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by MPXM2010/D
SEMICONDUCTOR TECHNICAL DATA
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The MPXM2010 device is a silicon piezoresistive pressure sensors providing a highly
accurate and linear voltage output — directly proportional to the applied pressure. The
sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film
resistor network integrated on–chip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation.
Motorola Preferred Device
0 to 10 kPa (0 to 1.45 psi)
25 mV FULL SCALE SPAN
(TYPICAL)
Features
• Temperature Compensated Over 0°C to +85°C
• Available in Easy–to–Use Tape & Reel
MPAK PACKAGE
• Ratiometric to Supply Voltage
• Gauge Ported & Non Ported Options
Application Examples
• Respiratory Diagnostics
• Air Movement Control
MPXM2010D/DT1
CASE 1320
• Controllers
• Pressure Switching
Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure
sensor chip.
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Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Preferred devices are Motorola recommended choices for future use and best overall value.
Motorola, Inc. 2002
PIN NUMBER
)365
REV 1
MPXM2010GS/GST1
CASE 1320A
1
Gnd
3
VS
2
+Vout
4
–Vout
MAXIMUM RATINGS(NOTE)
Rating
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
Pmax
75
kPa
Storage Temperature
Tstg
–40 to +125
°C
Operating Temperature
TA
–40 to +125
°C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Typ
Max
Unit
POP
0
—
10
kPa
VS
—
10
16
Vdc
Io
—
6.0
—
mAdc
VFSS
24
25
26
mV
Voff
–1.0
—
1.0
mV
Sensitivity
∆V/∆P
—
2.5
—
mV/kPa
Linearity(5)
—
–1.0
—
1.0
%VFSS
—
—
±0.1
—
%VFSS
—
—
±0.5
—
%VFSS
TCVFSS
–1.0
—
1.0
%VFSS
TCVoff
–1.0
—
1.0
mV
Input Impedance
Zin
1000
—
2550
Ω
Output Impedance
Zout
1400
—
3000
Ω
tR
—
1.0
—
ms
—
—
20
—
ms
—
—
±0.5
—
%VFSS
Pressure
Supply
Range(1)
Voltage(2)
Supply Current
Full Scale
Span(3)
Offset(4)
Pressure
Hysteresis(5)
Temperature
(0 to 10 kPa)
Hysteresis(5)
(–40°C to +125°C)
Temperature Effect on Full Scale
Temperature Effect on Offset(5)
Response
Time(6)
Warm–Up
Offset
Stability(7)
(10% to 90%)
Span(5)
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
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LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pressure.
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Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the minimum, maximum and typical output
characteristics of the MPXM2010 series at 25°C. The output
is directly proportional to the differential pressure and is essentially a straight line.
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A silicone gel isolates the die surface and wire bonds from
the environment, while allowing the pressure signal to be
transmitted to the silicon diaphragm.
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Figure 3. Output versus Pressure Differential
ORDERING INFORMATION
Device Type
Options
Case No
No.
MPXM2010D
Non–ported
1320
MPXM2010DT1
Non–ported, Tape and Reel
1320
MPXM2010GS
Ported
1320A
MPXM2010GST1
Ported, Tape and Reel
1320A
Motorola Sensor Device Data
3
PACKAGE DIMENSIONS
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Motorola Sensor Device Data
5
NOTES
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Motorola Sensor Device Data
NOTES
Motorola Sensor Device Data
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Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit,
and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in different
applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by
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owners.
Motorola, Inc. 2002.
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Motorola Sensor Device Data
MPXM2010/D