UMS BES flyer

BES TECHNOLOGY
This UMS unique Schottky Diode
process is space evaluated
UMS is offering a unique MMIC Schottky Diode process in open foundry mode
optimised for very high frequency applications up to several hundreds of GHz with a
typical Ft of 3THz. Notably, BES is particularly suited to the emerging E-band market.
This process is fully optical and offers two metal interconnect layers, precision
TaN resistors, high values TiWSi resistors, MIM capacitors, air-bridges and
backside via-holes.
Applications:
• Very High Frequency Mixers
• Very High Frequency Switches
• Very High Frequency Multipliers
• E-band Radio.
5µm finger BES
Schottky Diode
Main characteristics
Element
Diode (1x5µm)
Parameter
Typical Value
Condition
Ideality Factor n
1.15
Jo (A/cm2)
3e-6
Rs (Ohm)
5
Idiode= 15 mA
Vbd (V)
-7
Idiode= -20 µA
Von (V)
0.6
Idiode= 20 µA
MIM Cap.
Density (pF/mm2)
330
@ 1MHz
TaN Resistor
Sheet Resistance
30
Ohms/sq
TiWSi Resistor
Sheet Resistance
1000
Ohms/sq
GaAs Resistor
Sheet Resistance
9
Ohms/sq
Substrate
Thickness
100
Vdiode= 0.55 V
µm
UMS 2011/2012 - Printed on PEFC paper - Smith Corporate : 01 69 59 11 30
www.ums-gaas.com
Contact us:
UMS SAS - North Europe,
Ph: +33 1 69 33 02 26
e-mail: [email protected]
UMS GmbH - Germany,
Ph: +49 731 505 30 80
e-mail: [email protected]
UMS USA, Inc. - America,
Ph: +1 978 905 3162
e-mail: [email protected]
UMS SAS - South Europe,
Ph: +39 0765 480 434
e-mail: [email protected]
UMS - Asia,
Ph: +86 21 6103 1703
e-mail: [email protected]
Worlwide distributor: Richardson RFPD, Inc. – www.richardsonrfpd.com