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SEMICONDUCTOR TECHNICAL DATA
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The MPX5500 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metallization, and bipolar processing to provide an accurate, high level analog output signal that
is proportional to the applied pressure.
INTEGRATED
PRESSURE SENSOR
0 to 500 kPa (0 to 72.5 psi)
0.2 to 4.7 Volts Output
Freescale Semiconductor, Inc...
Features
• 2.5% Maximum Error over 0° to 85°C
• Ideally suited for Microprocessor or Microcontroller–Based Systems
• Patented Silicon Shear Stress Strain Gauge
• Durable Epoxy Unibody Element
• Available in Differential and Gauge Configurations
MPX5500D
CASE 867
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MPX5500DP
CASE 867C
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Figure 1. Fully Integrated Pressure Sensor Schematic
PIN NUMBER
1
Vout
4
N/C
2
Gnd
5
N/C
3
VS
6
N/C
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the lead.
REV 5
Sensor
Motorola
Motorola, Inc.
2001 Device Data
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MAXIMUM RATINGS(1)
Parametrics
Symbol
Value
Unit
P1max
2000
kPa
Storage Temperature
Tstg
–40° to +125°
°C
Operating Temperature
TA
–40° to +125°
°C
Maximum Pressure(2) (P2 1 Atmosphere)
NOTES:
1. Maximum Ratings apply to Case 867 only. Extended exposure at the specified limits may cause permanent damage or degradation to the
device.
2. This sensor is designed for applications where P1 is always greater than, or equal to P2. P2 maximum is 500 kPa.
OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4
required to meet electrical specifications.)
Characteristic
Symbol
Min
Typ
Max
Unit
POP
0
—
500
kPa
VS
4.75
5.0
5.25
Vdc
Io
—
7.0
10.0
mAdc
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Pressure Range(1)
Supply
Voltage(2)
Supply Current
Zero Pressure
Offset(3)
(0 to 85°C)
Voff
0.088
0.20
0.313
Vdc
Full Scale Output(4)
(0 to 85°C)
VFSO
4.587
4.70
4.813
Vdc
Full Scale Span(5)
(0 to 85°C)
VFSS
—
4.50
—
Vdc
—
—
—
2.5
%VFSS
V/P
—
9.0
—
mV/kPa
Accuracy(6)
Sensitivity
Response
Time(7)
tR
—
1.0
—
ms
Output Source Current at Full Scale Output
Io+
—
0.1
—
mAdc
Warm–Up Time(8)
—
—
20
—
ms
NOTES:
1. 1.0kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
4. Full Scale Output (VFSO) is defined as the output voltage at full rated pressure.
5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from
minimum or maximum rated pressure at 25°C.
• TcSpan:
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative
to 25°C.
• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25°C.
7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
8. Warm–up Time is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.
MECHANICAL CHARACTERISTICS
Characteristics
Weight, Basic Element (Case 867)
2
Typ
Unit
4.0
grams
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Freescale Semiconductor, Inc.
Figure 3 illustrates the Differential/Gauge basic chip carrier
(Case 867). A fluorosilicone gel isolates the die surface and
wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. (For
use of the MPX5500D in a high pressure, cyclic application,
consult the factory.)
The MPX5500 series pressure sensor operating characteristics, and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media, other
than dry air, may have adverse effects on sensor performance and long–term reliability. Contact the factory for
information regarding media compatibility in your application.
Figure 2 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves
are shown for operation over a temperature range of 0° to
85°C using the decoupling circuit shown in Figure 4. The
output will saturate outside of the specified pressure range.
Figure 4 shows the recommended decoupling circuit for
interfacing the output of the integrated sensor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended.
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Figure 3. Cross–Sectional Diagram
(Not to Scale)
Motorola Sensor Device Data
Figure 4. Recommended power supply decoupling
and output filtering.
For additional output filtering, please refer to
Application Note AN1646.
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PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing fluorosilicone gel
which protects the die from the environment. The Motorola
Part Number
MPX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the Table
below:
Pressure (P1)
Side Identifier
Case Type
MPX5500D
867
Stainless Steel Cap
MPX5500DP
867C
Side with Part Marking
ORDERING INFORMATION
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MPX Series
Device Name
Options
Case Type
Order Number
Device Marking
Basic Element
Differential
867
MPX5500D
MPX5500D
Ported Elements
Differential Dual Ports
867C
MPX5500DP
MPX5500DP
4
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Motorola Sensor Device Data
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PACKAGE DIMENSIONS
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PRESSURE AND VACUUM SIDES PORTED (DP)
Motorola Sensor Device Data
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Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or
guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the
application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental
damages. “Typical” parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications
and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application
by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are
not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications
intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where
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Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs,
damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated
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are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
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Technical Information Center: 1–800–521–6274
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852–26668334
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Motorola Sensor Device Data
MPX5500/D