IMAGE SENSOR Flat panel sensor C10013SK High reliability, high sensitivity Flat panel sensor C10013SK is a digital X-ray image sensor newly developed as a key device for open-type tube application, radiography and other real-time X-ray imaging applications requiring high resolution and high image quality. Features Applications l Low noise: 80 electrons l Energy range: 150 kVp Max. l High quality image: 1 Mpixels l Pixel size: 50 × 50 µm l Digital output (12-bits) l High-speed imaging: 4 frames/s (single binning) l Long life: 150 kVp, 2 MR l Wide dynamic range l Open type tube application l Radiography ■ Block diagram PIXEL NUMBER 1 2 1055 1056 1057 2111 2112 FOP WITH GOS SCINTILLATOR (52.8 mm × 52.8 mm) PHOTODIODE ARRAY 1115135 DIFFERENTIAL AMP ARRAY No. 1 VERTICAL SHIFT REGISTER C10013SK is a lightweight and compact flat panel sensor consisting of a sensor board and a control board. Each pixel has low noise amplifier. Analog video signals are amplified as the charge on each video line by 1056 ch differential amplifiers with CDS (Correlated Double Sampling) circuits, and are output from each of 8 amplifier arrays. The control board converts the analog video signal into a 12-bit digital signal and outputs it to an external frame grabber through the 12-bit parallel port. 1115136 EXTERNAL POWER SUPPLY A.vdd, D.vdd (not attached) IntExt TIMING PULSE GENERATOR DIFFERENTIAL AMP ARRAY No. 8 OSCILLATOR ExtTrgLemo ExtTrgGrb Vsync Hsync Pclk BIAS GENERATOR BUFFER AMP PROCESSING AMP BUFFER AMP PROCESSING AMP A/D FIFO VIDEO OUTPUT (12 BIT DIGITAL) A/D FIFO Note: Signals are readout in order of pixel number. KACCC0207EB 1 Flat panel sensor C10013SK ■ General ratings Parameter Pixel size Photodiode area Number of pixels Number of active pixels Readout Video output (Data1 - 12) Output data rate Synchronous signal (Vsync, Hsync, Pclk) ExtTrgGrb, ExtTrgLemo, IntExt Scintillator Specification 50 × 50 52.8 × 52.8 1056 × 1056 1032 × 1000 Charge amplifier array LVDS (differential) 12 bit 12.5 LVDS (differential) TTL CsI Unit µm mm pixels pixels MHz - ■ Absolute maximum ratings (Ta=25 °C) Parameter Supply voltage for digital circuitry (+5 V) Supply voltage for analog circuitry (+5 V) Input voltage (ExtTrgGrb, ExtTrgLemo, IntExt) Operating temperature *1 Storage temperature *1 *1: No condensation Symbol D.vdd A.vdd Vin Topr Tstg Value +6.0 +6.0 0 to 6.0 0 to +35 0 to +50 Unit V V V °C °C ■ Specification (Ta=25 °C, A.vdd= 5.0 V, D.vdd= 5.0 V) Parameter Symbol Min. Typ. Max. Unit Frame rate (single operation) Sf (int) 3.8 4 frames/s Frame rate external (single operation ) Sf (ext) Sf (int) to 1 frames/s Noise (rms) *2 N (rms) 80 electrons Sensitivity *3 S 120 150 LSB/mR Saturation charge Csat 0.3 M electrons Resolution *4 Reso 7.1 8 line pairs/mm Dynamic range 3800 Defect line *5 15 lines Adjacent defect line 1 lines Output offset *6 65 200 LSB *2: Internal trigger mode, single operation *3: At 150 kVp without filter *4: Spatial frequency at CTF=5 % *5: A defect line is a horizontal or vertical line containing 4 or more pixels that produce less than 1/8 of the average output from surrounding pixels and are formed continuously from the opposite side of an amplifier array or a vertical shift register. *6: Average of all effective pixels in single operation at Sf (int) Note: X-ray energy range is 20 k to 150 kVp. ■ Resolution (Ta=25 ˚C, A.vdd=5.0 V, D.vdd=5.0 V) 100 90 80 CTF (%) 70 60 50 40 30 20 10 0 0 1 2 3 4 5 6 7 8 9 10 SPATIAL FREQUENCY (line pairs/mm) KACCB0174EA 2 Flat panel sensor C10013SK ■ Timing chart To acquire images through an image grabber board, write parameters in the software program or parameter file by referring to the following timing chart and description. 1 FRAME 1st ROW 2nd ROW DUMMY LINES Vsync+ (GRABBER) 1st ROW 2nd ROW He LAST ROW All pulses are counted in the “High” period of Hsync+ Hsync+ (GRABBER) ENLARGED VIEW Vsync+ (GRABBER) 1st ROW 2nd ROW Hsync+ (GRABBER) Phe Pg Phe Phd Phe Phd Pclk+ (GRABBER) All pulses are counted at the rising edge of Pclk+. The effective video output is only included in the “Phe” period. KACCC0362EA Parameter He Phe Effective line Dummy line Effective pixel Dummy pixel Phd Pg Note: “He” is the Hsync count. Phe, Phd and Pg are the Pclk count. Count 1000 56 1032 24 1870 1877 ■ External trigger mode To acquire images in external trigger mode, input an external trigger pulse as shown below. When the time Tvd has passed after the rising edge of the external trigger pulse, synchronous signals and video signals are output. From Tmin to Tmax RECOMMENDATION: 50 % OF FRAME TIME ExtTrgLemo ExtTrgGrb (TTL) Tvd Vsync+ (LVDS) Hsync+, Pclk+ and Data 1-12 are the same as internal trigger mode. · Tmin is defined as 1/Sf (int). · Tmax is defined as the reciprocal of the minimum value of Sf (ext). · Tvd=320 µs KACCC0372EA 3 Flat panel sensor C10013SK ■ System requirements To operate C10013SK at full performance, the following system and peripherals are required. · PC: IBM compatible PC running on Windows XP · Digital frame grabber card: Monochrome 16 bits or more, pixel clock 13 MHz or more, LVDS interface synchronous signal (See the frame grabber manual.) The National Instruments IMAQ PCI-1424 (NI parts No. 777662-02) frame grabber has been verified to successfully acquire 12bit digital images from C10013SK. The IMAQ PCI-1422 (NI pats No. 777959-02) also acquires satisfactory images from C10013SK. You can utilize the demonstration software that comes with the frame grabber as a simple viewer, to acquire and save an image. To do so, refer to the frame grabber user’s guide for how to use the camera information file for the demonstration software. · Power source: A.vdd = +5.0 ± 0.1 V (700 mA), D.vdd = +5.0 ± 0.1 V (600 mA). Please use of a series power supply. (Avoid using a switching power supply.) A power cable (terminated with an FGG.2B.307.CLAD92Z plug at one end and open at the other end; 2 m; see Table 2.), an external trigger cable (terminated with an FFA.0S.302.CLAC37 plug at one end and open at the other end; 5 m; see table 3.) and an earth cable (AWG 18; 4 m) comes supplied with C10013SK. An optional frame grabber cable for interface with the 40-pin receptacle (see Table 1) on C10013SK is also available for synchronous signal, video output and external control. The voltages described above are specified at the flat panel sensor side. The impedance of the power cable attached with the flat panel sensor is low enough but it causes 0.1 V approx. drop. Therefore the voltage at the power source side should be set 0.1 V higher than the voltage specified above. Install a noise filter on the AC power input line to prevent surges on the AC line. To supply the synchronous signal through ExtTrgGrb, apply high level of TTL to ExtTrgLemo and IntExt, or leave them without connection. On the contrary, to use ExtTrgLemo, set high level to ExtTrgGrb and IntExt, or leave them without connection. The earth terminal must be connected to a stable earth point to eliminate noise from surroundings. Ta b le 1 : P in a s s ig n m e n t o f 4 0 -p in re c e p ta c le P in N o . S ig n a l 1 D a ta 1 + (L S B ) 2 D a ta 2 + 3 D a ta 3 + 4 D a ta 4 + 5 D a ta 5 + 6 D a ta 6 + 7 D a ta 7 + 8 D a ta 8 + 9 D a ta 9 + 10 D a ta 1 0 + 11 D a ta 11 + 12 D a ta 1 2 + (M S B ) 13 R e s e rve d 14 R e s e rve d 15 R e s e rve d 16 R e s e rve d 17 E xtTrg G rb (T T L ) 18 V s yn c + 19 H s yn c + 20 P c lk + U n le ss o th e rw is e no te d, sig n al le vel is LV D S . 4 0 -p in re ce p tac le : 1 02 4 0 -5 2 B 2 P L m ad e b y 3 M C o . L td . M a tin g p lu g : 1 0 14 0 -60 0 0 E L m ad e b y 3 M C o . L td . P in N o . 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 S ig n a l D a ta 1 - (L S B ) D a ta 2 D a ta 3 D a ta 4 D a ta 5 D a ta 6 D a ta 7 D a ta 8 D a ta 9 D a ta 1 0 D a ta 11 D a ta 1 2 - (M S B ) R e s e rve d R e s e rve d GND GND In tE xt (T T L ) V s yn c H s yn c P c lk - Ta b le 2 : P o w e r p in a s s ig n m e n t a n d c a b le c o lo r P in N o . C o lo r 1 B ro w n 2 Red 3 O ra n g e 4 Ye llo w 5 G re e n 6 B lu e 7 P u rp le S h ie ld 7 -p in p o w e r re c ep tac le : E C G .2 B .3 0 7.C LV m a de b y L E M O S . A . M a tin g p o w e r p lu g : F G G .2 B .3 0 7.C L A D 9 2 Z m a de b y L E M O S . A . S ig n a l R e s e rve d R e s e rve d R e s e rve d A n a lo g G N D A n a lo g + 5 V D ig ital G N D D ig ital + 5 V A n a lo g G N D Ta b le 3 : E x te rn a l trig g e r p in a s s ig n m e n t a n d c a b le c o lo r P in N o . C o lo r 1 Red 2 B la ck S h ie ld 2 -p in re c ep tac le : E C P.0 S .3 02 .C L L m a de b y L E M O S . A . M a tin g p lu g : F FA .0 S .3 0 2.C L A C 3 7 m a de b y L E M O S . A . 4 S ig n a l E xtTrg L e m o (T T L ) S ig n a l G N D A n a lo g G N D Flat panel sensor C10013SK ■ Connection Install the frame grabber board into the PC by the manufacturer’s instructions. When a general-purpose frame grabber board is used, binning or trigger operation for IntExt and ExtTrgGrb can be controlled with its digital I/O control. (REAR VIEW) PC/AT OS + ACQUISITION SOFTWARE VIDEO OUTPUT FRAME (12 BIT DIGITAL) GRABBER Vsync, Hsync, Pclk X-RAY SOURCE MONITOR IntExt ExtTrgGrb VOLTAGE SOURCE (A.vdd, D.vdd) ExtTrgLemo CMOS FLAT PANEL SENSOR C10013SK C10013SK KACCC0291EB ■ Dimensional outline (unit: mm, tolerance: ±1 mm unless otherwise noted) 152 38 16.5 23.5 15 * 118 * 40 DIGITAL OUT 16.4 EXT.TRG. POWER ACTIVE AREA 50 50 145 CMOS FLAT PANEL SENSOR C10013SK ACTIVE AREA 51.6 120 * 10 * 16.4 52.6 9 43 50 SCINTILLATOR TO TOP COVER 11.3 (4 ×) M3 DEPTH 4 mm CMOS FLAT PANEL SENSOR C10013SK 17.4 Top cover is made of carbon fiber (1.0 mm thickness). Weight: 2.7 kg 18.5 120 * 15 * * ±0.5 mm KACCA0173EC 5 Flat panel sensor C10013SK ■ Notice · Do not subject the Flat Panel Sensors to strong vibration or shock. (Strong shock such as drop impacts may cause permanent damage to these sensors.) · Users must take responsibility for implementing X-ray shielding safety measures to avoid the risk of X-ray exposure. · Data listed in this datasheet is defined at the time of shipment. Characteristics may vary somewhat due to exposure to X-rays so take proper coutermeasures such as making periodic image correction. · This product is warranted for a period of 12 months after the date of the shipment. The warranty is limited to replacement or repair of any defective product due to defects in workmanship or materials used in manufacture. The warranty does not cover loss or damage caused by natural disaster, misuse (including modifications and any use not complying with the environment, application, usage and storage conditions described in this datasheet), or total radiation dose over 2 million Roentgen (less than 150 kVp) even within the warranty period. · As described above, flat panel sensors have limited resistance to radiation. This must be taken into account when using a flat panel sensor under continuous irradiation (in-line non-destructive inspection, etc.) When using flat panel sensors in non-destructive inspection equipment, please contact us and provide information such as irradiation conditions. C10013SK conforms to European EMC directives: EN61326 Class A. ■ Optional frame grabber cables Frame grabber Cable type No. Cable length Cable end A8406-51 5m A8406-56 7m General-purpose A8406-57 10 m A8406-58 12 m 10140-6000EL *8 A8406-52 5m A8406-53 7m IMAQ PCI-1424 *7 A8406-54 10 m A8406-55 12 m *7: Made by NI (National Instrument Corporation) *8: Made by 3M Co. Ltd. *9: Made by Honda Tsushin Kogyo Co. Ltd. Note: The detailed information for these optional cables is shown in the datasheet of A8406 series. Cable end open PCS-XE100MA+ *9 Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2007 Hamamatsu Photonics K.K. HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184, www.hamamatsu.com U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741 Cat. No. KACC1122E06 May 2007 DN 6