Freescale Semiconductor Technical Data Document Number: MRF7S38075H Rev. 0, 8/2007 RF Power Field Effect Transistors MRF7S38075HR3 MRF7S38075HSR3 N - Channel Enhancement - Mode Lateral MOSFETs Designed for WiMAX base station applications with frequencies up to 3800 MHz. Suitable for WiMAX, WiBro, BWA, and OFDM multicarrier Class AB and Class C amplifier applications. • Typical WiMAX Performance: VDD = 30 Volts, IDQ = 900 mA, Pout = 12 Watts Avg., f = 3400 and 3600 MHz, 802.16d, 64 QAM 3/4, 4 bursts, 7 MHz Channel Bandwidth, Input Signal PAR = 9.5 dB @ 0.01% Probability on CCDF. Power Gain — 14 dB Drain Efficiency — 14% Device Output Signal PAR — 8.7 dB @ 0.01% Probability on CCDF ACPR @ 5.25 MHz Offset — - 49 dBc in 0.5 MHz Channel Bandwidth • Capable of Handling 10:1 VSWR, @ 32 Vdc, 3500 MHz, 75 Watts CW Peak Tuned Output Power • Pout @ 1 dB Compression Point w 75 Watts CW Features • Characterized with Series Equivalent Large - Signal Impedance Parameters • Internally Matched for Ease of Use • Integrated ESD Protection • Greater Negative Gate - Source Voltage Range for Improved Class C Operation • RoHS Compliant • In Tape and Reel. R3 Suffix = 250 Units per 56 mm, 13 inch Reel. 3400 - 3600 MHz, 12 W AVG., 30 V WiMAX LATERAL N - CHANNEL RF POWER MOSFETs CASE 465 - 06, STYLE 1 NI - 780 MRF7S38075HR3 CASE 465A - 06, STYLE 1 NI - 780S MRF7S38075HSR3 Table 1. Maximum Ratings Symbol Value Unit Drain - Source Voltage Rating VDS - 0.5, +65 Vdc Gate - Source Voltage VGS - 6.0, +10 Vdc Operating Voltage VDD 32, +0 Vdc Storage Temperature Range Tstg - 65 to +150 °C Case Operating Temperature TC 150 °C TJ 225 °C Symbol Value (2,3) Unit Operating Junction Temperature (1,2) Table 2. Thermal Characteristics Characteristic Thermal Resistance, Junction to Case Case Temperature 86°C, 74 W CW Case Temperature 69°C, 12 W CW RθJC 0.46 0.49 °C/W 1. Continuous use at maximum temperature will affect MTTF. 2. MTTF calculator available at http://www.freescale.com/rf. Select Tools/Software/Application Software/Calculators to access the MTTF calculators by product. 3. Refer to AN1955, Thermal Measurement Methodology of RF Power Amplifiers. Go to http://www.freescale.com/rf. Select Documentation/Application Notes - AN1955. © Freescale Semiconductor, Inc., 2007. All rights reserved. RF Device Data Freescale Semiconductor MRF7S38075HR3 MRF7S38075HSR3 1 Table 3. ESD Protection Characteristics Test Methodology Class Human Body Model (per JESD22 - A114) 1C (Minimum) Machine Model (per EIA/JESD22 - A115) A (Minimum) Charge Device Model (per JESD22 - C101) IV (Minimum) Table 4. Electrical Characteristics (TC = 25°C unless otherwise noted) Symbol Min Typ Max Unit Zero Gate Voltage Drain Leakage Current (VDS = 65 Vdc, VGS = 0 Vdc) IDSS — — 10 μAdc Zero Gate Voltage Drain Leakage Current (VDS = 28 Vdc, VGS = 0 Vdc) IDSS — — 1 μAdc Gate - Source Leakage Current (VGS = 5 Vdc, VDS = 0 Vdc) IGSS — — 1 μAdc Gate Threshold Voltage (VDS = 10 Vdc, ID = 248 μAdc) VGS(th) 1.2 2 2.7 Vdc Gate Quiescent Voltage (VDD = 30 Vdc, ID = 900 mAdc, Measured in Functional Test) VGS(Q) 2 2.7 3.5 Vdc Drain - Source On - Voltage (VGS = 10 Vdc, ID = 2.3 Adc) VDS(on) 0.1 0.21 0.3 Vdc Reverse Transfer Capacitance (VDS = 28 Vdc ± 30 mV(rms)ac @ 1 MHz, VGS = 0 Vdc) Crss — 0.77 — pF Output Capacitance (VDS = 28 Vdc ± 30 mV(rms)ac @ 1 MHz, VGS = 0 Vdc) Coss — 464 — pF Input Capacitance (VDS = 28 Vdc, VGS = 0 Vdc ± 30 mV(rms)ac @ 1 MHz) Ciss — 214 — pF Characteristic Off Characteristics On Characteristics Dynamic Characteristics (1) Functional Tests (In Freescale Test Fixture, 50 ohm system) VDD = 30 Vdc, IDQ = 900 mA, Pout = 12 W Avg., f = 3400 MHz and f = 3600 MHz, WiMAX Signal, 802.16d, 7 MHz Channel Bandwidth, 64 QAM 3/4, 4 Bursts, PAR = 9.5 dB @ 0.01% Probability on CCDF. ACPR measured in 0.5 MHz Channel Bandwidth @ ±5.25 MHz Offset. Power Gain Gps 12 14 17 dB Drain Efficiency ηD 12 14 24 % PAR 7.5 8.7 — dB ACPR — - 49 - 46 dBc IRL — - 12 -5 dB Output Peak - to - Average Ratio @ 0.01% Probability on CCDF Adjacent Channel Power Ratio Input Return Loss 1. Part internally matched both on input and output. (continued) MRF7S38075HR3 MRF7S38075HSR3 2 RF Device Data Freescale Semiconductor Table 4. Electrical Characteristics (TC = 25°C unless otherwise noted) (continued) Characteristic Symbol Min Typ Max Unit Typical Performances OFDM Signal (In Freescale Test Fixture, 50 ohm system) VDD = 30 Vdc, IDQ = 900 mA, Pout = 12 W Avg., f = 3400 MHz and f = 3600 MHz, WiMAX Signal, OFDM Single - Carrier, 7 MHz Channel Bandwidth, 64 QAM 3/4, 4 Bursts, PAR = 9.5 dB @ 0.01% Probability on CCDF. Mask System Type G @ Pout = 32 W Avg. Mask Point B at 3.5 MHz Offset Point C at 5 MHz Offset Point D at 7.4 MHz Offset Point E at 14 MHz Offset Point F at 17.5 MHz Offset dBc — — — — — - 27 - 38 - 42 - 60 - 60 — — — — — Relative Constellation Error @ Pout = 12 W Avg. (1) RCE — - 34 — dB (1) EVM — 2.1 — % rms Error Vector Magnitude (Typical EVM Performance @ Pout = 12 W Avg. with OFDM 802.16d Signal Call) Typical Performances (In Freescale Test Fixture, 50 ohm system) VDD = 30 Vdc, IDQ = 900 mA, 3400 - 3600 MHz Bandwidth Video Bandwidth @ 84 W PEP Pout where IM3 = - 30 dBc VBW (Tone Spacing from 100 kHz to VBW) — 20 — ΔIMD3 = IMD3 @ VBW frequency - IMD3 @ 100 kHz <1 dBc (both sidebands) MHz Gain Flatness in 200 MHz Bandwidth @ Pout = 12 W Avg. GF — 0.36 — dB Average Deviation from Linear Phase in 200 MHz Bandwidth @ Pout = 75 W CW Φ — 3.21 — ° Delay — 2.38 — ns Part - to - Part Insertion Phase Variation @ Pout = 75 W CW, f = 3500 MHz, Six Sigma Window ΔΦ — 63.4 — ° Gain Variation over Temperature ( - 30°C to +85°C) ΔG — 0.025 — dB/°C ΔP1dB — 0.026 — dBm/°C Average Group Delay @ Pout = 75 W CW, f = 3500 MHz Output Power Variation over Temperature ( - 30°C to +85°C) 1. RCE = 20Log(EVM/100) MRF7S38075HR3 MRF7S38075HSR3 RF Device Data Freescale Semiconductor 3 B2 VSUPPLY Z13 Z12 B1 VBIAS + C5 C12 C6 R1 C3 C2 Z2 Z3 Z4 Z5 Z6 Z7 Z8 Z9 C1 Z1 Z2 Z3 Z4 Z5 Z6 Z7 Z8 Z9 Z10 Z11 Z12 C8 + + C9 C10 C11 Z14 Z15 Z11 RF INPUT Z1 C7 + Z16 Z17 Z18 Z19 Z20 Z21 Z22 RF OUTPUT C4 Z10 DUT 0.427″ x 0.084” Microstrip 0.066″ x 0.192″ x 0.084″ Taper 0.045″ x 0.192″ Microstrip 0.044″ x 0.310″ Microstrip 0.150″ x 0.430″ Microstrip 0.107″ x 0.240″ Microstrip 0.155″ x 0.400″ Microstrip 0.943″ x 0.084″ Microstrip 0.158″ x 0.600″ Microstrip 0.110″ x 0.600″ Microstrip 0.802″ x 0.150″ Microstrip 0.150″ x 0.155″ Microstrip Z13 Z14 Z15 Z16 Z17 Z18 Z19 Z20 Z21 Z22 PCB 0.358″ x 0.150″ Microstrip 0.541″ x 0.070″ Microstrip 0.911″ x 0.560″ Microstrip 0.379″ x 0.560″ Microstrip 0.300″ x 0.084″ Microstrip 0.200″ x 0.240″ Microstrip 0.047″ x 0.240″ x 0.140″ Taper 0.463″ x 0.084″ Microstrip 0.089″ x 0.142″ Microstrip 0.657″ x 0.084″ Microstrip Arlon CuClad 250GX - 0300 - 55 - 22, 0.030″, εr = 2.55 Figure 1. MRF7S38075HR3(HSR3) Test Circuit Schematic Table 5. MRF7S38075HR3(HSR3) Test Circuit Component Designations and Values Part Description Part Number Manufacturer B1, B2 Small Ferrite Beads 2743019447 Fair Rite C1, C2, C4, C6 2.7 pF Chip Capacitors ATC100B2R7BT500XT ATC C3, C7 100 pF Chip Capacitors ATC100B101FT500XT ATC C5 22 μF, 35 V Electrolytic Capacitor EMVY350ADA221MHA0G Nippon Chemi - Con C9 100 μF, 50 V Electrolytic Capacitor MCHT101M1HB - 1017 - RF Multicomp C10, C11 470 μF, 63 V Electrolytic Capacitors EKME630ELL471MK25S Multicomp C12, C8 0.01 μF, 50 V Chip Capacitors C1825C103J5RAC Kemet R1 180 kΩ, 1/4 W Chip Resistor CRCW12061803FKEA Vishay MRF7S38075HR3 MRF7S38075HSR3 4 RF Device Data Freescale Semiconductor C5 C3 C10 B1 C7 C2 C8 C9 C6 C12 R1 B2 C11 CUT OUT AREA C1 C4 MRF7S38705 Rev. C Figure 2. MRF7S38075HR3(HSR3) Test Circuit Component Layout MRF7S38075HR3 MRF7S38075HSR3 RF Device Data Freescale Semiconductor 5 16 Gps, POWER GAIN (dB) 14 VDD = 30 Vdc, Pout = 12 W (Avg.), IDQ = 900 mA, 802.16d 64 QAM 3/4, 4 Bursts, 7 MHz Channel Bandwidth, Input Signal PAR = 9.5 dB @ 0.01% Probability on CCDF 14.5 14 Gps 13.5 IRL 13 12.5 12 3450 3475 −47 −8 −49 −12 −53 ACPR −L 3425 10 −51 ACPR−U 11.5 3400 12 3500 3525 3550 −55 3600 3575 −16 −20 −24 IRL, INPUT RETURN LOSS (dB) ηD 15 ACPR (dBc) 15.5 ηD, DRAIN EFFICIENCY (%) TYPICAL CHARACTERISTICS f, FREQUENCY (MHz) 15 24 ηD 22 20 14 13 18 VDD = 30 Vdc, Pout = 23 W (Avg.), IDQ = 900 mA, 802.16d 64 QAM 3/4, 4 Bursts, 7 MHz Channel Bandwidth, Input Signal PAR = 9.5 dB @ 0.01% Probability on CCDF 12.5 IRL 12 −38 −8 −40 −12 −42 ACPR −L 11.5 −44 −16 −20 ACPR−U 11 3400 3425 3450 3475 3500 3525 3550 3575 −46 3600 −24 IRL, INPUT RETURN LOSS (dB) 13.5 Gps ACPR (dBc) Gps, POWER GAIN (dB) 14.5 ηD, DRAIN EFFICIENCY (%) Figure 3. WiMAX Broadband Performance @ Pout = 12 Watts Avg. f, FREQUENCY (MHz) Figure 4. WiMAX Broadband Performance @ Pout = 23 Watts Avg. 16 −10 IMD, THIRD ORDER INTERMODULATION DISTORTION (dBc) IDQ = 1350 mA 15 Gps, POWER GAIN (dB) 1125 mA 14 900 mA 13 12 11 675 mA 450 mA VDD = 30 Vdc, IDQ = 900 mA f1 = 3495 MHz, f2 = 3505 MHz Two −Tone Measurements, 10 MHz Tone Spacing 10 9 VDD = 30 Vdc, IDQ = 900 mA f1 = 3495 MHz, f2 = 3505 MHz Two −Tone Measurements, 10 MHz Tone Spacing −20 IDQ = 450 mA −30 675 mA −40 1125 mA 900 mA 1350 mA −50 1 10 100 Pout, OUTPUT POWER (WATTS) PEP Figure 5. Two - Tone Power Gain versus Output Power 200 1 100 10 200 Pout, OUTPUT POWER (WATTS) PEP Figure 6. Third Order Intermodulation Distortion versus Output Power MRF7S38075HR3 MRF7S38075HSR3 6 RF Device Data Freescale Semiconductor −10 IMD, INTERMODULATION DISTORTION (dBc) VDD = 30 Vdc, IDQ =900 mA f1 = 3495 MHz, f2 = 3505 MHz Two −Tone Measurements, 10 MHz Tone Spacing −20 −30 3rd Order −40 5th Order −50 −60 7th Order −70 1 10 100 0 VDD = 30 Vdc, Pout = 84 W (PEP), IDQ = 900 mA Two −Tone Measurements (f1 + f2)/2 = Center Frequency of 3500 MHz −10 −20 IM3 −L −30 IM3 −U −40 IM5 −U IM5 −L −50 IM7 −U IM7 −L −60 1 200 100 10 TWO −TONE SPACING (MHz) Figure 8. Intermodulation Distortion Products versus Tone Spacing ηD, DRAIN EFFICIENCY (%), Gps, POWER GAIN (dB) Pout, OUTPUT POWER (WATTS) PEP Figure 7. Intermodulation Distortion Products versus Output Power 35 −25 VDD = 30 Vdc, IDQ = 900 mA f = 3500 MHz, 802.16d, 64 QAM 3/4 4 Bursts, 7 MHz Channel Bandwidth, Input Signal PAR = 9.5 dB @ 0.01% Probability on CCDF 30 25 ηD −30 −35 ACPR 20 −40 Gps 15 −45 10 −50 5 −55 −60 100 0 1 ACPR (dBc) IMD, INTERMODULATION DISTORTION (dBc) TYPICAL CHARACTERISTICS 10 Pout, OUTPUT POWER (WATTS) AVG. WiMAX Figure 9. WiMAX, ACPR, Power Gain and Drain Efficiency versus Output Power 17 Gps 85_C 25_C 40 35 30 14 85_C 13 25 12 20 11 15 10 ηD 9 10 VDD = 30 Vdc IDQ = 900 mA f = 3500 MHz 8 1 10 13 Gps, POWER GAIN (dB) 15 25_C ηD, DRAIN EFFICIENCY (%) 16 Gps, POWER GAIN (dB) 14 45 −30_C TC = −30_C 12 32 V 11 30 V 10 IDQ = 900 mA f = 3500 MHz 5 100 0 200 VDD = 28 V 9 0 40 80 Pout, OUTPUT POWER (WATTS) CW Pout, OUTPUT POWER (WATTS) CW Figure 10. Power Gain and Drain Efficiency versus CW Output Power Figure 11. Power Gain versus Output Power 120 MRF7S38075HR3 MRF7S38075HSR3 RF Device Data Freescale Semiconductor 7 TYPICAL CHARACTERISTICS 109 MTTF (HOURS) 108 107 106 105 90 110 130 150 170 190 210 230 250 TJ, JUNCTION TEMPERATURE (°C) This above graph displays calculated MTTF in hours when the device is operated at VDD = 30 Vdc, Pout = 12 W Avg., and ηD = 14%. MTTF calculator available at http:/www.freescale.com/rf. Select Tools/ Software/Application Software/Calculators to access the MTTF calcu− lators by product. Figure 12. MTTF versus Junction Temperature WiMAX TEST SIGNAL 100 −10 7 MHz Channel BW −20 10 −40 −50 0.1 (dB) PROBABILITY (%) Compressed Output Signal @ 12 W Avg. Pout 1 System Type G −30 Input Signal 0.01 −70 802.16d, 64 QAM 3/4, 4 Bursts, 7 MHz Channel Bandwidth, Input Signal PAR = 9.5 dB @ 0.01% Probability on CCDF 0.001 0.0001 0 2 4 −60 −80 Point B Point C −90 6 8 PEAK −TO−AVERAGE (dB) Figure 13. OFDM 802.16d Test Signal 10 Point B Point C −100 Point D Point D −110 −9 −7.2 −5.4 −3.6 −1.8 0 1.8 3.6 5.4 7.2 9 f, FREQUENCY (MHz) Figure 14. WiMAX Spectrum Mask Specifications MRF7S38075HR3 MRF7S38075HSR3 8 RF Device Data Freescale Semiconductor Zo = 25 Ω Zsource f = 3400 MHz f = 3600 MHz f = 3600 MHz Zload f = 3400 MHz VDD = 30 Vdc, IDQ = 900 mA, Pout = 12 W Avg. f MHz Zsource W Zload W 3400 20.70 + j14.63 5.63 - j5.17 3425 20.22 + j12.38 5.44 - j5.10 3450 19.02 + j10.82 5.23 - j4.97 3475 17.58 + j9.95 4.98 - j4.83 3500 16.28 + j9.46 4.73 - j4.66 3525 14.97 + j9.47 4.50 - j4.50 3550 13.94 + j9.49 4.22 - j4.33 3575 13.11 + j9.66 3.97 - j4.13 3600 12.45 + j9.98 3.73 - j3.89 Zsource = Test circuit impedance as measured from gate to ground. Zload = Test circuit impedance as measured from drain to ground. Output Matching Network Device Under Test Input Matching Network Z source Z load Figure 15. Series Equivalent Source and Load Impedance MRF7S38075HR3 MRF7S38075HSR3 RF Device Data Freescale Semiconductor 9 PACKAGE DIMENSIONS B G Q bbb 2X 1 T A M M B M NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M−1994. 2. CONTROLLING DIMENSION: INCH. 3. DELETED 4. DIMENSION H IS MEASURED 0.030 (0.762) AWAY FROM PACKAGE BODY. 3 B K 2 (FLANGE) D bbb M T A M B M M R (INSULATOR) bbb N T A M M B M ccc M T A M M aaa M T A M S (LID) ccc H T A M M B (LID) B M (INSULATOR) B M C F E A T A SEATING PLANE DIM A B C D E F G H K M N Q R S aaa bbb ccc INCHES MIN MAX 1.335 1.345 0.380 0.390 0.125 0.170 0.495 0.505 0.035 0.045 0.003 0.006 1.100 BSC 0.057 0.067 0.170 0.210 0.774 0.786 0.772 0.788 .118 .138 0.365 0.375 0.365 0.375 0.005 REF 0.010 REF 0.015 REF MILLIMETERS MIN MAX 33.91 34.16 9.65 9.91 3.18 4.32 12.57 12.83 0.89 1.14 0.08 0.15 27.94 BSC 1.45 1.70 4.32 5.33 19.66 19.96 19.60 20.00 3.00 3.51 9.27 9.53 9.27 9.52 0.127 REF 0.254 REF 0.381 REF STYLE 1: PIN 1. DRAIN 2. GATE 3. SOURCE (FLANGE) CASE 465 - 06 ISSUE G NI - 780 MRF7S38075H 4X U (FLANGE) 4X Z (LID) B 1 K 2X 2 B (FLANGE) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M−1994. 2. CONTROLLING DIMENSION: INCH. 3. DELETED 4. DIMENSION H IS MEASURED 0.030 (0.762) AWAY FROM PACKAGE BODY. D bbb M T A M B M N ccc M R (LID) M T A M B M ccc M T A S (INSULATOR) bbb M T A M M B M aaa M T A M (LID) B M (INSULATOR) B M H C 3 E A A F T SEATING PLANE DIM A B C D E F H K M N R S U Z aaa bbb ccc INCHES MIN MAX 0.805 0.815 0.380 0.390 0.125 0.170 0.495 0.505 0.035 0.045 0.003 0.006 0.057 0.067 0.170 0.210 0.774 0.786 0.772 0.788 0.365 0.375 0.365 0.375 −−− 0.040 −−− 0.030 0.005 REF 0.010 REF 0.015 REF MILLIMETERS MIN MAX 20.45 20.70 9.65 9.91 3.18 4.32 12.57 12.83 0.89 1.14 0.08 0.15 1.45 1.70 4.32 5.33 19.61 20.02 19.61 20.02 9.27 9.53 9.27 9.52 −−− 1.02 −−− 0.76 0.127 REF 0.254 REF 0.381 REF STYLE 1: PIN 1. DRAIN 2. GATE 5. SOURCE (FLANGE) CASE 465A - 06 ISSUE H NI - 780S MRF7S38075HS MRF7S38075HR3 MRF7S38075HSR3 10 RF Device Data Freescale Semiconductor PRODUCT DOCUMENTATION Refer to the following documents to aid your design process. Application Notes • AN1955: Thermal Measurement Methodology of RF Power Amplifiers Engineering Bulletins • EB212: Using Data Sheet Impedances for RF LDMOS Devices REVISION HISTORY The following table summarizes revisions to this document. Revision Date 0 Aug. 2007 Description • Initial Release of Data Sheet MRF7S38075HR3 MRF7S38075HSR3 RF Device Data Freescale Semiconductor 11 How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. 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Freescalet and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007. All rights reserved. MRF7S38075HR3 MRF7S38075HSR3 Document Number: MRF7S38075H Rev. 0, 8/2007 12 RF Device Data Freescale Semiconductor