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SEMICONDUCTOR TECHNICAL DATA
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The MPX2100 series device is a silicon piezoresistive pressure sensor providing a
highly accurate and linear voltage output — directly proportional to the applied pressure.
The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film
resistor network integrated on–chip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation.
Features
• Temperature Compensated Over 0°C to +85°C
• Easy–to–Use Chip Carrier Package Options
• Available in Absolute, Differential and Gauge Configurations
• Ratiometric to Supply Voltage
• ±0.25% Linearity (MPX2100D)
Application Examples
• Pump/Motor Controllers
• Robotics
• Level Indicators
• Medical Diagnostics
• Pressure Switching
• Barometers
• Altimeters
0 to 100 kPa (0 to 14.5 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
UNIBODY PACKAGE
MPX2100A/D
CASE 344
Figure 1 illustrates a block diagram of the internal circuitry on the stand–alone
pressure sensor chip.
MPX2100AP/GP
CASE 344B
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Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly proportional to the differential
pressure applied.
The absolute sensor has a built–in reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
MPX2100ASX/GSX
CASE 344F
PIN NUMBER
1
Gnd
3
VS
2
+Vout
4
–Vout
NOTE: Pin 1 is noted by the notch in
the lead.
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MAXIMUM RATINGS(NOTE)
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Rating
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
Pmax
400
kPa
Storage Temperature
Tstg
–40 to +125
°C
Operating Temperature
TA
–40 to +125
°C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Typ
Max
Unit
POP
0
—
100
kPa
VS
—
10
16
Vdc
Io
—
6.0
—
mAdc
VFSS
38.5
40
41.5
mV
Voff
–1.0
–2.0
—
—
1.0
2.0
mV
∆V/∆P
—
0.4
—
mV/kPa
—
—
–0.25
–1.0
—
—
0.25
1.0
%VFSS
—
—
±0.1
—
%VFSS
—
—
±0.5
—
%VFSS
TCVFSS
–1.0
—
1.0
%VFSS
TCVoff
–1.0
—
1.0
mV
Input Impedance
Zin
1000
—
2500
Ω
Output Impedance
Zout
1400
—
3000
Ω
Pressure Range(1)
Supply
Voltage(2)
Full Scale Span(3)
MPX2100A, MPX2100D
Offset(4)
MPX2100D
MPX2100A Series
Sensitivity
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Supply Current
Linearity(5)
MPX2100D Series
MPX2100A Series
Pressure Hysteresis(5) (0 to 100 kPa)
Temperature
Hysteresis(5)
(–40°C to +125°C)
Temperature Effect on Full Scale
Temperature Effect on Offset(5)
Response
Time(6)
Warm–Up
Offset
Stability(7)
(10% to 90%)
Span(5)
tR
—
1.0
—
ms
—
—
20
—
ms
—
—
±0.5
—
%VFSS
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
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LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
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ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
The effects of temperature on Full Scale Span and Offset
are very small and are shown under Operating Characteristics.
Figure 3 shows the output characteristics of the MPX2100
series at 25°C. The output is directly proportional to the
differential pressure and is essentially a straight line.
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Figure 4. Cross–Sectional Diagrams (Not to Scale)
Figure 4 illustrates the absolute sensing configuration
(right) and the differential or gauge configuration in the basic
chip carrier (Case 344). A silicone gel isolates the die surface
and wire bonds from the environment, while allowing the
pressure signal to be transmitted to the silicon diaphragm.
The MPX2100 series pressure sensor operating charac-
Motorola Sensor Device Data
teristics and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.
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PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die. The differential or gauge sensor is
designed to operate with positive differential pressure
applied, P1 > P2. The absolute sensor is designed for
vacuum applied to P1 side.
The Pressure (P1) side may be identified by using the
table below:
Part Number
MPX2100A
Case Type
MPX2100D
344
Stainless Steel Cap
344C
Side with Part Marking
MPX2100AP
MPX2100GP
344B
Side with Port Attached
MPX2100ASX
MPX2100GSX
344F
Side with Port Attached
ORDERING INFORMATION
MPX2100 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in
the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose
pressure connections.
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MPX2100DP
Pressure (P1) Side Identifier
MPX Series
Device Type
Options
Case Type
Order Number
Device Marking
Basic Element
Absolute, Differential
344
MPX2100A
MPX2100D
MPX2100A
MPX2100D
Ported Elements
Differential, Dual Port
344C
MPX2100DP
MPX2100DP
Absolute, Gauge
344B
MPX2100AP
MPX2100GP
MPX2100AP
MPX2100GP
Absolute, Gauge Axial
344F
MPX2100ASX
MPX2100GSX
MPX2100A
MPX2100D
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PACKAGE DIMENSIONS
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PACKAGE DIMENSIONS — CONTINUED
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NOTES
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MPX2100/D