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SEMICONDUCTOR TECHNICAL DATA
Freescale Semiconductor, Inc...
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The MPX2202/MPXV2202G device series is a silicon piezoresistive pressure sensor
providing a highly accurate and linear voltage output — directly proportional to the
applied pressure. The sensor is a single monolithic silicon diaphragm with the strain
gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for
precise span and offset calibration and temperature compensation. They are designed
for use in applications such as pump/motor controllers, robotics, level indicators, medical
diagnostics, pressure switching, barometers, altimeters, etc.
Features
UNIBODY PACKAGE
• Temperature Compensated Over 0°C to +85°C
• Easy–to–Use Chip Carrier Package Options
• Available in Absolute, Differential and Gauge Configurations
Application Examples
• Pump/Motor Controllers
• Robotics
MPX2202A/D
CASE 344
• Level Indicators
• Medical Diagnostics
• Pressure Switching
• Barometers
• Altimeters
Motorola Preferred Device
0 to 200 kPa (0 to 29 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
SMALL OUTLINE PACKAGE
SURFACE MOUNT
MPXV2202GP
CASE 1369
Figure 1 illustrates a block diagram of the internal
circuitry on the stand–alone pressure sensor chip.
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MPX2202AP/GP
CASE 344B
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MPXV2202DP
CASE 1351
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PIN NUMBER
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Figure 1. Temperature Compensated Pressure
Sensor Schematic
VOLTAGE OUTPUT versus
APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is
directly proportional to the differential pressure applied.
The absolute sensor has a built–in reference vacuum. The output voltage will decrease as vacuum,
relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the
pressure (P1) side relative to the vacuum (P2) side.
Similarly, output voltage increases as increasing vacuum is applied to the vacuum (P2) side relative to the
pressure (P1) side.
Preferred devices are Motorola recommended choices for future use
and best overall value.
Replaces MPX2200/D
MPX2202DP
CASE 344C
1
Gnd
5
N/C
2
+Vout
6
N/C
3
VS
7
N/C
4
–Vout
8
N/C
NOTE: Pin 1 is noted by the notch in
the lead.
MPX2202ASX/GSX
CASE 344F
PIN NUMBER
1
Gnd
3
VS
2
+Vout
4
–Vout
MPX2202GVP
CASE 344D
NOTE: Pin 1 is noted by the notch in
the lead.
REV 2
Motorola Sensor Device Data
Motorola, Inc. 2002
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MAXIMUM RATINGS(NOTE)
Rating
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
Pmax
800
kPa
Storage Temperature
Tstg
–40 to +125
°C
Operating Temperature
TA
–40 to +125
°C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristics
Symbol
Min
Typ
Max
Unit
POP
0
—
200
kPa
Supply Voltage
VS
—
10
16
Vdc
Supply Current
Io
—
6.0
—
mAdc
VFSS
38.5
40
41.5
mV
Voff
–1.0
—
1.0
mV
∆V/∆P
—
0.2
—
mV/kPa
—
–0.6
–1.0
—
—
0.4
1.0
%VFSS
—
—
±0.1
—
%VFSS
—
—
±0.5
—
%VFSS
TCVFSS
–2.0
—
2.0
%VFSS
Pressure Range(1)
Full Scale Span(3)
Freescale Semiconductor, Inc...
Offset(4)
Sensitivity
Linearity(5)
MPX2202D Series
MPX2202A Series
Pressure Hysteresis(5) (0 to 200 kPa)
Temperature
Hysteresis(5)
(–40°C to +125°C)
Temperature Effect on Full Scale Span(5)
Temperature Effect on
Offset(5)
TCVoff
–1.0
—
1.0
mV
Input Impedance
Zin
1000
—
2500
Ω
Output Impedance
Zout
1400
—
3000
Ω
Response Time(6) (10% to 90%)
tR
—
1.0
—
ms
Warm–Up
—
—
20
—
ms
Offset Stability(7)
—
—
±0.5
—
%VFSS
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
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LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
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ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
straight line.
The effects of temperature on Full Scale Span and Offset
are very small and are shown under Operating Characteristics.
Figure 3 shows the output characteristics of the
MPX2202/MPXV2202G series at 25°C. The output is directly
proportional to the differential pressure and is essentially a
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Figure 4. Cross–Sectional Diagrams (Not to Scale)
Figure 4 illustrates an absolute sensing die (right) and the
differential or gauge die in the basic chip carrier (Case 344).
A silicone gel isolates the die surface and wire bonds from
the environment, while allowing the pressure signal to be
transmitted to the silicon diaphragm.
The MPX2202/MPXV2202G series pressure sensor oper-
Motorola Sensor Device Data
ating characteristics and internal reliability and qualification
tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor
performance and long term reliability. Contact the factory for
information regarding media compatibility in your application.
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PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die from the environment. The differential
or gauge sensor is designed to operate with positive differenPart Number
MPX2202A
tial pressure applied, P1 > P2. The absolute sensor is
designed for vacuum applied to P1 side.
The Pressure (P1) side may be identified by using the
table below:
Case Type
MPX2202D
MPX2202DP
MPX2202AP
MPX2202GP
MPX2202GVP
Freescale Semiconductor, Inc...
MPX2202ASX
MPX2202GSX
Pressure (P1) Side Identifier
344
Stainless Steel Cap
344C
Side with Part Marking
344B
Side with Port Attached
344D
Stainless Steel Cap
344F
Side with Port Attached
MPXV2202GP
1369
Side with Port Attached
MPXV2202DP
1351
Side with Part Marking
ORDERING INFORMATION — UNIBODY PACKAGE (MPX2202 SERIES)
MPX Series
Device Type
Options
Order Number
Case Type
Device Marking
Basic Element
Absolute, Differential
344
MPX2202A
MPX2202D
MPX2202A
MPX2202D
Ported Elements
Differential, Dual Port
344C
MPX2202DP
MPX2202DP
Absolute, Gauge
344B
MPX2202AP
MPX2202GP
MPX2202AP
MPX2202GP
Absolute, Gauge Axial
344F
MPX2202ASX
MPX2202GSX
MPX2202A
MPX2202D
Gauge, Vacuum
344D
MPX2202GVP
MPX2202GVP
ORDERING INFORMATION — SMALL OUTLINE PACKAGE (MPXV2202G SERIES)
Device Type
Ported Elements
4
Options
Case No.
MPX Series Order No.
Packing Options
Marking
Gauge, Side Port, SMT
1369
MPXV2202GP
Trays
MPXV2202G
Differential, Dual Port, SMT
1351
MPXV2202DP
Trays
MPXV2202G
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Motorola Sensor Device Data
Freescale Semiconductor, Inc.
SMALL OUTLINE PACKAGE DIMENSIONS
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Motorola Sensor Device Data
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SMALL OUTLINE PACKAGE DIMENSIONS—CONTINUED
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UNIBODY PACKAGE DIMENSIONS
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Motorola Sensor Device Data
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UNIBODY PACKAGE DIMENSIONS — CONTINUED
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8
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UNIBODY PACKAGE DIMENSIONS — CONTINUED
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Motorola Sensor Device Data
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NOTES
10
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NOTES
Motorola Sensor Device Data
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Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit,
and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in different
applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by
customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed,
intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life,
or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase
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Opportunity/Affirmative Action Employer.
MOTOROLA and the Stylized M Logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respective
owners.
Motorola, Inc. 2002.
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Motorola Sensor Device Data
MPX2202/D