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by MPXT4100/D
SEMICONDUCTOR TECHNICAL DATA
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4100A: 20–105 kPa
4101A: 15–102 kPa
4105A: 15–105 kPa
X–ducer
SILICON
PRESSURE SENSORS
The Motorola MPXT4100A/4101A/4105A series Manifold Absolute Pressure (MAP)
sensor for engine control is designed to sense absolute air pressure within the intake
manifold. This measurement can be used to compute the amount of fuel required for
each cylinder. The small form factor and high reliability of on–chip integration makes the
Motorola MAP sensor a logical and economical choice for automotive system designers.
Features
• 1.8% Maximum Error Over 0° to 85°C
• Specifically Designed for Intake Manifold Absolute Pressure Sensing in Engine
Control Systems
• Ideally Suited for Microprocessor Interfacing
• Patented Silicon Shear Stress Strain Gauge
• Temperature Compensated Over – 40°C to +125°C
• Surface Mount Package
BASIC ELEMENT
CASE 473A–01, STYLE 2
• Ideal for Non–Automotive Applications
• Also Available in Unibody Package
Application Examples
• Manifold Sensing for Automotive Systems
PIN NUMBER
MAXIMUM RATINGS (TC = 25°C unless otherwise noted)
Rating
1
Gnd
5
N/C
2
+Vout
VS
6
N/C
7
N/C
8
N/C
Symbol
Value
Unit
3
Overpressure(1) (P1 > P2)
Pmax
400
kPa
4
Burst Pressure(1) (P1 > P2)
Pburst
1000
kPa
Tstg
– 40 to +125
°C
TA
– 40 to +125
°C
Storage Temperature
Operating Temperature
*Vout
NOTE: Pins 5, 6, 7, and 8 are not
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
VS
3
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
X–ducer
SENSING
ELEMENT
2
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
1
Vout
PINS 5, 6, 7 AND 8 ARE NO CONNECTS
The MPXT4100A/4101A/4105A series piezoresistive
transducer is a state–of–the–art, monolithic, signal conditioned, silicon pressure sensor. This sensor, with its patented transducer, combines advanced micromachining
techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog
output signal that is proportional to applied pressure.
Figure 1 shows a block diagram of the internal circuitry
integrated on a pressure sensor chip.
GND
Figure 1. Fully Integrated Pressure Sensor Schematic
Senseon and X–ducer are trademarks of Motorola, Inc.
Motorola Sensor Device Data
Motorola, Inc. 1997
1
MPXT4100A SERIES OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Pressure Range
Supply Voltage(2)
Supply Current
Symbol
Min
Typ
Max
Unit
POP
20
—
105
kPa
VS
4.85
5.1
5.35
Vdc
Io
—
7.0
10
mAdc
Offset(3)
(0 to 85°C)
Voff
0.225
0.306
0.388
V
Full Scale Output(4)
(0 to 85°C)
VFSO
4.816
4.897
4.978
Vdc
Full Scale Span(5)
(0 to 85°C)
VFSS
4.510
4.591
4.672
V
Accuracy(6)
(0 to 85°C)
—
—
—
±1.8
%VFSS
mV/kPa
∆V/∆P
—
54
—
Response Time(7)
tR
—
1.0
—
ms
Output Source Current at Full Scale Output
Io+
—
0.1
—
mA
Symbol
Min
Typ
Max
Unit
Weight, Basic Element (Case 473)
—
—
2.0
—
Grams
Warm–Up Time(8)
—
—
15
—
mSec
Cavity Volume
—
—
—
0.01
IN3
Volumetric Displacement
—
—
—
0.001
IN3
Common Mode Line Pressure(11)
—
—
—
690
kPa
Sensitivity
MECHANICAL CHARACTERISTICS
Characteristic
MPXT4101A SERIES OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Pressure Range
Supply Voltage(2)
Supply Current
Symbol
Min
Typ
Max
Unit
POP
15
—
102
kPa
VS
4.85
5.1
5.35
Vdc
Io
—
7.0
10
mAdc
Offset(3)
(0 to 85°C)
Voff
0.171
0.252
0.333
V
Full Scale Output(4)
(0 to 85°C)
VFSO
4.870
4.951
5.032
Vdc
Full Scale Span(5)
(0 to 85°C)
VFSS
4.618
4.700
4.782
V
Accuracy(6)
(0 to 85°C)
—
—
—
±1.8
%VFSS
mV/kPa
∆V/∆P
—
54
—
Response Time(7)
tR
—
1.0
—
ms
Output Source Current at Full Scale Output
Io+
—
0.1
—
mA
Symbol
Min
Typ
Max
Unit
Weight, Basic Element (Case 473)
—
—
2.0
—
Grams
Warm–Up Time(8)
—
—
15
—
mSec
Cavity Volume
—
—
—
0.01
IN3
Volumetric Displacement
—
—
—
0.001
IN3
Common Mode Line Pressure(11)
—
—
—
690
kPa
Sensitivity
MECHANICAL CHARACTERISTICS
Characteristic
2
Motorola Sensor Device Data
MPXT4105A SERIES OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25°C unless otherwise noted)
Characteristic
Pressure Range
Supply Voltage(2)
Supply Current
Symbol
Min
Typ
Max
Unit
POP
15
—
105
kPa
VS
4.85
5.1
5.35
Vdc
Io
—
7.0
10
mAdc
Offset(3)
(0 to 85°C)
Voff
0.184
0.306
0.428
Vdc
Full Scale Output(4)
(0 to 85°C)
VFSO
4.804
4.896
4.988
Vdc
Full Scale Span(5)
(0 to 85°C)
VFSS
—
4.590
—
(0 to 85°C)
—
—
—
"1.8
Vdc
Accuracy(6)
%VFSS
mV/kPa
∆V/∆P
—
51
—
Response Time(7)
tR
—
1.0
—
ms
Output Source Current at Full Scale Output
Io+
—
0.1
mAdc
Offset Stability(9)
—
—
"0.65
—
—
%VFSS
Symbol
Min
Typ
Max
Unit
Weight, Basic Element (Case 473)
—
—
2.0
—
Grams
Warm–Up Time(8)
—
—
15
—
mSec
Cavity Volume
—
—
—
0.01
IN3
Volumetric Displacement
—
—
—
0.001
IN3
Common Mode Line Pressure(11)
—
—
—
690
kPa
Sensitivity
MECHANICAL CHARACTERISTICS
Characteristic
NOTES:
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
2. Device is ratiometric within this specified excitation range.
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.
5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
6. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span
at 25°C due to all sources of error including the following:
• Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with minimum specified
pressure applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from
minimum or maximum rated pressure at 25°C.
• TcSpan:
Span deviation per °C over the temperature range of 0° to 85°C, as a percent of span at 25°C.
• TcOffset:
Output deviation per °C with minimum pressure applied, over the temperature range of 0° to 85°C.
7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
8. Warm–up Time is defined as the time required for the product to meet the specified output voltage.
9. Offset Stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
10. Decoupling circuit shown in Figure 3 required to meet specification.
11. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
Motorola Sensor Device Data
3
STAINLESS STEEL
METAL COVER
DIE
FLUORO SILICONE
DIE COAT
ÉÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉÉ
ÇÇÇÇ
ÉÉÉÉÉÉÉÉÉÉÉÉ
ÇÇÇÇ
ÉÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉÉ
P1
SENSOR
OUTPUT
(PIN 1)
WIRE BONDS
A/D
50 pF
51 k
µ PROCESSOR
EPOXY CASE
LEAD FRAME
Figure 3. Decoupling Filter for Sensor to
Microprocessor Interface
Figure 3 shows a typical decoupling circuit for interfacing
the integrated MAP sensor to the A/D input of a microprocessor. Proper decoupilng of the power supply is recommended.
Figures 4, 5, and 6 show the sensor output signal relative
to pressure input. Typical, minimum, and maximum output
curves are shown for operation over a temperature range of
0° to 85°C. (The output will saturate outside of the specified
pressure range.)
Figure 2. Cross Sectional Diagram
(Not to Scale)
Figure 2 illustrates an absolute sensing chip in the basic
chip carrier (Case 473). A fluorosilicone gel isolates the die
surface and wire bonds from the environment, while allowing
the pressure signal to be transmitted to the sensor diaphragm. The MPXT4100A/4101A/4105A series pressure
sensor operating characteristics, and internal reliability and
qualification tests are based on use of dry air as the pressure
media. Media, other than dry air, may have adverse effects
on sensor performance and long–term reliability. Contact the
factory for information regarding media compatibility in your
application.
5.0
OUTPUT (Volts)
4.0
3.5
3.0
6.0
TRANSFER FUNCTION:
Vout = Vs* (.01059*P–.152) ± Error
VS = 5.1 Vdc
TEMP = 0 to 85°C
20 kPA TO 105 kPA
MPXT4100A
MAX
5.0
TYP
OUTPUT (Volts)
4.5
2.5
2.0
1.5
1.0
MIN
4.0
TRANSFER FUNCTION:
Vout = Vs* (.01059*P–.109) ± Error
VS = 5.1 Vdc
TEMP = 0 to 85°C
15 kPA TO 102 kPA
MPXT4101A
MAX
3.0
TYP
2.0
MIN
1.0
0.5
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
105
0.0
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
105
110
0
Pressure (ref: to sealed vacuum) in kPa
Pressure (ref: to sealed vacuum) in kPa
Figure 4. Output versus Absolute Pressure
Figure 5. Output versus Absolute Pressure
5.0
4.5
OUTPUT (Volts)
4.0
3.5
3.0
TRANSFER FUNCTION:
Vout = Vs* (0.01*P–0.09) ± Error
VS = 5.1 Vdc
TEMP = 0 to 85°C
15 kPA TO 105 kPA
MPXT4105A
MAX
TYP
2.5
2.0
1.5
1.0
MIN
0
0
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
105
110
0.5
Pressure (ref: to sealed vacuum) in kPa
Figure 6. Output versus Absolute Pressure
4
Motorola Sensor Device Data
Transfer Function (MPXT4100A)
Nominal Transfer Value: Vout = VS (P x 0.01059 – 0.1518)
+/– (Pressure Error x Temp. Factor x 0.01059 x VS)
VS = 5.1 V ± 0.25 Vdc
Temperature Error Band
MPXT4100A Series
4.0
3.0
Temperature
Error
Factor
2.0
Temp
Multiplier
– 40
0 to 85
+125
3
1
3
1.0
0.0
–40
–20
0
20
40
60
80
100
120
140
Temperature in C°
Pressure Error Band
Error Limits for Pressure
3.0
Pressure Error (kPa)
2.0
1.0
0.0
20
40
60
80
100
120
Pressure (in kPa)
–1.0
– 2.0
– 3.0
Motorola Sensor Device Data
Pressure
Error (Max)
20 to 105 (kPa)
± 1.5 (kPa)
5
Transfer Function (MPXT4101A)
Nominal Transfer Value: Vout = VS (P x 0.01059 – 0.10941)
+/– (Pressure Error x Temp. Factor x 0.01059 x VS)
VS = 5.1 V ± 0.25 Vdc
Temperature Error Band
MPXT4101A Series
4.0
3.0
Temperature
Error
Factor
2.0
Temp
Multiplier
– 40
0 to 85
+125
3
1
3
1.0
0.0
–40
–20
0
20
40
60
80
100
120
140
Temperature in °C
Pressure Error Band
Error Limits for Pressure
Pressure Error (kPa)
3.0
2.0
1.0
0.0
Pressure (in kPa)
0
15
30
45
60
75
90
105
120
–1.0
– 2.0
– 3.0
6
Pressure
Error (Max)
15 to 102 (kPa)
± 1.5 (kPa)
Motorola Sensor Device Data
Transfer Function (MPXT4105A)
Nominal Transfer Value: Vout = VS (P x 0.01 – 0.09)
+/– (Pressure Error x Temp. Factor x 0.01 x VS)
VS = 5.1 V ± 0.25 Vdc
Temperature Error Band
MPXT4105A Series
4.0
3.0
Temperature
Error
Factor
2.0
Temp
Multiplier
– 40
– 20
0 to 85
125
3.0
1.5
1.0
2.5
1.0
0.0
–40
–20
0
20
40
60
80
100
120
140
Temperature in C°
NOTE: The Temperature Multiplier is a linear response from –40°C to –20°C, –20°C to 0°C, and from 85°C to 125°C
Pressure Error Band
Error Limits for Pressure
3.0
Pressure Error (kPa)
2.0
1.0
0.0
20
40
60
80
100
120
Pressure (in kPa)
–1.0
– 2.0
– 3.0
Motorola Sensor Device Data
Pressure
Error (Max)
40 to 94 (kPa)
15 (kPa)
105 (kPa)
± 1.5 (kPa)
± 2.4 (kPa)
± 1.8 (kPa)
7
ORDERING INFORMATION
The MPXT4100A, MPXT4101A, AND MPXT4105A series MAP silicon pressure sensors are available to be shipped in rails.
Packing Options
Port Options
Leadform
Case No.
MPXT Series Order No.
Marking
Rails
Element
84 degree
473A–01
MPXT4100A7U
MPXT4100A
Rails
Element
84 degree
473A–01
MPXT4101A7U
MPXT4101A
Rails
Element
84 degree
473A–01
MPXT4105A7U
MPXT4105A
PACKAGE DIMENSIONS
–A–
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5_TYPICAL DRAFT.
6. DIMENSION P TO CENTER OF LEAD WHEN
FORMED PARALLEL.
8
1
G
–B–
4
S
5
DETAIL X
DETAIL X
P
R
U
C
–T–
L
M
SEATING
PLANE
F 8 PL
0.25 (0.010) M T B
J
CASE 473A–01
ISSUE A
S
A
S
DIM
A
B
C
F
G
J
L
M
P
R
S
U
INCHES
MIN
MAX
0.658
0.668
0.658
0.668
0.329
0.357
0.026
0.034
0.100 BSC
0.009
0.011
0.138
0.150
0_
15 _
0.738
0.748
0.503
0.523
0.002
0.020
0.135
0.145
STYLE 2:
PIN 1.
2.
3.
4.
5.
6.
7.
8.
MILLIMETERS
MIN
MAX
16.71
16.97
16.71
16.97
8.36
9.07
0.660
0.864
2.54 BSC
0.23
0.28
3.81
3.51
0_
15_
18.75
19.00
12.78
13.28
0.05
0.51
3.43
3.68
GROUND
+VOUT
VSUPPLY
–VOUT
N/C
N/C
N/C
N/C
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola
data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals”
must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of
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applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury
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arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that
Motorola was negligent regarding the design or manufacture of the part. Motorola and
are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal
Opportunity/Affirmative Action Employer.
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8
◊
MPXT4100/D
Motorola Sensor Device
Data