Model 85 UltraStable 316L SS Pressure Sensor High Performance, Small Profile 0-100 mV Output Absolute and Gage Low Pressure Hydraulic Controls Process Control Oceanography Refrigeration/Compressors Pressure Transmitters Level Systems DESCRIPTION This ia a micromachined piezoresistive silicon pressure sensor. It is designed for OEM applications where compatibility with corrosive media must be maintained. The sensor chip is mounted on a TO style header, which is resistance welded to a 316 stainless steel package. A 316 stainless steel convoluted isolation diaphragm is welded to the package, sealing a small volume of silicone oil between the diaphragm and the sensor chip. The ISO pressure housing utilizes the oil column to couple the piezoresistive sensor to the isolation diaphragm. A thickfilm ceramic compensation board with laser trimmed resistors, and an additional gain set resistor to normalize pressure sensitivity are an integral part of the sensor package. A variety of threaded process fittings are available. Fittings include standards like 1/4 and 1/8 NPT, 1/4 BSP as well as custom process fittings. FEATURES Electrical options include cable and connector. Weldable and O-Ring Flush Mount -20°C to +85°C Compensated Temperature Range +0.1% Pressure Non-linearity +1.0% Interchangeable Span (provided by gain set resistor) Solid State Reliability Low Power DIMENSIONS STANDARD RANGES Range 1-68 psig psia 0 to 15 ● ● 0 to 30 ● ● 0 to 50 ● ● 0 to 100 ● ● 0 to 300 ● ● 0 to 500 ● ● ISO – Wide Temperature Range Model 85 UltraStable 316L SS Pressure Sensor PERFORMANCE SPECIFICATIONS All parameters measured at 1.5mA drive and at 25°C after 10 second warm up, unless otherwise specified. Unless specifically indicated, only those parameters indicated as tested are verified on each part. Parameters are specified for the compensated version only. PARAMETERS MIN TYP MAX UNITS NOTES Full Scale Output Span 75 100 150 mV 1, 2 Zero Offset -1 0 1 mV 2 0.10 % Span 3 Pressure Non-linearity -0.10 Pressure Hysteresis -0.05 0.02 0.05 % Span Input Resistance 2,000 3,500 4,500 Ω Output Resistance 4000 25000 Ω Temperature Error - Span -0.75 0.75 % Span 4 Temperature Error - Zero -0.5 0.5 % Span 4, 5 Thermal Hysteresis - Span 0.05 % Span 4 Thermal Hysteresis - Zero 0.05 % Span 4 0.1 ±% Span/yr. Long Term Stability - Offset Long Term Stability - Span 0.1 Supply Current 0.5 Output Load Resistance Insulation Resistance (50 VDC) 1.5 ±% Span/yr. mA 6 5 MΩ 7 50 MΩ 8 Pressure Overload 2.0 3X Rated Compensated Operating Temperature –20°C to +85°C 9 Operating Temperature Range –40°C to +125°C 9 Storage Temperature Range –50°C to +125°C 9 Media - Pressure Port Liquids and Gases compatible with 316L Stainless Steel Media - Reference Port Compatible with Silicon, Pyrex, Gold, Fluorosilicone Rubber and 316L Stainless Steel Weight 13 g 10 Notes 1. For amplified output circuits, 3.012V ± 1% interchangeability with gain set resistor. See Application Note TN-003. 7. 8. Between case and sensing element. 2. Measured at vacuum for absolute (A), ambient for gage (G). 9. 3. Best fit straight line. Maximum temperature range for product with standard cable and connector is –20°C to +105°C. Load resistance to reduce measurement errors due to output loading. 4. Over Temperature range: -20°C to +85°C Span with respect to +25°C. 10. Weight depends upon configuration (cable, connector, pressure fitting). 5. 15 psi range sensors have a temperature error of ±0.75% (Max) of Zero from -20°C to 85°C. 11. For gage units used at pressures below atmosphere, the span accuracy is not guaranteed. 6. Guarantees output/input ratiometricity. ORDERING INFORMATION APPLICATION SCHEMATIC CONNECTIONS PAD NO. / CABLE FUNCTION 1 +OUT 2 -EX 3 +EX 4 -OUT 5 GAIN 6 GAIN October 2001 ISO – Wide Temperature Range Feel free to contact customer service with any questions at Toll free 1(800)745-8008; Phone (757)766-1500; Fax (757)766-4297 1-69