Order this document by MPXL5010/D SEMICONDUCTOR TECHNICAL DATA " " !!# ! " "# !" " OPERATING OVERVIEW INTEGRATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) 0.2 to 4.7 Volts Output The MPXL5010 low profile series piezoresistive transducer is a state–of–the–art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin–film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features • Low Profile Package • 5.0% Maximum Error over 0° to 85°C • Ideally Suited for Microprocessor or Microcontroller–Based Systems CASE 469–01, STYLE 1 • Patented Silicon Shear Stress Strain Gauge • Available in Differential and Gauge Configurations • Also Available in Unibody Package (see MPX5010 Data Sheet) Application Examples • Hospital Beds • HVAC • Respiratory Systems • Process Control VS CASE 472B–01, STYLE 1 2 THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 X–ducer SENSING ELEMENT 3 GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY 4 Vout CASE 472–01, STYLE 1 PINS 1 AND 5 THROUGH 8 ARE NO CONNECTS GND Figure 1. Fully Integrated Pressure Sensor Schematic PIN NUMBER MAXIMUM RATINGS(1) Parametrics Symbol Value Unit Overpressure(2) (P1 > P2) Pmax 75 kPa Burst Pressure(2) (P1 > P2) Pburst 100 kPa Tstg – 40° to +125° °C TA – 40° to +125° °C Storage Temperature Operating Temperature 1 N/C 5 N/C 2 VS 6 N/C 3 Ground 7 N/C 4 Vout 8 N/C NOTE: Pins 1, 5, 6, 7 and 8 are internal device connections. Do not connect to external circuitry or ground. 1. TC = 25°C unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device. Senseon and X–ducer are trademarks of Motorola, Inc. REV 2 Motorola Sensor Device Data Motorola, Inc. 1997 1 OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2) Characteristic Symbol Min Pressure Range(1) POP 0 Supply Voltage(2) VS 4.75 Supply Current Io — Typ Max Unit — 10 kPa 5.0 5.25 Vdc 7.0 10 mAdc Minimum Pressure Offset(3) @ VS = 5.0 Volts (0 to 85°C) Voff 0 0.2 0.425 Vdc Full Scale Output(4) @ VS = 5.0 Volts (0 to 85°C) VFSO 4.475 4.7 4.925 Vdc Full Scale Span(5) @ VS = 5.0 Volts (0 to 85°C) VFSS — 4.5 — Vdc Accuracy(6) (0 to 85°C) Sensitivity Response Time(7) Output Source Current at Full Scale Output — — — ± 5.0 %VFSS V/P — 450 — mV/kPa tR — 1.0 — ms IO+ — 0.1 — mAdc Warm–Up Time(8) — — 20 — mSec Offset Stability(9) — — ± 0.5 — %VFSS Symbol Min Typ Max Unit — — 1.5 — Grams Decoupling circuit shown in Figure 3 required to meet Electrical Specifications. MECHANICAL CHARACTERISTICS Characteristic Weight, Basic Element NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative to 25°C. • Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 2 Motorola Sensor Device Data ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING Figure 2 illustrates the Differential/Gauge Sensing Chip in the basic Low Profile Package (Case 469). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPXL5010 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long–term reliability. Contact the factory for information STAINLESS STEEL METAL COVER DIE regarding media compatibility in your application. Figure 3 shows a typical decoupling circuit for interfacing the integrated sensor to the A/D input of a microprocessor. Proper decoupling of the power supply is recommended. Figure 4 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0° to 85°C using the decoupling circuit below. (The output will saturate outside of the specified pressure range.) ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÇÇÇ ÉÉÉÉÉÉÉÉÉÉÉ ÇÇÇ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ FLUORO SILICONE DIE COAT P1 WIRE BONDS MPXL5010 OUTPUT (PIN 4) A/D 50 pF 51 k µ PROCESSOR EPOXY CASE LEAD FRAME Figure 2. Cross–Sectional Diagram (Not to Scale) Figure 3. Typical Decoupling Filter for Sensor to Microprocessor Interface OUTPUT (V) 5.0 TRANSFER FUNCTION: 4.5 V = V *(0.09*P+0.04) ± ERROR out S 4.0 VS = 5.0 Vdc TEMP = 0 to 85°C 3.5 3.0 2.5 2.0 1.5 TYPICAL MAX 1.0 MIN 0.5 0 0 1 2 4 5 6 8 3 7 DIFFERENTIAL PRESSURE (kPa) 9 10 11 Figure 4. Output versus Pressure Differential Motorola Sensor Device Data 3 Transfer Function (MPXL5010) Nominal Transfer Value: Vout = VS x (0.09 x P + 0.04) Nominal Transfer Value: ± (Pressure Error x Temp. Factor x 0.09 x VS) Nominal Transfer Value: VS = 5.0 V ± 0.25 Vdc Temperature Error Band MPXL5010 Series 4.0 3.0 Temperature Error Factor 2.0 Temp Multiplier – 40 0 to 85 +125 3 1 3 1.0 0.0 –40 –20 0 20 40 80 60 100 120 140 Temperature in C° NOTE: The Temperature Multiplier is a linear response from 0° to –40°C and from 85° to 125°C. Pressure Error Band 0.5 0.4 0.3 Pressure Error (kPa) 0.2 0.1 0 –0.1 –0.2 0 1 2 3 4 5 6 7 8 9 10 Pressure (kPa) –0.3 –0.4 –0.5 4 MPXL5010 Series Pressure Error (Max) 0 to 10 kPa ± 0.5 kPa Motorola Sensor Device Data PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluorosilicone gel which protects the die from the environment. The Motorola pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. ORDERING INFORMATION The MPXL5010 pressure sensor is available in differential and gauge configurations. Devices are available in the basic element package or with pressure port fittings. MPXL Series D i N Device Name O i Options C Case Type T Shipping Method Device Marking MPXL5010G7U No Port, 84° Lead Bend 472 Tubes (Sleeve Pack) MPXL5010G MPXL5010G8U No Port, 4–Straight Leads 469 Tubes (Sleeve Pack) MPXL5010G MPXL5010GC7U Axial Port, 84° Lead Bend 472B Tubes (Sleeve Pack) MPXL5010G Motorola Sensor Device Data 5 PACKAGE DIMENSIONS NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. VERTICAL SURFACES MAY BE UP TO 5° DRAFT. –A– F G 1 8 –B– 4 5 L K R J HC –T– P D 8 PL 0.25 (0.010) M T B S A S G 4 5 –B– W X P R S V U C Y –T– L M J F 8 PL 0.25 (0.010) M CASE 472B–01 ISSUE O 6 MILLIMETERS MIN MAX 16.71 16.97 13.74 13.99 5.26 5.51 1.17 1.37 0.66 0.86 2.54 BSC 2.72 2.97 0.23 0.28 7.11 7.42 3.50 3.81 24.69 25.55 12.78 13.28 NC VSUPPLY GROUND VOUT NC NC NC NC NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. VERTICAL SURFACES MAY BE UP TO 5° DRAFT. 6. DIMENSION P TO CENTER OF LEAD WHEN FORMED PARALLEL. MARKING SURFACE –A– 8 INCHES MIN MAX 0.658 0.668 0.541 0.551 0.207 0.217 0.046 0.054 0.026 0.034 0.100 BSC 0.107 0.117 0.009 0.011 0.280 0.292 0.138 0.150 0.972 1.006 0.503 0.523 STYLE 1: PIN 1. 2. 3. 4. 5. 6. 7. 8. CASE 469–01 ISSUE O 1 DIM A B C D F G H J K L P R T B S A S DIM A B C F G J L M P R S U V W X Y INCHES MIN MAX 0.658 0.668 0.541 0.551 0.555 0.595 0.026 0.034 0.100 BSC 0.009 0.011 0.138 0.150 0_ 15 _ 0.735 0.745 0.185 0.195 0.155 0.165 0.120 0.130 0.305 0.315 0.561 0.571 0.010 0.025 0.002 0.020 STYLE 1: PIN 1. 2. 3. 4. 5. 6. 7. 8. MILLIMETERS MIN MAX 16.71 16.97 13.74 13.99 14.10 15.11 0.66 0.86 2.54 BSC 0.23 0.28 3.50 3.81 0_ 15_ 18.67 18.92 4.69 4.95 3.94 4.19 3.05 3.30 7.75 8.00 14.25 14.50 0.25 0.63 0.05 0.51 NC VSUPPLY GROUND VOUT NC NC NC NC Motorola Sensor Device Data PACKAGE DIMENSIONS–CONTINUED –A– NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. VERTICAL SURFACES MAY BE UP TO 5° DRAFT. 6. DIMENSION P TO CENTER OF LEAD WHEN FORMED PARALLEL. G 1 8 –B– 4 5 P R Y C L M J –T– SEATING PLANE F 8 PL 0.25 (0.010) M T B CASE 472–01 ISSUE O Motorola Sensor Device Data S A S DIM A B C F G J L Y M P R INCHES MIN MAX 0.658 0.668 0.541 0.551 0.209 0.237 0.026 0.034 0.100 BSC 0.009 0.011 0.138 0.150 0.002 0.020 0_ 15_ 0.735 0.745 0.508 0.518 STYLE 1: PIN 1. 2. 3. 4. 5. 6. 7. 8. MILLIMETERS MIN MAX 16.71 16.97 13.74 13.99 5.31 6.02 0.66 0.86 2.54 BSC 0.23 0.28 3.50 3.81 0.05 0.51 0_ 15 _ 18.67 18.92 12.90 13.16 NC VSUPPLY GROUND VOUT NC NC NC NC 7 Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. 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