D6F-@AB71 MEMS Flow Sensor Reduction of Piping time by quick joint connection • Reduce the influence of pulsation flow by bypass flow path • 30 L/min and 70 L/min of Air can be measured. • Compact size of 30 × 84.6 × 32 mm (H × W × D). RoHS Compliant Refer to the Safety Precautions on page 3. Ordering Information Applicable fluid D6F-30AB71-000 Air D6F-70AB71-000 D6F-CABLE 1 (Optional) - Connections 6.0 - 5.0 4.0 3.0 2.0 1.0 0 6 12 18 24 30 56 70 Flow rate (L/min) D6F-70AB71-000 6.0 Use the following connectors for connections to the D6F: Housing 51021 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 3:GND Enlarged View 5.0 4.0 3.0 2.0 1.0 0.0 0 14 28 42 Flow rate (L/min) D6F-30AB71-000 Flow rate L/min (normal) 0 6 12 18 24 30 Output voltage V 1.00 ±0.12 1.25 ±0.12 1.91 ±0.12 2.75 ±0.12 3.78 ±0.12 5.00 ±0.12 D6F-70AB71-000 Flow rate L/min (normal) 0 14 28 42 56 70 Output voltage V 1.00 ±0.12 1.43 ±0.12 2.25 ±0.12 3.14 ±0.12 4.06 ±0.12 5.00 ±0.12 Measurement conditions: Power-supply voltage 12±0.1 VDC, ambient temperature 25±5°C and ambient humidity 35 to 75%RH. 1 D6F-@AB71 1: Vcc 2: Vout 3: GND 53398 (Made by Molex Japan) 1:Vcc 2:Vout 0 to 70 L/min Output voltage (V) Connector D6F-30AB71-000 0.0 D6F-30AB71-000 D6F-70AB71-000 Pin No. Flow rate range 0 to 30 L/min Output voltage (V) Model Output Voltage Characteristics D6F-@AB71 MEMS Flow Sensor Characteristics/Performance Model D6F-30AB71-000 Flow Range (See note 1.) D6F-70AB71-000 0 to 30 L/min 0 to 70 L/min Calibration Gas (See note 2.) Air Flow Port Type Quick joint P14 Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load and Vcc of 12 to 24 VDC, GND = 0 VDC, 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ min.) Accuracy ±3%F.S. (25°C characteristic) Repeatability (See note 3.) ±0.3%F.S. Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ) Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 Withstand Pressure 100 kPa Pressure Drop (See note 3.) 0.88 kPa Operating Temperature –10 to +60°C (with no condensation or icing) 3.49 kPa Operating Humidity 35 to 85%RH (with no condensation or icing) Storage Temperature –30 to +80°C (with no condensation or icing) Storage Humidity 35 to 85%RH (with no condensation or icing) Temperature Characteristics ±3%F.S. for 25°C characteristic at an ambient temperature of –10 to +60°C Insulation Resistance Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 75 g Note: 1. Volumetric flow rate at 0°C, 101.3 kPa. Note: 2. Dry gas (must not contain large particles, e.g., dust, oil, or mist.) Note: 3. Reference (typical) D6F-@AB71 Dimensions (Unit: mm) ● MEMS Flow Sensors Note. D6F-30AB71-000 D6F-70AB71-000 20.5 The Port type of pipe fitting based on “Quick Joint P14 Type”. * P14 shows the name of an O-ring prescribed by JIS B 2401. * The port of O-ring ditch is based on P14 of JIS B 2406. Lot No. Display A A 64.5 84.6±0.5 66.6 60.6 25.8 3.7 B 6 33.4 30.9 2-2.6 dia Depth 6.5 30±0.5 30° 26 dia. 22 dia. Note 18 +0.05 dia. 0 0.9 CO. 5 (circumference) R2 (circumference) 3±0.15 30±0.5 32±0.5 CO. 5 (circumference) 6 CROSS A-A ● Cable (Order Separately) D6F-CABLE1 200±35 100±15 Brown wire Black wire 1. Vcc 2. Vout Blue wire 2 3. GND D6F-@AB71 MEMS Flow Sensor Safety Precautions The D6F is built for use with general-purpose devices. In cases such as those described below, where safety is required, implement measures to ensure the safety of the system and all devices, such as fail-safe designs, redundancy designs, and regular maintenance. • Safety devices for ensuring safety for persons • Transportation equipment control (such as applications to stop operation) • Aviation and space equipment • Nuclear power equipment Do not use the D6F for applications in which D6F operation would directly affect human life. Caution Make sure that the power to all equipment is turned OFF before you install the Sensor. Installing the Sensor while the power supply is ON may result in electrical shock or abnormal operation. Precautions for Correct Use ● Fluids, Tubes, and Sensor Installation All Models (1) Use clean fluids. Dust and mist can affect the characteristics of the Sensor or damage the Sensor. Install a filter and mist separator on the upstream tube. (Not required for the D6F-W@A1, D6F-V, D6F-P and D6FPH.) (2) Do not use combustible gases (e.g., hydrogen), corrosive gases (e.g., chlorine, sulfur, acidic, or alkali gas), or other non-approved fluids. They may damage the Sensor. (3) The performance specifications that are given for the G6F do not apply if any fluids other than the specified applicable fluid are used. (4) Foreign matter in the tubes that are connected to the Sensor may damage the Sensor. Prevent any foreign matter from entering the tubes after the Sensor is removed from its packaging. (5) Attach the tubes so that fluid flows only in the direction designated by the arrows on the Sensor. Correct measurements cannot be obtained if the fluid flows in the wrong direction. (6) We recommend that you install the tubes horizontally. If the tubes are not installed horizontally, an error of ±1% F.S. or higher may result. (This does not apply to the D6F-03A3.) (7) Install the Sensor on a flat surface. Incorrect installation may damage the Sensor and make it impossible to obtain correct measurements. (8) After the Sensor is installed, check to confirm that it operates correctly. (9) Do not drop the Sensor, remove the cover, or attempt to disassemble the Sensor in any way. D6F-@@AB7 (1) Please use a Quick Joint (Type P14) for piping, and fix it by a Quick Fastener that fit Type P14. (2) Do not apply big force to piping which remain to join, and not apply big force directly to joint part with gripping case. It causes defective leakage and breakage. *Reference There is a possibility that leak damage or faulty of the body occurs when static load of more than 40N is applied to 300 mm from the center of product as fulcrum point. ● Operating Environment Do not use the Sensor in the following locations: • Locations directly subject to heat radiated from heating equipment • Locations subject to water or oil • Locations subject to direct sunlight • Locations subject to intense temperature changes • Locations subject to icing or condensation • Locations subject to excessive vibration or shock ● Countermeasures against Noise Noise may make it impossible to obtain correct measurements. Consider the following countermeasures. • Allow as much space as possible between the Sensor and devices that generates high frequencies (such as high-frequency welders and high-frequency sewing machines) or surges. • Attach surge absorbers or noise filters to noise-generating devices that are near the Sensor (in particular, equipment with inductance, such as motors, transformers, solenoids, and magnetic coils). (It also helps to separate pipes and ducts, and to use shielded cables.) ● Power Supply • Wire with the correct terminal names and polarities. Incorrect wiring will cause failure of internal components. • When using a commercially available switching regulator, ground the FG (frame ground) and G (ground) terminals. RoHS Directive The RoHS mark is displayed on the packing of products for which the six substances banned by the RoHS Directive have been abolished (both in processing and in the electronic components mounted to the PCBs). * RoHS marking may be terminated if it is later determined that parts that were previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts. ● RoHS Compliance Criteria The following standards are used to determine RoHS compliance for the six banned substances. (Items to which the RoHS Directive is not applicable are not given.) • Lead: 1,000 ppm max. • Hexavalent chromium: 1,000 ppm max. • Mercury: 1,000 ppm max. • PBB: 1,000 ppm max. • Cadmium: 100 ppm max. • PBDE: 1,000 ppm max. 3 D6F-@AB71 WARNING D6F-@AB71 D6F-@AB71 MEMS Flow Sensor • Application examples provided in this document are for reference only. In actual applications, confirm equipment functions and safety before using the product. • Consult your OMRON representative before using the product under conditions which are not described in the manual or applying the product to nuclear control systems, railroad systems, aviation systems, vehicles, combustion systems, medical equipment, amusement machines, safety equipment, and other systems or equipment that may have a serious influence on lives and property if used improperly. Make sure that the ratings and performance characteristics of the product provide a margin of safety for the system or equipment, and be sure to provide the system or equipment with double safety mechanisms. Note: Do not use this document to operate the Unit. OMRON Corporation Electronic and Mechanical Components Company 4 Contact: www.omron.com/ecb Cat. No. A236-E1-01 0615(0615)(O)