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SEMICONDUCTOR TECHNICAL DATA
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" The MPXM2202 device is a silicon piezoresistive pressure sensors providing a highly
accurate and linear voltage output — directly proportional to the applied pressure. The
sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film
resistor network integrated on–chip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation.
Motorola Preferred Device
0 to 200 kPa (0 to 29 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
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Features
• Temperature Compensated Over 0°C to +85°C
MPAK PACKAGE
• Available in Easy-to-Use Tape & Reel
• Ratiometric to Supply Voltage
• Gauge Ported & Non Ported Options
Application Examples
• Pump/Motor Controllers
• Robotics
• Level Indicators
• Medical Diagnostics
• Pressure Switching
• Barometers
• Altimeters
CASE 1320
Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure
sensor chip.
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CASE 1320A
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Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Preferred devices are Motorola recommended choices for future use and best overall value.
REV 0
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PIN NUMBER
)487
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1
Gnd
3
VS
2
+Vout
4
–Vout
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MAXIMUM RATINGS(NOTE)
Rating
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
Pmax
400
kPa
Storage Temperature
Tstg
–40 to +125
°C
Operating Temperature
TA
–40 to +125
°C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Typ
Max
Unit
Pressure Range(1)
POP
0
—
200
kPa
Supply Voltage(2)
VS
—
10
16
Vdc
Supply Current
Io
—
6.0
—
mAdc
VFSS
38.5
40
41.5
mV
Voff
–1.0
–2.0
—
—
1.0
2.0
mV
∆V/∆P
—
0.2
—
mV/kPa
—
—
–0.6
–1.0
—
—
0.4
1.0
%VFSS
—
—
±0.1
—
%VFSS
—
—
±0.5
—
%VFSS
TCVFSS
–2.0
—
2.0
%VFSS
Full Scale
Span(3)
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Offset(4)
MPXM2202D/G Series
MPXM2202A Series
Sensitivity
Linearity(5)
MPXM2202D/G Series
MPXM2202A Series
Pressure Hysteresis(5) (0 to 100 kPa)
Temperature
Hysteresis(5)
(–40°C to +125°C)
Temperature Effect on Full Scale Span(5)
Temperature Effect on
Offset(5)
TCVoff
–1.0
—
1.0
mV
Input Impedance
Zin
1000
—
2500
Ω
Output Impedance
Zout
1400
—
3000
Ω
Response
Time(6)
Warm–Up
Offset
Stability(7)
(10% to 90%)
tR
—
1.0
—
ms
—
—
20
—
ms
—
—
±0.5
—
%VFSS
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
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LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pressure.
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Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
A silicone gel isolates the die surface and wire bonds from
the environment, while allowing the pressure signal to be
transmitted to the silicon diaphragm.
Figure 3 shows the minimum, maximum and typical output
characteristics of the MPXM2202 series at 25°C. The output
is directly proportional to the differential pressure and is essentially a straight line.
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Figure 3. Output versus Pressure Differential
ORDERING INFORMATION
Device Type/Order No
No.
Options
Case Type
MPXM2202D
Non–ported
1320
MPXM2202DT1
Non–ported, Tape and Reel
1320
MPXM2202GS
Ported
1320A
MPXM2202GST1
Ported, Tape and Reel
1320A
MPXM2202A
Non–ported
MPXM2202AT1
Non–ported, Tape and Reel
MPXM2202AS
Ported
1320A
MPXM2202AST1
Ported, Tape and Reel
1320A
Motorola Sensor Device Data
1320
1320
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PACKAGE DIMENSIONS
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PACKAGE DIMENSIONS (CONTINUED)
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NOTES
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NOTES
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Motorola Sensor Device Data
MPXM2202/D