IMAGE SENSOR Flat panel sensor C9312SK-06 High-speed, High reliability, 110 kV (X-ray tube voltage) proof Flat panel sensor C9312SK-06 is a digital X-ray image sensor newly developed as a key device for non-destructive inspection, radiography and other real-time X-ray imaging applications requiring high-speed and high image quality. Features Applications l Energy range: 110 kVp Max. l High quality image: 5.7 Mpixels l Pixel size: 50 × 50 µm l Digital output (12-bit dual port LVDS) l High-speed imaging: 8 frames/s (single binning) l Long life: 110 kVp, 6 MR l Non-destructive inspection l Radiography ■ Block diagram C9312SK-06 is a compact flat panel sensor consisting of a sensor board and a control board. The sensor board also has 16 charge-sensitive amplifier arrays each having 312 ch amplifiers with a horizontal shift register. Analog video signals are amplified as the charge on each video line by 4992 ch charge amplifiers with CDS (Correlated Double Sampling) circuits added, and are output each of 16 amplifier arrays. The control board converts the analog video signal into a 12-bit digital signal and outputs it to an external frame grabber through a couple of 12-bit parallel ports. Block diagram (C9312SK, C9312SK-06) FOP WITH GOS SCINTILLATOR (123 × 130 mm) PROCESSING AMP A/D BUFFER AMP PROCESSING AMP A/D T2495 T2496 T4991 T4992 PHOTODIODE ARRAY PORT A T2872897 B1 B2 B2497 T2875392 B2495 B2496 B4991 B4992 PORT B B2872897 B-AMP ARRAY No.1 FIFO VIDEO OUTPUT PORT A (12-BIT DIGITAL) FIFO T-AMP ARRAY No.8 B2875392 BOTTOM SIDE SHIFT REGISTER TOP SIDE SHIFT REGISTER T-AMP ARRAY No.1 PIXEL NUMBER T1 T2 T2497 BUFFER AMP B-AMP ARRAY No.8 EXTERNAL POWER SUPPLY A.vdd, D.vdd (not attached) ExtTrgLemo IntExt OSCILLATOR ExtTrgGrb Vsync Hsync Pclk TIMING PULSE GENERATOR BIAS GENERATOR BUFFER AMP PROCESSING AMP A/D BUFFER AMP PROCESSING AMP A/D Note: Signals are read out in order of pixel number. FIFO VIDEO OUTPUT PORT B (12-BIT DIGITAL) FIFO KACCA0168EB KACCA0168EB 1 Flat panel sensor C9312SK-06 ■ General ratings Parameter Pixel size Photodiode area Number of pixels Number of active pixels Readout Video output Output data rate Synchronous signal (Vsync, Hsync, Pclk) ExtTrgGrb, ExtTrgLemo, IntExt Scintillator Specification 50 × 50 124.8 × 115.2 2496 × 2304 2472 × 2184 Charge amplifier array LVDS (differential) 12-bit dual port 33.333 LVDS (differential) TTL GOS Unit µm mm pixels pixels MHz - ■ Absolute m axim um ratings (Ta=25 °C) Parameter Supply voltage for digital circuitry (+5 V) Supply voltage for analog circuitry (+5 V) Input voltage (ExtTrgGrb, ExtTrgLemo, IntExt) Operating temperature * 1 Storage temperature *1 *1: No condensation Symbol D.vdd A.vdd A.vdd Topr Tstg Value +6.0 +6.0 +6.0 0 to +35 0 to +50 Unit V V V °C °C ■ Specification (Ta=25 °C, A.vdd= 5.0 V, D.vdd= 5.0 V) Parameter Symbol Min. Typ. Max. Unit Frame rate (single operation) Sf (int) 7.6 8 frames/s Frame rate external (single operation ) Sf (ext) Sf (int) to 1 frames/s Noise (rms) * 2 N (rms) 700 electrons Sensitivity * 3 S 16 20 LSB/mR Saturation charge Csat 2.25 M electrons Resolution * 4 Reso 7.1 9 line pairs/mm Dynamic range 3200 Defect line * 5 20 lines Output offset * 6 65 200 LSB *2: Internal trigger mode, single operation *3: at 110 kVp without filter *4: Spatial frequency at CTF=5 % *5: A defective line is a vertical or horizontal line containing 4 or more consecutive pixels that produce less than 1/8 of the average output from the surrounding pixels. In this case, one of the following conditions must be met. Horizontal defective line: Defective pixels are continuously located from the opposite side of the shift register on the upper side or lower side. Vertical defective line : Defective pixels are continuously located, starting from Row 1091 toward Row 0 in the upper half area. Defective pixels are continuously located, starting from Row 1092 toward Row 2183 in the lower half area. Adjacent defective lines are not allowed in the vertical and horizontal directions. *6: Average of all effective pixels in single operation at Sf (int) Note: X-ray energy range is 20 k to 110 kVp. ■ Resolution (Ta=25 ˚C, A.vdd=5.0 V, D.vdd=5.0 V) 100 90 80 CTF (%) 70 60 50 40 30 20 10 0 0 1 2 3 4 5 6 7 8 9 10 SPATIAL FREQUENCY (line pairs/mm) KACCB0148EA 2 Flat panel sensor C9312SK-06 ■ Timing chart To acquire images through an image grabber board, parameters that match the following timing chart should be described in the software program or parameter file. Tvc (1 FRAME) 1st ROW 2nd ROW Vsync+ (GRABBER) 1st ROW 2nd ROW LAST ROW He Thc (1 LINE) Hsync+ (GRABBER) * All pulses are counted at the 'High' region of the Hsync+ Vsync+ (GRABBER) LAST ROW DUMMY LINES 1st ROW 2nd ROW Hsync+ (GRABBER) Phe Phd Pg Phe Phd Phe Phd Pclk+ (GRABBER) * All pulses are counted at the riging edge of the Pclk+. * The effective video output is only included in the “Phe” region. The “Phe” region is composed with effective pixel clocks and dummy pixel clocks. * Pclk always flows out regardless of the status for Vsync or Hsync. KACCC0281EB Parameter 1 × 1 (Port A) 60 1092 0 Dummy Effective Dummy Dummy Effective Dummy He Phe 1 × 1 (Port B) 0 1092 60 0 2472 24 1062 1069 Phd Pg ■ External trigger mode To acquire images in external trigger mode, input an external trigger pulse as shown below. When the time Tvd has passed after the rising edge of the external trigger pulse, synchronous signals and video signals are output. When used in synchronization with a pulsed X-ray source, X-rays should be irradiated during the Txray period. FRAME TIME (Tvc to Tmax) RECOMMENDATION: 50 % OF FRAME TIME ExtTrgLemo ExtTrgGrb (TTL) Tvd Tvc - Tvdpw Txray Vsync+ (LVDS) Hsync+, Pclk+ and Data 1-12 are the same as internal trigger mode. · Tmax is defined as the reciprocal of the minimum value of Sf (ext). · Txray = FRAME TIME - Tvd - (Tvc - Tvdpw) KACCC0341EB Parameter Symbol Delay time (only external trigger mode) Tvd Vsync Cycle time (internal trigger mode) Tvc Dummy pulse width Tvdpw Note: The numbers of siginificant figures is two. (except Tvc) Value 190 124 400 (Typ.) Unit µs ms µs 3 Flat panel sensor C9312SK-06 ■ System requirements To operate C9312SK-06 at full performance, the following system and peripherals are required. · PC: IBM compatible PC running on Windows XP · Digital frame grabber card: Monochrome 32 bits or more, pixel clock 33.3 MHz or more, LVDS interface synchronous signal (See the frame grabber manual.) · Power source: A. vdd = +5.0 ± 0.1 V (1.8 A), D. vdd = +5.0 ± 0.1 V (0.5 A). Please use a series power supply. (Avoid using a switching power supply.) A power cable (terminated with an DB-25SF-N plug with right angle type shell at one end and open at the other end; 2 m; see Table 2.), an external trigger cable (terminated with an FFA.OS.302.CLAC37 plug at one end and open at the other end; 5 m; see table 3.) and an earth cable (AWG 18; 4 m) comes supplied with C9312SK-06. An optional frame grabber cable for interface with the 80-pin receptacle (see Table 1) on C9312SK06 is also available for synchronous signal, video output and external control. The voltages described above are specified at the flat panel sensor side. The impedance of the power cable attached with the flat panel sensor is low enough but it causes 0.1 V approx. drop. Therefore the voltage at the power source side should be set 0.1 V higher than the voltage specified above. Install a noise filter on the AC power input line to prevent surges on the AC line. To supply the synchronous signal through ExtTrgGrb, apply high level of TTL to ExtTrgLemo and IntExt, or leave them without connection. On the contrary, to use ExtTrgLemo, set high level to ExtTrgGrb and IntExt, or leave them without connection. The earth terminal must be connected to a stable earth point to eliminate noise from surroundings. Table 1: Pin assignment of 80-pin receptacle Pin No. Signal 1 A_Data1+ (LSB) 2 A_Data1- (LSB) 3 A_Data2+ 4 A_Data25 A_Data3+ 6 A_Data37 A_Data4+ 8 A_Data49 A_Data5+ 10 A_Data511 A_Data6+ 12 A_Data613 A_Data7+ 14 A_Data715 A_Data8+ 16 A_Data817 A_Data9+ 18 A_Data919 A_Data10+ 20 A_Data1021 A_Data11+ 22 A_Data1123 A_Data12+ (MSB) 24 A_Data12- (MSB) 25 Reserved 26 Reserved 27 Reserved 28 Reserved 29 Reserved 30 Reserved 31 Reserved 32 Reserved 33 IntExt (TTL) 34 Reserved 35 Vsync+ 36 Vsync37 Hsync+ 38 Hsync39 Pclk+ 40 PclkUnless otherwise noted signal, signal level is LVDS. 80-pin receptacle: PCS-E80LMD made by Honda Tsushin Kogyo Co., Ltd. Mating plug: PCS-E80FA made by Honda Tsushin Kogyo Co., Ltd. Pins described “Reserved” are prepared for an extension of the future. Do not connect any signal or power or GND, etc. to this plug. 4 Pin No. 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 Signal B_Data1+ (LSB) B_Data1- (LSB) B_Data2+ B_Data2B_Data3+ B_Data3B_Data4+ B_Data4B_Data5+ B_Data5B_Data6+ B_Data6B_Data7+ B_Data7B_Data8+ B_Data8B_Data9+ B_Data9B_Data10+ B_Data10B_Data11+ B_Data11B_Data12+ (MSB) B_Data12- (MSB) Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved ExtTrgGrb (TTL) Reserved Reserved Reserved Reserved Reserved GND GND Flat panel sensor C9312SK-06 Table 2: Power pin assignment Pin No. Signal Cable color Marking color Pin No. Signal Cable color 1 NC Brown 14 NC Red 2 NC Orange 15 Analog GND Yellow 3 Analog GND Green 16 Analog GND Blue 4 Analog +5 V Purple 17 Analog +5 V Gray 5 Analog +5 V White 18 Digital GND Black 6 Digital GND Brown White 19 Digital GND Red 7 Digital +5 V Orange White 20 Digital +5 V Yellow 8 Digital +5 V Green White 21 Reserved 9 Reserved 22 Reserved 10 Reserved 23 Reserved 11 Reserved 24 Reserved 12 Reserved 25 Reserved 13 Reserved NC: no connection 25-pin receptacle: DBLC-J25PAF-10L6 made by JAE (Japan Aviation Electronics Industry limited) Mating plug: DB-25SF-N made by JAE Marking color White White - Table 3: External trigger pin assignment and cable color Pin No. Signal 1 ExtTrgLemo (TTL) 2 Signal GND 2-pin receptacle: ECP.0S.302.CLL made by LEMO S. A. Mating plug: FFA.0S.302.CLAC37 made by LEMO S. A. Color Red Black ■ Connection Install the frame grabber board into the PC by the manufacturer’s instructions. When a general-purpose frame grabber board is used, trigger operation for IntExt and ExtTrgGrb can be controlled with its digital I/O control. (REAR VIEW) PC/AT VIDEO OUTPUT (12-BIT DIGITAL) Vsync, Hsync, Pclk OS + IMAGE ACQUISITION SOFTWARE FRAME GRABBER X-ray SOURCE MONITOR CMOS FLAT PANEL SENSOR C9312SK-06 IntExt ExtTrgGrb ExtTrgLemo VOLTAGE SOURCE (A.vdd, D.vdd) C9312SK-06 KACCC0353EA 5 Flat panel sensor C9312SK-06 ■ Dimensional outline (unit: mm, tolerance: ±1 mm unless otherwise noted) 24.7 39.5 14 15 54 DIGITAL OUT EXT.TRG. POWER FROM SCINTILLATOR TO TOP COVER 9.4 * 76.75 18 16.07 52.75 13.5 * 156.5 * 19 * (0, 0) 234 (2471, 1091) 118.5 * (0, 1092) (2471, 2183) 46.3 (6 ×) M3 DEPTH 5 20 * 46.4 CMOS FLAT PANEL SENSOR C9312SK-06 ACTIVE AREA 109.2 78.5 * 87.5 * CMOS FLAT PANEL SENSOR C9312SK-06 ACTIVE AREA 123.6 198 * ±0.5 Top cover is made of carbon fiber (1.0 mm thickness) Weight: 5.6 kg KACCA0200EA KACCA0200EA ■ Notice · Do not subject the Flat Panel Sensors to strong vibration or shock. (Strong shock such as drop impacts may cause permanent damage to these sensors.) · Users must take responsibility for implementing X-ray shielding safety measures to avoid the risk of X-ray exposure. · Data listed in this datasheet is defind at the time of shipment. Characteristics may vary somewhat due to exposure to X-rays so take proper countermeasures such as making periodic image correction. · This product is warranted for a period of 12 months after the date of the shipment. The warranty is limited to replacement or repair of any defective product due to defects in workmanship or materials used in manufacture. The warranty does not cover loss or damage caused by natural disaster, misuse (including modifications and any use not complying with the environment, application, usage and storage conditions described in this datasheet), or total radiation dose over 6 million Roentgen (less than 110 kVp) even within the warranty period. · As described above, flat panel sensors have limited resistance to radiation. This must be taken into account when using a flat panel sensor under continuous irradiation (in-line non-destructive inspection, etc.) When using flat panel sensors in non-destructive inspection equipment, please contact us and provide information such as irradiation conditions. C9312SK-06 conforms to European EMC directives: EN61326 Class A. ■ F ram e grabber cab les F ra m e g ra bb e r C a b le typ e N o . A 8 4 0 6 -41 A 8 4 0 6 -46 G e n e ra l-pu rp ose A 8 4 0 6 -47 A 8 4 0 6 -48 A 8 4 0 6 -42 A 8 4 0 6 -43 IM A Q P C I-1 4 2 4 * 7 A 8 4 0 6 -44 A 8 4 0 6 -45 *7 : M a d e b y N I (N a tio na l Instrum en ts C orp o ratio n ) *8 : M a d e b y H o n d a Tsush in K o g yo C o., L td . C a b le le n gth 5 m 7 m 10 m 12 m 5 m 7 m 10 m 12 m C a b le en d C a b le en d open P C S -E 8 0 FA * 8 P C S -XE 1 0 0 M A + * 8 N o te : Th e d eta ile d in fo rm a tio n fo r the se o p tio na l ca b le s is sh o w n in th e d a tashe e t of A 8 40 6 se ries. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2007 Hamamatsu Photonics K.K. HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184, www.hamamatsu.com U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741 6 Cat. No. KACC1137E03 Aug. 2007 DN