Order this document by MPXT2010/D SEMICONDUCTOR TECHNICAL DATA ! ! The MPXT2010 Series silicon piezoresistive pressure sensors provide a very accurate and linear voltage output — directly proportional to the applied pressure. These sensors house a single monolithic silicon die with the strain gauge and thin–film resistor network integrated on each chip. The sensor is laser trimmed for precise span and offset, both calibrated and temperature compensated. COMPENSATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) FULL SCALE SPAN: 25 mV Features • Stress Isolated Top Piston Fit Package • Gauge Pressure Measurement • Temperature Compensated over 0° to + 85°C • Unique Silicon Shear Stress Strain Gauge • Ratiometric to Supply Voltage • Available in Unibody Package (Case 344), See MPX2010 Series Data Sheet Application Examples BASIC ELEMENT CASE 473A–01 • Respiratory Diagnostic Devices and Systems • Air Movement Control (HVAC) • Level Indicators PIN NUMBER • Controllers • Pressure Switching VS THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY Gnd 5 N/C 2 +Vout VS 6 N/C 3 7 N/C 4 –Vout 8 N/C NOTE: Pins 5, 6, 7, and 8 are not device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the Lead. 3 X–ducer SENSING ELEMENT 1 2 4 Vout+ Vout– 1 GND Figure 1. Calibrated and Temperature Compensated Pressure Sensor Schematic Senseon and X–ducer are trademarks of Motorola, Inc. REV 1 Motorola Sensor Device Data Motorola, Inc. 1997 1 MAXIMUM RATINGS(1) Parametrics Overpressure(9) (P1 > P2) Symbol Value Unit Pmax 75 kPa Pburst 100 kPa Tstg – 40 to +125 °C Operating Temperature TA – 40 to +125 1. TC = 25°C unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device. °C Burst Pressure(9) (P1 > P2) Storage Temperature OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2) Characteristic Symbol Min Typ Max Unit 0 — 10 kPa — 10 16 Vdc 6.0 — mAdc Pressure Range(1) POP Supply Voltage(2) VS Supply Current Io — Offset(3) Voff –1.0 — +1.0 mV VFSS 24 25 26 mV Sensitivity V/P — 2.5 — mV/kPa Linearity(5) — –1.0 — +1.0 %VFSS Pressure Hysteresis(5) (0 to 10 kPa) — — ± 0.1 — %VFSS Temperature Hysteresis(5) (– 40°C to +125°C) — — ± 0.5 — %VFSS Full Scale Span(4) Temperature Effect on Offset(5) Temperature Effect on Full Scale Span(5) Input Impedance TCVoff –1.0 — +1.0 mV TCVFSS –1.0 — +1.0 %VFSS Zin 1300 — 2550 Ω Zout 1400 — 3000 Ω Response Time(6) (10% to 90%) tR — 1.0 — ms Warm–up Time(7) — — 20 — ms Offset Stability(8) — — ± 0.5 — %VFSS Symbol Min Typ Max Unit — — 2.0 — Grams Output Impedance ā MECHANICAL CHARACTERISTICS Characteristic Weight, Basic Element NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self–heating. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation over the temperature range of 0 to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. • Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Warm–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 8. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 9. Exposure beyond these limits may cause permanent damage or degradation to the device. 2 Motorola Sensor Device Data ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION Figure 2 shows the output characteristics of the MPXT2010 series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line. The effects of temperature on full scale span and offset are small and are shown under Operating Characteristics. OUTPUT (mVdc) 30 25 15 STAINLESS STEEL METAL COVER VS = 10 Vdc TA = 25°C P1 > P2 20 aMAX Figure 3 illustrates the differential/gauge die in the basic chip carrier (Case 473). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. DIE SPAN RANGE (TYP) TYP MIN 0 –5 kPa PSI 2.5 0.362 5 0.725 7.5 1.09 10 1.45 ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉÉ ÇÇÇÇ ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉÉ P1 WIRE BONDS 10 5 FLUORO SILICONE DIE COAT OFFSET (TYP) EPOXY CASE LEAD FRAME Figure 2. Output versus Pressure Differential LINEARITY Linearity refers to how well a transducer’s output follows the equation: Vout = Voff + (sensitivity x P) over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end–point straight line fit, or (2) a least squares best line fit (see Figure 4). When calculating linearity, Motorola uses the end–point straight line fit. This method measures the two end and the mid range pressure points and compares to ideal. This typically represents the “worst case” error which is often more desirable for the customers when calculating an error budget in their designs. air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application. LEAST SQUARES FIT EXAGGERATED PERFORMANCE CURVE RELATIVE VOLTAGE OUTPUT The MPXT2010 series pressure sensor operating characteristics, internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry Figure 3. Cross–Sectional Diagram (not to scale) LEAST SQUARE DEVIATION STRAIGHT LINE DEVIATION END POINT STRAIGHT LINE FIT OFFSET 0 50 PRESSURE (% FULLSCALE) 100 Figure 4. Linearity Specification Comparison ORDERING INFORMATION The MPXT2010G7U pressure sensor is available to be shipped in Rails. Packing Options Rails Port Options Element Motorola Sensor Device Data Leadform Case No. MPXS Series Order No. Marking 84 degree 473A–01 MPXT2010G7U MPXT2010G 3 PACKAGE DIMENSIONS NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5_TYPICAL DRAFT. 6. DIMENSION P TO CENTER OF LEAD WHEN FORMED PARALLEL. –A– 8 1 G –B– S 4 5 DETAIL X DETAIL X P R U C –T– L SEATING PLANE F 8 PL 0.25 (0.010) M T B M J S A S DIM A B C F G J L M P R S U INCHES MIN MAX 0.658 0.668 0.658 0.668 0.329 0.357 0.026 0.034 0.100 BSC 0.009 0.011 0.138 0.150 0_ 15 _ 0.738 0.748 0.503 0.523 0.002 0.020 0.135 0.145 STYLE 2: PIN 1. 2. 3. 4. 5. 6. 7. 8. MILLIMETERS MIN MAX 16.71 16.97 16.71 16.97 8.36 9.07 0.660 0.864 2.54 BSC 0.23 0.28 3.81 3.51 0_ 15_ 18.75 19.00 12.78 13.28 0.05 0.51 3.43 3.68 GROUND +VOUT VSUPPLY –VOUT N/C N/C N/C N/C CASE 473A–01 ISSUE A Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by customer’s technical experts. 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