InGaAs linear image sensors G11620 series (cooled type) Single video line (256/512 pixels) near infrared image sensor (0.95 to 1.67 μm) The G11620 series is an InGaAs linear image sensor designed for near infrared multichannel spectrophotometry. The CMOS chip consists of charge amplifiers, a shift register, and a timing generator. Previous products had two CMOS chips, but a single chip configuration was achieved on this product through the use of bump connection. This structure has reduced the video output difference between odd pixels and even pixels. Charge amplifiers are configured with CMOS transistor array and are connected to each pixel of the InGaAs photodiode array. Since the signal from each pixel is read in charge integration mode, high sensitivity and stable operation are attained in a wide spectral response range. The package is hermetically sealed providing excellent reliability. The signal processing circuit on the CMOS chip enables the selection of an optimum conversion efficiency (CE) for your application from the available two types using external voltage. Features Applications Low noise, low dark current Near infrared multichannel spectrophotometry Selectable from two conversion efficiency types Radiation thermometers Built-in saturation countermeasure circuit Non-destructive inspection equipment Built-in CDS circuit*1 Built-in thermistor Easy operation (built-in timing generator*2) High resolution: 25 μm pitch (G11620-512SA) *1: A major source of noise in charge amplifiers is the reset noise generated when the integration capacitance is reset. However, the CDS circuit, which takes the difference between the signal after the completion of the integration time and the signal immediately after resetting, greatly reduces the reset noise. *2: Different signal timings must be properly set in order to operate a shift register. In conventional image sensor operation, external PLDs (programmable logic device) are used to input the required timing signals. However, the image sensors internally generate all timing signals on the CMOS chip just by supplying CLK and RESET pulses. This makes it simple to set the timings. Selection guide Type no. G11620-256SA G11620-512SA Cooling Image size (mm) Number of total pixels One-stage TE-cooled 12.8 × 0.5 256 512 Number of effective pixels 256 512 Dedicated driver circuit - Structure G11620-256SA Pixel size [μm (H) × μm (V)] 50 × 500 Pixel pitch (μm) 50 G11620-512SA 25 × 500 25 Parameter Package Window material 28-pin metal (refer to dimensional outline) Sapphire (with anti-reflective coating) www.hamamatsu.com 1 InGaAs linear image sensors G11620 series (cooled type) V Enlarged view of photosensitive area (unit: μm) x H Type no. x H V G11620-256SA 30 50 500 G11620-512SA 10 25 500 KMIRC0088EA Block diagram (G11620-512SA) CMOS chip Shift register ..... CLK RESET Charge amplifier Timing generator ..... Shift register AD_sp ..... InGaAs chip ..... VIDEO CMOS readout circuit ..... AD_trig KMIRC0048EA 2 InGaAs linear image sensors G11620 series (cooled type) Absolute maximum ratings Parameter Supply voltage Clock pulse voltage Reset pulse voltage Gain selection terminal voltage Operating temperature Storage temperature Soldering conditions Thermistor power dissipation Symbol Vdd, INP, Fvref Vinp, PDN Vϕ V(RES) Vcfsel Topr Tstg Pd_th Condition Min. Typ. Max. Unit Ta=25 °C -0.3 - +6 V Ta=25 °C Ta=25 °C Ta=25 °C No dew condensation*3 No dew condensation*3 -0.3 -0.3 -0.3 -10 -20 Up to 260 °C, up to 10 s - +6 +6 +6 +60 +70 V V V °C °C mW Ta=25 °C - 400 *3: When there is a temperature difference between a product and the surrounding area in high humidity environment, dew condensation may occur on the product surface. Dew condensation on the product may cause deterioration in characteristics and reliability. Note: Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings. Recommended terminal voltage (Ta=25 °C) Parameter Supply voltage Differential reference voltage Video line reset voltage Input stage amplifier reference voltage Photodiode cathode voltage Ground High Clock pulse voltage Low High Reset pulse voltage Low Symbol Vdd Fvref Vinp INP PDN Vss Vϕ V(RES) Min. 4.7 1.1 3.9 3.9 3.9 4.7 0 4.7 0 Typ. 5.0 1.2 4.0 4.0 4.0 0 5.0 0 5.0 0 Max. 5.3 1.3 4.1 4.1 4.1 5.3 0.4 5.3 0.3 Unit V V V V V V V V Electrical characteristics (Ta=25 °C) Parameter Current consumption Clock frequency Video data rate Video output voltage High Low Output offset voltage Output impedance High AD_trig, AD_sp pulse voltage Low Thermistor resistance Thermistor B constant*4 Symbol G11620-256SA I(Vdd) G11620-512SA Ifvref Ivinp Iinp Ipdn f DR VH VL Vos Zo Vtrig, Vsp Rth B Min. 0.1 0.1 9.0 - Typ. 55 80 1 f 4.0 1.2 Fvref 5 Vdd GND 10.0 3950 Max. 80 100 1 1 1 1 5 5 11.0 - Unit mA MHz MHz V V kΩ V kΩ K *4: T1=25 °C, T2=50 °C 3 InGaAs linear image sensors G11620 series (cooled type) Electrical and optical characteristics (Ta=25 °C, Vdd=5 V, INP=Vinp=PDN=4 V, Fvref=1.2 V, Vϕ=5 V, f=1 MHz) Parameter Spectral response range Peak sensitivity wavelength Photosensitivity Photoresponse nonuniformity*6 PRNU Saturation charge Qsat Saturation output voltage Dark output Dark current Temperature coefficient of dark output (dark current) Vsat VD ID CE=16 nV/eCE=16 nV/e- Min. 1.45 0.7 168 16.8 2.7 - - CE=16 nV/e- - 1.1 - times/°C CE=16 nV/eCE=160 nV/eCE=16 nV/eCE=16 nV/e- 6750 - 200 300 14000 - 400 500 μV rms Conversion Symbol λ λp S efficiency*5 λ=λp Cf=10 pF Cf=1 pF CE Readout noise*7 N Dynamic range Defective pixels*8 D - *5: *6: *7: *8: Condition CE=16 nV/eCE=160 nV/e- Max. 1.65 ±10 ±0.5 ±5 Unit μm μm A/W nV/e% MeV V/s pA % - 1 For switching the conversion efficiency, see the pin connections. Measured at 50% saturation and 10 ms integration time after subtracting the dark output, excluding the first and last pixels Integration time when CE=16 nV/e- is 10 ms. Integration time when CE=160 nV/e- is 1 ms. Pixels whose photoresponse nonuniformity, readout noise, or dark current is outside the specifications Spectral response (typical example) Spectral transmittance of window material (typical example) (Typ.) 1.0 95 Transmittance (%) 0.6 Td=25 °C 0.4 Td=-10 °C 0.2 0 0.8 (Ta=25 °C) 100 0.8 Photosensitivity (A/W) Typ. 0.95 to 1.7 1.55 0.82 16 160 ±5 175 17.5 2.8 ±0.05 ±0.5 90 85 80 75 1.0 1.2 1.4 1.6 1.8 70 0.5 1.0 1.5 2.0 2.5 3.0 Wavelength (μm) Wavelength (μm) KMIRB0092EA KMIRB0070EA 4 InGaAs linear image sensors G11620 series (cooled type) Linearity error 20 (Td=25 ˚C, Vdd=5 V, INP=Vinp=PDN=4 V, Fvref=1.2 V, f=1 MHz, CE=16 nV/eˉ) 15 Linearity error (%) 10 5 0 -5 -10 -15 -20 1 10 100 1000 10000 Output voltage (mV) KMIRB0091EA Equivalent circuit G11620-256SA PDN Cf_select S/H VIDEO INP Fvref Photodiode array Charge amplifier array CMOS readout circuit KMIRC0049EA 5 InGaAs linear image sensors G11620 series (cooled type) G11620-512SA Cf_select PDN S/H VIDEO Odd pixels Even pixels INP Fvref Odd pixels Cf_select S/H INP Even pixels Photodiode array Charge amplifier array CMOS readout circuit KMIRC0054EA 6 InGaAs linear image sensors G11620 series (cooled type) Timing chart CLK RESET Integration time (setting) 5 CLK Blank Integration time (actual) 5 CLK AD_sp AD_trig n × CLK VIDEO 1 tf(clk) CLK 2 n-1 n tr(clk) Note: n=number of channels tpw(clk) tr(res) tf(res) RESET tpw(res) KMIRC0055EB Parameter Clock pulse frequency Clock pulse width Clock pulse rise/fall times High Reset pulse width Low Reset pulse rise/fall times Symbol f tpw(clk) tr(clk), tf(clk) tpw(res) tr(res), tf(res) Min. 0.1 60 0 6 Number of pixels + 28 0 Typ. 1 500 20 20 Max. 5 5000 30 30 Unit MHz ns ns clocks ns 7 InGaAs linear image sensors G11620 series (cooled type) Connection example Pulse generator CLK AD_sp RESET AD_trig Controller Buffer amp Buffer amp Cf_select 1 ADC Cf_select 2 INP Supply voltage PDN Vinp Fvref Vdd GND VIDEO Buffer amp KMIRC0056EB 8 InGaAs linear image sensors G11620 series (cooled type) Pin connections (top view) Cf SELECT1 Cf SELECT2 RESET TEAD_SP AD_TRIG Vdd GND INP CLK PDN TE+ THERM THERM CASE Vinp Fvref VIDEO KMIRC0089EA PDN AD_sp Input/ output Input Output Cf_select1, 2 Input*9 Thermistor AD_trig Output Output RESET Input CLK Input INP Input Vinp Input Fvref Input VIDEO Vdd GND CASE Output Input Input - TE+, TE- Input Terminal name Function and recommended connection Remark InGaAs photodiode’s cathode bias terminal. Set to the same potential as INP. Digital start signal for A/D conversion Signal for selecting the feedback capacitance (integration capacitance) on the CMOS chip Thermistor for monitoring the temperature inside the package Sampling sync signal for A/D conversion Reset pulse for initializing the feedback capacitance in the charge amplifier formed on the CMOS chip. Integration time is determined by the high level period of this pulse. Clock pulse for operating the CMOS shift register Input stage amplifier reference voltage. This is the supply voltage for operating the signal processing circuit on the CMOS chip. Set to the same potential as PDN. Video line reset voltage. This is the supply voltage for operating the signal processing circuit on the CMOS chip. Differential amplifier reference voltage. This is the supply voltage for operating the signal processing circuit on the CMOS chip. Differential amplifier output. This is an analog video signal. Supply voltage (+5 V) for operating the signal processing circuit on the CMOS chip Ground (0 V) for the signal processing circuit on the CMOS chip This terminal is connected to the package. Power supply terminal for the thermoelectric cooler for cooling the photodiode array 4.0 V 0 to 5 V 0 V or 5 V 0 to 5 V 0 to 5 V 0 to 5 V 4.0 V 4.0 V 1.2 V 1.2 to 4.0 V 5V 0V - *9: The conversion efficiency is determined by the supply voltage to the Cf_select terminal as follows. Conversion efficiency 16 nV/e- (low gain) 160 nV/e- (high gain) Cf_select1 High High Cf_select2 High Low Low: 0 V (GND), High: 5 V (Vdd) 9 InGaAs linear image sensors G11620 series (cooled type) Specifications of TE-cooler (Ta=25 °C, Vdd=5 V, INP=Vinp=PDN=4 V, Fvref=1.2 V, Vϕ=5 V, f=1 MHz) Parameter Allowable TE cooler current Allowable TE cooler voltage Temperature difference*10 Thermistor resistance Thermistor power dissipation Condition Symbol Ic max Vc max ∆T Rth Pth Ic=1.7 A Min. 40 9 - Typ. 10 - Max. 1.8 5.0 11 400 Unit A V °C kΩ mW *10: Temperature difference between the photosensitive area and package heat dissipation area TE-cooler temperature characteristics (Ta=25 °C, Vdd=5 V, INP=Vinp=PDN=4 V, Fvref=1.2 V, Vϕ=5 V, f=1 MHz) (Typ. heatsink 0.5 °C/W) Voltage Temperature difference Voltage (V) 3.5 70 60 3.0 50 2.5 40 2.0 30 1.5 20 1.0 10 0.5 0 Temperature difference (°C) 4.0 -10 0 0 1 2 Current (A) KMIRB0031EC Thermistor temperature characteristics (Typ.) 1000 Thermistor resistance (kΩ) Temperature (°C) -40 -35 -30 -25 -20 -15 -10 -5 0 5 10 15 100 10 1 -40 -30 -20 -10 0 10 20 30 40 50 60 Thermistor resistance (kΩ) 281 208 155 117 88.8 68.4 53.0 41.2 32.1 25.1 19.8 15.7 Temperature (°C) 20 25 30 35 40 45 50 55 60 65 70 Thermistor resistance (kΩ) 12.5 10.0 8.06 6.53 5.32 4.36 3.59 2.97 2.47 2.07 1.74 70 Temperature (°C) KMIRB0061EA 10 InGaAs linear image sensors G11620 series (cooled type) Dimensional outline (unit: mm) 63.5 ± 0.15 53.3 ± 0.15 38.1 ± 0.15 2.54 ± 0.15 35.6 ± 0.15 R 1.59 27.2 ± 0.15 15 1 6.4 ± 1 1.0 ± 0.2 3.8 ± 0.3 5.8 ± 0.2 Index mark 6.15 ± 0.2 Photosensitive surface 20.3 ± 0.15 3.0 ± 0.15 10.2 ± 0.15 22.9 ± 0.15 25.4 ± 0.15 28 2.54 ± 0.15 0.45 ± 0.05 14 Photosensitive area left side: 1 ch Position accuracy of photosensitive area center: ±0.3 (with respect to package center) Rotation accuracy of photosensitive area: ±2° (with respect to package center) Package material: FeNi alloy Lead processing: Ni/Au plating Lead material: FeNiCo alloy Window refractive index of window material: n=1.76 Window material thickness: 0.66 AR coat: coated (1.55 μm peak) Window sealing method: brazing Cap sealing: welding KMIRA0031EA Electrostatic countermeasures This device has a built-in protection circuit against static electrical charges. However, to prevent destroying the device with electrostatic charges, take countermeasures such as grounding yourself, the workbench and tools to prevent static discharges. Also protect this device from surge voltages which might be caused by peripheral equipment. Related information www.hamamatsu.com/sp/ssd/doc_en.html Precautions ∙ Disclaimer ∙ Safety consideration ∙ Image sensors Information described in this material is current as of October, 2015. Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always contact us for the delivery specification sheet to check the latest specifications. The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use. Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39) 02-93581733, Fax: (39) 02-93581741 China: Hamamatsu Photonics (China) Co., Ltd.: B1201, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86) 10-6586-6006, Fax: (86) 10-6586-2866 Cat. No. KMIR1026E01 Oct. 2015 DN 11