Agilent E4991A RF Impedance/Material Analyzer Data Sheet Definitions Measurement Parameters and Range All specifications apply over a 5 °C to 40 °C range (unless otherwise stated) and 30 minutes after the instrument has been turned on. Measurement parameters Specification (spec.) Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution, measurement uncertainties, and changes in performance due to environmental conditions. Supplemental information is intended to provide information useful in applying the instrument, but that is not covered by the product warranty. The information is denoted as typical, or nominal. Typical (typ.) Expected performance of an average unit which does not include guardbands. It is not covered by the product warranty. Nominal (nom.) A general, descriptive term that does not imply a level of performance. It is not covered by the product warranty. 2 Impedance parameters: |Z|, |Y|, Ls, Lp, Cs, Cp, Rs(R), Rp, X, G, B, D, Q, θz, θy, |Γ|, Γx, Γy, θγ Material parameters (option E4991A-002): (see “Option E4991A-002 material measurement (typical)” on page 17) Permittivity parameters: |εr|, εr', εr", tanδ Permeability parameters: |μr|, μr', μr", tanδ Measurement range Measurement range (|Z|): 130 mΩ to 20 kΩ. (Frequency = 1 MHz, Point averaging factor ≥ 8, Oscillator level = –3 dBm; = –13 dBm; or = –23 dBm, Measurement accuracy ≤ ±10%, Calibration is performed within 23 °C ±5 °C, Measurement is performed within ±5 °C of calibration temperature) Source Characteristics DC Bias (Option E4991A-001) Frequency DC voltage bias Range: 1 MHz to 3 GHz Range: 0 to ±40 V Resolution: 1 mHz Resolution: 1 mV Accuracy: without Option E4991A-1D5: ±10 ppm (23 °C ±5 °C) ±20 ppm (5 °C to 40 °C) with Option E4991A-1D5: ±1 ppm (5 °C to 40 °C) Accuracy: ±{0.1% + 6 mV + (Idc[mA] x 20 Ω)[mV]} (23 °C ±5 °C) ±{0.2% + 12 mV + (Idc[mA] x 40 Ω)[mV]} (5 °C to 40 °C) Stability: with Option E4991A-1D5: ±0.5 ppm/year (5 °C to 40 °C)(typical) DC current bias Oscillator level Accuracy: ±{0.2%+20 µA+ (Vdc[V] /10 kΩ)[mA]} (23 °C ±5 °C) ±{0.4% +40 µA+ (Vdc[V] /5 kΩ)[mA]} (5 °C to 40 °C) Range: Power (when 50 Ω load is connected to test port): –40 dBm to 1 dBm (frequency ≤ 1 GHz) –40 dBm to 0 dBm (frequency > 1 GHz1) Current (when short is connected to test port): 0.0894 mArms to 10 mArms (frequency ≤ 1 GHz) 0.0894 mArms to 8.94 mArms (frequency > 1 GHz1) Voltage (when open is connected to test port): 4.47 mVrms to 502 mVrms (frequency ≤ 1 GHz) 4.47 mVrms to 447 mVrms (frequency > 1 GHz1) Resolution: 0.1 dB2 Accuracy: (Power, when 50 Ω load is connected to test port) Frequency ≤ 1 GHz: ±2 dB (23 °C ±5 °C) ±4 dB (5 °C to 40 °C) Frequency > 1 GHz: ±3 dB (23 °C ±5 °C) ±5 dB (5 °C to 40 °C) with Option E4991A-010: Frequency ≤ 1 GHz ±3.5 dB (23 °C ± 5 °C) ±5.5 dB (5 °C to 40 °C) Frequency > 1 GHz ±5.6 dB (23 °C ± 5 °C) ±7.6 dB (5 °C to 40 °C) Range: 100 µA to 50 mA, –100 µA to –50 mA Resolution: 10 µA DC bias monitor Monitor parameters: Voltage and current Voltage monitor accuracy: ±{0.5% + 15 mV + (Idc[mA] x 2 Ω)[mV]} (23 °C ±5 °C, typical) ±{1.0% + 30 mV + (Idc[mA] x 4 Ω)[mV]} (5 °C to 40 °C, typical) Current monitor accuracy: ±{0.5% + 30 µA + (Vdc[V] / 40 k Ω)[mA]} (23 °C ±5 °C, typical) ±{1.0% + 60 µA + (Vdc[V] / 20 k Ω)[mA]} (5 °C to 40 °C, typical) Output impedance Output impedance: 50 Ω (nominal) 1. It is possible to set more than 0 dBm (447 mV, 8.94 mA) oscillator level at frequency > 1 GHz. However, the characteristics at this setting are not guaranteed. 2. When the unit is set at mV or mA, the entered value is rounded to 0.1 dB resolution. 3 Probe Station Connection Kit (Option E4991A-010) Measurement Accuracy Oscillator level Temperature: 23 °C ±5 °C Power accuracy: Frequency ≤ 1 GHz: ±5.5 dB (5 °C to 40 °C) Frequency > 1 GHz: ±7.6 dB (5 °C to 40 °C) Accuracy-specified plane: 7-mm connector of test head Sweep Characteristics |Z|, |Y|: ±(Ea + Eb) [%] (see Figures 1 through 4 for examples of calculated accuracy) Sweep parameters: Frequency, oscillator level (power, voltage, current), DC bias voltage, DC bias current θ: ± Sweep range setup: Start/stop or center/span L, C, X, B: ± (Ea + Eb) x √(1 + Dx2) [%] R, G: ± (Ea + Eb) x √(1 + Qx2) [%] Conditions for defining accuracy Accuracy defined measurement points: Same points at which the calibration is done. Accuracy when open/short/load calibration is performed Sweep conditions Sweep directions: Oscillator level, DC bias (voltage and current): up sweep, down sweep Other parameters sweep: up sweep Number of measurement points: 2 to 801 Delay time: Types: point delay, sweep delay, segment delay Range: 0 to 30 sec Resolution: 1 msec Segment sweep Available setup parameters for each segment: Sweep frequency range, number of measurement points, point averaging factor, oscillator level (power, voltage, or current), DC bias (voltage or current), DC bias limit (current limit for voltage bias, voltage limit for current bias) Number of segments: 1 to 16 Sweep span types: Frequency base or order base 4 D: at Dx tan Ea + Eb 100 (1 + Dx2 )tan <1 at Dx ≤ 0.1 Q: at Qx tan at ± 1 ± Ea + Eb <1 100 10 ≥ Qx ≥ 10 Ea + Eb Dx tan Ea + Eb 100 Ea + Eb 100 Ea + Eb 100 (1 + Qx2 )tan ± 1 ±Qx2 ± Sweep mode: Continuous, single ± Sweep types: Frequency sweep: linear, log, segment Other parameters sweep: linear, log (Ea + Eb) [rad] 100 Qx tan Ea + Eb 100 Ea + Eb 100 Ea + Eb 100 Accuracy when open/short/load/low-loss capacitor calibration is performed (Point averaging factor ≥ 8, typical) |Z|, |Y|: ±(Ea + Eb) [%] θ: ± L, C, X, B: ± √(Ea + Eb)2 + (Ec Dx)2 [%] R, G: ± √(Ea + Eb)2 + (Ec Qx )2 [%] Ec 100 <1 at Dx ≤ 0.1 Q: at Qx tan at ± 1 ± Ec <1 100 10 ≥ Qx ≥ 10 Ec Eb = ± Ec 100 Ec Dx tan 100 Ec 100 (1 + Qx2 )tan ± ± at Dx tan (1 + Dx2 )tan ± D: Ec [rad] 100 1 ±Qx2 Qx tan at oscillator level < –33 dBm: ±1 [%] (1 MHz ≤ Frequency ≤ 100 MHz) ±1.2 [%] (100 MHz < Frequency ≤ 500 MHz) ±1.2 [%] (500 MHz < Frequency ≤ 1 GHz) ±2.5 [%] (1 GHz < Frequency ≤ 1.8 GHz) ±5 [%] (1.8 GHz < Frequency ≤ 3 GHz) Ec 100 Ec 100 Ec 100 (See Figure 5) Definition of each parameter Dx = Measurement value of D Qx = Measurement value of Q Ea = (Within ±5 °C from the calibration temperature. Measurement accuracy applies when the calibration is performed at 23 °C ±5 °C. When the calibration is performed beyond 23 °C ±5 °C, measurement error doubles.) at oscillator level ≥ –33 dBm: ±0.65 [%] (1 MHz ≤ Frequency ≤ 100 MHz) ±0.8 [%] (100 MHz < Frequency ≤ 500 MHz) ±1.2 [%] (500 MHz < Frequency ≤ 1 GHz) ±2.5 [%] (1 GHz < Frequency ≤ 1.8 GHz) ±5 [%] (1.8 GHz < Frequency ≤ 3 GHz) Zs +Yo• Zx × 100 [%] Zx (|Zx|: measurement value of |Z|) 0.08 × F Ec = ± 0.06 + 1000 [%] (F: frequency [MHz], typical) Zs = (Within ±5 °C from the calibration temperature. Measurement accuracy applies when the calibration is performed at 23 °C ±5 °C. When the calibration is performed beyond 23 °C ±5 °C, the measurement accuracy decreases to half that described. F: frequency [MHz].) at oscillator level = –3 dBm, –13 dBm, or –23 dBm: ±(13 + 0.5 × F) [mΩ] (averaging factor ≥ 8) ±(25 + 0.5 × F) [mΩ] (averaging factor ≤ 7) at oscillator level ≥ –33 dBm ±(25 + 0.5 × F) [mΩ] (averaging factor ≥ 8) ±(50 + 0.5 × F) [mΩ] (averaging factor ≤ 7) at oscillator level < –33 dBm ±(50 + 0.5 × F) [mΩ] (averaging factor ≥ 8) ±(100 + 0.5 × F) [mΩ] (averaging factor ≤ 7) Yo = (Within ±5 °C from the calibration temperature. Measurement accuracy applies when the calibration is performed at 23 °C ±5 °C. When the calibration is performed beyond 23 °C ±5 °C, the measurement accuracy decreases to half that described. F: frequency [MHz].) at oscillator level = –3 dBm, –13 dBm, –23 dBm: ±(5 + 0.1 × F) [µS] (averaging factor ≥ 8) ±(10 + 0.1 × F) [µS] (averaging factor ≤ 7) at oscillator level ≥ –33 dBm: ±(10 + 0.1 × F) [µS] (averaging factor ≥ 8) ±(30 + 0.1 × F) [µS] (averaging factor ≤ 7) at oscillator level < –33 dBm ±(20 + 0.1 × F) [µS] (averaging factor ≥ 8) ±(60 + 0.1 × F) [µS] (averaging factor ≤ 7) 5 Measurement Accuracy (continued) Calculated impedance measurement accuracy Figure 1. |Z|, |Y| Measurement accuracy when open/short/load calibration is performed. Oscillator level = –23 dBm, –13 dBm, –3 dBm. Point averaging factor ≥ 8 within ±5 °C from the calibration temperature. Figure 2. |Z|, |Y| Measurement accuracy when open/short/load calibration is performed. Oscillator level ≥ –33 dBm. Point averaging factor ≥ 8 within ±5 °C from the calibration temperature. 6 Figure 3. |Z|, |Y| Measurement accuracy when open/short/load calibration is performed. Oscillator level ≥ –33 dBm. Point averaging factor ≤ 7 within ±5 °C from the calibration temperature. Figure 4. |Z|, |Y| Measurement accuracy when open/short/load calibration is performed. Oscillator level < –33 dBm within ±5 °C from the calibration temperature. Measurement Support Functions Error correction Figure 5. Q Measurement accuracy when open/short/load/low-loss capacitor calibration is performed (typical). Available calibration and compensation Open/short/load calibration: Connect open, short, and load standards to the desired reference plane and measure each kind of calibration data. The reference plane is called the calibration reference plane. Low-loss capacitor calibration: Connect the dedicated standard (low-loss capacitor) to the calibration reference plane and measure the calibration data. Port extension compensation (fixture selection): When a device is connected to a terminal that is extended from the calibration reference plane, set the electrical length between the calibration plane and the device contact. Select the model number of the registered test fixtures in the E4991A’s setup toolbar or enter the electrical length for the user’s test fixture. Open/short compensation: When a device is connected to a terminal that is extended from the calibration reference plane, make open and/or short states at the device contact and measure each kind of compensation data. Calibration/compensation data measurement point User-defined point mode: Obtain calibration/compensation data at the same frequency and power points as used in actual device measurement, which are determined by the sweep setups. Each set of calibration/compensation data is applied to each measurement at the same point. If measurement points (frequency and/or power) are changed by altering the sweep setups, calibration/ compensation data become invalid and calibration or compensation data acquisition is again required. 7 Measurement Support Functions (continued) Fixed frequency and fixed power point mode: Obtain calibration/compensation data at fixed frequency and power points covering the entire frequency and power range of the E4991A. In device measurement, calibration or compensation is applied to each measurement point by using interpolation. Even if the measurement points (frequency and/or power) are changed by altering the sweep setups, you don’t need to retake the calibration or compensation data. Fixed frequency and user-defined power point mode: Obtain calibration/compensation data at fixed frequency points covering the entire frequency range of the E4991A and at the same power points as used in actual device measurement which are determined by the sweep setups. Only if the power points are changed, calibration/ compensation data become invalid and calibration or compensation data acquisition is again required. Trigger Trigger mode: Internal, external (external trigger input connector), bus (GPIB), manual (front key) Averaging Types: Sweep-to-sweep averaging, point averaging Setting range: Sweep-to-sweep averaging: 1 to 999 (integer) Point averaging: 1 to 100 (integer) Display LCD display : Type/size: color LCD, 8.4 inch (21.3 cm) Resolution: 640 (horizontal) × 480 (vertical) Number of traces: Data trace: 3 scalar traces + 2 complex traces (maximum) Memory trace: 3 scalar traces + 2 complex traces (maximum) Trace data math: Data – memory, data/memory (for complex parameters), delta% (for scalar parameters), offset Format: For scalar parameters: linear Y-axis, log Y-axis For complex parameters: Z, Y: polar, complex; Γ: polar, complex, Smith, admittance Other display functions: Split/overlay display (for scalar parameters), phase expansion 8 Marker Interface Number of markers: Main marker: one for each trace (marker 1) Sub marker: seven for each trace (marker 2 to marker 8) Reference marker: one for each trace (marker R) GPIB Marker search: Search type: maximum, minimum, target, peak Search track: performs search with each sweep Standard conformity: IEEE 488.1-1987, IEEE 488.2-1987 Available functions (function code)1: SH1, AH1, T6, TE0, L4, LE0, SR1, RL0, PP0, DT1, DC1, C0, E2 Numerical data transfer format: ASCII Other functions: Marker continuous mode, marker coupled mode, marker list, marker statistics Protocol: IEEE 488.2-1987 Equivalent circuit analysis Interface standard: IEEE 1284 Centronics Circuit models: 3-component model (4 models), 4-component model (1 model) Analysis types: Equivalent circuit parameters calculation, frequency characteristics simulation Printer parallel port Connector type: 25-pin D-sub connector, female LAN interface Standard conformity: 10 Base-T or 100 Base-TX (automatically switched), Ethertwist, RJ45 connector Protocol: TCP/IP Limit marker test Functions: FTP Number of markers for limit test: 9 (marker R, marker 1 to 8) USB Port Setup parameters for each marker: Stimulus value, upper limit, and lower limit Interface standard: USB 1.1 Mass storage Available functions: Provides connection to printers and USB/GPIB Interface. Built-in flexible disk drive: 3.5 inch, 720 KByte or 1.44 MByte, DOS format Connector type: Standard USB A, female Hard disk drive: 2 GByte (minimum) Stored data: State (binary), measurement data (binary, ASCII or CITI file), display graphics (bmp, jpg), VBA program (binary) 1. Refer to the standard for the meaning of each function code. 9 Measurement Terminal (At Test Head) Rear Panel Connectors Connector type: 7-mm connector Frequency: 10 MHz ±10 ppm (typical) External reference signal input connector Level: 0 dBm to +6 dBm (typical) Input impedance: 50 Ω (nominal) Connector type: BNC, female Internal reference signal output connector Frequency: 10 MHz (nominal) Accuracy of frequency: Same as frequency accuracy described in “Frequency” on page 3 Level: +2 dBm (nominal) Output impedance: 50 Ω (nominal) Connector type: BNC, female High stability frequency reference output connector (Option E4991A-1D5) Frequency: 10 MHz (nominal) Accuracy of frequency: Same as frequency accuracy described in “Frequency” on page 3 Level: +2 dBm (nominal) Output impedance: 50 Ω (nominal) Connector type: BNC, female 10 External trigger input connector General Characteristics Level: LOW threshold voltage: 0.5 V HIGH threshold voltage: 2.1 V Input level range: 0 V to +5 V Environment conditions Pulse width (Tp): ≥ 2 µsec (typical). See Figure 6 for definition of Tp. Temperature: 5 °C to 40 °C Polarity: Positive or negative (selective) Connector type: BNC, female Tp Tp Tp 5V 5V OV OV Postive trigger signal Figure 6. Definition of pulse width (Tp) Tp Operating condition Humidity: (at wet bulb temperature ≤ 29 °C, without condensation) Flexible disk drive non-operating condition: 15% to 90% RH Flexible disk drive operating condition: 20% to 80% RH Altitude: 0 m to 2,000 m (0 feet to 6,561 feet) Negative trigger signal Vibration: 0.5 G maximum, 5 Hz to 500 Hz Warm-up time: 30 minutes Non-operating storage condition Temperature: –20 °C to +60 °C Humidity: (at wet bulb temperature ≤ 45 °C, without condensation) 15% to 90% RH Altitude: 0 m to 4,572 m (0 feet to 15,000 feet) Vibration: 1 G maximum, 5 Hz to 500 Hz 11 General Characteristics (continued) Other Specifications Safety EMC European Council Directive 89/336/EEC IEC 61326-1:1997+A1 CISPR 11:1990 / EN 55011:1991 Group 1, Class A IEC 61000-4-2:1995 / EN 61000-4-2:1995 4 kV CD / 4 kV AD IEC 61000-4-3:1995 / EN 61000-4-3:1996 3 V/m, 80-1000 MHz, 80% AM IEC 61000-4-4:1995 / EN 61000-4-4:1995 1 kV power / 0.5 kV Signal IEC 61000-4-5:1995 / EN 61000-4-5:1995 0.5 kV Normal / 1 kV Common IEC 61000-4-6:1996 / EN 61000-4-6:1996 3 V, 0.15-80 MHz, 80% AM IEC 61000-4-11:1994 / EN 61000-4-11:1994 100% 1cycle Note: When tested at 3 V/m according to EN 61000-4-3:1996, the measurement accuracy will be within specifications over the full immunity test frequency range of 80 MHz to 1000 MHz except when the analyzer frequency is identical to the transmitted interference signal test frequency. AS/NZS 2064.1/2 Group 1, Class A 12 European Council Directive 73/23/EEC IEC 61010-1:1990+A1+A2 / EN 61010-1:1993+A2 INSTALLATION CATEGORY II, POLLUTION DEGREE 2 INDOOR USE IEC60825-1:1994 CLASS 1 LED PRODUCT CAN/CSA C22.2 No. 1010.1-92 Power requirements 90 V to 132 V, or 198 V to 264 V (automatically switched), 47 Hz to 63 Hz, 350 VA maximum Weight Main unit: 17 kg (nominal) Test head: 1 kg (nominal) Dimensions Main unit: See Figure 7 through Figure 9 Test head: See Figure 10 Option E4991A-007 test head dimensions: See Figure 11 Option E4991A-010 test head dimensions: See Figure 12 425.6 E4991A 1M Hz - 3 G Hz RF Im pedanc e/M aterial A naly z er MEASUREMENT ENTRY / NAVIGATION Trace Meas/ Format 7 8 9 G /n S c a le Display 4 5 6 M /μ Marker Marker Fctn 1 2 3 k /m +/- Enter STIMULUS 0 Start/ Stop Sweep Source Cal/ Compen Trigger Trigger Setup . Click Cancel/ Close OK/ Apply 221.6 A gilent Menu SYSTEM System Utility Save/ Recall Preset TEST HEAD INTERFACE A v o id s t a t ic d is c h a r g e PORT 1 PORT 2 27.5 RF OUT 58.8 40.6 62.5 Figure 7. Main unit dimensions (front view, in millimeters, nominal) 426.2 107.8 179.8 214.4 27.7 30.0 30.3 Figure 8. Main unit dimensions (rear view, in millimeters, nominal) 389.7 23.4 221.6 214.4 32.0 12.8 18.0 17.3 21.0 Figure 9. Main unit dimensions (side view, in millimeters, nominal) 13 40.0 General Characteristics (continued) 40.6 58.8 30.3 52.0 92.1 134.5 162.9 64.3 160.0 Figure 10. Test head dimensions (in millimeters, nominal) Figure 11. Option E4991A-007 test head dimensions (in millimeters, nominal) 14 41.7 General Characteristics (continued) 111 32.1 62.9 40.4 52 38 19.3 67.9 56.4 5.9 22 19 121 Figure 12. Option E4991A-010 test head dimensions (in millimeters, nominal) 15 Furnished accessories Model/option number Description Agilent E4991A Agilent E4991A impedance/material analyzer (main unit) Test head Agilent 16195B 7-mm calibration kit Torque wrench E4991A recovery disk Power cable CD-ROM (English/Japanese PDF manuals) 1 1. The CD-ROM includes an operation manual, an installation and quick start guide, and a programming manual. A service manual is not included. 16 Quantity 1 1 1 1 1 1 1 Option E4491A-002 Material Measurement (Typical) Measurement parameter Typical accuracy of permittivity parameters: Permittivity parameters: |εr|, εr', εr", tanδ Permeability parameters: |µr|, µr', µr", tanδ εr' accuracy Frequency range ± 5 + 10 + Using with Agilent 16453A: 1 MHz to 1 GHz (typical) = ∆ε'rm : ε'rm 0.1 t ε'rm + + 0.25 t f ε'rm Using with Agilent 16454A: 1 MHz to 1 GHz (typical) Measurement accuracy Conditions for defining accuracy: Calibration: Open, short, and load calibration at the test port (7-mm connector) Calibration temperature: Calibration is performed at an environmental temperature within the range of 23 °C ± 5 °C. Measurement error doubles when calibration temperature is below 18 °C or above 28 °C. Temperature: Temperature deviation: within ±5 ˚C from the calibration temperature Environment temperature: Measurement accuracy applies when the calibration is performed at 23 °C ±5 °C. When the calibration is below 18 °C or above 23 °C, measurement error doubles. Measurement frequency points: Same as calibration points Oscillator level: Same as the level set at calibration Point averaging factor: ≥ 8 Electrode pressure setting of 16453A: maximum 100 1– 13 f √ε'rm 2 [%] (at tanδ < 0.1) Loss tangent accuracy of εr (= ∆tanδ): ±(Ea + Eb) (at tanδ < 0.1) • where, Ea = at Frequency ≤ 1 GHz: 0.002 + 0.001 t • + 0.004f + f ε'rm 0.1 13 1– f √ε'rm 2 ∆ε'rm 1 0.002 ε'rm • 100 + ε'rm t tanδ Eb = f = Measurement frequency [GHz] t = Thickness of MUT (material under test) [mm] ε'rm = Measured value of ε'r tanδ = Measured value of dielectric loss tangent 17 Typical accuracy of permeability parameters: µr' accuracy = 4+ ∆µ' rm : µ' rm 0.02 25 15 + Fµ'rm 1 + × f Fµ'rm Fµ'rm 2 f 2 [%] (at tanδ < 0.1) • Loss tangent accuracy of µr (= ∆tanδ): ±(Ea + Eb ) (at tanδ < 0.1) where, Ea = 0.002 + Eb = f 0.001 + 0.004 f Fµ'rm f ∆µrm' tanδ • µ'rm 100 h = Measurement frequency [GHz] c = hln [mm] b = Height of MUT (material under test) [mm] b = Inner diameter of MUT (material under test) [mm] c = Outer diameter of MUT (material under test) [mm] F µ'rm = Measured value of µ'r tanδ = Measured value of loss tangent 18 Option E4491A-002 Material Measurement (typical) (continued) Examples of calculated permittivity measurement accuracy Figure 13. Permittivity accuracy ( ∆ε'r ) vs. frequency (at t = 0.3 mm, typical) ε'r ∆ε' Figure 14. Permittivity accuracy ( r ) vs. frequency (at t = 1 mm, typical) ε'r Figure 15. Permittivity accuracy ( ∆ε'r ) vs. frequency (at t = 3 mm, typical) ε'r 19 Figure 16. Dielectric loss tangent (tanδ) accuracy vs. frequency (at t = 0.3 mm, typical)1 Figure 19. Permittivity (ε'r) vs. frequency (at t = 0.3 mm, typical) Figure 17. Dielectric loss tangent (tanδ) accuracy vs. frequency (at t = 1 mm, typical)1 Figure 20. Permittivity (ε'r) vs. frequency (at t = 1 mm, typical) Figure 18. Dielectric loss tangent (tanδ) accuracy vs. frequency (at t = 3 mm, typical)1 Figure 21. Permittivity (ε'r) vs. frequency (at t = 3 mm, typical) 1. This graph shows only frequency dependence of Ea to simplify it. The typical accuracy of tanδ is defined as Ea + Eb; refer to “Typical accuracy of permittivity parameters” on page 17. 20 Option E4991A-002 Material Measurement (typical) (continued) Examples of calculated permeability measurement accuracy Figure 22. Permeability accuracy ( ∆µ'r ) vs. frequency (at F = 0.5, typical) µ'r ∆µ'r Figure 23. Permeability accuracy ( vs. frequency (at F = 3, typical) µ'r ) Figure 24. Permeability accuracy ( ∆µ'r ) vs. frequency (at F = 10, typical) µ'r 21 Figure 25. Permeability loss tangent (tanδ) accuracy vs. frequency (at F = 0.5, typical)1 Figure 28. Permeability (µ'r ) vs. frequency (at F = 0.5, typical) Figure 26. Permeability loss tangent (tanδ) accuracy vs. frequency (at F = 3, typical)1 Figure 29. Permeability (µ'r ) vs. frequency (at F = 3, typical) Figure 27. Permeability loss tangent (tanδ) accuracy vs. frequency (at F = 10, typical)1 Figure 30. Permeability (µ'r ) vs. frequency (at F = 10, typical) 1. This graph shows only frequency dependence of Ea to simplify it. The typical accuracy of tanδ is defined as Ea + Eb; refer to “Typical accuracy of permeability parameters” on page 18. 22 Option E4991A-007 Temperature Characteristic Test Kit Impedance, admittance and phase angle accuracy: This section contains specifications and supplemental information for the E4991A Option E4991A-007. Except for the contents in this section, the E4991A standard specifications and supplemental information are applied. |Z|, |Y| ± (Ea + Eb ) [%] (see Figure 31 through Figure 34 for calculated accuracy) Operation temperature θ ± Range: –55 °C to +150 °C (at the test port of the high temperature cable) Source characteristics Frequency 100 [rad] where, Ea = at oscillator level ≥ –33 dBm: ±0.8 [%] (1 MHz ≤ ƒ ≤ 100 MHz) ±1 [%] (100 MHz < ƒ ≤ 500 MHz) ±1.2 [%] (500 MHz < ƒ ≤ 1 GHz) ±2.5 [%] (1 GHz < ƒ ≤ 1.8 GHz) ±5 [%] (1.8 GHz < ƒ ≤ 3 GHz) at oscillator level < –33 dBm: ±1.2 [%] (1 MHz ≤ ƒ ≤ 100 MHz) ±1.5 [%] (100 MHz < ƒ ≤ 500 MHz) ±1.5 [%] (500 MHz < ƒ ≤ 1 GHz) ±2.5 [%] (1 GHz < ƒ ≤ 1.8 GHz) ±5 [%] (1.8 GHz < ƒ ≤ 3 GHz) (Where, ƒ is frequency) Range: 1 MHz to 3 GHz Oscillator level Source power accuracy at the test port of the high temperature cable: Frequency ≤ 1 GHz: +2 dB/–4 dB (23 °C ±5 °C) +4 dB/–6 dB (5 °C to 40 °C) Frequency > 1 GHz: +3 dB/–6 dB (23 °C ±5 °C) +5 dB/–8 dB (5 °C to 40 °C) (Ea + Eb ) Eb = ± Zs + Yo × |Zx| × 100 [%] |Zx| Where, |Zx|= Absolute value of impedance Measurement accuracy (at 23 °C ±5 °C) Zs Conditions 1 The measurement accuracy is specified when the following conditions are met: Calibration: open, short and load calibration is completed at the test port (7-mm connector) of the high temperature cable Calibration temperature: calibration is performed at an environmental temperature within the range of 23 °C ±5 °C. Measurement error doubles when calibration temperature is below 18 °C or above 28 °C. Measurement temperature range: within ±5 °C of calibration temperature Measurement plane: same as calibration plane Oscillator level: same as the level set at calibration = At oscillator level = –3 dBm, –13 dBm, or –23 dBm: ± (30 + 0.5 × F) [mΩ] (point averaging factor ≥ 8) ± (40 + 0.5 × F) [mΩ] (point averaging factor ≤ 7) At oscillator level ≥ –33 dBm: ± (35 + 0.5 × F) [mΩ] (point averaging factor ≥ 8) ± (70 + 0.5 × F) [mΩ] (point averaging factor ≤ 7) At oscillator level < –33 dBm: ± (50 + 0.5 × F) [mΩ] (point averaging factor ≥ 8) ± (150 + 0.5 × F) [mΩ] (point averaging factor ≤ 7) (Where, F is frequency in MHz) Yo = At oscillator level = –3 dBm, –13 dBm, –23 dBm: ± (12 + 0.1 × F) [µS] (point averaging factor ≥ 8) ± (20 + 0.1 × F) [µS] (point averaging factor ≤ 7) At oscillator level ≥ –33 dBm: ± (15 + 0.1 × F) [µS] (point averaging factor ≥ 8) ± (40 + 0.1 × F) [µS] (point averaging factor ≤ 7) At oscillator level < –33 dBm: ± (35 + 0.1 × F) [µS] (point averaging factor ≥ 8) ± (80 + 0.1 × F) [µS] (point averaging factor ≤ 7) 1. The high temperature cable must be kept at the same position throughout calibration and measurement. (Where, F is frequency in MHz) 23 Calculated Impedance/Admittance Measurement Accuracy 24 Figure 31.|Z|, |Y| measurement accuracy when open/short/load calibration is performed. Oscillator level = –23 dBm, –13 dBm, –3 dBm. Point averaging factor ≥ 8 within ±5 °C of calibration temperature. Figure 33.|Z|, |Y| measurement accuracy when open/short/load calibration is performed. Oscillator level ≥ –33 dBm. Point averaging factor ≤ 7 within ±5 °C of calibration temperature. Figure 32.|Z|, |Y| measurement accuracy when open/short/load calibration is performed. Oscillator level ≥ –33 dBm. Point averaging factor ≥ 8 within ±5 °C of calibration temperature. Figure 34.|Z|, |Y| measurement accuracy when open/short/load calibration is performed. Oscillator level < –33 dBm. Point averaging factor ≥ 8 within ±5 °C of calibration temperature. Typical Effects of Temperature Change on Measurement Accuracy When the temperature at the test port (7-mm connector) of the high temperature cable changes from the calibration temperature, typical measurement accuracy involving temperature dependence effects (errors) is applied. The typical measurement accuracy is represented by the sum of error due to temperature coefficients (Ea´, Yo´and Zs´), hysteresis error (Eah , Yoh and Zsh) and the specified accuracy. Conditions The typical measurement accuracy is applied when the following conditions are met: Conditions of Ea’, Zs’ and Yo’: Measurement temperature: –55 °C to 5 °C or 40 °C to 150 °C at test port. For 5 °C to 40 °C, Ea´, Yo´ and Zs´ are 0 (neglected). Temperature change: ≥ 5 °C from calibration temperature when the temperature compensation is off. ≥ 20 °C from calibration temperature when the temperature compensation is set to on. Calibration temperature: 23 °C ±5 °C Calibration mode: user calibration Temperature compensation: temperature compensation data is acquired at the same temperature points as measurement temperatures. Conditions of Eah, Zsh and Yoh: Measurement temperature: –55 °C to 150 °C at the test port Calibration temperature: 23 °C ±5 °C Calibration mode: user calibration 25 Typical measurement accuracy (involving temperature dependence effects)1: |Z|, |Y|: ± (Ea + Eb + Ec + Ed) [%] θ : ± (Ea + Eb + Ec + Ed) [rad] 100 Where, Ec = Ea´ × ∆T + Eah Ed = ± Zs´× ∆T + Zsh + (Yo´× ∆T + Yoh ) × |Zx| × 100 [%] |Zx| Where, |Zx| = Absolute value of measured impedance Figure 35. Typical frequency characteristics of temperature coefficient, (Ec+Ed)/∆T, when |Zx|= 10 Ω and 250 Ω, E ah= Z sh= Yoh= 0 are assumed 2. Here, Ea´, Zs´ and Yo´ are given by the following equations: Without temperature compensation With temperature compensation 1 MHz ≤ ƒ < 500 MHz 500 MHz ≤ ƒ ≤ 3 GHz Ea´ 0.006 + 0.015 × ƒ [%/°C] 0.006 + 0.015 × ƒ [%/°C] 0.006 + 0.015 × ƒ [%/°C] Zs´ 1 + 10 × ƒ [mΩ/°C] 1 + 10 × ƒ [mΩ/°C] 5 + 2 × ƒ [mΩ/°C] Yo´ 0.3 + 3 × ƒ [µS/°C] 0.3 + 3 × ƒ [µS/°C] 1.5 + 0.6 × ƒ [µS/°C] ƒ = Measurement frequency in GHz Eah, Zsh and Yoh are given by following equations: Eah = Ea´ × ∆Tmax × 0.3 [%] Zsh = Zs´ × ∆Tmax × 0.3 [mΩ] Yoh = Yo´ × ∆Tmax × 0.3 [µS] ∆T = Difference of measurement temperature-from calibration temperature ∆Tmax = Maximum temperature change (°C) at the test port from calibration temperature after the calibration is performed. 1. See graphs in Figure 35 for the calculated values of (Ec+Ed) exclusive of the hysteresis errors Eah, Zsh and Yoh, when measured impedance is 10 Ω and 250 Ω. 2. Read the value of ∆|Z|%/°C at the material measurement frequency and multiply it by ∆T to derive the value of (Ec+Ed) when Eah= Yoh= Zsh= 0. 26 Typical Material Measurement Accuracy When Using Options E4991A-002 and E4991A-007 Material measurement accuracy contains the permittivity and permeability measurement accuracy when the E4991A with Option E4991A-002 and E4991A-007 is used with the 16453A or 16454A test fixture. Measurement parameter Permittivity parameters: |εr|, ε'r , ε", tanδ Typical permittivity measurement accuracy1: εr´ accuracy ± 5 + 10 + Eε = ∆ε´rm ε´rm : 0.5 t ε´rm × + 0.25 × + f t ε´rm 100 | 1– Permeability parameters: |µr|, µ'r , µ", tanδ Frequency [%] (at tanδ < 0.1) Use with Agilent 16453A: 1 MHz to 1 GHz (typical) Loss tangent accuracy of εr (= ∆tanδ) : Use with Agilent 16454A: 1 MHz to 1 GHz (typical) | ± (Ea + Eb ) (at tanδ < 0.1) where, Range: –55 °C to +150 °C (at the test port of the high temperature cable) Ea Conditions The measurement accuracy is specified when the following conditions are met: Calibration: Open, short and load calibration is completed at the test port (7-mm connector) of the high temperature cable Calibration temperature: Calibration is performed at an environmental temperature within the range of 23 °C ±5 °C. Measurement error doubles when calibration temperature is below 18 °C or above 28 °C. Measurement temperature range: Within ±5 °C of calibration temperature Measurement frequency points: Same as calibration points (User Cal) Oscillator level: Same as the level set at calibration Point averaging factor: ≥ 8 2 . Operation temperature Typical material measurement accuracy (at 23 °C ±150 °C) 13 f √ε´rm = at Frequency ≤ 1 GHz 0.002 + 0.0025 t × + (0.008 × f ) + f ε´rm ∆ε´rm × 0.1 | 1– 13 f √ε´rm | 1 0.002 + ε´rm × tanδ 100 t Eb = f = Measurement frequency [GHz] t = Thickness of MUT (material under test) [mm] ε´rm 2 ε´rm = Measured value of ε´r tanδ = Measured value of dielectric loss tangent 1. The accuracy applies when the electrode pressure of the 16453A is set to maximum. 27 Typical permeability measurement accuracy: µr´ accuracy Eµ = 4+ ∆µ´rm µ´rm : 0.02 25 15 × + F × µ´rm × 1 + f F × µ´rm F × µ´rm [%] (at tanδ < 0.1) . Loss tangent accuracy of µr (= ∆tanδ) : ± (Ea + Eb ) (at tanδ < 0.1) where, = 0.002 + Eb = f = Measurement frequency [GHz] F = hln h = Height of MUT (material under test) [mm] b = Inner diameter of MUT [mm] c = Outer diameter of MUT [mm] µ´rm = Measured value of µ´r tanδ = 28 0.005 + 0.004 × f F × µ´rm × f Ea tanδ ∆µ ´rm × µ´rm 100 c [mm] b Measured value of loss tangent 2 × f2 Examples of Calculated Permittivity Measurement Accuracy ∆ε' Figure 36. Permittivity accuracy ( r ) vs. frequency, ε'r (at t = 0.3 mm typical) Figure 37. Permittivity accuracy ( (at t = 1 mm, typical) ∆ε'r ) vs. frequency ε'r Figure 38. Permittivity accuracy ( (at t = 3 mm, typical) ∆ε'r ) vs. frequency ε'r Figure 39. Dielectric loss tangent (tanδ) accuracy vs. frequency (at t = 0.3 mm, typical)1 Figure 40. Dielectric loss tangent (tanδ) accuracy vs. frequency (at t = 1 mm, typical)1 Figure 41. Dielectric loss tangent (tanδ) accuracy vs. frequency (at t = 3 mm, typical)1 1. This graph shows only frequency dependence of Ea for simplification. The typical accuracy of tanδ is defined as Ea + Eb; refer to “Typical permittivity measurement accuracy” on page 27. 29 Examples of Calculated Permittivity Measurement Accuracy (continued) Figure 42. Permittivity (ε'r) vs. frequency (at t = 0.3 mm, typical) Figure 43. Permittivity (ε'r) vs. frequency (at t = 1 mm, typical) Figure 44. Permittivity (ε'r) vs. frequency (at t = 3 mm, typical) 30 Examples of Calculated Permeability Measurement Accuracy Figure 45. Permeability accuracy ( ∆µ'r vs. frequency (at F = 0.5, typical) µ'r ) Figure 46. Permeability accuracy ( ∆µ'r vs. frequency (at F = 3, typical) µ'r Figure 47. Permeability accuracy ( ∆µ'r vs. frequency (at F = 10, typical) µ'r ) ) Figure 48. Permeability loss tangent (tanδ) accuracy vs. frequency (at F = 0.5, typical)1 Figure 49. Permeability loss tangent (tanδ) accuracy vs. frequency (at F = 3, typical)1 Figure 50. Permeability loss tangent (tanδ) accuracy vs. Frequency (at F = 10, typical)1 1. This graph shows only frequency dependence of Ea for simplification. The typical accuracy of tanδ is defined as Ea + Eb; refer to “Typical permeability measurement accuracy” on page 28. 31 Examples of Calculated Permeability Measurement Accuracy (continued) Figure 51. Permeability (µ'r ) vs. frequency (at F = 0.5, typical) Figure 52. Permeability (µ'r ) vs. frequency (at F = 3, typical) Figure 53. Permeability (µ'r ) vs. frequency (at F = 10, typical) 32 Typical Effects of Temperature Change on Permittivity Measurement Accuracy When the temperature at the test port (7-mm connector) of the high temperature cable changes more than 5 °C from the calibration temperature, the typical permittivity measurement accuracy involving temperature dependence effects (errors) is applied. The typical permittivity accuracy is represented by the sum of error due to temperature coefficient (Tc), hysteresis error (Tc× ∆Tmax) and the accuracy at 23 °C ± 5 °C. Typical accuracy of permittivity parameters: εr´ accuracy = ∆ε´rm : ε´rm ± (Eε + Ef + Eg) [%] . Loss tangent accuracy of ε (= ∆tanδ) : ± (Eε + Ef + Eg ) 100 where, Eε = Permittivity measurement accuracy at 23 °C ± 5 °C Ef = Tc × ∆T Eg = Tc × ∆Tmax × 0.3 Tc = K1 + K2 + K3 See Figure 54 through Figure 56 for the calculated value of Tc without temperature compensation K1 = 1 × 10-6 × (60 + 150 × ƒ) K 2 = 3 × 10-6 × (1 + 10 × ƒ) × ε´rm 1 × t 1– +10 × ƒ f 2 fo K3 = 1 5 × 10-3 × (0.3 + 3 × ƒ) × ε´rm t 1 × 1– f 2 +10 × ƒ fo 33 Typical accuracy of permittivity parameters (continued): with temperature compensation K1 = 1 × 10-6 × (60 + 150 × ƒ) K2 = 1 MHz ≤ f < 500 MHz 3 × 10-6 × (1 + 10 × ƒ) × ε´rm t 1 × 1– +10 ׃ 2 f fo 500 MHz ≤ ƒ ≤ 1 GHz 3 × 10-6 × (5 + 2 × ƒ) × ε´rm t 1 × 1– K3 +10 2 f ׃ fo = 1 MHz ≤ ƒ < 500 MHz 1 5 × 10-3 × (0.3 + 3 × ƒ) × ε´rm × t 1 f 1– 2 +10 × ƒ fo 500 MHz ≤ ƒ ≤ 1 GHz 1 5 × 10-3 × (1.5 + 0.6 × ƒ) × ε´rm t 1 × 1– f 2 +10 × ƒ fo ƒ ƒo = Measurement frequency [GHz] 13 = [GHz] √ ε´r t = Thickness of MUT (material under test) [mm] ε´rm = Measured value of ε´r ∆T = Difference of measurement temperature from calibration temperature ∆Tmax = Maximum temperature change (°C) at test port from calibration temperature after the calibration is performed. 34 Figure 54. Typical frequency characteristics of temperature coefficient of ε'r (Thickness = 0.3 mm) Figure 55. Typical frequency characteristics of temperature coefficient of ε'r (Thickness = 1 mm) Figure 56. Typical frequency characteristics of temperature coefficient of ε'r (Thickness = 3 mm) 35 Typical Effects of Temperature Change on Permeability Measurement Accuracy When the temperature at the test port (7-mm connector) of the high temperature cable changes more than 5 °C from the calibration temperature, the typical permeability measurement accuracy involving temperature dependence effects (errors) is applied. The typical permeability accuracy is represented by the sum of error due to temperature coefficient (Tc), hysteresis error (Tc × ∆Tmax) and the accuracy at 23 °C ±5 °C. Typical accuracy of permeability parameters: µ r´ accuracy = ∆µ´rm µ´rm : ± (Eµ + Eh + Ei ) [%] . Loss tangent accuracy of µr (= ∆tanδ) : ± (Eµ + Eh + Ei ) 100 where, Eµ = Permeability measurement accuracy at 23 °C ± 5 °C Eh = Tc × ∆T Ei = Tc × ∆Tmax × 0.3 Tc = K4 + K5 + K6 See Figure 57 through Figure 59 for the calculated value of Tc without temperature compensation K4 = K5 = 1 × 10-6 × (60 + 150 × ƒ) |1 – 0.01 × {F × (µ´rm – 1) + 10} × ƒ2| 1 × 10-2 × (1 + 10 × ƒ) × K6 {F × (µ´rm –1) + 20} × ƒ = 2 × 10-6 × (0.3 + 3 × ƒ) × {F × (µ´rm – 1) + 20} × ƒ |1 – 0.01 × {F × (µ´rm –1) + 10} × ƒ2| with temperature compensation K4 = K5 = 1 × 10-6 × (60 + 150 × ƒ) 1 MHz ≤ ƒ < 500 MHz 1 × 10-2 × (1 + 10 × ƒ) × |1 – 0.01 × {F × (µ´rm – 1) +10} × ƒ2| {F × (µ´rm – 1) + 20} × ƒ 500 MHz ≤ ƒ ≤ 1 GHz 1 × 10-2 × (5 + 2 × ƒ) × 36 |1 – 0.01 × {F × (µ´rm – 1) +10} × ƒ2| {F × (µ´rm – 1) + 20} × ƒ Typical accuracy of permeability parameters (continued): K6 = 1 MHz ≤ ƒ < 500 MHz 2 × 10-6 × (0.3 + 3 × ƒ) × {F × (µ´rm – 1) + 20} × ƒ |1 – 0.01 × {F × (µ´rm – 1) +10} × ƒ2| 500 MHz ≤ ƒ ≤ 1 GHz 2 × 10-6 × (1.5 + 0.6 × ƒ) × {F × (µ´rm –1) + 20} × ƒ |1 – 0.01 × {F × (µ´rm –1) +10} × ƒ2| ƒ = Measurement frequency [GHz] F = hln c [mm] b h = Height of MUT (material under test) [mm] b = Inner diameter of MUT [mm] c = Outer diameter of MUT [mm] µ´ = Measured value of µ´r ∆T = Difference of measurement temperature from calibration temperature ∆Tmax = Maximum temperature change (°C) at test port from calibration temperature after the calibration is performed. 37 Figure 57. Typical frequency characteristics of temperature coefficient of µ'r (at F = 0.5) Figure 58. Typical frequency characteristics of temperature coefficient of µ'r (at F = 3) Figure 59. Typical frequency characteristics of temperature coefficient of µ'r (at F = 10) 38 39 www.agilent.com www.agilent.com/find/impedance Agilent Email Updates www.agilent.com/find/emailupdates Get the latest information on the products and applications you select. Agilent Direct www.agilent.com/find/agilentdirect Quickly choose and use your test equipment solutions with confidence. Agilent Open www.agilent.com/find/open Agilent Open simplifies the process of connecting and programming test systems to help engineers design, validate and manufacture electronic products. Agilent offers open connectivity for a broad range of system-ready instruments, open industry software, PC-standard I/O and global support, which are combined to more easily integrate test system development. 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