the next frame scan begins when the MCLK goes low. The signal integration time is the time period from right after the end of the n-th row scan to the timing for holding the optical signal information integrated on the n-th row in the next frame. 128 × 128 pixels End Signal processing circuit Horizontal shift register VIDEO (signal voltage) VIDEO (reset voltage) KMIRC0068EA 1 InGaAs area image sensor G12242-0707W Global shutter mode In this mode, the integration time is equal to the low period of the MSP and the output voltage is sampled and held simultaneously at all pixels. Then the signals are sequentially read out in the same way as the rolling shutter mode. The vertical shift register scans from top to bottom while sequentially selecting each row. The following operations to are performed on each pixel of the selected row: Transfers the optical signal information sampled and held in each pixel to the signal processing circuit as a signal voltage, and samples and holds the signal voltage. Resets each pixel after having transferred the signal, transfers the reset signal voltage to the signal processing circuit, and samples and holds the reset signal voltage. The horizontal shift register performs a sequential scan to output the signal voltage and reset signal voltage as serial data. The offset voltage in each pixel can be eliminated by finding a difference between the signal voltage and the reset voltage with a circuit outside the sensor. Then the vertical shift register shifts by one row to select the next row and the operations to are repeated. When the MSP, which is a frame scan signal, goes low after the vertical shift register advances to the 128th row, the reset switches for all pixels simultaneously turn off and the next frame integration begins. Structure Parameter Image size Cooling Number of total pixels Number of effective pixels Pixel size Pixel pitch Package Window Specification 2.56 × 2.56 Two-stage TE-cooled 16384 (128 × 128) 16384 (128 × 128) 20 × 20 20 TO-8 16-pin metal (refer to dimensional outline) Borosilicate glass with anti-reflective coating Unit mm pixels pixels μm μm - Absolute maximum ratings Parameter Supply voltage Clock pulse voltage Start pulse voltage Operating temperature Storage temperature TE-cooler allowable current TE-cooler allowable voltage Thermistor power dissipation Symbol Vdd V(MCLK) V(MSP) Topr Tstg Ic Vc Pth Value -0.3 to +5.5 Vdd +0.5 Vdd +0.5 -10 to +60 -20 to +70 0.9 0.8 0.2 Unit V V V °C °C A V mW Note: Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings. 2 InGaAs area image sensor G12242-0707W Electrical and optical characteristics (Td=15 °C, Vdd=5 V, PD_bias=3 V) Parameter Spectral response range Peak sensitivity wavelength Photosensitivity Conversion efficiency Saturation charge Saturation output voltage Symbol λ λp S CE Qsat Vsat Photoresponse nonuniformity*1 PRNU Dark output Dark current Dark output nonuniformity Temperature coefficient of dark output Readout noise Dynamic range Defective pixel*2 VD ID DSNU ΔTDS Nr DR - Condition λ=λp Cf=0.08 pF After subtracting dark output, Integration time=5 ms Integration time=10 ms Min. 0.7 0.6 Typ. 0.95 to 1.7 1.55 0.8 1 1000 1.1 Max. - Unit μm μm A/W μV/ekeV - ±10 ±20 % -0.2 - 0.3 0.5 ±0.05 1.1 500 2200 - 0.5 2.5 ±0.2 1000 1 V pA V times/°C μV rms % *1: Measured at one-half of the saturation, excluding first and last pixels on each row *2: Pixels with photoresponse nonuniformity (integration time 5 ms), readout noise, or dark current higher than the maiximum value One or less cluster of four or more contiguous defective pixels <Examples of four contiguous defective pixels> Normal pixel Defective pixel KMIRC0060EB Electrical characteristics (Ta=25 °C) Parameter Supply voltage Supply current Ground Element bias Element bias current High Video output voltage (VIDEO_S) Low Video output voltage (VIDEO_R) Clock frequency Video data rate Thermistor resistance Symbol Vdd I(Vdd) Vss PD_bias I(PD_bias) VSH VSL VR f fV Rth Min. 4.9 2.9 3.6 2.8 2.8 8.2 Typ. 5 20 0 3.0 4.0 2.9 2.9 f/4 9 Max. 5.1 40 3.1 1 4.1 3.0 3.0 20 9.8 Unit V mA V V mA V V MHz MHz kΩ 3 InGaAs area image sensor G12242-0707W Equivalent circuit Whole image sensor THERM THERM Thermistor One pixel Reset switch Vb1 Shift register 0.1 μF Sample and hold switch VIDEO_S Photodiode Cf VIDEO_R Two-stage TE-cooler PD_bias Timing generator AD_Trig Vdd Vss Vref TE(+) TE(-) MCLK MSP Mode 1 Mode 2 External input KMIRC0072EB 4 InGaAs area image sensor G12242-0707W Connection example Supply voltage for analog buffer (A) GND -15 V +15 V Supply voltage for digital buffer (D) GND +5 V Supply voltage for sensor drive GND +5 V Temperature control circuit +15 V(A) VIDEO_S (signal output) B1 -15 V(A) VIDEO_R (reset signal output) AD_TRIG (output for A/D conversion) Vb1 Vdd +15 V(A) C2 B1 Vref -15 V(A) +5 V(D) R1 G12242-0707W PD_bias B2 +5 V(D) B2 MSP (input) B2 Mode 1 (input) B2 Mode 2 (input) B2 VR1 C2 C1 MCLK (input) VR1 C2 TE(+) TE(-) THERM THERM +5 V(D) +5 V(D) +5 V(D) (Reference) Parameter values Measurement board (Reference) Buffer Symbol Value Symbol IC R1 10 Ω B1 AD847 VR1 10 kΩ B2 TC74HCT541 C1 330 pF C2 0.1 μF KMIRC0070EB 5 InGaAs area image sensor G12242-0707W Timing chart The video output from a single pixel is equal to 4 MCLK (master clock) pulses. The MSP (master start pulse) is a signal for setting the integration time, so making the low (0 V) period of the MSP longer will extend the integration time. The MSP also functions as a signal that triggers each control signal to perform frame scan. When the MSP goes from low (0 V) to high (5 V) , each control signal starts on the falling edge of the MCLK and frame scan is performed during the high period of the MSP. In the global shutter mode, the low (0 V) period of the MSP serves as the integration time. In the rolling shutter mode, the integration time for the n-th row is the time period from right after the end of the n-th row scan to the timing for holding the optical signal information integrated on the n-th row in the next frame. The timing charts when operated at a MCLK frequency of 20 MHz are shown below. tr(MCLK) tf(MCLK) tpw(MCLK) t1 tr(MSP) t2 tf(MSP) t3 tpw(MSP) Integration time during global shutter mode One frame scanning period [(128 rows × 128 columns × 0.2 μs) (including blank)] MCLK (input) MSP (input) AD_TRIG (output) VIDEO_S (output) VIDEO_R (output) MSP Low űŦųŪŰť*1 4.6 μs 0.2 μs 0.2 μs 4.6 μs 0.2 μs 0.2 μs 4.6 μs 0.2 μs 0.2 μs (Blank period)*2 (1-1 ch) (1-128 ch) (Blank (2-1 ch) (2-128 ch) (Blank (3-1 ch) (3-128 ch) period) period) A MSP Low 0.3 μs*3 űŦųŪŰť*1 4.6 μs 0.2 μs 0.2 μs 4.6 μs (Blank period) (1-1 ch) (1-128 ch) (Blank period) (128-128 ch) (Blank period) 0.2 μs Integration time for the first row during rolling shutter mode*4 3.839 ms B AD_TRIG Dummy (2 clocks) VIDEO_S VIDEO_R 0.2 μs 0.2 μs 4.6 μs 0.2 μs n-127 ch n-128 ch Blank period between rows (n+1)-1 ch 0.2 μs *1: The minimum number of MCLK pulses during the MSP low period is 20. The integration time can be changed by adjusting the MSP low period. Rolling shutter mode: Integration time = MSP low period + 3.838 ms Global shutter mode: Integration time = MSP low period *2: There is a blank of 4.6 μs between each row. *3: The blank period after scanning the last channel is 0.3 μs. *4: The integration time for the first row in the rolling shutter mode is the time period from after 0.15 μs (period “A”) after the first row is scanned to the timing for holding the optical signal information integrated on the first row in the next frame. (Period “B”: 2.45 μs from the falling edge of the MCLK pulse right after the MSP goes high) As with the first row, the integration time for the second row onward is the time period from right after the end of scan on that row to the timing for holding the optical signal information integrated in the next frame. From the second row onward, the integration start timing shifts by 30.2 μs right after the end of scan on the preceding row. This operation is repeated until the 128th row and then returns to the first row. KMIRC0071EB 6 InGaAs area image sensor Parameter Symbol High Low Clock pulse voltage V(MCLK) tr(MCLK) tf(MCLK) tpw(MCLK) Clock pulse rise/fall times Clock pulse width High Low Start pulse voltage V(MSP) tr(MSP) tf(MSP) tpw(MSP) t1 t2 t3 Start pulse rise/fall times 3 Start pulse width* Start (rise) timing*4 Start (fall) timing*4 Output settling time G12242-0707W Min. Vdd - 0.5 0 Typ. Vdd 0 Max. Vdd + 0.5 0.5 Unit V V 0 10 12 ns 10 Vdd - 0.5 0 Vdd 0 Vdd + 0.5 0.5 ns V V 0 10 12 ns 0.001 10 10 - - 10 50 ms ns ns ns *3: Integration time max.=10 ms *4: Setting these timings shorter than the minimum value may delay the operation by one MCLK pulse and cause malfunction. Operation mode selection block Operating mode Rolling shutter mode Global shutter mode Mode 1 Low High Mode 2 Low Low * Low=0 V (Vss), High=5 V (Vdd) Spectral response Photosensitivity temperature characteristics (Typ. Td=25 °C) 1.0 (Typ.) 100 Td=60 °C 90 80 Relative sensitivity (%) Photosensitivity (A/W) 0.8 0.6 0.4 0.2 Td=40 °C 70 60 Td=20 °C 50 40 30 Td=-10 °C 20 10 0 0.8 1.0 1.2 1.4 1.6 1.8 Wavelength (μm) 0 1.55 1.65 1.60 1.70 1.75 Wavelength (μm) KMIRB0079EA Note: chip temperature KMIRB0072EB 7 InGaAs area image sensor G12242-0707W Cooling characteristics of TE-cooler Thermistor temperature characteristics (Typ.) 45 40 (Typ. Ta=25 °C, thermal resistance of heatsink 0.5 °C/W) 40 Element temperature (°C) Thermistor resistance (kΩ) 30 35 30 25 20 15 10 20 10 0 -10 5 0 -20 -10 -20 0 10 20 30 40 50 60 70 Temperature (°C) 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Current (A) KMIRB0067EA KMIRB0073EA There is the following relation between the thermistor resistance and temperature (°C). R1 = R2 × exp B {1/(T1 + 273.15) - 1/(T2 + 273.15)} R1: Resistance at T1 (°C) R2: Resistance at T2 (°C) B: B constant (B=3410 K ± 2%) Thermistor resistance=9 kΩ (at 25 °C) Current vs. voltage (TE-cooler) 0.9 (Typ. Ta=25 °C, thermal resistance of heatsink 0.5 °C/W) 0.8 0.7 Current (A) 0.6 0.5 0.4 0.3 0.2 0.1 0 0 0.1 0.2 0.3 0.4 0.5 Voltage (V) 0.6 0.7 0.8 KMIRB0074EA 8 InGaAs area image sensor G12242-0707W Dimensional outline (unit: mm) 1 ch 128 ch 16384 ch 23 ± 2 Photosensitive surface 10.0 ± 0.2 ϕ14.0 ± 0.2 Window ϕ10.0 ± 0.2 7.2 ± 0.3 ϕ15.3 ± 0.2 ϕ0.45 ġōŦŢť 5.7 ± 0.2 9.5 ± 0.2 Position accuracy of photosensitive area center with respect to cap center -0.5≤X≤+0.5 -0.5≤Y≤+0.5 1.9 ± 0.2 Package: Kovar Window: borosilicate glass with anti-reflective coating Window sealing method: hermetic KMIRA0028EB Pin connections Pin no. Name Input/Output Vss Input 1 2 Vdd Input 3 MCLK Input 4 AD_TRIG Output 5 MSP Input 6 Mode 1 Input 7 Mode 2 Input 8 Vb1 Output 9 PD_bias Input 10 Vref Input 11 VIDEO_R Output 12 VIDEO_S Output 13 TE (-) Input 14 THERM Output 15 THERM Output 16 TE (+) Input Note: Connect a bypass capacitor of 0.1 μF to the Vb1 Function 0 V ground +5 V power supply Control pulse for timing generator A/D sampling signal Frame scan start pule Mode switching Mode switching Pixel bias voltage (internally generated) Photodiode bias voltage CMOS drive voltage Video output after reset Video output after integration Terminal for thermoelectric cooler (-) Terminal for thermistor Terminal for thermistor Terminal for thermoelectric cooler (+) Remark 0V 5V Syochronized with falling edge Syochronized with falling edge 0.5 V 3.0 V 3.0 V 2.9 V typ. 2.9 to 4.0 V typ. terminal. 9 InGaAs area image sensor G12242-0707W Precautions (1) Electrostatic countermeasures This device has a built-in protection circuit against static electrical charges. However, to prevent destroying the device with electrostatic charges, take countermeasures such as grounding yourself, the workbench and tools to prevent static discharges. Also protect this device from surge voltages which might be caused by peripheral equipment. (2) Incident window If dust or dirt gets on the light incident window, it will show up as black blemishes on the image. When cleaning, avoid rubbing the window surface with dry cloth or dry cotton swab, since doing so may generate static electricity. Use soft cloth, paper or a cotton swab moistened with alcohol to wipe dust and dirt off the window surface. Then blow compressed air onto the window surface so that no spot or stain remains. (3) Soldering To prevent damaging the device during soldering, take precautions to prevent excessive soldering temperatures and times. Soldering should be performed within 5 seconds at a soldering temperature below 260 °C. (4) Operating and storage environments Handle the device within the temperature range specified in the absolute maximum ratings. Operating or storing the device at an excessively high temperature and humidity may cause variations in performance characteristics and must be avoided. Related information www.hamamatsu.com/sp/ssd/doc_en.html Precautions ∙ Notice ∙ Image sensors/Precautions Information described in this material is current as of June, 2014. Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always contact us for the delivery specification sheet to check the latest specifications. Type numbers of products listed in the delivery specification sheets or supplied as samples may have a suffix "(X)" which means preliminary specifications or a suffix "(Z)" which means developmental specifications. The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use. Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39) 02-93581733, Fax: (39) 02-93581741 China: Hamamatsu Photonics (China) Co., Ltd.: B1201, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86) 10-6586-6006, Fax: (86) 10-6586-2866 Cat. No. KMIR1022E03 Jun. 2014 DN 10