MOTOROLA MPXL10GC7U

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by MPXL10/D
SEMICONDUCTOR TECHNICAL DATA
The MPXL10 series device is a silicon piezoresistive pressure sensor providing a very
accurate and linear voltage output — directly proportional to the applied pressure. This
standard, low cost, uncompensated sensor permits manufacturers to design and add
their own external temperature compensating and signal conditioning networks.
Compensation techniques are simplified because of the predictability of Motorola’s single
element strain gauge design.
0 to 10 kPa (0 – 1.45 psi)
35 mV FULL SCALE SPAN
(TYPICAL)
Features
• Low Profile Package
• Low Cost
• Patented Silicon Shear Stress Strain Gauge Design
• Ratiometric to Supply Voltage
• Easy to Use Chip Carrier Package Options
• Differential and Gauge Options
• Available in Unibody Package (see MPX10 Series Data Sheet)
Application Examples
• Air Movement Control
• Environmental Control Systems
• Level Indicators
• Leak Detection
• Medical Instrumentation
• Industrial Controls
• Pneumatic Control Systems
• Robotics
PIN NUMBER
Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
PIN 3
CASE 472B–01, STYLE 2
1
Gnd
5
N/C
2
+Vout
VS
6
N/C
3
7
N/C
4
–Vout
8
N/C
NOTE: Pins 5, 6, 7, and 8 are not
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
+ VS
PIN 2
+ Vout
X–ducer
PIN 4
– Vout
PIN 1
Figure 1. Uncompensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Senseon and X–ducer are trademarks of Motorola, Inc.
Motorola Sensor Device Data
 Motorola, Inc. 1997
1
MAXIMUM RATINGS
Rating
Overpressure(8) (P1 > P2)
Burst Pressure(8) (P1 > P2)
Storage Temperature
Operating Temperature
Symbol
Value
Unit
Pmax
Pburst
Tstg
75
kPa
100
kPa
– 40 to +125
°C
TA
– 40 to +125
°C
OPERATING CHARACTERISTICS (VS = 3.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Typ
Max
Unit
POP
VS
0
—
10
kPa
—
3.0
6.0
Vdc
Io
—
6.0
—
mAdc
Full Scale Span(3)
Offset(4)
VFSS
Voff
20
35
50
mV
0
20
35
mV
Sensitivity
Linearity(5)
∆V/∆P
—
3.5
—
mV/kPa
—
–1.0
—
1.0
Pressure Hysteresis(5) (0 to 10 kPa)
Temperature Hysteresis(5) (– 40°C to +125°C)
—
—
± 0.1
—
%VFSS
%VFSS
—
—
± 0.5
—
Temperature Coefficient of Full Scale Span(5)
Temperature Coefficient of Offset(5)
TCVFSS
TCVoff
– 0.22
—
– 0.16
%VFSS
%VFSS/°C
—
±15
—
µV/°C
Temperature Coefficient of Resistance(5)
TCR
0.21
—
0.27
Input Impedance
Zin
Zout
400
—
550
%Zin/°C
Ω
750
—
1250
Ω
—
1.0
—
ms
Warm–Up
tR
—
—
20
—
ms
Offset Stability(9)
—
—
± 0.5
—
%VFSS
Symbol
Min
Typ
Max
Unit
—
—
—
690
kPa
Differential Pressure Range(1)
Supply Voltage(2)
Supply Current
Output Impedance
Response Time(6) (10% to 90%)
MECHANICAL CHARACTERISTICS
Characteristic
Common Mode Line Pressure(7)
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
• TCR:
Zin deviation with minimum rated pressure applied, over the temperature range of – 40°C to +125°C,
relative to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
TEMPERATURE COMPENSATION
Figure 2 shows the typical output characteristics of the
MPXL10 series over temperature.
The X–ducer piezoresistive pressure sensor element is a
semiconductor device which gives an electrical output signal
proportional to the pressure applied to the device. This device uses a unique transverse voltage diffused semiconductor strain gauge which is sensitive to stresses produced in a
thin silicon diaphragm by the applied pressure.
Because this strain gauge is an integral part of the silicon
diaphragm, there are no temperature effects due to differences in the thermal expansion of the strain gauge and the
diaphragm, as are often encountered in bonded strain gauge
pressure sensors. However, the properties of the strain
gauge itself are temperature dependent, requiring that the
device be temperature compensated if it is to be used over
an extensive temperature range.
Temperature compensation and offset calibration can be
achieved rather simply with additional resistive components,
or by designing your system using the MPX2010D series
sensor.
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range (Figure 3). There are two basic methods for
calculating nonlinearity: (1) end point straight line fit or (2) a
least squares best line fit. While a least squares fit gives the
“best case” linearity error (lower numerical value), the calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
80
70
– 40°C
60
50
SPAN
RANGE
(TYP)
+ 125°C
40
30
20
OFFSET
(TYP)
10
0
PSI 0
kPa
0.3
2.0
0.6
0.9
LINEARITY
60
+ 25°C
VS = 3 Vdc
P1 > P2
1.2
4.0
6.0
8.0
PRESSURE DIFFERENTIAL
1.5
10
Figure 2. Output versus Pressure Differential
Figure 4 illustrates the Differential/Gauge Sensing Chip in
the basic Low Profile Package (Case 472B–01). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted
to the sensor diaphragm.
The MPXL10 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on
use of dry air as the pressure media. Media, other than dry air,
may have adverse effects on sensor performance and long–
term reliability. Contact the factory for information regarding
media compatibility in your application.
50
OUTPUT (mVdc)
OUTPUT (mVdc)
70
ACTUAL
40
SPAN
(VFSS)
30
THEORETICAL
20
10
OFFSET
(VOFF)
0
0
MAX
POP
PRESSURE (kPA)
Figure 3. Linearity Specification Comparison
STAINLESS STEEL
METAL COVER
DIE
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÇÇÇÇ
ÉÉÉÉÉÉÉÉÉÉÉ
ÇÇÇÇ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
FLUORO SILICONE
DIE COAT
P1
WIRE BONDS
EPOXY CASE
LEAD FRAME
Figure 4. Cross–Sectional Diagram
(Not to Scale)
Motorola Sensor Device Data
3
ORDERING INFORMATION
MPXL10 series pressure sensors are available in differential and gauge configurations. Devices are available in the basic
element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure
connections.
MPX Series
D i T
Device
Type
O i
Options
C
Case
Type
T
Order Number
Device Marking
MPXL10GC7U
N/A
Case 472B–01
MPXL10GC7U
MPXL10G
PACKAGE DIMENSIONS
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. VERTICAL SURFACES MAY BE UP TO 5° DRAFT.
6. DIMENSION P TO CENTER OF LEAD WHEN
FORMED PARALLEL.
MARKING SURFACE
–A–
G
1
8
–B–
W
4
5
X
P
R
S
V
U
C
Y
–T–
L
M
F 8 PL
J
0.25 (0.010)
M
CASE 472B–01
ISSUE O
T B
S
A
S
DIM
A
B
C
F
G
J
L
M
P
R
S
U
V
W
X
Y
INCHES
MIN
MAX
0.658
0.668
0.541
0.551
0.555
0.595
0.026
0.034
0.100 BSC
0.009
0.011
0.138
0.150
0_
15 _
0.735
0.745
0.185
0.195
0.155
0.165
0.120
0.130
0.305
0.315
0.561
0.571
0.010
0.025
0.002
0.020
STYLE 2:
PIN 1.
2.
3.
4.
5.
6.
7.
8.
MILLIMETERS
MIN
MAX
16.71
16.97
13.74
13.99
14.10
15.11
0.66
0.86
2.54 BSC
0.23
0.28
3.50
3.81
0_
15_
18.67
18.92
4.69
4.95
3.94
4.19
3.05
3.30
7.75
8.00
14.25
14.50
0.25
0.63
0.05
0.51
GROUND
+VOUT
VSUPPLY
–VOUT
NC
NC
NC
NC
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola
data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals”
must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of
others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other
applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury
or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola
and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees
arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that
Motorola was negligent regarding the design or manufacture of the part. Motorola and
are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal
Opportunity/Affirmative Action Employer.
Mfax is a trademark of Motorola, Inc.
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MPXL10/D
Motorola Sensor Device
Data