Silicon Carbide - Schottky Barrier Diodes

Innovations Embedded
Silicon Carbide
Schottky Barrier Diodes
White Paper
ROHM MarketingUSA
Presented by ROHM Semiconductor
Silicon Carbide
Schottky Barrier Diodes
Taking Efficiency to the Next Level for PFC and Other Applications
Introduction
Schottky barrier diodes (SBDs) have been available for
more than a decade but were not commercially viable
The semiconductor industry has a well-established
until recently. As a pioneer in SiC technology, ROHM
history of “smaller, faster, and cheaper.” Improving
Semiconductor expects that volume production will lead
performance and reducing device cost while shrinking
to SiC’s acceptance in more and more applications.
packaging size is fundamental to virtually every semiconductor product type. For power products, improved
performance is measured by increased efficiency and
The Advantages of Silicon Carbide
power density, higher power handling capability, and
The highest performance silicon power diodes are
wider operating temperature range. Such improvements
Schottky barrier diodes. Not only do SBDs have the
depend largely on the desirable characteristics of power
lowest reverse recovery time (trr) compared to the
components used, such as low switching and conduc-
various types of fast recovery (fast recovery epitaxial),
tion losses, high switching frequency, stable electrical
ultrafast recovery and super-fast recovery diodes, they
characteristics over a wide temperature range, high
also have the lowest forward voltage drop (VF). Both of
operating temperature, and high blocking voltage. As
these parameters are essential to high efficiency. Table
silicon power components approach their theoretical
1 shows a comparison of breakdown voltage, VF, and
limits, compound semiconductor materials, such as sili-
trr for commonly available diodes. While Schottky bar-
con carbide (SiC) and gallium nitride (GaN), provide the
rier diodes have the advantage of low forward losses
capability to dramatically improve these parameters.
and negligible switching losses compared to other diode
Today, the need for higher efficiency in end products is
more critical than ever. Although silicon power products
technologies, the narrow bandgap of silicon limits their
use to a maximum voltage of around 200 V. Si diodes
continue to see incremental improvements, devices
that operate above 200 V have higher VF and trr.
based on compound semiconductor materials deliver
Silicon carbide is a compound semiconductor with
significantly better performance — in a large number of
superior power characteristics to silicon, including a
cases not possible with their silicon counterparts. This is
bandgap approximately three times greater, a dielectric
certainly true for the most basic components in power
breakdown field 10 times higher and a thermal coef-
electronics: diodes and transistors. Silicon carbide (SiC)
ficient three times larger. These characteristics make it
Type
VBR (VRRM)
VF (1)
trr (1)
Si Schottky Barrier Diode
15 V-200 V
0.3V-0.8 V
<10 ns
Si Super Fast Diode
50 V-600 V
0.8V-1.2 V
25 ns-35 ns
Si Ultra Fast Diode
50 V-1,000 V
1.35V-1.75 V
50 ns-75 ns
Si Fast Recovery (Epitaxial) Diode
50 V-1,000 V
1.2 V
100 ns-500 ns
Si Standard Recovery Diode
50 V-1,000 V
1.0 V
1 μs-2 μs
Silicon Carbide Schottky Barrier Diode
600 V
1.5 V
<15 ns
(1) @25°C. Si-based diodes have a wide increase at higher temperatures and are typically limited to 150°C operation.
Table 1. Comparison of key parameters for silicon and SiC diodes.
ROHM Semiconductor
SiC Schottky Barrier Diodes
1
ideal for power electronics applications. Silicon carbide
devices have higher breakdown voltage, operating temperature and thermal conductivity, as well as shorter
recovery time and lower reverse current than silicon
diodes with comparable breakdown voltage. These
device characteristics equate to low-loss, high-efficiency
power conversion, smaller heat sinks, reduced cooling
costs and lower EMI signatures. Continuing progress in
raising high (250º C+) operating temperature and high
blocking voltage promise exciting new applications such
as motor drive in HEV/EV and solid-state transformers.
SiC is certainly not the only compound semiconductor
material being considered for next-generation power
components. Gallium arsenide (GaAs) Schottky rectifiers
Figure 1. With an SiC Schottky barrier diode (SBD), switching losses
are reduced by 2/3 compared to a silicon fast recovery
diode (FRD). The Si FRD is used for comparison since it
has a comparable voltage rating to the SiC SBD.
have been available since the 1990s but have only found
limited acceptance for the most demanding applications
due to their higher cost than silicon. GaAs bandgap,
breakdown field and thermal conductivity are lower than
silicon carbide. More recently, researchers are pursuing
gallium nitride (GaN) for power transistors. GaN has similar bandgap and dielectric constant (hence comparable
breakdown voltage) to SiC. It has higher electron mobility but only ¼ the thermal conductivity. This technology
is early in its development/commercialization phase relative to SiC. Currently there are many more SiC devices
and suppliers.
Figure 1 shows the reduction in switching losses compared to fast recovery diodes based on SiC SBD’s minimal reverse recovery charge (Qrr) during turn-off.
With silicon fast recovery diodes, the trr increases significantly with temperature as shown in Figure 2. In
contrast, SiC SBDs maintain a constant trr regardless of
temperature. This enables SiC SBD operation at higher
temperature without increased switching losses. The
numerous SiC SBD performance advantages can result
in more compact, lighter power devices with higher efficiency.
Figure 2. The reverse recovery time of a silicon FRD can easily
double with a junction temperature rise of only 40°C. In
contrast, silicon carbide SBDs are essentially flat over this
same temperature range.
With all of these benefits, why hasn’t SiC had more of
an impact in new products? One reason is the continuous improvements of silicon devices, which benefits
from having an infrastructure – process, circuit design,
production equipment – that has been fine tuned for
over fifty years. By contrast, SiC technology is still in
its infancy. The higher cost of SiC devices has been a
barrier to most commercial applications. This is due in
large part to the fact that SiC is a much more difficult
SiC has demonstrated temperature stability over a wide
material to process than silicon. For example, costly ion
operating range, as shown in Figure 3. This simplifies
implantation is used for doping because of SiC’s low
the parallel connection of multiple devices and prevents
diffusion rate. Reactive ion etching (RIE) with a fluorine-
thermal runaway.
based plasma is performed, followed by annealing at
ROHM Semiconductor
SiC Schottky Barrier Diodes
2
n
lower production costs;
n
availability of SiC transistors;
n
wider pool of suppliers;
n
the rise of green energy in general, and power
conversion efficiency in particular, driven by
legislation and market demands; and
n
new applications such electric vehicles (EVs) and
charging stations.
Cost
In its report “SiC 2010,” Yole Developpement identified
Figure 3. The forward voltage of a high voltage (1200V) silicon carbide SBD increases less than 2X when the temperature
increases from 25°C to 225°C.
the transition to 4-inch (100-mm) SiC wafers as a signifi-
high temperature. These processing difficulties increase
“The total SiC substrate merchant market has reached
cost and limit the types of device structures that can be
approximately $48M in 2008. It is expected to exceed
built. As a result, the cost is high and availability limited.
$300M in a decade.” The coming transition to 6-inch
However, this is about to change.
(150-mm) wafers is expected to play a significant role
cant milestone towards reduced cost. The report states,
in further cost reduction and market growth. According
The Timing is Right for Silicon Carbide
Technology
to the report, “150-mm wafers will definitely accelerate
the cost reduction of SiC device manufacturing.” Figure
Though the first commercial SiC SBDs were available
in 2001, adoption has been limited until recently. The
increase in interest and adoption in many applications
4 shows the growth that can be expected for SiC substrates in photovoltaic (PV) inverters, a key application
requiring high efficiency.
are predominantly due to:
Substrate market (M$)
Substrate volume (units)
SiC Substrate Market in Units and $ for PV Inverters
SiC 6” wafer (units)
SiC 4” wafer (units)
Wafer market (M$)
2006
2007
2008
2009
2010
2011
2012
2013
2014
2015
Figure 4. Increased wafer sizes of 4 and 6-inch will accelerate market acceptance of SiC. Source: Yole Developpement.
ROHM Semiconductor
SiC Schottky Barrier Diodes
3
Device market (M$)
Diode + Transistor (Si + SiC) Device Market in PV Inverters
Si market (M$)
SiC market (M$)
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
2018
2019
Figure 5. SiC diodes and transistors will start to grow in photovoltaic inverter applications starting in 2013. Source: Yole Developpement.
SiC Transistor
California’s Renewables Portfolio Standard (RPS), estab-
One of the main obstacles to the increased use of SiC
has been the lack of an SiC transistor to provide a complete SiC solution. With the ongoing global R&D efforts
in this area, Yole expects to see volume production
within the next few years. Figure 5 shows the impact this
lished in 2002 under Senate Bill 1078, is one of the most
ambitious renewable energy standards in the country.
It requires that 20% of a utility’s portfolio should come
from renewable energy by 2017. These and other efforts
will drive the need for SiC PV inverters.
will have in one market – photovoltaic converters. The
Other applications that are attracting early adopters of
growth is based on a greater number of suppliers and
SiC technology and seeing early implementation include
increased production capacity for both SiC diodes and
those where the need for high efficiency is either a major
transistors.
end-product differentiator and/or where legislation and
Legislation and Market Push for Green Energy
Governments around the globe are pursuing renewable
regulations dictate a minimum energy efficiency level.
Some key regulatory milestones are:
n
January 2001, IEC-61000-4-3 requirements stimu-
energy sources to reduce the dependence on fossil fuels
late active power factor correction (PFC) to mini-
and reduce CO2 emissions. For example, in the U.S.,
mize energy loss and distortion in AC/DC switch
President Obama has set a goal of generating 80% of
mode power supply (SMPS) designs (see Figure
America’s electricity from clean sources by 2035.
6). Many power products are required to meet
Figure 6. A simplified active PFC boost converter typically requires a power MOSFET, a blocking diode, an inductor and a capacitor. Not
shown is a snubber circuit to mitigate EMI emission.
ROHM Semiconductor
SiC Schottky Barrier Diodes
4
80 PLUS Test Type
115V Internal Non-Redundant
Percent of Rated Load
20%
50%
80 PLUS Basic
80%
80%
80%
Bronze
82%
85%
82%
81%
85%
81%
Silver
85%
88%
85%
85%
89%
85%
Gold
87%
90%
87%
88%
92%
88%
Platinum
90%
92%
89%
90%
94%
91%
100%
230V Internal Redundant
20%
50%
100%
Not defined
Table 2. 80 PLUS Efficiency Levels. Per ENERGY STAR 5.0, desktop computer, laptop computer or server power supplies must comply with
the Bronze level. Source: Wikipedia.
n
both minimum power factor and efficiency levels.
As a practical example, consider the PFC circuit
In 2004, the 80 Plus program was launched that
in a 1 KW AC-DC power supply with the following
requires 80% or higher energy efficiency at various
characteristics:
loads (see Table 2). SiC SBDs allow power supply
n
n
Input: 100 Vac, 60 Hz
designers to meet high efficiency certification lev-
n
Output: 400 Vdc, 2.5 A
els such as 80 Plus Bronze, Silver, or Gold.
n
Switching frequency: 50 KHz
In July 2009, the U.S. Department of Energy
n
Operating temperature: 100º C
(DOE) ENERGY STAR v5.0 specification for computers that includes 80 Plus power supply efficiency was adopted by the European Commission
and the U.S. government.
Tabel 3 summarizes the performace comparison
between a circuit using a 600V Si FRD and an SiC SBD.
SiC advantages in real-world applications
SMPSs with output power ratings above 300 W typically
use active PFC boost converters designed to operate
Peak reverse current
Si-FRD
ROHM SiC SBD
56 A
14 A
Power conversion efficiency
93.13%
95.57%
Harmonic distortion
2.42%
2.36%
Table 3. Performance comparison between circuits using 600 V / 20 A
Si-FRD and ROHM 600 V / 10A SBD (SCS110AG).
in continuous conduction mode (CCM). The single biggest advantage of using SiC diode in place of Si diode is
Improvements similar to those in power supplies and
the former’s much lower reverse recovery current (See
PFC circuits can be obtained in other applications. For
Figure 1), which translates into approximately 60% lower
example, inverters with SiC SBDs have dramatically
switching loss and elimination (or great simplication) of
reduced recovery losses, resulting in improved efficiency.
the snubber circuit to control EMI. Also, the switching
When used with IGBTs and lower operating frequencies,
transistor no longer has to be derated to accommodate
the lower thermal losses allow for smaller heat sinks.
the large reverse current from the silicon blocking diode
— a lower amperage, less expensive transistor can be
used. With lower loss, the heat sink/cooling system can
be made smaller. Lower switching loss allows the circuit
to operate at higher frequency giving designers options
to further increase efficiency and/or to reduce the
choke’s size, saving cost and board space.
ROHM Semiconductor
Using ROHM’s SiC SBDs, customers report improvements of system-level efficiency from 0.3% to 1.0%.
This translates into an annual savings of over $50 for
a 20 kW inverter operating at a cost of $0.10/kW-hr.
For products with a long lifetime such as such as solar
inverters, this provides a savings of $750 in 15 years or
$1500 in 30 years.
SiC Schottky Barrier Diodes
5
100000
50000
Rated Current (A)
High voltage
resistance devices
Medium voltage
resistance devices
10000
5000
Low voltage
resistance devices
1000
500
HEV
EV
Package
Air conditioners
100
50
DC/DC
Converter
Routers
Automotive
equipment
Power supplies
Notebook PCs HDD for communication
devices
PPC
10
5
Energy transmission
and distribution PE
Railway drive
Industrial motors
SiC device
target market
Server WS
AC adapters
SW power supplies
1
10
50
100
500
1000
5000 10000
50000 100000
Rated Voltage (V)
Figure 7. Target applications for silicon carbide’s higher efficiency vary depending on voltage and current rating.
In addition to photovoltaic inverters and PFC, other
transistors (MOSFETs, JFETs, BJTs), SiC diodes pack-
applications for 600 V and lower SiC devices include
aged with Si transistors, SiC module, etc.
switching circuits, uninterruptible power supplies (UPS),
motor drive circuits, and others where high efficiency
is a product differentiator. Figure 7 shows how various
application areas are distributed according to blocking voltage and current handling requirements. Though
today’s SiC devices still trail IGBT in power rating and
the types of devices are still limited, in general the higher
these requirements are, the more compelling the adoption of SiC technology.
the need for SiC are vehicles with some form of electric
propulsion such as hybrid, plug-in hybrid, electric, and
fuel cell vehicles. Efficiency, size, and cost are extremely
important factors, making SiC devices particularly suitable. These vehicles require the efficiency that SiC can
provide and, equally important, they have an operating
environment that demands SiC’s temperature stability
and higher temperature operating capabilities. Cars with
SiC SBDs and SiC transistors can potentially eliminate a
Challenges to SiC adoption
liquid cooling system to help justify the increased costs
The main obstacles to widespread adoption of SiC are
of SiC technology. Acceptance in these vehicles will cre-
cost, availability (of different device types as well as a
ate a high volume damand and push the technology into
larger supplier pool) and familiarity of the engineering
the mainstream.
community with this technology.
While EV usage will occur in the future when SiC tran-
For SiC components to be widely adopted in power
sistors are more affordable and widely available, having
electronics, the premium over Si must come down. SiC
them as a driving force should encourage engineers with
diodes are approximately 5x more expensive than Si
other applications to take a closer look at SiC technol-
FRDs. As with silicon, lower costs will be reailzed by
ogy.
improving yield as the technology matures, the use of
larger wafers, and an increase in the number of suppliers. In the past few years, more vendors — both small
and large, startups and established - have joined the
“race.” As a result, a variety of SiC devices are or will
soon be available, including various flavors of diodes and
A rapidly emerging field that can dramatically accelerate
ROHM Semiconductor
As described earlier in the PFC application example, SiC
can in many cases serve as a drop-in replacement for its
Si counterpart. This example also makes it clear that, to
fully realize the performance benefits and potential cost
savings, (e.g., no or simplified snubber, using switching
SiC Schottky Barrier Diodes
6
transistor with lower current rating), designers must be
ROHM has also solved the problems associated with
fully aware of the characteristics of SiC devices. Those
mass production of SiC SBD devices, such as uniformity
who take advantage of SiC’s capabilities early, when
of the Schottky contact barrier and formation of a high-
only diodes are widely available, will be in a much better
resistance guard ring layer that does not require high
position to judge, adopt, and fully realize the benefits of
temperature processing, making uniform, in-house pro-
future SiC components (transistors, modules, etc.) in
duction possible.
power applications.
In 2008, ROHM together with Nissan Motor Co., Ltd.
ROHM Semiconductor’s Silicon Carbide
Solutions
(HJD). The HJD delivers avalanche energy and fracture
resistance that exceed the performance of previous
As a leading designer and manufacturer of semiconduc-
designs by a factor of 10. ROHM had been shipping
tor products, from VLSI integrated circuits to discretes
HJD engineering samples along with proprietary high-
and passives to optical electronics, ROHM recognized
power SBDs and MOSFETs for two years prior to the
the potential of and made significant investment in sili-
announcement. During that time, engineers worked
con carbide technology many years ago. Some of the
aggressively to improve the underlying technologies for
major milestones in its history of silicon carbide research
commercialization.
and development have been announced and are worth
noting.
In 2010, ROHM acquired SiCrystal AG, a leading producer and supplier of high-quality, single-crystalline
ROHM’s pioneering efforts resulted in the successful
silicon carbide wafers. SiCrystal’s capabilities include
development of a silicon carbide double-diffusion metal-
complete materials processing from crystal growth to
oxide-semiconductor field-effect transistor (DMOSFET)
wafering. With the acquisition of SiCrystal AG, ROHM
prototype in 2004. Schottky barrier diodes and power
possesses total manufacturing capability for SiC semi-
modules that incorporated SiC transistors and SBDs
conductors from ingot formation to power device fabri-
were developed soon afterward. Improvements and
cation. This allows the rapid development of advanced
enhancements were made to the SiC SBDs based on
products and complete control of raw materials for
customer feedback in 2005. This led to the development
industry-leading reliability and quality.
of a uniform production system for SiC devices.
ROHM’s R&D activities also include the development of
Mass production of SiC transistors has proven particu-
the industry’s first SiC Trench MOSFET as well as high
larly challenging to manufacturers worldwide. Therefore,
power modules using SiC Trench MOSFETs and SBDs
in parallel, ROHM partnered with university and industrial
compatible with operating temperatures greater than
partners to develop production processes and equip-
200° C.
ment. ROHM overcame several significant obstacles
and successfully established the industry’s first mass
production system for SiC transistors. To do this, ROHM
developed a proprietary field-weakening architecture
and unique screening methods to ensure reliability and
technology that limits the degradation in characteristics
caused by the high-temperature (up to 1,700° C) processes required in SiC fabrication.
announced the development of a heterojunction diode
ROHM Semiconductor
ROHM’s SiC offerings include Schottky barrier diodes,
MOSFETs, and modules. 600 V SBDs are in mass production and are available as bare die or packaged parts.
1200 V SBDs and MOSFETs are currently sampled to
customers in North America. In the pipeline are paired
SiC SBD plus Si transistor in a single package as well as
all-SiC
modules.
SiC Schottky Barrier Diodes
7
Absolute Maximum Ratings
Electrical Characteristics
(Ta = 25°C)
(Ta = 25°C)
Part No.
IFSM(A)
VF(V)
IR(µA)
VRM(V)
VR(V)
IO(A)
60Hz.1
Typ.
IF(A)
Max.
VR(V)
Package
SCS106AGC
600
600
6
24
1.5
6
120
600
TO-220AC [2 pin]
SCS108AGC
600
600
8
32
1.5
8
160
600
TO-220AC [2 pin]
SCS110AGC
600
600
10
40
1.5
10
200
600
TO-220AC [2 pin]
SCS112AGC
600
600
12
48
1.5
12
240
600
TO-220AC [2 pin]
SCS120AGC
600
600
20
80
1.5
20
400
600
TO-220AC [2 pin]
Table 4. Available Schottky barrier diodes range from 6A to 20A-rated 600V products.
ROHM Semiconductor Silicon Carbide
Schottky Barrier Diodes
Though SiC components still command a sizeable (est.
5x currently) premium in price over Si, the technology
has advanced to the point where the benefits are compelling for an increasing number of applications. This is
demonstrate a smaller increase in VF than other available products. For example at 150° C, the 10 A/600
V SCS110AGC features a VF of 1.6 V (1.5 V @25° C)
compared to 1.6 V (1.4 V@25°C), 1.85 V and 2.2 V for
comparably rated SBDs from other suppliers.
especially the case for Schottky barrier diodes. Currently
Initial SBDs are rated at a maximum operating tem-
the largest markets for SiC SBDs are PFC / power sup-
perature of 150°C. Even though SiC has the capability
plies and solar inverters.
to perform at much higher temperatures than silicon
ROHM Semiconductor’s SCS1xxAGC series of SiC
Schottky barrier diodes has a rated blocking voltage of
600V, is available in 6, 8, 10, 12 and 20 A, and offers
devices, most engineers will initially design to the 150°C
maximum rating they have traditionally used and use the
higher operating capability as a safety factor.
industry-leading low forward voltage and fast recovery
Initial products are offered in the popular TO-220, 2-pin
time. Compared to Si FRD diodes, all SiC diodes incur
package with exposed fin. ROHM Semiconductor also
much lower switching loss. Compared to other SiC
utilizes surface mount D2PAK and TO-220 fully isolated
diodes, ROHM SiC SBDs feature lower VF and thus
packaging technology. These packages may be offered
comparatively lower conduction loss. Table 3 shows
in the future depending on customer interest.
the characteristics at room temperature, but the low VF
advantage remains true at high (150ºC) as well.
These Schottky barrier diodes are but the first in
ROHM’s SiC product lineup. And through extensive R&D
It’s worth noting that the 20 A-rated part is achieved
activites, more products in the pipeline. In fact, 1200 V
with a single die, not by paralleling two die (although the
SiC SBDs and MOSFETs are already sampling at strate-
2-die version is available for sampling for interested cus-
gic partners to address higher power applications such
tomers).
as UPS and to develop all-SiC power devices. SiC and
Table 4 presents a more detailed description of ROHM
600 V SBDs. All products have a typical trr of 15 nsec.
At higher temperatures, ROHM Semiconductor SBDs
ROHM Semiconductor
Si combination and all-SiC modules are also expected
to be part of future offerings.
SiC Schottky Barrier Diodes
8
Silicon Carbide for Today’s Designs
ROHM Semiconductor process and device technologies
incorporate advancements that address performance
and cost aspects of SiC SBDs. The 600 V Schottky barrier diodes in production today provide both low VF for
manufacturing capability. Furthermore, it has complete
control over the entire SiC manufacturing and designing
process. ROHM is currently the only supplier capable of
offering a complete range of SiC products, from bare die
to package parts to modules.
reduced conduction loss with ultra-short reverse recov-
ROHM considers products that enable increased energy
ery time to enable efficient high-speed switching.
efficiency – SiC products in particular – as a key growth
With its long history and investment in SiC development, including the recent the acquisition of SiCrystal,
ROHM Semiconductor is well-positioned to provide
driver. ROHM is committed to continue driving SiC technology development and offering a full range of competitive SiC products.
leading-edge SiC products in production quantities.
Expect more device types, higher-performance
Unlike many startups that are taking compound semi-
and cost-competitive SiC products from ROHM
conductor research into pilot manufacturing lines,
Semiconductor in the near future.
ROHM Semiconductor already possesses high volume
ROHM Semiconductor
SiC Schottky Barrier Diodes
9
ROHM Semiconductor
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San Diego, CA 92121
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makes no representations that the circuits are free from patent infringement. Specifications subject to change without notice for the purpose
of improvement.
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office-automation equipment, communications devices, electrical appliances and electronic toys). Should you intend to use these products
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© 2011 ROHM Semiconductor USA, LLC. Although every effort has been made to ensure accuracy, ROHM accepts no responsibility for
errors or omissions. Specifications and product availability may be revised without notice. No part of this document represents an offer or
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