014405%20%20rev2.0.pdf

Cypress Semiconductor
Product Qualification Report
QTP# 014405 VERSION 2.0
February 2004
Neuron Device Family
CY7C53150* / CY7C53120*
Neuron Chip Network Processor
S4D-5 Technology Derivative, Fab 2
Echelon, LonWorks, LonTalk and Neuron are registered trademarks of Echelon Corporation
CYPRESS TECHNICAL CONTACT FOR QUALIFICATION DATA:
Rene Rodgers
Principal Reliability Engineer
(408) 943-2732
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 2 of 16
February 2004
PRODUCT QUALIFICATION HISTORY
Qual
Report
Description of Qualification Purpose
Date
Comp
010702
New Technology S4AD-5 / New Product, Programmable Clock Generator, CY2414ZC,
its product family and bond option.
April 01
003605
Technology Derivative S4D-5 /New Neuron Devices, CY7C53150 and CY7C53120
Jul 01
014406
100K Endurance cycle qualification for Devices CY7C53120 and CY7C53150
Dec 01
014405
5 layer change to enhance functionality
Dec 01
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 3 of 16
February 2004
PRODUCT DESCRIPTION (for qualification)
Qualification Purpose: Qualify 5 layer change to CY7C53150* and CY7C53120* technology S4D-5, Fab 2
Marketing Part #:
CY7C53150* and CY7C53120*
Device Description:
5V, Industrial, available in 44/64-pin TQFP and 32-lead SOIC package
Cypress Division:
Cypress Semiconductor Corporation – Interface Product Division (IPD) WA
Overall Die (or Mask) REV Level (pre-requisite for qualification):
Rev. C
What ID markings on 7C53150/7C53120A
Die:
FT3150/FT3120A
TECHNOLOGY/FAB PROCESS DESCRIPTION S4D-5
Number of Metal Layers:
2
Metal Composition:
Metal 1: 500A Ti/6,000A Al 0.5% Cu /1,200A TiW
Metal 2: 500A Ti/8,000A Al 0.5% Cu/300A TiW
Passivation Type and Materials:
3,000A TeOs / 6,000A Si3N4
Free Phosphorus contents in top glass layer(%):
0%
Number of Transistors in Device:
450,000
Number of Gates in Device
168,000
Generic Process Technology/Design Rule ( -drawn):
Single Poly, Double Metal, 0.35 m
Gate Oxide Material/Thickness (MOS):
SiO2 / 110A
Name/Location of Die Fab (prime) Facility:
Cypress Semiconductor - Round Rock, TX
Die Fab Line ID/Wafer Process ID:
Fab2, S4D-5
PACKAGE AVAILABILITY
PACKAGE
ASSEMBLY SITE FACILITY
32-lead SOIC
CSPI-R
44, 64-pin TQFP
ASE, Taiwan / CSPI-R
Note: Package Qualification details upon request.
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 4 of 16
February 2004
MAJOR PACKAGE INFORMATION USED IN THIS QUALIFICATION
Package Designation:
Package Outline, Type, or Name:
Mold Compound Name/Manufacturer:
Mold Compound Flammability Rating:
S32
32-lead Plastic Small Outline IC (SOIC)
NITTO MP8000CH
V-O per UL94
Oxygen Rating Index:
>28%
Lead Frame Material:
Copper
Lead Finish, Composition / Thickness:
Solder Plated, 85% Sn, 15%Pb
Die Backside Preparation Method/Metallization:
N/A
Die Separation Method:
Wafer Saw
Die Attach Supplier:
Dexter
Die Attach Material:
QMI 509
Die Attach Method:
Epoxy
Bond Diagram Designation:
10-04008
Wire Bond Method:
Thermosonic
Wire Material/Size:
Au, 1.0mil
Thermal Resistance Theta JA °C/W:
52.5°C/W
Package Cross Section Yes/No:
N/A
Assembly Process Flow:
11-21000
Name/Location of Assembly (prime) facility:
Cypress Philippines (CSPI-R)
ELECTRICAL TEST / FINISH DESCRIPTION
Test Location:
Cypress Philippines (CSPI-R)
Fault Coverage:
100%
Note: Please contact a Cypress Representative for other packages availability
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 5 of 16
February 2004
RELIABILITY TESTS PERFORMED PER SPECIFICATION REQUIREMENT
Stress/Test
Test Condition
(Temp/Bias)
High Temperature Operating Life
Dynamic Operating Condition, Vcc Max=5.75V, 125°C
Early Failure Rate
Dynamic Operating Condition, Vcc Max=5.75V, 150°C
High Temperature Operating Life
Dynamic Operating Condition, Vcc Max=5.75V, 125°C
Latent Failure Rate
Dynamic Operating Condition, Vcc Max=5.75V, 150°C
Result
P/F
P
Dynamic Operating Condition, Vcc Max=3.8V, 150°C
P
Dynamic Operating Condition, Vcc Max=3.8V, 150°C
High Temperature Steady State life
150°C, 3.63V, Vcc Max
P
Low Temperature Operating Life
-30C, 4.3V, 8MHZ
130°C, 5.5V,85%RH
Precondition:
JESD22 Moisture Sensitivity Level 3
P
High Accelerated Saturation Test
(HAST)
P
192 Hrs, 30C/60%RH+3IR-Reflow, 235°C+5, 0°C
130°C, 3.63V,85%RH
Precondition:
JESD22 Moisture Sensitivity Level 1
Temperature Cycle
168 Hrs, 85C/85%RH+3IR-Reflow, 235°C+5, 0°C
130°C, 5.5V,85%RH
Precondition:
JESD22 Moisture Sensitivity Level 3
P
192 Hrs, 30C/60%RH+3IR-Reflow, 235°C+5, 0°C
130°C, 3.63V,85%RH
Precondition:
JESD22 Moisture Sensitivity Level 1
168 Hrs, 85C/85%RH+3IR-Reflow, 235°C+5, 0°C
Pressure Cooker
130°C, 5.5V,85%RH
Precondition:
JESD22 Moisture Sensitivity Level 3
P
192 Hrs, 30C/60%RH+3IR-Reflow, 235°C+5, 0°C
130°C, 3.63V,85%RH
Precondition:
JESD22 Moisture Sensitivity Level 1
168 Hrs, 85C/85%RH+3IR-Reflow, 235°C+5, 0°C
Electrostatic Discharge
2,000V
Human Body Model (ESD-HBM)
MIL-STD-883, Method 3015.7
Electrostatic Discharge
500V
Charge Device Model (ESD-CDM)
Cypress Spec. 25-00020
Data Retention
150°C ± 5°C no bias
P
Age Bond Strength
200C, 4hrs
P
MIL-STD-883, Method 883-2011
P
P
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 6 of 16
February 2004
RELIABILITY TESTS PERFORMED PER SPECIFICATION REQUIREMENT (continuation)
Stress/Test
Test Condition
(Temp/Bias)
Result
P/F
Current Density
Cypress Spec 22-00029
P
SEM Analysis
MIL-STD-883, Method 883-2018-2
P
Endurance test
MIL-STD-883-Method 1033
P
Acoustic Microscopy, Level 1 & 3
Cypress Spec. 25-00104
P
Latchup Sensitivity
± 300mA
P
In accordance with JEDEC 17. Cypress Spec. 01-00081
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 7 of 16
February 2004
RELIABILITY FAILURE RATE SUMMARY
Device Tested/
Device Hours
#
Fails
Activation
Energy
Thermal3
A.F
Failure
Rate
High Temperature Operating Life
Early Failure Rate1
3033 Devices
@125C
1
N/A
N/A
329 PPM
High Temperature Operating Life
Early Failure Rate1
3999 Devices
@150C
1
N/A
N/A
250 PPM
High Temperature Operating Life1,2
Long Term Failure Rate
685,075 DHRs
1
0 .7
170
9 FITs
Stress/Test
1
2
3
Assuming an ambient temperature of 55°C and a junction temperature rise of 15°C.
Chi-squared 60% estimations used to calculate the failure rate with only zero reject
Thermal Acceleration Factor is calculated from the Arrhenius equation
E  1 1  
AF = exp  A  -  
 k  T 2 T1  
where:
EA =The Activation Energy of the defect mechanism.
k = Boltzmann's constant = 8.62x10-5 eV/Kelvin.
T1 is the junction temperature of the device under stress and T2 is the junction temperature of the device
at use conditions.
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 8 of 16
February 2004
Reliability Test Data
QTP #:
Device
Fab Lot #
010702
Assy Lot #
Assy Loc Duration
Samp
Rej
Failure Mechanism
STRESS: ACOUSTIC-MSL1
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
COMP
15
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
COMP
15
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
COMP
15
0
STRESS: HIGH TEMP DYNAMIC OPERATING LIFE-EARLY FAILURE RATE, 150C, 3.8V, Vcc Max
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
48
1005
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
48
1004
1
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
48
1005
0
STRESS: HIGH TEMP DYNAMIC OPERATING LIFE-LATENT FAILURE RATE, 150C, 3.8V, Vcc Max
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
80
120
0
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
500
120
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
80
120
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
500
120
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
80
120
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
500
120
0
STRESS: AGE BOND STRENGTH
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
COMP
15
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
COMP
15
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
COMP
15
0
TAIWN-T
COMP
3
0
TAIWN-T
500
48
0
STRESS: DYNAMIC LATCH-UP TESTING, 11.5V
CY2414ZC (7C841400A)
2101502
610106170/1/2
STRESS: LOW TEMPERATURE OPERATING LIFE, -30C, 4.3V
CY2414ZC (7C841400A)
2101502
610106170/1/2
STRESS: ESD-CHARGE DEVICE MODEL, 500V
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
COMP
9
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
COMP
9
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
COMP
9
0
NON VISUAL
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 9 of 16
February 2004
Reliability Test Data
QTP #:
Device
Fab Lot #
Assy Lot #
010702
Assy Loc Duration
Samp
Rej
Failure Mechanism
STRESS: ESD-HUMAN BODY CIRCUIT PER MIL STD 883, METHOD 3015, 2,000V
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
COMP
9
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
COMP
9
0
CY2414ZC (7C841400A)
2103764
610106177
TAIWN-T
COMP
10
0
STRESS: STATIC LATCH-UP TESTING, 125C, 10V, ±300mA
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
COMP
3
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
COMP
3
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
COMP
3
0
STRESS: HI-ACCEL SATURATION TEST, 130C, 85%RH, 3.63V), PRE COND 168 HR 85C/85%RH, MSL1
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
128
50
0
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
256
50
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
128
48
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
128
48
0
STRESS: HIGH TEMP STEADY STATE LIFE TEST, 150C, 3.63V
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
80
80
0
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
168
80
0
610106170/1/2
TAIWN-T
COMP
45
0
STRESS: ENDURANCE TEST
CY2414ZC (7C841400A)
2101502
STRESS: DATA RETENTION, PLASTIC, 150C
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
168
80
0
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
552
80
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
168
80
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
552
80
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
168
80
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
552
80
0
STRESS: PRESSURE COOKER TEST, 121C, 100%RH), PRE COND 168 HR 85C/85%RH, MSL1
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
168
50
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
168
49
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
168
51
0
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 10 of 16
February 2004
Reliability Test Data
QTP #:
Device
Fab Lot #
Assy Lot #
010702
Assy Loc Duration
Samp
Rej
STRESS: TC COND. C -65C TO 150C, PRECONDITION 168 HRS 85C/85%RH, MSL1
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
300
50
0
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
500
50
0
CY2414ZC (7C841400A)
2101502
610106170/1/2
TAIWN-T
1000
50
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
300
50
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
500
50
0
CY2414ZC (7C841400A)
2052404
610106173/4/5
TAIWN-T
1000
50
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
300
50
0
CY2414ZC (7C841400A)
2103764
610106176/7/8
TAIWN-T
500
50
0
1000
49
0
CY2414ZC (7C841400A)
2103764 610106176/7/8
TAIWN-T
Failure Mechanism
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 11 of 16
February 2004
Reliability Test Data
QTP #:
Device
Fab Lot #
003605
Assy Lot #
Assy Loc Duration
Samp
Rej
CY7C53150-AI (7C53150A) 2104858
610109389/90
TAIWN-G
COMP
15
0
CY7C53150-AI(7C53150B) 2110601
610115306
TAIWN-G
COMP
15
0
CY7C53150-AI (7C53150B) 2113874
340100160/1
TAIWN-G
COMP
15
0
Failure Mechanism
STRESS: ACOUSTIC-MSL3
STRESS: HIGH TEMP DYNAMIC OPERATING LIFE-EARLY FAILURE RATE, 150C, 5.75V, Vcc Max
CY7C53120-SI (7C53120B) 2110601
610119962
CSPI-R
80
394
0
CY7C53120-SI (7C53120B) 2113874
610119334
CSPI-R
80
591
0
STRESS: HIGH TEMP DYNAMIC OPERATING LIFE-EARLY FAILURE RATE, 125C, 5.75V, Vcc Max
CY7C53120-SI (7C53120B) 2110601
610119962
CSPI-R
96
609
1
CY7C53120-SI (7C53120B) 2113874
610119334/7707 CSPI-R
96
414
0
MISSING LICON
STRESS: HIGH TEMP DYNAMIC OPERATING LIFE-LATENT FAILURE RATE, 150C, 5.75V, Vcc Max
CY7C53120-SI (7C53120B) 2110601
610119962
CSPI-R
197
393
0
CY7C53120-SI (7C53120B) 2110601
610119962
CSPI-R
500
393
0
CY7C53120-SI (7C53120B) 2113874
610119334
CSPI-R
197
400
1
CY7C53120-SI (7C53120B) 2113874
610119334
CSPI-R
500
399
0
COMP
9
0
COMP
9
0
UNKNOWN
STRESS: ESD-CHARGE DEVICE MODEL, 500V
CY7C53150-AI (7C53150B) 2110601
610115306
TAIWN-G
STRESS: ESD-HUMAN BODY CIRCUIT PER MIL STD 883, METHOD 3015, 2,000V
CY7C53150-AI (7C53150B) 2110601
610115306
TAIWN-G
STRESS: STATIC LATCH-UP TESTING, 125C, 12V, ±300mA
CY7C53150-AI (7C53150A) 2104858
610109389/90
TAIWN-G
COMP
3
0
CY7C53150-AI (7C53150B) 2110601
610115306
TAIWN-G
COMP
3
0
STRESS: HI-ACCEL SATURATION TEST, 130C, 85%RH, 5.5V, PRE COND 192 Hrs., 30ºC/60%RH, MSL3
CY7C53150-AI (7C53150A) 2104858
610109389/90
TAIWN-G
128
48
0
CY7C53150-AI (7C53150B) 2110601
610115306
TAIWN-G
128
46
0
CY7C53150-AI (7C53150B) 2110601
610115306
TAIWN-G
256
46
0
TAIWN-G
1000
48
0
STRESS: ENDURANCE TEST, -25C/+85
CY7C53150-AI (7C53150B) 2110601
610115306
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 12 of 16
February 2004
Reliability Test Data
QTP #:
Device
Fab Lot #
Assy Lot #
003605
Assy Loc Duration
Samp
Rej
STRESS: DATA RETENTION, PLASTIC, 150C
CY7C53150-AI (7C53150B) 2110601
610115306
TAIWN-G
500
266
0
CY7C53150-AI (7C53150B) 2113874
340100160/1
TAIWN-G
500
266
0
STRESS: PRESSURE COOKER TES, 121C, 100%RH), PRE COND 192 HR 30ºC/60%RH, MSL3
CY7C53150-AI (7C53150A) 2104858
610109389/90
TAIWN-G
168
50
0
CY7C53150-AI (7C53150B) 2110601
610115306
TAIWN-G
168
48
0
Failure Mechanism
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 13 of 16
February 2004
Reliability Test Data
QTP #:
Device
014406
Fab Lot #
Assy Lot #
Assy Loc
CY7C53120*-SI (7C531201B)
2118274
610120676
CSPI-R
CY7C53120*-SI (7C531201B)
2138780
610139817
CSPI-R
Duration
Samp
Rej
COMP
50
0
COMP
50
0
STRESS: ENDURANCE TEST
*Note: For Data Retention after Endurance Cycle, please see next page.
Failure Mechanism
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 14 of 16
February 2004
FLASH MEMORY ENDURANCE AND DATA RETENTION
Units1 cycled 90000 times or less have an expected data retention lifetime equal to or greater than 20 years2.
For units cycled 100000 times or more, the data retention cummulative failure rate over time is defined below:
Lifetime
Cummulative Data
1
(Years ) Retention Failure Rate After
100000 Cycles
0.0
2.6
5.2
7.8
10.4
13.0
15.6
18.2
20.8
23.4
26.0
28.6
31.2
33.7
36.3
38.9
41.5
44.1
46.7
49.3
51.9
54.5
57.1
59.7
62.3
64.9
2.25%
2.84%
3.24%
3.54%
3.80%
4.02%
4.22%
4.39%
4.55%
4.69%
4.83%
4.96%
5.07%
5.18%
5.29%
5.39%
5.49%
5.58%
5.66%
5.75%
5.83%
5.91%
5.98%
6.05%
6.13%
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
7.0%
QTP# 014405, V, 2.0
Page 15 of 16
February 2004
Cummulative Data Retention Failure After 100K
Cycles
Failure Rate
6.0%
5.0%
4.0%
3.0%
2.0%
1.0%
0.0%
0
10
20
30
40
Lifetime (Years)
(1) Test sample size = 48 units. No rejects found on units with 90000 cycles or below.
(2) Calculation assumptions are: Ea=1.1eV, Tuse =70C, Tstress=150C, delta T=0C, AF = 1137.
50
60
70
Cypress Semiconductor
Neuron Chip Network Processor, S4D-5, Fab 2
Device: CY7C53150* / CY7C53120*
QTP# 014405, V, 2.0
Page 16 of 16
February 2004
Reliability Test Data
QTP #:
Device
Fab Lot #
Assy Lot #
014405
Assy Loc
Duration
Samp
Rej
STRESS: HIGH TEMP DYNAMIC OPERATING LIFE-EARLY FAILURE RATE, 125C, 5.75V, Vcc Max
CY7C53120*-SI (7C531201B)
2138780
610139817
CSPI-R
96
2010
0
STRESS: HIGH TEMP DYNAMIC OPERATING LIFE-LATENT FAILURE RATE, 125C, 5.75V, Vcc Max
CY7C53120*-SI (7C531201B)
2138780
610139817
CSPI-R
168
2009
0
CSPI-R
COMP
9
0
STRESS: ESD-CHARGE DEVICE MODEL, 500V
CY7C53120*-SI (7C531201B)
2138780
610139165
STRESS: ESD-HUMAN BODY CIRCUIT PER MIL STD 883, METHOD 3015, 2,000V
CY7C53120*-SI (7C531201B)
2138780
610139165
CSPI-R
COMP
9
0
CSPI-R
COMP
3
0
STRESS: STATIC LATCH-UP TESTING, 125C, 10V, ±300mA
CY7C53120*-SI (7C531201B)
2138780
610139165
Failure Mechanism