InGaAs area image sensor G12460-0606S Image sensor with 64 × 64 pixels developed for two-dimensional infrared imaging The G12460-0606S has a hybrid structure consisting of a CMOS readout circuit (ROIC: readout integrated circuit) and backilluminated InGaAs photodiodes. Each pixel is made up of an InGaAs photodiode and a ROIC electrically connected by an indium bump. A timing generator in the ROIC provides an analog video output and AD-TRIG output which are easily obtained by just supplying a master clock (MCLK) and master start pulse (MSP) from external digital inputs. The G12460-0606S has 64×64 pixels arrayed at a 50 μm pitch and their signals are read out from a single video line. Light incident on the InGaAs photodiodes is converted into electrical signals which are then input to the ROIC through indium bumps. Electrical signals in the ROIC are converted into voltage signals by charge amplifiers and then sequentially output from the video line by the shift register. The G12460-0606S is hermetically sealed in a TO-8 package together with a onestage thermoelectric cooler to deliver low-cost yet highly stable operation. Features Applications Spectral response range: 1.12 to 1.9 μm Thermal imaging monitor Excellent linearity by offset compensation Laser beam profiler High sensitivity: 1600 nV/e- Near infrared image detection Simultaneous charge integration for all pixels (global shutter mode) Foreign object detection Simple operation (built-in timing generator) One-stage TE-cooled Low cost Block diagram Start www.hamamatsu.com Shift register A sequence of operation of the readout circuit is described below. In the readout circuit, the charge amplifier output voltage is sampled and held simultaneously at all pixels during the integration time determined by the low period of the master start pulse (MSP) which is as a frame scan signal. Then the pixels are scanned and their video signals are output. Pixel scanning starts from the starting point at the upper left in the right figure. The vertical shift register scans from top to bottom in the right figure while sequentially selecting each row. For each pixel on the selected row, the following operations are performed: Transfers the sampled and held optical signal information to the signal processing circuit as a signal voltage. Resets the amplifier in each pixel after having transferred the signal voltage and transfers the reset voltage to the signal processing circuit. The signal processing circuit samples and holds the signal voltage and reset voltage . The horizontal shift register scans from left to right in the right figure, and the voltage difference between and is calculated in the offset compensation circuit. This eliminates the amplifier offset voltage in each pixel. The voltage difference between and is output as the output signal in the form of serial data. The vertical shift register then selects the next row and repeats the operations from to . After the vertical shift register advances to the 64th row, the MSP, which is a frame scan signal, goes high. After that, when the MSP goes high and then low, the reset switches for all pixels are simultaneously released and the next frame integration begins. 64 × 64 pixels End Signal processing circuit Offset compensation circuit VIDEO Shift register KMIRC0043EA 1 InGaAs area image sensor G12460-0606S Element structure Parameter Image size Cooling Number of total pixels Number of effective pixels Pixel size Pixel pitch Package Window Specification 3.2 × 3.2 One-stage TE-cooled 4096 (64 × 64) 4096 (64 × 64) 50 × 50 50 TO-8 16-pin metal (refer to dimensional outline) Anti-reflective coating borosilicate glass Unit mm pixels pixels μm μm - Absolute maximum ratings Parameter Supply voltage Clock pulse voltage Operating temperature Storage temperature TE-cooler allowable current TE-cooler allowable voltage Thermistor power dissipation Symbol Vdd V(MCLK) Topr Tstg Ic Vc Pth Value -0.3 to +5.5 Vdd + 0.5 -10 to +60 -20 to +70 1.3 1.9 0.2 Unit V V °C °C A V mW Note: Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings. Electrical and optical characteristics (Ta=25 °C, Td=0 °C, Vdd=5 V, PD_bias=4.5 V) Parameter Spectral response range Peak sensitivity wavelength Photosensitivity Conversion efficiency Saturation charge Symbol λ λp S CE Qsat Saturation output voltage Vsat Photoresponse nonuniformity*1 PRNU Dark voltage Dark current Dark output nonuniformity Readout noise Dynamic range Defective pixel*2 VD ID DSNU Nr DR - Condition λ=λp After subtracting dark output After subtracting dark output, Integration time: 1 ms Integration time: 2 ms Integration time: 2 ms Integration time: 0.1 ms Min. 1.0 - Typ. 1.12 to 1.9 1.75 1.1 1600 1.3 Max. - Unit μm μm A/W nV/eMe- 1.5 2.0 - V - ±10 ±20 % 1.0 - 1.3 8 ±0.2 800 2500 - 1.6 20 ±0.5 1500 1 V pA V μV rms % *1: Measured at one-half of the saturation, excluding first and last pixels on each row *2: Pixels with photoresponse nonuniformity (integration time: 1 ms), readout noise, dark current, dark output, DSNU, or saturation output voltage higher than the maximum value One or less cluster of four or more contiguous defective pixels <Examples of four contiguous defective pixels> Normal pixel Defective pixel KMIRC0060EB 2 InGaAs area image sensor G12460-0606S Electrical characteristics (Ta=25 °C) Parameter Supply voltage Supply current Ground Element bias Element bias current High Low Video output voltage Clock frequency Video data rate Thermistor resistance Symbol Vdd I(Vdd) Vss PD_bias I(PDbias) VH VL f fV Rth Min. 4.9 4.4 8.2 Typ. 5 30 0 4.5 3.2 1.2 f/8 9 Max. 5.1 60 4.6 1 40 9.8 Unit V mA V V mA V MHz MHz kΩ Equivalent circuit Whole image sensor THERM THERM Thermistor 1 pixel Reset Switch Shift register Sample-and-hold Switch Offset compensation circuit VIDEO Photodiode Vb1 0.1 μF One-stage TE-cooler PD_bias Vdd Vss TE(+) TE(-) Timing generator MCLK AD_TRIG MSP External input KMIRC0063ED 3 InGaAs area image sensor G12460-0606S Connection example Power supply for digital buffer (D) GND +5 V Vdd +15 V (A) VIDEO (signal output) Power supply for sensor drive GND +5 V Power supply for analog buffer (A) GND -15 V +15 V Temperature contorol circuit Vb1 C2 B1 -15 V (A) +5 V (D) AD_TRIG (output for A/D conversion) G12460-0606S C2 B2 C1 +5 V (D) MCLK (input) PD_bias R1 VR1 TE(+) TE(-) THERM THERM B2 +5 V (D) MSP (input) B2 Measurement board (Reference) Parameter values (Reference) Buffer Symbol Value Symbol R1 10 Ω B1 Type no. AD847 VR1 10 kΩ B2 TC74VHCT541 C1 330 pF C2 0.1 μF KMIRC0075EA 4 InGaAs area image sensor G12460-0606S Timing chart The video output from a single pixel is equal to 8 MCLK (master clock) pulses. The MSP (master start pulse) is a signal for setting the integration time, so making the low (0 V) period of the MSP longer will extend the integration time. The MSP also functions as a signal that triggers each control signal to perform frame scan. When the MSP goes from low (0 V) to high (5 V) , each control signal starts on the falling edge of the MCLK and frame scan is performed during the high period of the MSP. One frame scanning period [64 rows × 64 columns (including blank) × 8 MCLK] MCLK (input) MSP (input) AD_TRIG (output) VIDEO (output) (Video űŦųŪŰť) 1 (Integration time)* 90 MCLK 8 MCLK 8 MCLK 94 MCLK*2 8 MCLK 8 MCLK 8 MCLK (1 ch) (2 ch) (Blank period) (65 ch) (66 ch) (4096 ch) (Blank period) tf(MCLK) tr(MCLK) (Blank period) tpw(MCLK) t1 tr(MSP) t2 tf(MSP) 6 MCLK (Reset period)*3 t3 tpw(MSP) Integration time *1: A minimum number of MCLK of integration time is 40 MCLK. *2: There are blanks of 94 MCLK between each row. *3: A minimum number of MCLK of reset period is 200 MCLK. KMIRC0044EC KMIRC0044EC Parameter Clock pulse voltage Symbol High Low tr(MCLK) tf(MCLK) tpw(MCLK) Clock pulse rise/fall times Clock pulse width Start pulse voltage Start pulse rise/fall times 3 Start pulse width* Start (rise) timing*4 Start (fall) timing*4 Output setting time V(MCLK) High Low V(MSP) tr(MSP) tf(MSP) tpw(MSP) t1 t2 t3 Min. Vdd - 0.5 0 Typ. Vdd 0 Max. Vdd + 0.5 0.5 Unit V V 0 10 12 ns 10 Vdd - 0.5 0 Vdd 0 Vdd + 0.5 0.5 ns V V 0 10 12 ns 0.001 10 10 - - 2 50 ms ns ns ns *3: Integration time max.=2 ms *4: Setting these timings shorter than minimum value may delay the operation by one MCLK pulse and cause malfunction. 5 InGaAs area image sensor G12460-0606S Spectral response Photosensitivity temperature characteristics (Typ. Ta=25 °C) 1.2 (Typ.) 100 90 25 °C 80 Relative sensitivity (%) Photosensitivity (A/W) 1.0 0.8 0.6 0.4 70 60 0 °C 50 40 30 -10 °C 20 0.2 10 0 0.8 1.2 1.0 1.4 1.6 1.8 0 1.75 2.0 1.85 1.8 Wavelength (μm) 1.9 1.95 Wavelength (μm) KMIRB0078EA KMIRB0087EA Thermistor temperature characteristics (Typ.) 45 70 40 60 35 50 Element temperature (°C) Thermistor resistance (kΩ) Cooling characteristics (TE-cooler) 30 25 20 15 10 5 0 -20 -10 (Typ. Ta=25 °C, thermal resistance of heatsink 0.5 °C/W) 40 30 20 10 0 -10 0 10 20 30 40 50 60 70 -20 -0.4 -0.2 0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 Current (A) Temperature (°C) KMIRB0067EA KMIRB0054ED There is the following relation between the thermistor resistance and temperature (°C). R1 = R2 × exp B {1/(T1 + 273.15) - 1/(T2 + 273.15)} R1: Resistance at T1 (°C) R2: Resistance at T2 (°C) B: B constant (B=3410 K ± 2%) Thermistor resistance=9 kΩ (at 25 °C) 6 InGaAs area image sensor G12460-0606S Current vs. voltage (TE-cooler) (Typ. Ta=25 °C, thermal resistance of heatsink 0.5 °C/W) 1.4 1.2 0.8 0.6 0.4 0.2 0 0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 Voltage (V) KMIRB0055ED Dimensional outline (unit: mm) 1 ch 64 ch 4096 ch 10.0 ± 0.2 23 ± 1 ϕ14.0 ± 0.2 Window ϕ10.0 ± 0.2 4.8 ± 0.3 ϕ15.3 ± 0.2 Photosensitive area ϕ0.45 Lead 5.7 ± 0.2 Current (A) 1.0 9.5 ± 0.2 Position accuracy of photosensitive area center with respect to cap center -0.5≤X≤+0.5 -0.5≤Y≤+0.5 1.9 ± 0.2 Package material: kovar metal Window material: borosilicate glass with anti-reflective coating Window sealing method: hermetic KMIRA0021EB 7 InGaAs area image sensor G12460-0606S Pin connections Pin no. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Name Vss Vdd MCLK AD_TRIG MSP NC NC Vdd PD_bias Vb1 NC VIDEO TE (-) THERM THERM TE (+) Input/Output Input Input Input Output Input Input Input Output Output Input Output Output Input Function 0 V ground +5 V supply voltage Clock pulse for timing generator Signal for A/D sampling Clock pulse for flame scan start +5 V supply voltage Photodiode bias voltage Pixel bias voltage Video output TE-cooler (-) Thermistor Thermistor TE-cooler (+) Remark 0V 5V Falling synchronous pulse Falling synchronous pulse 5V 4.5 V 1.27 V 1.2 to 3.2 V * Do not connect anything to the NC terminals. Note: Connect a bypass capacitor of 0.1 μF to the Vb1 terminal. Precautions (1) Electrostatic countermeasures This device has a built-in protection circuit against static electrical charges. However, to prevent destroying the device with electrostatic charges, take countermeasures such as grounding yourself, the workbench and tools to prevent static discharges. Also protect this device from surge voltages which might be caused by peripheral equipment. (2) Incident window If dust or dirt gets on the light incident window, it will show up as black blemishes on the image. When cleaning, avoid rubbing the window surface with dry cloth or dry cotton swab, since doing so may generate static electricity. Use soft cloth, paper or a cotton swab moistened with alcohol to wipe dust and dirt off the window surface. Then blow compressed air onto the window surface so that no spot or stain remains. (3) Soldering To prevent damaging the device during soldering, take precautions to prevent excessive soldering temperatures and times. Soldering should be performed within 5 seconds at a soldering temperature below 260 °C. (4) Operating and storage environments Handle the device within the temperature range specified in the absolute maximum ratings. Operating or storing the device at an excessively high temperature and humidity may cause variations in performance characteristics and must be avoided. 8 InGaAs area image sensor G12460-0606S Related information www.hamamatsu.com/sp/ssd/doc_en.html Precautions ∙ Disclaimer ∙ Image sensors Information described in this material is current as of May, 2015. Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always contact us for the delivery specification sheet to check the latest specifications. The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use. Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39) 02-93581733, Fax: (39) 02-93581741 China: Hamamatsu Photonics (China) Co., Ltd.: B1201, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86) 10-6586-6006, Fax: (86) 10-6586-2866 Cat. No. KMIR1023E03 May 2015 DN 9