PHOTODIODE Si photodiode S8551, S8552, S8553 Photodiodes for VUV (Vacuum UV) detection S8551, S8552 and S8553 are VUV (Vacuum UV) photodiodes suitable for detection of ArF excimer lasers (λ=193 nm). Designed to provide optimal performance in the VUV range, these photodiodes offer more stable sensitivity even after long exposure to VUV radiation compared with conventional types. Features Applications l Reliable detection improves of ArF excimer laser l ArF excimer laser detection l Detection of various UV light sources (λ=193 nm) l Large active area S8551: 5.8 × 5.8 mm S8552: 10 × 10 mm S8553: 18 × 18 mm l Windowless package S8551: TO-8 metal package S8552: 16.5 × 15.0 mm ceramic package S8553: 25.5 × 25.5 mm ceramic package ■ Absolute maximum ratings (Ta=25 °C) Parameter Reverse voltage Operating temperature Storage temperature Symbol VR Max. Topr Tstg Value 5 -20 to +60 * -55 to +80 * Unit V °C °C * No condensation ■ Electrical and optical characteristics (Ta=25 °C) Min. 45 - S8551 Typ. 60 0.02 Max. 0.5 Min. 45 - S8552 Typ. 60 0.05 Max. 1.0 Min. 45 - S8553 Typ. 60 0.1 Max. 5.0 mA/W nA VR=0 V, f=10 kHz - 1.0 - - 4.0 - - 8.0 - nF VR=0 V, RL=1 kΩ 10 to 90 % - 2 - - 9 - - 18 - µs Parameter Symbol P h oto sensitivity S ID λ=193 nm VR=10 mV Ct tr Dark current Terminal capacitance Rise time Condition Unit S8551, S8552 and S8553 use windowless packages with no protection on the photodiode chip. Always use the following precautions when handling these photodiodes. ■ Handling precautions ● Handle the photodiodes in a clean room. ● Never touch the photodiode chip surface and wire bonding. ● Wear dust-proof gloves and dust-proof mask. ● Use an air dust cleaner to blow away dust and foreign matter on the photodiode chip surface. ● Do not clean the photodiodes by any method other than air blow. 1 Si photodiode ■ Variation in sensitivity due to VUV exposure S8551, S8552, S8553 ■ Dimensional outlines (unit: mm) S8551 2 120 [Typ. ArF excimer laser, 0.1 mJ/cm /pulse, f=100 Hz, λ=193 nm, pulse width=15 ns (FWHM)] 13.9 ± 0.2 100 10.5 ± 0.1 S8551, S8552, S8553 80 60 ACTIVE AREA 5.8 × 5.8 40 PHOTOSENSITIVE SURFACE CAP WITHOUT WINDOW CONVENTIONAL TYPE 0 5 × 106 0.5 MAX. 2.9 20 1 × 107 0.45 LEAD NUMBER OF SHOT (15.0) 5.0 ± 0.2 RELATIVE SENSITIVITY (%) 12.35 ± 0.1 KSPDB0188EB 7.5 ± 0.2 ANODE TERMINAL MARK 1.4 1.0 MAX. CASE KSPDA0142EA S8552 S8553 +0 16.5 ± 0.2 25.5 -0.6 0.5 LEAD WHITE CERAMIC 0.45 LEAD 10 10.5 1.1 PHOTOSENSITIVE SURFACE 2.54 ACTIVE AREA 18 × 18 2.15 ± 0.1 0.75 0.3 PHOTOSENSITIVE SURFACE +0 18.0 15.0 ± 0.15 ACTIVE AREA 10 × 10 25.5 - 0.6 18.0 3.4 1.75 15.1 ± 0.3 5.0 12.5 ± 0.2 13.7 ± 0.3 ANODE TERMINAL MARK KSPDA0143EA KSPDA0144EA Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2002 Hamamatsu Photonics K.K. HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184, http://www.hamamatsu.com U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741 2 Cat. No. KSPD1050E02 Jul. 2002 DN