Freescale Semiconductor Technical Data Document Number: MPX4105A Rev 6, 07/2006 Integrated Silicon Pressure Sensor for Manifold Absolute Pressure Applications On-Chip Signal Conditioned, Temperature Compensated and Calibrated The Freescale MPX4105A series Manifold Absolute Pressure (MAP) sensor for engine control is designed to sense absolute air pressure within the intake manifold. This measurement can be used to compute the amount of fuel required for each cylinder. Freescale’s MAP sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The small form factor and high reliability of on-chip integration make the Freescale MAP sensor a logical and economical choice for the automotive system designer. The MPX4105A series piezoresistive transducer is a state-of-the-art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. MPX4105A SERIES INTEGRATED PRESSURE SENSOR 15 TO 105 kPA (2.2 TO 15.2 psi) 0.3 TO 4.9 V OUTPUT UNIBODY PACKAGE Features • • • • MPX4105A CASE 867-08 1.8% Maximum Error Over 0° to 85°C Specifically Designed for Intake Manifold Absolute Pressure Sensing in Engine Control Systems Temperature Compensated Over –40 to +125°C Durable Epoxy Unibody Element PIN NUMBERS(1) 1 Vout 4 N/C Typical Applications 2 GND 5 N/C • • • 3 VS 6 N/C Manifold Sensing for Automotive Systems Ideally Suited for Microprocessor or Microcontroller-Based Systems Also Ideal for Non-Automotive Applications ORDERING INFORMATION Device Type Options Case No. MPX Series Order No. Device Marking UNIBODY PACKAGE (MPX4105A SERIES) Basic Element Absolute, Element 867 MPX4105A © Freescale Semiconductor, Inc., 2006. All rights reserved. MPX4105A 1. Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead. VS Thin Film Temperature Compensation and Gain Stage #1 Sensing Element GND Gain Stage #2 and Ground Reference Shift Circuitry Vout Pins 4, 5, and 6 are NO CONNECTS for unibody devices. Figure 1. Fully Integrated Pressure Sensor Schematic Table 1. Maximum Ratings(1) Rating Symbol Value Unit Maximum Pressure (P1 > P2) PMAX 400 kPa Storage Temperature TSTG -40 to +125 °C TA -40 to +125 °C Operating Temperature 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. MPX4105A 2 Sensors Freescale Semiconductor Table 2. Operating Characteristics (VS = 5.1 Vdc, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 3 required to meet electrical specifications.) Characteristic Pressure Range Symbol Min Typ Max Unit POP 15 — 105 kPa VS 4.85 5.1 5.35 Vdc Io — 7.0 10 mAdc (0 to 85°C) Voff 0.184 0.306 0.428 Vdc (0 to 85°C) VFSO 4.804 4.896 4.988 Vdc (0 to 85°C) VFSS — 4.590 — Vdc (0 to 85°C) — — — ±1.8 %VFSS (1) (2) Supply Voltage Supply Current Minimum Pressure Offset Full Scale Output Full Scale Span (3) (4) (5) Accuracy(6) ∆V/∆P — 51 —- mV/kPa Response Time(7) Sensitivity tR — 1.0 —- ms Output Source Current at Full Scale Output Io+ — 0.1 —- mAdc Warm-Up Time(8) — — 15 —- ms Offset Stability(9) — — ±0.65 —- %VFSS 1. 2. 3. 4. 5. 6. 7. 8. 9. 1.0 kPa (kiloPascal) equals 0.145 psi. Device is ratiometric within this specified excitation range. Offset (Voff) is defined as the output voltage at the minimum rated pressure. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation over the temperature range of 0 to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. • Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. Table 3. Mechanical Characteristics Characteristics Weight, Basic Element (Case 867) Typ Unit 4.0 grams MPX4105A Sensors Freescale Semiconductor 3 ON-CHIP TEMPERATURE COMPENSATION AND CALIBRATION Fluoro Silicone Gel Die Coat Stainless Steel Cap Die P1 Wire Bond Epoxy Plastic Case Die Bond Lead Frame Absolute Element P2 Sealed Vacuum Reference Figure 2. Cross Sectional Diagram (not to scale) (For additional output filtering, please refer to Application Note AN1646) +5 V Vout 5.0 4.5 Output 4.0 IPS 1.0 µF 0.01 µF GND 470 pF Output (Volts) Vs 3.5 3.0 2.5 2.0 1.5 Transfer Function: Vout = Vs* (0.01*P-0.09) ± Error VS = 5.1 Vdc Temperature = 0 to 85°C 20 kPa to 105 kPa MPX4105A TYP MAX MIN 1.0 0.5 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 90 95 100 105 110 Figure 3. Recommended Power Supply Decoupling and Output Filtering Pressure (ref: to sealed vacuum) in kPa Figure 4. Output versus Absolute Pressure Figure 2 illustrates an absolute sensing chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPX4105A series pressure sensor operating characteristics, internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 3 shows the recommended decoupling circuit for interfacing the output of the integrated sensor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended. Figure 4 shows the sensor output signal relative to pressure input. Typical minimum and maximum output curves are shown for operation over a temperature range of 0° to 85°C. The output will saturate outside of the specified pressure range. MPX4105A 4 Sensors Freescale Semiconductor Transfer Function (MPX4105A) Nominal Transfer Value: Vout = VS (P x 0.01 - 0.09) ± (Pressure Error x Temp. Factor x 0.01 x VS) VS = 5.1 V ± 0.25 Vdc Temperature Error Band MPX4105A Series 4.0 Break Points Temp 3.0 Temperature Error Factor Multiplier –40 –20 0 to 85 125 2.0 3.0 1.5 1.0 2.5 1.0 0.0 –40 –20 0 20 40 60 80 100 120 140 Temperature in °C NOTE: The Temperature Multiplier is a linear response from –40°C to –20°C, –20°C to 0°C, and from 85°C to 125°C. Pressure Error Band Error Limits for Pressure 3.0 Pressure Error (kPa) 2.0 1.0 0.0 –1.0 20 40 60 80 100 120 Pressure (in kPa) –2.0 –3.0 Pressure 40 to 94 (kPa) 15 (kPa) 105 (kPa) Error (Max) ±1.5 (kPa) ±2.4 (kPa) ±1.8 (kPa) MPX4105A Sensors Freescale Semiconductor 5 PACKAGE DIMENSIONS C R POSITIVE PRESSURE (P1) M B -AN PIN 1 SEATING PLANE 1 2 3 4 5 NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). DIM A B C D F G J L M N R S L 6 -TG J S F D 6 PL 0.136 (0.005) STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX STYLE 2: PIN 1. 2. 3. 4. 5. 6. OPEN GROUND -VOUT VSUPPLY +VOUT OPEN M T A M STYLE 3: PIN 1. 2. 3. 4. 5. 6. INCHES MILLIMETERS MIN MAX MIN MAX 0.595 0.630 15.11 16.00 0.514 0.534 13.06 13.56 0.200 0.220 5.08 5.59 0.027 0.033 0.68 0.84 0.048 0.064 1.22 1.63 0.100 BSC 2.54 BSC 0.40 0.014 0.016 0.36 0.695 0.725 17.65 18.42 30˚ NOM 30˚ NOM 0.475 0.495 12.07 12.57 0.430 0.450 10.92 11.43 0.090 0.105 2.29 2.66 OPEN GROUND +VOUT +VSUPPLY -VOUT OPEN CASE 867-08 ISSUE N UNIBODY PACKAGE MPX4105A 6 Sensors Freescale Semiconductor How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. Technical Information Center, EL516 2100 East Elliot Road Tempe, Arizona 85284 +1-800-521-6274 or +1-480-768-2130 www.freescale.com/support Europe, Middle East, and Africa: Freescale Halbleiter Deutschland GmbH Technical Information Center Schatzbogen 7 81829 Muenchen, Germany +44 1296 380 456 (English) +46 8 52200080 (English) +49 89 92103 559 (German) +33 1 69 35 48 48 (French) www.freescale.com/support Japan: Freescale Semiconductor Japan Ltd. Headquarters ARCO Tower 15F 1-8-1, Shimo-Meguro, Meguro-ku, Tokyo 153-0064 Japan 0120 191014 or +81 3 5437 9125 [email protected] Asia/Pacific: Freescale Semiconductor Hong Kong Ltd. Technical Information Center 2 Dai King Street Tai Po Industrial Estate Tai Po, N.T., Hong Kong +800 2666 8080 [email protected] For Literature Requests Only: Freescale Semiconductor Literature Distribution Center P.O. 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